TW200704305A - Substrate carrying device - Google Patents

Substrate carrying device

Info

Publication number
TW200704305A
TW200704305A TW095113746A TW95113746A TW200704305A TW 200704305 A TW200704305 A TW 200704305A TW 095113746 A TW095113746 A TW 095113746A TW 95113746 A TW95113746 A TW 95113746A TW 200704305 A TW200704305 A TW 200704305A
Authority
TW
Taiwan
Prior art keywords
substrate
carrying
magnet gear
drive shaft
carrying roller
Prior art date
Application number
TW095113746A
Other languages
Chinese (zh)
Other versions
TWI309542B (en
Inventor
Takao Matsumoto
Satoshi Yamamoto
Original Assignee
Dainippon Screen Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Mfg filed Critical Dainippon Screen Mfg
Publication of TW200704305A publication Critical patent/TW200704305A/en
Application granted granted Critical
Publication of TWI309542B publication Critical patent/TWI309542B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G13/00—Roller-ways
    • B65G13/11—Roller frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G17/00—Conveyors having an endless traction element, e.g. a chain, transmitting movement to a continuous or substantially-continuous load-carrying surface or to a series of individual load-carriers; Endless-chain conveyors in which the chains form the load-carrying surface
    • B65G17/30—Details; Auxiliary devices
    • B65G17/48—Controlling attitudes of load-carriers during movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G23/00—Driving gear for endless conveyors; Belt- or chain-tensioning arrangements
    • B65G23/02—Belt- or chain-engaging elements
    • B65G23/04—Drums, rollers, or wheels
    • B65G23/08—Drums, rollers, or wheels with self-contained driving mechanisms, e.g. motors and associated gearing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

To provide a substrate carrying device, capable of changing a substrate to an inclined attitude when the substrate is being carried straight on a substrate carrying passage without reducing throughput of a substrate processing. Each magnet gear 231 of a drive shaft 23 and a magnet gear 215 of each carrying roller 21 are disposed close to each other but not in contact. As the drive shaft 23 rotates by rotation drive force from a drive motor or the like, rotation drive force is transmitted from the magnet gear 231 of the drive shaft 23 toward a magnet gear 215 of the carrying roller 21. The carrying rollers 21 are gradually largely inclined from a horizontal attitude in a perpendicular direction to the carrying direction of the substrate B as they go from the carrying roller 21 upstream of the substrate carrying direction to the carrying roller 21 on the downstream side.
TW095113746A 2005-05-19 2006-04-18 Substrate carrying device TW200704305A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005147388A JP2006321623A (en) 2005-05-19 2005-05-19 Substrate carrying device

Publications (2)

Publication Number Publication Date
TW200704305A true TW200704305A (en) 2007-01-16
TWI309542B TWI309542B (en) 2009-05-01

Family

ID=37424276

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095113746A TW200704305A (en) 2005-05-19 2006-04-18 Substrate carrying device

Country Status (4)

Country Link
JP (1) JP2006321623A (en)
KR (1) KR100801367B1 (en)
CN (1) CN1865097B (en)
TW (1) TW200704305A (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009119359A (en) * 2007-11-14 2009-06-04 Tamura Koki:Kk Remover of paper dust
CN101806674B (en) * 2009-02-13 2011-08-24 北京京东方光电科技有限公司 Glass substrate drawing device
JP5088591B2 (en) * 2010-04-15 2012-12-05 株式会社ダイフク Plate-shaped body transfer device
CN102506935A (en) * 2011-10-28 2012-06-20 东莞市伟创东洋自动化设备有限公司 Automatic inclining detection device
KR101234593B1 (en) * 2011-11-15 2013-02-19 김영환 Transfer unit using roller type wire connecting
CN103373586B (en) * 2012-04-16 2015-12-16 鸿富锦精密工业（深圳）有限公司 Conveyer
KR101263163B1 (en) 2012-12-27 2013-05-10 주식회사 폴리쉘 Apparatus for guiding producing of forming sheet
CN104658963B (en) * 2013-11-19 2018-06-01 中芯国际集成电路制造(上海)有限公司 A kind of cleaning method of perforate
CN105759645A (en) * 2016-02-04 2016-07-13 罗建义 Intelligent kitchen system
CN105511331A (en) * 2016-02-04 2016-04-20 罗建义 Intelligent kitchen system
CN105905582B (en) * 2016-06-28 2019-03-12 佛山市冠哲金属实业有限公司 A kind of collection device of ceiling fan blades
CN107799449B (en) * 2017-10-23 2020-01-17 武汉华星光电半导体显示技术有限公司 Substrate carrying clip and substrate carrying method
CN108033270A (en) * 2017-11-23 2018-05-15 东旭科技集团有限公司 Glass substrate conveying device and its operating method and glass substrate transmission system
CN107934547A (en) * 2017-12-21 2018-04-20 东莞科耀机电设备有限公司 A kind of pcb board material conveyer
CN109650011A (en) * 2019-02-18 2019-04-19 杭州特翌智物流科技有限公司 A kind of balance wheel sorting device
CN113307028A (en) * 2021-04-27 2021-08-27 蔡燕山 Production equipment of flat-panel display
CN113443840B (en) * 2021-06-30 2022-07-29 福莱特玻璃集团股份有限公司 Air knife for glass production and manufacturing
CN114424868B (en) * 2022-01-06 2023-11-28 浙江亿睿智能装备有限公司 Automatic shoe storing and taking cabinet capable of saving power

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63197222U (en) 1987-06-10 1988-12-19
JP2683317B2 (en) * 1993-11-19 1997-11-26 マルヤス機械株式会社 Conveyor
FR2716874B1 (en) * 1994-03-03 1996-06-21 Materiel Arboriculture Conveying device for products, especially fruit, suitable for sorting said products according to predetermined selection criteria.
JPH09278172A (en) * 1996-04-09 1997-10-28 Murata Mach Ltd Conveyor system
JP3290399B2 (en) 1998-03-27 2002-06-10 マルヤス機械株式会社 Conveyor
JP3608949B2 (en) * 1998-07-10 2005-01-12 大日本スクリーン製造株式会社 Substrate transfer device
IT1305875B1 (en) * 1998-12-18 2001-05-21 Lanfranco Anzani GRAVITY HANDLING DEVICE, FOR AUTOMATED WAREHOUSES
JP3842565B2 (en) * 2001-03-06 2006-11-08 マルヤス機械株式会社 Roller conveyor
EP1473257A3 (en) * 2003-04-28 2007-08-08 Grob-Werke GmbH & Co. KG Device and system for conveying articles on two adjacent roller conveyors
KR100567137B1 (en) * 2004-04-09 2006-04-05 주식회사 디엠에스 Magnetic transferring apparatus having a cylindrical shape for use in work transferring equipment

Also Published As

Publication number Publication date
KR20060120420A (en) 2006-11-27
JP2006321623A (en) 2006-11-30
TWI309542B (en) 2009-05-01
KR100801367B1 (en) 2008-02-11
CN1865097A (en) 2006-11-22
CN1865097B (en) 2010-05-12

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees