TW200711201A - Manufacturing method of an organic EL panel and manufacturing method of an organic EL display apparatus - Google Patents

Manufacturing method of an organic EL panel and manufacturing method of an organic EL display apparatus

Info

Publication number
TW200711201A
TW200711201A TW095121262A TW95121262A TW200711201A TW 200711201 A TW200711201 A TW 200711201A TW 095121262 A TW095121262 A TW 095121262A TW 95121262 A TW95121262 A TW 95121262A TW 200711201 A TW200711201 A TW 200711201A
Authority
TW
Taiwan
Prior art keywords
organic
manufacturing
thin film
luminescent part
panel
Prior art date
Application number
TW095121262A
Other languages
Chinese (zh)
Inventor
Toshio Negishi
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of TW200711201A publication Critical patent/TW200711201A/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/87—Passivation; Containers; Encapsulations
    • H10K59/871—Self-supporting sealing arrangements
    • H10K59/8722—Peripheral sealing arrangements, e.g. adhesives, sealants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30—Devices specially adapted for multicolour light emission
    • H10K59/38—Devices specially adapted for multicolour light emission comprising colour filters or colour changing media [CCM]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/87—Passivation; Containers; Encapsulations
    • H10K59/873—Encapsulations

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

This invention provides a technique for producing an organic EL display device having a prolonged service life. The production process comprises placing a first protective film (15) for protecting a luminescent part (12) in a vacuum atmosphere, introducing trimethylaluminum and ozone alternately to form an alumina thin film on the surface of the first protective film (15). This alumina thin film is dense and is impermeable to water. Therefore, moisture in the air does not reach the luminescent part (12) and thus does not cause a deterioration in the organic thin film in the luminescent part (12), and, thus, an organic EL display device (5) having a prolonged service life can be provided.
TW095121262A 2005-06-15 2006-06-14 Manufacturing method of an organic EL panel and manufacturing method of an organic EL display apparatus TW200711201A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005175492 2005-06-15

Publications (1)

Publication Number Publication Date
TW200711201A true TW200711201A (en) 2007-03-16

Family

ID=37532175

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095121262A TW200711201A (en) 2005-06-15 2006-06-14 Manufacturing method of an organic EL panel and manufacturing method of an organic EL display apparatus

Country Status (5)

Country Link
JP (1) JP4891236B2 (en)
KR (1) KR100884519B1 (en)
CN (1) CN101069300A (en)
TW (1) TW200711201A (en)
WO (1) WO2006134812A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5208591B2 (en) * 2007-06-28 2013-06-12 株式会社半導体エネルギー研究所 Light emitting device and lighting device
TWI388078B (en) 2008-01-30 2013-03-01 Osram Opto Semiconductors Gmbh Method for manufacturing electronic components and electronic components
FR2933538B1 (en) * 2008-07-07 2012-09-21 Commissariat Energie Atomique DISPLAY, LIGHTING OR SIGNALING ELECTROLUMINESCENT DEVICE AND METHOD FOR MANUFACTURING THE SAME
KR101479528B1 (en) 2010-09-03 2015-01-07 울박, 인크 Protective film forming method, and surface flattening method
CN107285781A (en) * 2017-06-30 2017-10-24 长兴泓矿炉料有限公司 A kind of hydration-resisting magnesite-dolomite refractories and preparation method thereof
CN114420816B (en) * 2021-12-09 2023-07-21 苏州工业园区雨竹半导体有限公司 Light-emitting diode chip and preparation process thereof

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002033186A (en) * 2000-07-17 2002-01-31 Stanley Electric Co Ltd Organic light emitting element
JP2003217829A (en) * 2002-01-22 2003-07-31 Toyota Industries Corp Organic el display panel
JP2003347042A (en) * 2002-05-24 2003-12-05 Denso Corp Sealing film for organic electronic device and its manufacturing method
GB0222649D0 (en) * 2002-09-30 2002-11-06 Microemissive Displays Ltd Passivation layer
US6888172B2 (en) * 2003-04-11 2005-05-03 Eastman Kodak Company Apparatus and method for encapsulating an OLED formed on a flexible substrate

Also Published As

Publication number Publication date
JP4891236B2 (en) 2012-03-07
KR100884519B1 (en) 2009-02-18
CN101069300A (en) 2007-11-07
KR20070085419A (en) 2007-08-27
WO2006134812A1 (en) 2006-12-21
JPWO2006134812A1 (en) 2009-01-08

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