TW200631881A - Wafer transfer device and method thereof - Google Patents

Wafer transfer device and method thereof

Info

Publication number
TW200631881A
TW200631881A TW094107218A TW94107218A TW200631881A TW 200631881 A TW200631881 A TW 200631881A TW 094107218 A TW094107218 A TW 094107218A TW 94107218 A TW94107218 A TW 94107218A TW 200631881 A TW200631881 A TW 200631881A
Authority
TW
Taiwan
Prior art keywords
supporting portion
lateral
point
transfer device
lateral surface
Prior art date
Application number
TW094107218A
Other languages
Chinese (zh)
Other versions
TWI299030B (en
Inventor
Kuo-Hao Pen
Original Assignee
Macronix Int Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Macronix Int Co Ltd filed Critical Macronix Int Co Ltd
Priority to TW94107218A priority Critical patent/TWI299030B/en
Publication of TW200631881A publication Critical patent/TW200631881A/en
Application granted granted Critical
Publication of TWI299030B publication Critical patent/TWI299030B/en

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A wafer transfer device including a first supporting portion and a second supporting portion is provided. The first supporting portion has a first top surface, a first lateral surface and a second lateral surface. The first lateral surface has a norm line. The second supporting portion connected to the first supporting portion has a second top surface, a third and a fourth lateral surfaces. The third and the fourth lateral surfaces are respectively connected to the first and the second lateral surfaces. The first and the second top surfaces have a wafer receiving region for receiving a wafer. The third and the fourth lateral surfaces respectively intersect with a direct line parallel to the norm line at a first point and a second point. The width between the first lateral surface and the second lateral surface is larger than the width between the first point and the second point.
TW94107218A 2005-03-09 2005-03-09 Wafer transfer device and method thereof TWI299030B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94107218A TWI299030B (en) 2005-03-09 2005-03-09 Wafer transfer device and method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94107218A TWI299030B (en) 2005-03-09 2005-03-09 Wafer transfer device and method thereof

Publications (2)

Publication Number Publication Date
TW200631881A true TW200631881A (en) 2006-09-16
TWI299030B TWI299030B (en) 2008-07-21

Family

ID=45069570

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94107218A TWI299030B (en) 2005-03-09 2005-03-09 Wafer transfer device and method thereof

Country Status (1)

Country Link
TW (1) TWI299030B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8317450B2 (en) * 2008-10-30 2012-11-27 Lam Research Corporation Tactile wafer lifter and methods for operating the same

Also Published As

Publication number Publication date
TWI299030B (en) 2008-07-21

Similar Documents

Publication Publication Date Title
TW200620664A (en) Semicomductor device and method for manufacturing the same
WO2007110729A3 (en) Seating arrangement
WO2008135905A3 (en) A photosensitive device and a method of manufacturing a photosensitive device
EP1714359A4 (en) 110 oriented group iv-vi semiconductor structure, and method for making and using the same
TW200634626A (en) Input to interface element
WO2008039534A3 (en) Quantum tunneling devices and circuits with lattice- mismatched semiconductor structures
WO2008076661A3 (en) Ceramic package substrate with recessed device
TW200942973A (en) Substrate processing apparatus, coating apparatus and coating method
MX2009005459A (en) Photovoltaic device including a metal stack.
MX2010003226A (en) Photovoltaic devices including heterojunctions.
TW200720170A (en) Work transfer system
NZ583210A (en) Tool comprising a cam track and cam follower with first and second cam tracks
JO2295B1 (en) A device
WO2009056740A3 (en) Member defining a holder for a device and tyre including such member
TW200725889A (en) Semiconductor device and method for forming the same
EP1925697A4 (en) AlN CRYSTAL AND METHOD FOR GROWING THE SAME, AND AlN CRYSTAL SUBSTRATE
MY153426A (en) A support device for materials handling
MY148114A (en) A conversion kit
GB2463167A (en) An apparatus and method for transporting a fabric
TW200707642A (en) Semiconductor device and method for fabricating the same
WO2011002210A3 (en) Photovoltaic power-generating apparatus
WO2003085453A3 (en) Mid-frame for an imaging apparatus
TWI266477B (en) Chip with adjustable pinout function and method thereof
TW200631881A (en) Wafer transfer device and method thereof
WO2009074135A3 (en) Photovoltaic modular device