TW200636235A - Fabrication method for integrated micro sensor, and micro sensor made with the same - Google Patents
Fabrication method for integrated micro sensor, and micro sensor made with the sameInfo
- Publication number
- TW200636235A TW200636235A TW094110607A TW94110607A TW200636235A TW 200636235 A TW200636235 A TW 200636235A TW 094110607 A TW094110607 A TW 094110607A TW 94110607 A TW94110607 A TW 94110607A TW 200636235 A TW200636235 A TW 200636235A
- Authority
- TW
- Taiwan
- Prior art keywords
- humidity
- sensing
- variation
- sensor
- temperature
- Prior art date
Links
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- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
The present invention provides a fabrication method for integrated micro sensor, and the micro sensor made with the same, which employs the MEMS technology of semiconductor processing to fabricate the micro sensor of integrated temperature, humidity circuit. The structural design of the sensor employs the semiconductor process, CMOS, to capture the moisture by the humidity variation in the air through the moisture-absorption material, and indirectly affect the sensing capacitor below the material, so as to generate the variation of capacitance, and combine the variation with the sensing circuit to provide the signal with optimal processing. As for the temperature sensing, there are two types of sensing, in which one is the thermopile sensing, and the other one is the thermoresistive sensing, and both of them employ the existing CMOS processing material to design and fabricate. With the temperature variation, the characteristics of the material will also be changed, and the temperature of the chip could be measured by an external instrument. Because the temperature variation in the air would also affect the humidity variation, the present invention adds the temperature sensor for humidity compensation. Below the humidity sensing electrode, it is added with a heater designed with polysilicon material, which could prevent the humidity sensor from attachment of moisture on the surface of humidity sensing film under high humidity through using the heater to heat the attached moisture, so as to improve the precision of humidity sensor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94110607A TWI283297B (en) | 2005-04-01 | 2005-04-01 | Fabrication method for integrated micro sensor, and micro sensor made with the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94110607A TWI283297B (en) | 2005-04-01 | 2005-04-01 | Fabrication method for integrated micro sensor, and micro sensor made with the same |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200636235A true TW200636235A (en) | 2006-10-16 |
TWI283297B TWI283297B (en) | 2007-07-01 |
Family
ID=39428138
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94110607A TWI283297B (en) | 2005-04-01 | 2005-04-01 | Fabrication method for integrated micro sensor, and micro sensor made with the same |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI283297B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111912881A (en) * | 2019-05-09 | 2020-11-10 | 林宗宏 | Thermoelectric nano sensor and manufacturing method and application method thereof |
US10843919B2 (en) | 2018-12-28 | 2020-11-24 | Industrial Technology Research Institute | Microelectromechanical system apparatus with heater |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104634832B (en) * | 2015-02-28 | 2018-01-05 | 苏州工业园区纳米产业技术研究院有限公司 | CMOS MEMS capacitive humidity sensors and preparation method thereof |
-
2005
- 2005-04-01 TW TW94110607A patent/TWI283297B/en not_active IP Right Cessation
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10843919B2 (en) | 2018-12-28 | 2020-11-24 | Industrial Technology Research Institute | Microelectromechanical system apparatus with heater |
CN111912881A (en) * | 2019-05-09 | 2020-11-10 | 林宗宏 | Thermoelectric nano sensor and manufacturing method and application method thereof |
CN111912881B (en) * | 2019-05-09 | 2024-01-09 | 林宗宏 | Thermoelectric nanosensor and method of making and using same |
Also Published As
Publication number | Publication date |
---|---|
TWI283297B (en) | 2007-07-01 |
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Legal Events
Date | Code | Title | Description |
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MM4A | Annulment or lapse of patent due to non-payment of fees |