TW200611753A - Apparatus for removing coating from edge of substrate - Google Patents

Apparatus for removing coating from edge of substrate

Info

Publication number
TW200611753A
TW200611753A TW094119657A TW94119657A TW200611753A TW 200611753 A TW200611753 A TW 200611753A TW 094119657 A TW094119657 A TW 094119657A TW 94119657 A TW94119657 A TW 94119657A TW 200611753 A TW200611753 A TW 200611753A
Authority
TW
Taiwan
Prior art keywords
substrate
state
edge
chuck
slit
Prior art date
Application number
TW094119657A
Other languages
Chinese (zh)
Inventor
Shinji Takase
Kazunobu Yamaguchi
Yoshiaki Masu
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Publication of TW200611753A publication Critical patent/TW200611753A/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1313—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells specially adapted for a particular application
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B08B11/04—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Coating Apparatus (AREA)
  • Cleaning In General (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

This invention is to provide an apparatus for removing coating from edge of substrate which surely prevents the bending of the edges of a large-sized glass substrate. A chuck 3 is raised by making a shaft 4 of a substrate holder 2 extend to receive the substrate W in this raised position. Under this state, a peripheral part of the substrate W is deflected downward by its own weight. Next, the chuck 3 is lowered by retracting the shaft 4 to a level flush with the upper surface of a bar member 17, and then the under surface of the peripheral part of the substrate W is supported by the bar member 17 and the substrate W is retained in a horizontal state. At this time, a cleaning liquid (solvent) is retained by surface tension in a slit 11 of a cleaning unit 10. From this state, the cleaning units 10 at left and right are moved forward to insert the edges of the substrate W in the slit 11 of the cleaning unit 10.
TW094119657A 2004-06-17 2005-06-14 Apparatus for removing coating from edge of substrate TW200611753A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004179077A JP2006000748A (en) 2004-06-17 2004-06-17 Substrate-edge-film removing apparatus

Publications (1)

Publication Number Publication Date
TW200611753A true TW200611753A (en) 2006-04-16

Family

ID=35706730

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094119657A TW200611753A (en) 2004-06-17 2005-06-14 Apparatus for removing coating from edge of substrate

Country Status (4)

Country Link
JP (1) JP2006000748A (en)
KR (1) KR20060046468A (en)
CN (1) CN100445816C (en)
TW (1) TW200611753A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI558469B (en) * 2012-11-06 2016-11-21 東京威力科創股份有限公司 Method for removing coating film on circumferential portion, substrate processing device, and storage medium

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101740325B (en) * 2008-11-14 2012-11-28 家登精密工业股份有限公司 Cleaning device for semiconductor base material
KR100934765B1 (en) * 2009-01-29 2009-12-30 주식회사 에이디피엔지니어링 Apparatus for manufacturing flat panel display
CN104511393A (en) * 2014-12-18 2015-04-15 赵春玲 Roll-coating device for edge
DE102016002773A1 (en) * 2016-03-09 2017-09-14 Ludy Galvanosysteme Gmbh Device for transporting a flat material to be treated and system with such a device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3341958B2 (en) * 1994-08-04 2002-11-05 東京応化工業株式会社 Method and apparatus for removing edge coating on substrate
JPH08297278A (en) * 1995-04-25 1996-11-12 Toppan Printing Co Ltd Substrate carrying out device
JP3303028B2 (en) * 1997-09-17 2002-07-15 三菱マテリアル株式会社 Disk storage device
JP3809798B2 (en) * 2001-12-20 2006-08-16 凸版印刷株式会社 Substrate edge developing method and developing device therefor
JP2003303762A (en) * 2002-04-11 2003-10-24 Tokyo Electron Ltd Apparatus and method for treating substrate
JP3995236B2 (en) * 2002-07-01 2007-10-24 株式会社アドバンスト・ディスプレイ Substrate end face cleaning apparatus, substrate end face cleaning method, and semiconductor device manufacturing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI558469B (en) * 2012-11-06 2016-11-21 東京威力科創股份有限公司 Method for removing coating film on circumferential portion, substrate processing device, and storage medium

Also Published As

Publication number Publication date
KR20060046468A (en) 2006-05-17
CN100445816C (en) 2008-12-24
CN1710468A (en) 2005-12-21
JP2006000748A (en) 2006-01-05

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