TW200631881A - Wafer transfer device and method thereof - Google Patents
Wafer transfer device and method thereofInfo
- Publication number
- TW200631881A TW200631881A TW094107218A TW94107218A TW200631881A TW 200631881 A TW200631881 A TW 200631881A TW 094107218 A TW094107218 A TW 094107218A TW 94107218 A TW94107218 A TW 94107218A TW 200631881 A TW200631881 A TW 200631881A
- Authority
- TW
- Taiwan
- Prior art keywords
- supporting portion
- lateral
- point
- transfer device
- lateral surface
- Prior art date
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A wafer transfer device including a first supporting portion and a second supporting portion is provided. The first supporting portion has a first top surface, a first lateral surface and a second lateral surface. The first lateral surface has a norm line. The second supporting portion connected to the first supporting portion has a second top surface, a third and a fourth lateral surfaces. The third and the fourth lateral surfaces are respectively connected to the first and the second lateral surfaces. The first and the second top surfaces have a wafer receiving region for receiving a wafer. The third and the fourth lateral surfaces respectively intersect with a direct line parallel to the norm line at a first point and a second point. The width between the first lateral surface and the second lateral surface is larger than the width between the first point and the second point.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94107218A TWI299030B (en) | 2005-03-09 | 2005-03-09 | Wafer transfer device and method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94107218A TWI299030B (en) | 2005-03-09 | 2005-03-09 | Wafer transfer device and method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200631881A true TW200631881A (en) | 2006-09-16 |
TWI299030B TWI299030B (en) | 2008-07-21 |
Family
ID=45069570
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94107218A TWI299030B (en) | 2005-03-09 | 2005-03-09 | Wafer transfer device and method thereof |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI299030B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8317450B2 (en) * | 2008-10-30 | 2012-11-27 | Lam Research Corporation | Tactile wafer lifter and methods for operating the same |
-
2005
- 2005-03-09 TW TW94107218A patent/TWI299030B/en active
Also Published As
Publication number | Publication date |
---|---|
TWI299030B (en) | 2008-07-21 |
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