TW200608478A - System and method of cleaning and etching a substrate - Google Patents
System and method of cleaning and etching a substrateInfo
- Publication number
- TW200608478A TW200608478A TW094121622A TW94121622A TW200608478A TW 200608478 A TW200608478 A TW 200608478A TW 094121622 A TW094121622 A TW 094121622A TW 94121622 A TW94121622 A TW 94121622A TW 200608478 A TW200608478 A TW 200608478A
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- etching
- cleaning
- solution
- reacted
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31127—Etching organic layers
- H01L21/31133—Etching organic layers by chemical means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
- H01L21/46—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428
- H01L21/461—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
Abstract
One embodiment provides a method of processing a substrate. The method includes applying a solution to a surface of a substrate. At least one reacting species has been produced by dissociation of the solution by applying energy such as a light to the solution. A first material on the substrate is reacted and removing the reacted first material. A system for processing a substrate is also described.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US88000704A | 2004-06-28 | 2004-06-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200608478A true TW200608478A (en) | 2006-03-01 |
TWI271793B TWI271793B (en) | 2007-01-21 |
Family
ID=35786645
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094121622A TWI271793B (en) | 2004-06-28 | 2005-06-28 | System and method of cleaning and etching a substrate |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1782461A4 (en) |
JP (1) | JP2008504714A (en) |
KR (1) | KR20070026687A (en) |
CN (1) | CN101006571A (en) |
TW (1) | TWI271793B (en) |
WO (1) | WO2006012174A2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI426962B (en) * | 2009-03-09 | 2014-02-21 | Hitachi High Tech Corp | A cleaning device for a mask member and a cleaning method, and an organic electroluminescent display |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130068264A1 (en) * | 2011-09-21 | 2013-03-21 | Nanya Technology Corporation | Wafer scrubber apparatus |
KR101992422B1 (en) * | 2012-08-14 | 2019-06-24 | 주식회사 동진쎄미켐 | Apparatus and method for polishing metal layer using photolysis advanced oxidation process |
TWI667708B (en) * | 2013-11-11 | 2019-08-01 | 東京威力科創股份有限公司 | Method and hardware for enhanced removal of post etch polymer and hardmask removal |
TWI570806B (en) * | 2013-11-11 | 2017-02-11 | 東京威力科創股份有限公司 | System and method for enhanced removal of metal hardmask using ultra violet treatment |
US10867815B2 (en) | 2018-09-04 | 2020-12-15 | Tokyo Electron Limited | Photonically tuned etchant reactivity for wet etching |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5512123A (en) * | 1992-05-19 | 1996-04-30 | Maxwell Laboratories | Method for using pulsed optical energy to increase the bondability of a surface |
US5782986A (en) * | 1996-01-11 | 1998-07-21 | Fsi International | Process for metals removal using beta-diketone or beta-ketoimine ligand forming compounds |
US6631726B1 (en) * | 1999-08-05 | 2003-10-14 | Hitachi Electronics Engineering Co., Ltd. | Apparatus and method for processing a substrate |
JP2001118818A (en) * | 1999-08-12 | 2001-04-27 | Uct Kk | Ultraviolet ray-treating device and method |
JP3961240B2 (en) * | 2001-06-28 | 2007-08-22 | 株式会社半導体エネルギー研究所 | Method for manufacturing semiconductor device |
-
2005
- 2005-06-23 WO PCT/US2005/022172 patent/WO2006012174A2/en active Application Filing
- 2005-06-23 JP JP2007519288A patent/JP2008504714A/en not_active Withdrawn
- 2005-06-23 KR KR1020067027743A patent/KR20070026687A/en not_active Application Discontinuation
- 2005-06-23 CN CNA2005800285221A patent/CN101006571A/en active Pending
- 2005-06-23 EP EP05762857A patent/EP1782461A4/en not_active Withdrawn
- 2005-06-28 TW TW094121622A patent/TWI271793B/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI426962B (en) * | 2009-03-09 | 2014-02-21 | Hitachi High Tech Corp | A cleaning device for a mask member and a cleaning method, and an organic electroluminescent display |
Also Published As
Publication number | Publication date |
---|---|
KR20070026687A (en) | 2007-03-08 |
EP1782461A4 (en) | 2008-05-28 |
WO2006012174A3 (en) | 2006-09-14 |
WO2006012174A2 (en) | 2006-02-02 |
JP2008504714A (en) | 2008-02-14 |
EP1782461A2 (en) | 2007-05-09 |
TWI271793B (en) | 2007-01-21 |
CN101006571A (en) | 2007-07-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |