TW200718915A - System for measurement of height, angle and their variations of surface of articles - Google Patents
System for measurement of height, angle and their variations of surface of articlesInfo
- Publication number
- TW200718915A TW200718915A TW094138312A TW94138312A TW200718915A TW 200718915 A TW200718915 A TW 200718915A TW 094138312 A TW094138312 A TW 094138312A TW 94138312 A TW94138312 A TW 94138312A TW 200718915 A TW200718915 A TW 200718915A
- Authority
- TW
- Taiwan
- Prior art keywords
- spot
- axis
- height
- variations
- laser beam
- Prior art date
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention provides a system for measuring height, angle and their variation, of surface of articles. The system includes an optic path structure, wherein laser beam passes through a lens assembly and focuses on surface of object to be measured. The reflected light passes through said lens assembly and an astigmatic lens, and projects on photo sensors. Variations in height of the laser spot on the object to be measured may be measured according to variations in shape and position of the spot on the photo sensors. Focus error signal, X axis angular signal and Y axis angular signal are calculated using signals generated by the photo sensors and are used to represent movements of the spot in the vertical direction and the angular movements in the direction perpendicular to axis of the incident laser beam and in the direction perpendicular to axis of the incident laser beam and X axis, respectively, of the light spot. Thereby, non-contact and precise measurement of height and angles and their variation of the spot on the surface of the article may be obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94138312A TWI264520B (en) | 2005-11-01 | 2005-11-01 | System for measurement of height, angle and their variations of surface of articles |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94138312A TWI264520B (en) | 2005-11-01 | 2005-11-01 | System for measurement of height, angle and their variations of surface of articles |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI264520B TWI264520B (en) | 2006-10-21 |
TW200718915A true TW200718915A (en) | 2007-05-16 |
Family
ID=37969382
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94138312A TWI264520B (en) | 2005-11-01 | 2005-11-01 | System for measurement of height, angle and their variations of surface of articles |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI264520B (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI502170B (en) * | 2014-01-22 | 2015-10-01 | Academia Sinica | Optical measurement system and method for measuring linear displacement, rotation and rolling angles |
TWI580930B (en) * | 2015-12-30 | 2017-05-01 | Tilt angle and distance measurement method | |
TWI813438B (en) * | 2022-09-07 | 2023-08-21 | 卡德爾股份有限公司 | Inspection method of metal processing parts |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7821647B2 (en) * | 2008-02-21 | 2010-10-26 | Corning Incorporated | Apparatus and method for measuring surface topography of an object |
US8269157B2 (en) * | 2009-10-23 | 2012-09-18 | Academia Sinica | Optical imaging system |
TW201129772A (en) * | 2010-02-26 | 2011-09-01 | Jian-Hong Liu | Measurement system for knife tip and diameter of miniature knife tool |
TWI411761B (en) * | 2010-12-29 | 2013-10-11 | Metal Ind Res & Dev Ct | Combined angle measurement system |
CN113125808A (en) * | 2020-01-10 | 2021-07-16 | 精浚科技股份有限公司 | Focusing atomic force microscope |
-
2005
- 2005-11-01 TW TW94138312A patent/TWI264520B/en active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI502170B (en) * | 2014-01-22 | 2015-10-01 | Academia Sinica | Optical measurement system and method for measuring linear displacement, rotation and rolling angles |
TWI580930B (en) * | 2015-12-30 | 2017-05-01 | Tilt angle and distance measurement method | |
TWI813438B (en) * | 2022-09-07 | 2023-08-21 | 卡德爾股份有限公司 | Inspection method of metal processing parts |
Also Published As
Publication number | Publication date |
---|---|
TWI264520B (en) | 2006-10-21 |
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