TW200709880A - Short-wavelength laser scribing method and system for scribing ceramic substrates - Google Patents
Short-wavelength laser scribing method and system for scribing ceramic substratesInfo
- Publication number
- TW200709880A TW200709880A TW094131114A TW94131114A TW200709880A TW 200709880 A TW200709880 A TW 200709880A TW 094131114 A TW094131114 A TW 094131114A TW 94131114 A TW94131114 A TW 94131114A TW 200709880 A TW200709880 A TW 200709880A
- Authority
- TW
- Taiwan
- Prior art keywords
- ceramic substrate
- short
- scribing
- wavelength laser
- ceramic substrates
- Prior art date
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- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The present invention relates to a short-wavelength laser scribing method and system for scribing ceramic substrates, using a short-wavelength laser whose wavelength is between 150 to 400 nanometers to impact a surface of a ceramic substrate realizing the power of 0.4 Watt or above so as to effectively etch the ceramic substrate and to cause the laser pulse to form scribed lines on the ceramic substrate surface upon impacting the ceramic substrate. The substrate is then introduced into a breaking machine to be broken into pieces. This invention overcomes the defects found in the conventional measure of directly cutting the ceramic substrate using a cutter that may result in fracturing the ceramic substrates. Hence, it ensures the cut ceramic substrate to have narrower scribed lines with higher precision but without damages.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW094131114A TW200709880A (en) | 2005-09-09 | 2005-09-09 | Short-wavelength laser scribing method and system for scribing ceramic substrates |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW094131114A TW200709880A (en) | 2005-09-09 | 2005-09-09 | Short-wavelength laser scribing method and system for scribing ceramic substrates |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200709880A true TW200709880A (en) | 2007-03-16 |
Family
ID=57911096
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094131114A TW200709880A (en) | 2005-09-09 | 2005-09-09 | Short-wavelength laser scribing method and system for scribing ceramic substrates |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW200709880A (en) |
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2005
- 2005-09-09 TW TW094131114A patent/TW200709880A/en unknown
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