TW200720611A - Decompression drier - Google Patents

Decompression drier

Info

Publication number
TW200720611A
TW200720611A TW095129661A TW95129661A TW200720611A TW 200720611 A TW200720611 A TW 200720611A TW 095129661 A TW095129661 A TW 095129661A TW 95129661 A TW95129661 A TW 95129661A TW 200720611 A TW200720611 A TW 200720611A
Authority
TW
Taiwan
Prior art keywords
carrying
port
chamber
lcd substrate
decompression
Prior art date
Application number
TW095129661A
Other languages
Chinese (zh)
Other versions
TWI311633B (en
Inventor
Takahiro Sakamoto
Mitsuhiro Sakai
Shunichi Yahiro
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW200720611A publication Critical patent/TW200720611A/en
Application granted granted Critical
Publication of TWI311633B publication Critical patent/TWI311633B/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B15/00—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form
    • F26B15/10—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions
    • F26B15/12—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions the lines being all horizontal or slightly inclined
    • F26B15/18—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions the lines being all horizontal or slightly inclined the objects or batches of materials being carried by endless belts
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Mechanical Engineering (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Coating Apparatus (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Solid Materials (AREA)
  • Liquid Crystal (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

Decompression drier 23b has the carrying port 61 where the LCD substrate G is carried in and the carrying out port 62 where the LCD substrate G is carried out in the side wall section, the chamber 6 which accommodates the LCD substrate G which is carried from the carrying port 61 in abbreviation horizontal state, the gate component 63, 64 which opens and closes the carrying port 61 and the carrying out port 62, the decompression mechanism which decompresses inside the chamber 6 when the carrying port 61 and the carrying out port 62 has been blocked by the gate component 63, 64, abbreviation conveying the LCD substrate G, horizontally, as from the carrying port 61 it carries into the chamber 6, after the decompression drying processing due to the decompression mechanism, abbreviation conveying horizontally, the conveying mechanism 7 which it carries out outside the chamber 6 from the carrying out port 62, and inside the chamber 6, without supporting the LCD substrate G locally, equally support possible belt 71.
TW095129661A 2005-08-11 2006-08-11 Decompression drier TWI311633B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005233092A JP4319175B2 (en) 2005-08-11 2005-08-11 Vacuum dryer

Publications (2)

Publication Number Publication Date
TW200720611A true TW200720611A (en) 2007-06-01
TWI311633B TWI311633B (en) 2009-07-01

Family

ID=37721987

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095129661A TWI311633B (en) 2005-08-11 2006-08-11 Decompression drier

Country Status (4)

Country Link
JP (1) JP4319175B2 (en)
KR (2) KR101216747B1 (en)
CN (1) CN1913101A (en)
TW (1) TWI311633B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI386613B (en) * 2008-10-10 2013-02-21 Dainippon Screen Mfg Substrate drying device
TWI417497B (en) * 2008-09-25 2013-12-01 Tokyo Electron Ltd Reduced-pressure drying device and reduced-pressure drying method

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5192747B2 (en) * 2007-08-06 2013-05-08 東レエンジニアリング株式会社 Vacuum dryer
JP2009052762A (en) * 2007-08-23 2009-03-12 Shimada Phys & Chem Ind Co Ltd Drying device
JP5579550B2 (en) * 2010-09-10 2014-08-27 株式会社スギノマシン Vacuum dryer
CN107192242A (en) * 2017-07-19 2017-09-22 江西迪迪工业智能设备有限公司 A kind of drier
JP6861198B2 (en) * 2018-12-12 2021-04-21 株式会社Ｓｃｒｅｅｎホールディングス Substrate transfer device and coating device
KR102559562B1 (en) * 2021-03-11 2023-07-27 주식회사 한국제이텍트써모시스템 Heat treatment oven exhaust duct integrated heater unit
CN115468389B (en) * 2022-09-16 2023-08-01 江苏美客鼎嵘智能装备制造有限公司 Display glass substrate baking equipment

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004299850A (en) * 2003-03-31 2004-10-28 Dainippon Printing Co Ltd Processing method and processing device
JP2005134013A (en) * 2003-10-29 2005-05-26 Pioneer Electronic Corp Device and method for manufacturing substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI417497B (en) * 2008-09-25 2013-12-01 Tokyo Electron Ltd Reduced-pressure drying device and reduced-pressure drying method
TWI386613B (en) * 2008-10-10 2013-02-21 Dainippon Screen Mfg Substrate drying device

Also Published As

Publication number Publication date
KR20120090018A (en) 2012-08-16
JP4319175B2 (en) 2009-08-26
TWI311633B (en) 2009-07-01
KR20070019563A (en) 2007-02-15
JP2007046859A (en) 2007-02-22
CN1913101A (en) 2007-02-14
KR101216747B1 (en) 2012-12-31

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees