TW200702712A - Processing method for standard surface of optical measurement - Google Patents

Processing method for standard surface of optical measurement

Info

Publication number
TW200702712A
TW200702712A TW094124003A TW94124003A TW200702712A TW 200702712 A TW200702712 A TW 200702712A TW 094124003 A TW094124003 A TW 094124003A TW 94124003 A TW94124003 A TW 94124003A TW 200702712 A TW200702712 A TW 200702712A
Authority
TW
Taiwan
Prior art keywords
optical measurement
preventing
glaring
processing method
glaring light
Prior art date
Application number
TW094124003A
Other languages
Chinese (zh)
Other versions
TWI360660B (en
Inventor
Chi-Ruei Lin
liang-jia Chen
Shin-Chin Hung
Jing-Yu Jang
Original Assignee
Univ Nat Taipei Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Taipei Technology filed Critical Univ Nat Taipei Technology
Priority to TW094124003A priority Critical patent/TW200702712A/en
Publication of TW200702712A publication Critical patent/TW200702712A/en
Application granted granted Critical
Publication of TWI360660B publication Critical patent/TWI360660B/zh

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  • Physical Vapour Deposition (AREA)

Abstract

A kind of processing method for standard surface of optical measurement is revealed in the present invention. A kind of physical vapor deposition method is used to deposit the sputtering target material on the substrate surface. By adjusting the deposition parameters to deposit white color silver film, which has uniformly rough surface, it is capable of preventing the effect of glaring light. In addition to preventing the effect of glaring light, the requirements of size accuracy and precision for the plane of optical measurement can also be obtained. The invented surface processing technique for preventing glaring light can be used for the glaring-prevented plane of optical measurement as well as for the other surfaces where prevention of glaring light is necessary.
TW094124003A 2005-07-15 2005-07-15 Processing method for standard surface of optical measurement TW200702712A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW094124003A TW200702712A (en) 2005-07-15 2005-07-15 Processing method for standard surface of optical measurement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW094124003A TW200702712A (en) 2005-07-15 2005-07-15 Processing method for standard surface of optical measurement

Publications (2)

Publication Number Publication Date
TW200702712A true TW200702712A (en) 2007-01-16
TWI360660B TWI360660B (en) 2012-03-21

Family

ID=46728234

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094124003A TW200702712A (en) 2005-07-15 2005-07-15 Processing method for standard surface of optical measurement

Country Status (1)

Country Link
TW (1) TW200702712A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111623714A (en) * 2019-02-27 2020-09-04 汉能移动能源控股集团有限公司 Method for determining film thickness

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111623714A (en) * 2019-02-27 2020-09-04 汉能移动能源控股集团有限公司 Method for determining film thickness

Also Published As

Publication number Publication date
TWI360660B (en) 2012-03-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees