TW200616929A - Method for producing fluoromethane and product produced thereby - Google Patents

Method for producing fluoromethane and product produced thereby

Info

Publication number
TW200616929A
TW200616929A TW094131358A TW94131358A TW200616929A TW 200616929 A TW200616929 A TW 200616929A TW 094131358 A TW094131358 A TW 094131358A TW 94131358 A TW94131358 A TW 94131358A TW 200616929 A TW200616929 A TW 200616929A
Authority
TW
Taiwan
Prior art keywords
fluoromethane
product produced
producing
hydrogen chloride
producing fluoromethane
Prior art date
Application number
TW094131358A
Other languages
Chinese (zh)
Other versions
TWI346097B (en
Inventor
Hiromoto Ohno
Tatsuharu Arai
Original Assignee
Showa Denko Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko Kk filed Critical Showa Denko Kk
Publication of TW200616929A publication Critical patent/TW200616929A/en
Application granted granted Critical
Publication of TWI346097B publication Critical patent/TWI346097B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C17/00—Preparation of halogenated hydrocarbons
    • C07C17/093—Preparation of halogenated hydrocarbons by replacement by halogens
    • C07C17/20—Preparation of halogenated hydrocarbons by replacement by halogens of halogen atoms by other halogen atoms
    • C07C17/202—Preparation of halogenated hydrocarbons by replacement by halogens of halogen atoms by other halogen atoms two or more compounds being involved in the reaction
    • C07C17/206—Preparation of halogenated hydrocarbons by replacement by halogens of halogen atoms by other halogen atoms two or more compounds being involved in the reaction the other compound being HX
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C17/00—Preparation of halogenated hydrocarbons
    • C07C17/38—Separation; Purification; Stabilisation; Use of additives
    • C07C17/383—Separation; Purification; Stabilisation; Use of additives by distillation
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C19/00—Acyclic saturated compounds containing halogen atoms
    • C07C19/08—Acyclic saturated compounds containing halogen atoms containing fluorine
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/50—Improvements relating to the production of bulk chemicals
    • Y02P20/52—Improvements relating to the production of bulk chemicals using catalysts, e.g. selective catalysts

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)

Abstract

To provide a method for efficiently producing HFC-41 having high purity and usable as an etching gas for semiconductor and provide a product produced by the method. The method for producing fluoromethane comprises reacting methyl chloride with hydrogen fluoride in gaseous phase in the presence of a fluorination catalyst to obtain a mixture containing the fluoromethane and hydrogen chloride, introducing the mixture into a distillation column, separating the fluoromethane and hydrogen chloride as a column top fraction and purifying the fluoromethane.
TW094131358A 2004-09-16 2005-09-12 Method for producing fluoromethane and product produced thereby TW200616929A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004269660 2004-09-16

Publications (2)

Publication Number Publication Date
TW200616929A true TW200616929A (en) 2006-06-01
TWI346097B TWI346097B (en) 2011-08-01

Family

ID=38159800

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094131358A TW200616929A (en) 2004-09-16 2005-09-12 Method for producing fluoromethane and product produced thereby

Country Status (3)

Country Link
KR (1) KR100884287B1 (en)
CN (1) CN100562510C (en)
TW (1) TW200616929A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014221727A (en) * 2013-05-13 2014-11-27 昭和電工株式会社 Dichloromethane purification method and method of producing difluoromethane using the same
CN106542959B (en) * 2016-11-01 2019-05-14 北京宇极科技发展有限公司 The preparation method of one fluoromethane
CN110606797A (en) * 2019-06-20 2019-12-24 绿菱电子材料（天津）有限公司 Preparation method of high-conversion-rate monofluoromethane

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS608235A (en) 1983-06-28 1985-01-17 Showa Denko Kk Production of fluoromethane
JPS6013726A (en) 1983-07-04 1985-01-24 Showa Denko Kk Preparation of fluoromethane

Also Published As

Publication number Publication date
KR20070038566A (en) 2007-04-10
KR100884287B1 (en) 2009-02-18
CN101023051A (en) 2007-08-22
TWI346097B (en) 2011-08-01
CN100562510C (en) 2009-11-25

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