TW200628979A - Positive resist composition and manufacturing method of resist pattern - Google Patents
Positive resist composition and manufacturing method of resist patternInfo
- Publication number
- TW200628979A TW200628979A TW094141161A TW94141161A TW200628979A TW 200628979 A TW200628979 A TW 200628979A TW 094141161 A TW094141161 A TW 094141161A TW 94141161 A TW94141161 A TW 94141161A TW 200628979 A TW200628979 A TW 200628979A
- Authority
- TW
- Taiwan
- Prior art keywords
- group
- acid
- resist composition
- general formula
- itself
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Materials For Photolithography (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
A resist composition improved in EL margin and measuring faithfulness (mask linearity) is provided. The resist composition comprises a resin component (A) which increases alkali solubility of itself by an action of an acid, an acid releasing component (B) which releases an acid by an exposure of itself, wherein the (B) component contains an onium salt based acid generating agent (B1) having a cation portion represented by the following general formula (b-1) and an oxime sulfonate based acid generating agent including a following structure represented by the following general formula (b-2), , wherein R1" is an alkyl group, alkoxy group, halogen atom, or hydroxyl group, R2" and R3" are independently aryl group or alkyl group which may have a substituent group, and n represents an integer of 0 to 3, , wherein R21' represents an organic group, R22' represents a monovalent organic group, or a cyano group.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004366584A JP4319136B2 (en) | 2004-12-17 | 2004-12-17 | Positive resist composition and resist pattern forming method |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200628979A true TW200628979A (en) | 2006-08-16 |
TWI304153B TWI304153B (en) | 2008-12-11 |
Family
ID=36587685
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94141161A TWI304153B (en) | 2004-12-17 | 2005-11-23 | Positive resist composition and manufacturing method of resist pattern |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4319136B2 (en) |
TW (1) | TWI304153B (en) |
WO (1) | WO2006064622A1 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8795948B2 (en) | 2012-03-22 | 2014-08-05 | Tokyo Ohka Kogyo Co., Ltd. | Resist composition, method of forming resist pattern and polymeric compound |
US8795947B2 (en) | 2012-03-22 | 2014-08-05 | Tokyo Ohka Kogyo Co., Ltd. | Resist composition and method of forming resist pattern |
TWI465848B (en) * | 2008-08-22 | 2014-12-21 | Tokyo Ohka Kogyo Co Ltd | Positive resist composition, method of forming resist pattern, and polymeric compound |
US8980524B2 (en) | 2010-01-05 | 2015-03-17 | Tokyo Ohka Kogyo Co., Ltd. | Positive resist composition and method of forming resist pattern |
US9023580B2 (en) | 2011-11-24 | 2015-05-05 | Tokyo Ohka Kogyo Co., Ltd. | Method of forming polymeric compound, resist composition and method of forming resist pattern |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7488568B2 (en) | 2007-04-09 | 2009-02-10 | Tokyo Ohka Kogyo Co., Ltd. | Resist composition, method of forming resist pattern, compound and acid generator |
JP5066405B2 (en) | 2007-08-02 | 2012-11-07 | 富士フイルム株式会社 | Resist composition for electron beam, X-ray or EUV, and pattern forming method using the composition |
JP5393325B2 (en) * | 2008-08-01 | 2014-01-22 | 富士フイルム株式会社 | Positive resist composition and pattern forming method using the same |
JP5422293B2 (en) * | 2008-08-01 | 2014-02-19 | 富士フイルム株式会社 | Positive resist composition and pattern forming method using the same |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11236416A (en) * | 1997-10-08 | 1999-08-31 | Shin Etsu Chem Co Ltd | Polystyrene-based polymer compound, chemical amplification positive type resist material and pattern formation |
JP4289937B2 (en) * | 2003-03-28 | 2009-07-01 | 東京応化工業株式会社 | Photoresist composition and resist pattern forming method using the same |
JP2004334060A (en) * | 2003-05-12 | 2004-11-25 | Shin Etsu Chem Co Ltd | Photoacid generator for chemically amplified resist, resist material containing the same and pattern forming method |
JP2004341062A (en) * | 2003-05-13 | 2004-12-02 | Fuji Photo Film Co Ltd | Positive resist composition |
-
2004
- 2004-12-17 JP JP2004366584A patent/JP4319136B2/en active Active
-
2005
- 2005-11-08 WO PCT/JP2005/020419 patent/WO2006064622A1/en active Application Filing
- 2005-11-23 TW TW94141161A patent/TWI304153B/en active
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI465848B (en) * | 2008-08-22 | 2014-12-21 | Tokyo Ohka Kogyo Co Ltd | Positive resist composition, method of forming resist pattern, and polymeric compound |
US8980524B2 (en) | 2010-01-05 | 2015-03-17 | Tokyo Ohka Kogyo Co., Ltd. | Positive resist composition and method of forming resist pattern |
US9023580B2 (en) | 2011-11-24 | 2015-05-05 | Tokyo Ohka Kogyo Co., Ltd. | Method of forming polymeric compound, resist composition and method of forming resist pattern |
US8795948B2 (en) | 2012-03-22 | 2014-08-05 | Tokyo Ohka Kogyo Co., Ltd. | Resist composition, method of forming resist pattern and polymeric compound |
US8795947B2 (en) | 2012-03-22 | 2014-08-05 | Tokyo Ohka Kogyo Co., Ltd. | Resist composition and method of forming resist pattern |
Also Published As
Publication number | Publication date |
---|---|
JP2006171568A (en) | 2006-06-29 |
WO2006064622A1 (en) | 2006-06-22 |
TWI304153B (en) | 2008-12-11 |
JP4319136B2 (en) | 2009-08-26 |
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