TW200604569A - Carbon nanotubes as probes of MENS devices and manufacturing method thereof - Google Patents

Carbon nanotubes as probes of MENS devices and manufacturing method thereof

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Publication number
TW200604569A
TW200604569A TW093122141A TW93122141A TW200604569A TW 200604569 A TW200604569 A TW 200604569A TW 093122141 A TW093122141 A TW 093122141A TW 93122141 A TW93122141 A TW 93122141A TW 200604569 A TW200604569 A TW 200604569A
Authority
TW
Taiwan
Prior art keywords
manufacturing
carbon nanotubes
probes
shaped grooves
catalysis
Prior art date
Application number
TW093122141A
Other languages
Chinese (zh)
Other versions
TWI241414B (en
Inventor
Hui-Chi Su
Ching-Hsiang Tsai
Yun-Wen Lee
Jih-Shun Chiang
Yu-Sheng Hsieh
Chien Liang Hwang
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW93122141A priority Critical patent/TWI241414B/en
Application granted granted Critical
Publication of TWI241414B publication Critical patent/TWI241414B/en
Publication of TW200604569A publication Critical patent/TW200604569A/en

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Abstract

Carbon nanotubes as probes of MEMS devices and manufacturing method thereof combines processes of the probe structure and the carbon nanotubes. The manufacturing method includes the steps of preparing a substrate with V-shaped grooves and depositing a etch stop layer to cover the V-shaped grooves. The catalysis is formed in the bottom of the V-shaped grooves. The substrate and the etch stop layer are etched until a tip of the catalysis in the bottom of the V-shaped grooves is exposed. Finally, provide active gas to synthesize the nanotubes within the tip of the catalysis.
TW93122141A 2004-07-23 2004-07-23 Carbon nanotubes as probes of MEMS devices and manufacturing method thereof TWI241414B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW93122141A TWI241414B (en) 2004-07-23 2004-07-23 Carbon nanotubes as probes of MEMS devices and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW93122141A TWI241414B (en) 2004-07-23 2004-07-23 Carbon nanotubes as probes of MEMS devices and manufacturing method thereof

Publications (2)

Publication Number Publication Date
TWI241414B TWI241414B (en) 2005-10-11
TW200604569A true TW200604569A (en) 2006-02-01

Family

ID=37013945

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93122141A TWI241414B (en) 2004-07-23 2004-07-23 Carbon nanotubes as probes of MEMS devices and manufacturing method thereof

Country Status (1)

Country Link
TW (1) TWI241414B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI502782B (en) * 2010-05-21 2015-10-01 Merck Patent Gmbh Selectively etching of a carbon nano tubes (cnt) polymer matrix on a plastic substructure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI502782B (en) * 2010-05-21 2015-10-01 Merck Patent Gmbh Selectively etching of a carbon nano tubes (cnt) polymer matrix on a plastic substructure

Also Published As

Publication number Publication date
TWI241414B (en) 2005-10-11

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees