TW200641167A - Nanofabrication based on sam growth - Google Patents
Nanofabrication based on sam growthInfo
- Publication number
- TW200641167A TW200641167A TW094145409A TW94145409A TW200641167A TW 200641167 A TW200641167 A TW 200641167A TW 094145409 A TW094145409 A TW 094145409A TW 94145409 A TW94145409 A TW 94145409A TW 200641167 A TW200641167 A TW 200641167A
- Authority
- TW
- Taiwan
- Prior art keywords
- sam
- nanofabrication
- molecular species
- substrate surface
- forming molecular
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
Abstract
The present invention relates to a process of nanofabrication based on nucleated SAM growth, to patterned substrates prepared thereby, to a nanowire or grid of nanowires prepared thereby and to electronic devices including the same. In particular, there is provided a process which comprises applying a first SAM-forming molecular species to a first surface region of the substrate surface, so as to provide a first SAM defining a scaffold pattern on the first surface region; and applying a second SAM-forming molecular species to at least a second surface region of said substrate surface which is not covered by the first SAM, whereby a second replica SAM comprising the second SAM-forming molecular species selectively forms on substrate surface adjacent to at least one edge of said first SAM.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP04106967 | 2004-12-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200641167A true TW200641167A (en) | 2006-12-01 |
Family
ID=36216850
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094145409A TW200641167A (en) | 2004-12-23 | 2005-12-20 | Nanofabrication based on sam growth |
Country Status (7)
Country | Link |
---|---|
US (1) | US20090272715A1 (en) |
EP (1) | EP1831764A2 (en) |
JP (1) | JP2008525204A (en) |
KR (1) | KR20070086446A (en) |
CN (1) | CN101088044A (en) |
TW (1) | TW200641167A (en) |
WO (1) | WO2006067694A2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI459467B (en) * | 2007-09-26 | 2014-11-01 | Eastman Kodak Co | Organosiloxane materials for selective area deposition of inorganic materials |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE112008001634A5 (en) * | 2007-06-21 | 2010-04-01 | GeSIM Gesellschaft für Silizium-Mikrosysteme mbH | Method and device for transfer of micro- or nanostructures by contact stamping |
EP2288962A1 (en) * | 2008-05-06 | 2011-03-02 | Nano Terra Inc. | Molecular resist compositions, methods of patterning substrates using the compositions and process products prepared therefrom |
US20100101840A1 (en) * | 2008-10-29 | 2010-04-29 | Raytheon Company | Application of a self-assembled monolayer as an oxide inhibitor |
KR20110023164A (en) | 2009-08-28 | 2011-03-08 | 삼성전자주식회사 | Optoelectronic device |
US9321269B1 (en) * | 2014-12-22 | 2016-04-26 | Stmicroelectronics S.R.L. | Method for the surface treatment of a semiconductor substrate |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5512131A (en) * | 1993-10-04 | 1996-04-30 | President And Fellows Of Harvard College | Formation of microstamped patterns on surfaces and derivative articles |
US5725788A (en) * | 1996-03-04 | 1998-03-10 | Motorola | Apparatus and method for patterning a surface |
US6048623A (en) * | 1996-12-18 | 2000-04-11 | Kimberly-Clark Worldwide, Inc. | Method of contact printing on gold coated films |
US6180288B1 (en) * | 1997-03-21 | 2001-01-30 | Kimberly-Clark Worldwide, Inc. | Gel sensors and method of use thereof |
US6413587B1 (en) * | 1999-03-02 | 2002-07-02 | International Business Machines Corporation | Method for forming polymer brush pattern on a substrate surface |
EP1194960B1 (en) * | 1999-07-02 | 2010-09-15 | President and Fellows of Harvard College | Nanoscopic wire-based devices, arrays, and methods of their manufacture |
US6703304B1 (en) * | 2001-01-30 | 2004-03-09 | Advanced Micro Devices, Inc. | Dual damascene process using self-assembled monolayer and spacers |
WO2002071151A1 (en) * | 2001-03-06 | 2002-09-12 | Lee T Randall | Dithiocarboxylic acid self-assembled monolayers and methods for using same in microconact printing |
US6773616B1 (en) * | 2001-11-13 | 2004-08-10 | Hewlett-Packard Development Company, L.P. | Formation of nanoscale wires |
JP2005534190A (en) * | 2002-07-26 | 2005-11-10 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | Micro contact printing method |
TW564383B (en) * | 2002-10-17 | 2003-12-01 | Chi Mei Optoelectronics Corp | A liquid crystal display comprises color filters with recess structures |
US7182996B2 (en) * | 2002-11-22 | 2007-02-27 | Florida State University Research Foundation, Inc. | Deposting nanowires on a substrate |
US6893966B2 (en) * | 2002-11-27 | 2005-05-17 | International Business Machines Corporation | Method of patterning the surface of an article using positive microcontact printing |
US6860956B2 (en) * | 2003-05-23 | 2005-03-01 | Agency For Science, Technology & Research | Methods of creating patterns on substrates and articles of manufacture resulting therefrom |
-
2005
- 2005-12-14 KR KR1020077013949A patent/KR20070086446A/en not_active Application Discontinuation
- 2005-12-14 JP JP2007547734A patent/JP2008525204A/en active Pending
- 2005-12-14 CN CNA2005800443329A patent/CN101088044A/en active Pending
- 2005-12-14 WO PCT/IB2005/054250 patent/WO2006067694A2/en not_active Application Discontinuation
- 2005-12-14 EP EP05824926A patent/EP1831764A2/en not_active Withdrawn
- 2005-12-14 US US11/722,103 patent/US20090272715A1/en not_active Abandoned
- 2005-12-20 TW TW094145409A patent/TW200641167A/en unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI459467B (en) * | 2007-09-26 | 2014-11-01 | Eastman Kodak Co | Organosiloxane materials for selective area deposition of inorganic materials |
Also Published As
Publication number | Publication date |
---|---|
WO2006067694A3 (en) | 2006-10-05 |
KR20070086446A (en) | 2007-08-27 |
EP1831764A2 (en) | 2007-09-12 |
JP2008525204A (en) | 2008-07-17 |
CN101088044A (en) | 2007-12-12 |
US20090272715A1 (en) | 2009-11-05 |
WO2006067694A2 (en) | 2006-06-29 |
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