TW200610591A - Cleaning method and cleaning liquid feeder practicing the same - Google Patents

Cleaning method and cleaning liquid feeder practicing the same

Info

Publication number
TW200610591A
TW200610591A TW094128390A TW94128390A TW200610591A TW 200610591 A TW200610591 A TW 200610591A TW 094128390 A TW094128390 A TW 094128390A TW 94128390 A TW94128390 A TW 94128390A TW 200610591 A TW200610591 A TW 200610591A
Authority
TW
Taiwan
Prior art keywords
cleaning liquid
washed
cleaning
sprayed
continuously
Prior art date
Application number
TW094128390A
Other languages
Chinese (zh)
Inventor
Yoshiki Kobayashi
Masahiko Yasukawa
Original Assignee
Xevios Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xevios Corp filed Critical Xevios Corp
Publication of TW200610591A publication Critical patent/TW200610591A/en

Links

Landscapes

  • Engineering & Computer Science (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Liquid Crystal (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

To provide a cleaning method which prevents a film forming of a cleaning liquid on a material to be washed, and at the same time, enables also the prevention of the back flow of the cleaning liquid and foreign materials on the material to be washed. In the cleaning method which sprays the cleaning liquid continuously to the material to be washed, a high-pressure cleaning liquid is sprayed to the material to be washed continuously in a flow rate of 14-17 m/sec, and at the same time, the flow rate of the cleaning liquid sprayed continuously increases up to 100-120 m/sec in a cycle of 20-50 c/sec to add strength and weakness to the cleaning liquid. Accordingly, since the strength and weakness added to the cleaning liquid blows out the cleaning liquid sprayed to the material to be washed, no coating film of the cleaning liquid is formed on the material to be washed. Further, since the cleaning liquid is sprayed continuously to the material to be washed, it is possible to flow the cleaning liquid bumped against the material to be washed on the material to be washed always together with the removed foreign materials, and to prevent the back flow on the material to be washed.
TW094128390A 2004-09-10 2005-08-19 Cleaning method and cleaning liquid feeder practicing the same TW200610591A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004264584A JP2006075776A (en) 2004-09-10 2004-09-10 Cleaning method and cleaning liquid feeder practicing the same

Publications (1)

Publication Number Publication Date
TW200610591A true TW200610591A (en) 2006-04-01

Family

ID=36155676

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094128390A TW200610591A (en) 2004-09-10 2005-08-19 Cleaning method and cleaning liquid feeder practicing the same

Country Status (4)

Country Link
JP (1) JP2006075776A (en)
KR (1) KR20060051081A (en)
CN (1) CN1745911A (en)
TW (1) TW200610591A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4832415B2 (en) * 2007-12-13 2011-12-07 トヨタ自動車株式会社 Cylinder head cleaning method and cylinder head cleaning device
WO2015083669A1 (en) * 2013-12-02 2015-06-11 独立行政法人 産業技術総合研究所 Wet processing apparatus
CN111755320A (en) * 2020-05-20 2020-10-09 嘉兴市轩禾园艺技术有限公司 Polysilicon functional film, preparation method and application thereof

Also Published As

Publication number Publication date
CN1745911A (en) 2006-03-15
KR20060051081A (en) 2006-05-19
JP2006075776A (en) 2006-03-23

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