TW200643582A - Inspection method, and manufacturing method for liquid crystal display using inspection method - Google Patents

Inspection method, and manufacturing method for liquid crystal display using inspection method

Info

Publication number
TW200643582A
TW200643582A TW095110674A TW95110674A TW200643582A TW 200643582 A TW200643582 A TW 200643582A TW 095110674 A TW095110674 A TW 095110674A TW 95110674 A TW95110674 A TW 95110674A TW 200643582 A TW200643582 A TW 200643582A
Authority
TW
Taiwan
Prior art keywords
inspection method
pattern element
region
joints
accuracy
Prior art date
Application number
TW095110674A
Other languages
Chinese (zh)
Inventor
Toshihiro Yamashita
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of TW200643582A publication Critical patent/TW200643582A/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133514—Colour filters
    • G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133354—Arrangements for aligning or assembling substrates

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mathematical Physics (AREA)
  • Liquid Crystal (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

The present invention provides an inspection method that is capable of quantitatively measuring the accuracy of joints between patterns and thereby improving the accuracy of joints between patterns, and also provides a manufacturing method for liquid crystal displays using this inspection method. The inspection method for inspecting the accuracy of joints between patterns involving different exposures when a substrate is divided into a plurality of regions for separate exposures to form a predetermined pattern includes the step of, in an overlap region where a first and a second regions out of the plurality of regions overlap each other, measuring a first distance between a first pattern element obtained during exposure of the first region and a second pattern element obtained during exposure of the first region and located approximately parallel to the first pattern element; the step of, in the overlap region, measuring a second distance between the second pattern element and a third pattern element obtained during exposure of the second region and joined with the first pattern element; and the step of determining a difference between the first and the second distances to quantify the accuracy of joints by measurement.
TW095110674A 2005-06-01 2006-03-28 Inspection method, and manufacturing method for liquid crystal display using inspection method TW200643582A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005161038A JP2006337631A (en) 2005-06-01 2005-06-01 Inspection method and method for manufacturing liquid crystal display apparatus using same

Publications (1)

Publication Number Publication Date
TW200643582A true TW200643582A (en) 2006-12-16

Family

ID=37484041

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095110674A TW200643582A (en) 2005-06-01 2006-03-28 Inspection method, and manufacturing method for liquid crystal display using inspection method

Country Status (5)

Country Link
JP (1) JP2006337631A (en)
KR (1) KR100812322B1 (en)
CN (1) CN1873538A (en)
SG (1) SG127790A1 (en)
TW (1) TW200643582A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10276438B2 (en) 2016-08-23 2019-04-30 Au Optronics Corporation Marked pixel unit, display device using the same, and method for fabricating the display device

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100911331B1 (en) * 2008-12-30 2009-08-07 주식회사 탑 엔지니어링 Array tester and method for measuring a point of substrate of the same
KR100911330B1 (en) * 2008-12-30 2009-08-07 주식회사 탑 엔지니어링 Array tester, method for measuring a point of substrate of the same and method for measuring a position cordinate
CN102243382B (en) * 2010-05-13 2014-12-31 上海天马微电子有限公司 Liquid crystal display device and manufacturing method thereof, and detection and improvement device
CN109856930B (en) * 2017-11-30 2021-05-25 京东方科技集团股份有限公司 Alignment mark, substrate, manufacturing method of substrate and exposure alignment method

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6077756A (en) * 1998-04-24 2000-06-20 Vanguard International Semiconductor Overlay target pattern and algorithm for layer-to-layer overlay metrology for semiconductor processing
JP2000277425A (en) * 1999-03-26 2000-10-06 Nec Corp Electron beam lithography method and its device
JP3348783B2 (en) * 1999-07-28 2002-11-20 日本電気株式会社 Mark for overlay and semiconductor device
JP4635354B2 (en) * 2001-03-07 2011-02-23 株式会社ニコン Exposure method, splice error measurement method, and device manufacturing method
DE60108082T2 (en) * 2001-05-14 2005-10-13 Infineon Technologies Ag A method of performing an alignment measurement of two patterns in different layers of a semiconductor wafer
US7190823B2 (en) * 2002-03-17 2007-03-13 United Microelectronics Corp. Overlay vernier pattern for measuring multi-layer overlay alignment accuracy and method for measuring the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10276438B2 (en) 2016-08-23 2019-04-30 Au Optronics Corporation Marked pixel unit, display device using the same, and method for fabricating the display device

Also Published As

Publication number Publication date
KR20060125476A (en) 2006-12-06
CN1873538A (en) 2006-12-06
JP2006337631A (en) 2006-12-14
KR100812322B1 (en) 2008-03-10
SG127790A1 (en) 2006-12-29

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