TW200718915A - System for measurement of height, angle and their variations of surface of articles - Google Patents

System for measurement of height, angle and their variations of surface of articles

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Publication number
TW200718915A
TW200718915A TW094138312A TW94138312A TW200718915A TW 200718915 A TW200718915 A TW 200718915A TW 094138312 A TW094138312 A TW 094138312A TW 94138312 A TW94138312 A TW 94138312A TW 200718915 A TW200718915 A TW 200718915A
Authority
TW
Taiwan
Prior art keywords
spot
axis
height
variations
laser beam
Prior art date
Application number
TW094138312A
Other languages
Chinese (zh)
Other versions
TWI264520B (en
Inventor
Ing-Shouh Hwang
En-Te Hu
Kuang-Yuh Huang
Original Assignee
Academia Sinica
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Academia Sinica filed Critical Academia Sinica
Priority to TW94138312A priority Critical patent/TWI264520B/en
Application granted granted Critical
Publication of TWI264520B publication Critical patent/TWI264520B/en
Publication of TW200718915A publication Critical patent/TW200718915A/en

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

The present invention provides a system for measuring height, angle and their variation, of surface of articles. The system includes an optic path structure, wherein laser beam passes through a lens assembly and focuses on surface of object to be measured. The reflected light passes through said lens assembly and an astigmatic lens, and projects on photo sensors. Variations in height of the laser spot on the object to be measured may be measured according to variations in shape and position of the spot on the photo sensors. Focus error signal, X axis angular signal and Y axis angular signal are calculated using signals generated by the photo sensors and are used to represent movements of the spot in the vertical direction and the angular movements in the direction perpendicular to axis of the incident laser beam and in the direction perpendicular to axis of the incident laser beam and X axis, respectively, of the light spot. Thereby, non-contact and precise measurement of height and angles and their variation of the spot on the surface of the article may be obtained.
TW94138312A 2005-11-01 2005-11-01 System for measurement of height, angle and their variations of surface of articles TWI264520B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94138312A TWI264520B (en) 2005-11-01 2005-11-01 System for measurement of height, angle and their variations of surface of articles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94138312A TWI264520B (en) 2005-11-01 2005-11-01 System for measurement of height, angle and their variations of surface of articles

Publications (2)

Publication Number Publication Date
TWI264520B TWI264520B (en) 2006-10-21
TW200718915A true TW200718915A (en) 2007-05-16

Family

ID=37969382

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94138312A TWI264520B (en) 2005-11-01 2005-11-01 System for measurement of height, angle and their variations of surface of articles

Country Status (1)

Country Link
TW (1) TWI264520B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI502170B (en) * 2014-01-22 2015-10-01 Academia Sinica Optical measurement system and method for measuring linear displacement, rotation and rolling angles
TWI580930B (en) * 2015-12-30 2017-05-01 Tilt angle and distance measurement method
TWI813438B (en) * 2022-09-07 2023-08-21 卡德爾股份有限公司 Inspection method of metal processing parts

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7821647B2 (en) * 2008-02-21 2010-10-26 Corning Incorporated Apparatus and method for measuring surface topography of an object
US8269157B2 (en) * 2009-10-23 2012-09-18 Academia Sinica Optical imaging system
TW201129772A (en) * 2010-02-26 2011-09-01 Jian-Hong Liu Measurement system for knife tip and diameter of miniature knife tool
TWI411761B (en) * 2010-12-29 2013-10-11 Metal Ind Res & Dev Ct Combined angle measurement system
CN113125808A (en) * 2020-01-10 2021-07-16 精浚科技股份有限公司 Focusing atomic force microscope

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI502170B (en) * 2014-01-22 2015-10-01 Academia Sinica Optical measurement system and method for measuring linear displacement, rotation and rolling angles
TWI580930B (en) * 2015-12-30 2017-05-01 Tilt angle and distance measurement method
TWI813438B (en) * 2022-09-07 2023-08-21 卡德爾股份有限公司 Inspection method of metal processing parts

Also Published As

Publication number Publication date
TWI264520B (en) 2006-10-21

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