TW200612589A - Acoustic resonator device and method for manufacturing the same - Google Patents
Acoustic resonator device and method for manufacturing the sameInfo
- Publication number
- TW200612589A TW200612589A TW093131284A TW93131284A TW200612589A TW 200612589 A TW200612589 A TW 200612589A TW 093131284 A TW093131284 A TW 093131284A TW 93131284 A TW93131284 A TW 93131284A TW 200612589 A TW200612589 A TW 200612589A
- Authority
- TW
- Taiwan
- Prior art keywords
- semiconductor substrate
- acoustic resonator
- resonator device
- reinforcing plate
- manufacturing
- Prior art date
Links
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
An acoustic resonator device includes a semiconductor substrate, a FBAR (thin film bulk acoustic resonator) and a reinforcing plate. The FBAR is fabricated on the upper surface of the semiconductor substrate. The semiconductor substrate has a resonating cavity through its upper and lower surfaces. The reinforcing plate is bonded to the lower surface of the semiconductor substrate to seal the resonating cavity. Therefore the reinforcing plate can be configured for die-bonding to eliminate the contamination of the resonating cavity. The semiconductor substrate will not suffer from chipping during wafer sawing.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW93131284A TWI236777B (en) | 2004-10-15 | 2004-10-15 | Acoustic resonator device and method for manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW93131284A TWI236777B (en) | 2004-10-15 | 2004-10-15 | Acoustic resonator device and method for manufacturing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI236777B TWI236777B (en) | 2005-07-21 |
TW200612589A true TW200612589A (en) | 2006-04-16 |
Family
ID=36675049
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW93131284A TWI236777B (en) | 2004-10-15 | 2004-10-15 | Acoustic resonator device and method for manufacturing the same |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI236777B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI667189B (en) * | 2017-08-31 | 2019-08-01 | 研能科技股份有限公司 | Microelectromechanical fluid control device |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI422238B (en) * | 2009-09-25 | 2014-01-01 | Ind Tech Res Inst | Acoustic power generator and the manufacturing method thereof |
CN109541319B (en) * | 2018-10-10 | 2023-09-01 | 金华职业技术学院 | Liquid dielectric constant measuring method |
CN109374982B (en) * | 2018-10-10 | 2023-08-01 | 金华职业技术学院 | Liquid dielectric constant measuring device |
-
2004
- 2004-10-15 TW TW93131284A patent/TWI236777B/en active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI667189B (en) * | 2017-08-31 | 2019-08-01 | 研能科技股份有限公司 | Microelectromechanical fluid control device |
US10883487B2 (en) | 2017-08-31 | 2021-01-05 | Microjet Technology Co., Ltd. | Micro-electromechanical fluid control device |
Also Published As
Publication number | Publication date |
---|---|
TWI236777B (en) | 2005-07-21 |
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