TW200604569A - Carbon nanotubes as probes of MENS devices and manufacturing method thereof - Google Patents
Carbon nanotubes as probes of MENS devices and manufacturing method thereofInfo
- Publication number
- TW200604569A TW200604569A TW093122141A TW93122141A TW200604569A TW 200604569 A TW200604569 A TW 200604569A TW 093122141 A TW093122141 A TW 093122141A TW 93122141 A TW93122141 A TW 93122141A TW 200604569 A TW200604569 A TW 200604569A
- Authority
- TW
- Taiwan
- Prior art keywords
- manufacturing
- carbon nanotubes
- probes
- shaped grooves
- catalysis
- Prior art date
Links
Abstract
Carbon nanotubes as probes of MEMS devices and manufacturing method thereof combines processes of the probe structure and the carbon nanotubes. The manufacturing method includes the steps of preparing a substrate with V-shaped grooves and depositing a etch stop layer to cover the V-shaped grooves. The catalysis is formed in the bottom of the V-shaped grooves. The substrate and the etch stop layer are etched until a tip of the catalysis in the bottom of the V-shaped grooves is exposed. Finally, provide active gas to synthesize the nanotubes within the tip of the catalysis.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW93122141A TWI241414B (en) | 2004-07-23 | 2004-07-23 | Carbon nanotubes as probes of MEMS devices and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW93122141A TWI241414B (en) | 2004-07-23 | 2004-07-23 | Carbon nanotubes as probes of MEMS devices and manufacturing method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI241414B TWI241414B (en) | 2005-10-11 |
TW200604569A true TW200604569A (en) | 2006-02-01 |
Family
ID=37013945
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW93122141A TWI241414B (en) | 2004-07-23 | 2004-07-23 | Carbon nanotubes as probes of MEMS devices and manufacturing method thereof |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI241414B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI502782B (en) * | 2010-05-21 | 2015-10-01 | Merck Patent Gmbh | Selectively etching of a carbon nano tubes (cnt) polymer matrix on a plastic substructure |
-
2004
- 2004-07-23 TW TW93122141A patent/TWI241414B/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI502782B (en) * | 2010-05-21 | 2015-10-01 | Merck Patent Gmbh | Selectively etching of a carbon nano tubes (cnt) polymer matrix on a plastic substructure |
Also Published As
Publication number | Publication date |
---|---|
TWI241414B (en) | 2005-10-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |