TW200709880A - Short-wavelength laser scribing method and system for scribing ceramic substrates - Google Patents

Short-wavelength laser scribing method and system for scribing ceramic substrates

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Publication number
TW200709880A
TW200709880A TW094131114A TW94131114A TW200709880A TW 200709880 A TW200709880 A TW 200709880A TW 094131114 A TW094131114 A TW 094131114A TW 94131114 A TW94131114 A TW 94131114A TW 200709880 A TW200709880 A TW 200709880A
Authority
TW
Taiwan
Prior art keywords
ceramic substrate
short
scribing
wavelength laser
ceramic substrates
Prior art date
Application number
TW094131114A
Other languages
Chinese (zh)
Inventor
Chih-Ming Hsu
qing-rong Xu
Original Assignee
Cleavage Entpr Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cleavage Entpr Co Ltd filed Critical Cleavage Entpr Co Ltd
Priority to TW094131114A priority Critical patent/TW200709880A/en
Publication of TW200709880A publication Critical patent/TW200709880A/en

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Abstract

The present invention relates to a short-wavelength laser scribing method and system for scribing ceramic substrates, using a short-wavelength laser whose wavelength is between 150 to 400 nanometers to impact a surface of a ceramic substrate realizing the power of 0.4 Watt or above so as to effectively etch the ceramic substrate and to cause the laser pulse to form scribed lines on the ceramic substrate surface upon impacting the ceramic substrate. The substrate is then introduced into a breaking machine to be broken into pieces. This invention overcomes the defects found in the conventional measure of directly cutting the ceramic substrate using a cutter that may result in fracturing the ceramic substrates. Hence, it ensures the cut ceramic substrate to have narrower scribed lines with higher precision but without damages.
TW094131114A 2005-09-09 2005-09-09 Short-wavelength laser scribing method and system for scribing ceramic substrates TW200709880A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW094131114A TW200709880A (en) 2005-09-09 2005-09-09 Short-wavelength laser scribing method and system for scribing ceramic substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW094131114A TW200709880A (en) 2005-09-09 2005-09-09 Short-wavelength laser scribing method and system for scribing ceramic substrates

Publications (1)

Publication Number Publication Date
TW200709880A true TW200709880A (en) 2007-03-16

Family

ID=57911096

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094131114A TW200709880A (en) 2005-09-09 2005-09-09 Short-wavelength laser scribing method and system for scribing ceramic substrates

Country Status (1)

Country Link
TW (1) TW200709880A (en)

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