200535399 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種用來同時觀察單一物體之多個表面 的光學裝置。 【先前技術】 在生產半導體裝置的期間，舉例而言：如無引線四方扁 平封裝（Quad Flat No-Lead，QFN)單元之構件。此期間需 要為了品質控制而去抽樣檢查該等構件並且加以研究，如此 則通常會牵涉到對該具有功能性之構成物的各個面上進行 視察的工作，以確定其呈現、非毀損，以及確定其在不需要 的地方沒有重疊等。該視察裝置係以觀察器的形式存在，而 其係為人類視察提供相關表面的放大影像。 對許多產品而言，舉例而言·· QFN單元。其受到抽樣檢 查的物體係具有複數個需要調查的表面，該QFN單元係通常 於單的半導體基板上具有大量的數量，而該等qfn單元 乃是自基板進行單獨嵌入式製程（s|ngulated)而來，以成 為可支單7L尺寸的平行六面體積塊（bi〇ck)，該等單元係於 主要則表面上、以及四個側表面的每一個上具有接觸點。 普通的視察褒置僅能一次擷取一個觀測圖（MW)，而 為了擷取其他的觀測圖’則該裝置必須被移動至另一個觀察 位置’或是該樣品必須要進行翻轉、或是觀察器必須移動。 因此’不同的面係以每—個面都需要觀察時間的情況而連續 200535399 地進行觀察。但就視察本身而言，這是時間上的浪費，而也 因此潛在地造成工作效率不彰。 在1 997年12月2日所核發，發明人為Char 1 es H. Anderson之美國專利第5, 694, 250號中，其係討論一種以一 水平方向將一個影像分光並且以鉛直分階定位方式 (vertical staged orientation)投影該分光之影像的光 學指導方式，但如此之光學指導卻僅能適用於從一、二維的 平面擷取影像。 【發明内容】 根據本發明之構想，其係提供一種用以對一物體之複數 個表面的影像進行多面觀察的裝置，其中該物體所具有之表 面係位於至少不同之第一以及第二平面中。 根據前述構想，該裝置係包括一第一光線指向裝置、一 第二光線指向裝置、一第三光線指向裝置、一第一光線接收 裝置乂及’“象平面。該第一光線指，向裝置係用於將光線指 向-物體之—或多個第一表面，而該一或多個第一表面係延 伸於-或多個第—平面中；該第二光線指向裝置係用於再次 指向反射自該物體之該一或多個第一平面的光線，以使光線 移動進入一第一太/*! ·外势一 4 » 方向，该苐二先線指向裝置係用於將光線指 向6亥物體於-第二平面中之—第二表面，而該第—以及該第 二平面係為不同；該第-光線接收裝置係用於接收在一第二 200535399 力I勺私動之反射自s亥物體之该第二表面的光線，以及用於接 收在該第一方向移動之反射自該物體之該一或多個第一表 面的光線；而該影像平面則係位於一第三平面之中，以用於 接收該第一以及第二表面之接收光線，並自其產生一影像。 根據本發明的第二構想，其係提供一種用以對一物體之 複數個表面的影像進行多面觀察的裝置，其中該物體所具有 之平面位於至；不同之第一以及第二平面中，而該裝置係包 括複數個反射器、—光束分光器、以及—影像產生裝置。該 馒數個反射器係用以將光線反射至一物體於複數個第一平 面中之複數個第一表面’以及用以將反射自該物體之該複數 個第一表面之光線進行反射，以使光線移動進入一第一方 向；該光束分光器係用以將在—第三方向移動之光線反射至 該複數個反射器與該物體在一第二平面中的一第二表面，其 中該第-及第二平面係為不同，以及用以傳輸在—第二方向 ί動之反射自δ亥物體之該第二表面，之光線與在該第一方向 移動之反射自該物體之該複數個第—表面的反射光線；該影 像產生裝置係用以從該光束分光器所傳輸之該第__以及第 表面之光線而產生—影像，該影像係被產生於一相同的第 二平面中。 根據本發明的第三構想，其係提供一種用以對一物體之 複數個表面的影像進行多面觀察的裝置，其中該物體所具有 200535399 之平面立於$ + • 、夕不同之第一以及第二平面之令，該方法包 ★於或？個第一表面之光線指向、光方向的改變，於一 …表面的光指向、以及光線接收並且有一影像之產生。該 -·-或多個第一本 表面係為一物體於一或多個第一平面中的第 一表面；該亦士人 ^ 向之改變係會將反射自該物體之該一或多個 弟-表面的光線改變方向而使得於一第一方向中移動；該第 二表面係為該物體於一第二平面中的一第二表面，該第一以 及第一表面係為不同纟；該％線接收係會接收於一第二方向 移動之反射自该物體之該第二表面之光線以及於一第一方 向移動之反射自該物體之該一或多個第一表面的光線,·該影 像之產生乃是從該第一以及第二表面之接收光線產生一影 像，而該影像係產生於一相同的第三平面中。 於前兩方面構想中的★女验罢总m ^ w ^ τ幻β裝置係可利用該第三方面構想 之方法而加以操作。 【實施方式】 / 在此於夕力㈣所附圖式中所顯示之相同參考符號係 用於表示相同的元件。 經由主要實施例的非限定性的總覽，正如下述：一多面 觀察器1G係會提供-物體之數個表面的觀測圖。光線係被 反射至一光束分光器50之上’以及一受到視察之物體32的 -第二、前表面56之上’而該分光器5〇則將將光線朝向複 200535399 數们反射1 34 ’然後’該等反射器34將該光線反射至該物 體32的第一、側表面54之上。該前表φ 56的影像係會直 接從該前表面56被反射回該光束分光器5〇,該等側表面Μ 的該4心像則係經由泫專反射器3 4而亦被反射回該光束分 光器50。各個影像係會通過該光束分光器5〇而到達一聚焦 透鏡14，而該聚焦透鏡丨4則會將合成影像聚焦至一影像擷 取裝置16之上，該多面觀察器1〇係於不需要旋轉或翻轉一 物體的情形下，擷取該物體之多個觀測圖的影像。 第一圖係為根據本發明之一實施例的一多面觀察器1 〇 的一剖面示意圖。該多面觀察器1 〇係包括一觀測圖產生器 殼體1 2 ’ 一聚焦透鏡丨4，以及一影像擷取裝置，在此係以 一 CCD照相機做為例子。 該觀測圖產生器殼體1 2係分別於彼此面對面平行的第 一以及第二側面26、28中具有第一以及第二孔洞22、24， 雖然就其本身而言並沒有如此的線存在於該觀察器之中，但 是延伸通過該第一以及該第二孔洞22、24中心之一中心線 1 8係加以顯示。該第一孔洞22係提供到達在該觀測圖產生 器殼體1 2内的一觀察位置30的入口，以接收一用作研究的 物體32，該第二孔洞24係與一第二光線接收裝置相對，在 此實施例中係為被配置於該殼體1 2外的一短距離上之一聚 焦透鏡14。該第二孔洞24以及該聚焦透鏡1 4係一般而言彼 200535399 此平行配置，並且該聚焦透鏡14係以該第二孔洞24 (以及 該中心線1 8 )為中心。 四個第一以及第二光線反射裝置係被定位為以該觀察 位置30 (以及該中心、線} 8 )為中間而圍繞其周圍，而在此 例子中’ $等第-以及第：光線反射裝置係為反射器，在此 例子中係為直角稜鏡的形式。該等反射器的目的係在於將光 線再指向該物體32在第一平面中的該等第一、侧表面54, 以及將反射自該物體32之該等側表面的光線再指向進入一 第-方向。通過該等直角稜鏡34的中心軸係被設置於（延 伸垂直於第-圖所在平面之）相同平面之中，並且，每一個 中心軸係與其最接近的兩個中心軸成直角。每一個稜鏡係相 關於I 3及等中心軸之平面而被傾斜一角度以，而該等棱鏡 係為了使該等稜鏡的面36面對該物體以而加以傾斜且最 接近該第一孔洞2 2 66 4嘉緣1 , 緣θ比離該第一孔洞2 2更遠之該等 邊緣更靠近該中心綠！ βι , 、、' 8 ，、中該角度ct係為1. 5。。而該傾斜 的原因，則是為了改盖 文ϋ忒物體U之一特定邊緣的清晰度 (deflnit1Qn)’因其相反的可能會不清楚。對在第一圖中 ^置而° ’ Μ稜鏡係加以傾斜，以將光線稍微地反射進 入錢察裔’而該觀察器則會朝向該物體Μ在一第二平面 中之该第二、面向内矣 ^ 衣面56 ’而此係則使得結合該物體32 之纟玄韵表面與該辈相彳本 、 5 6之該等邊緣有較佳的清晰度， 10 200535399 在其若係為需要更多細節之後面邊緣年 深日守忒寺稜鏡則會傾倒 至 進入其他方向。不同的稜鏡係可以傾料 n u刮不冋的角度或是甚 不同的方向。 在此實施例中，相對之該等直角稜鏡34之面向外的面 36係實質上平行於彼此（雖然偏離2α)，而相對之該等直角 棱鏡34的反射表φ38則幾乎是彼此成直角（雖然偏離2α)。 該等相對之直角稜鏡34之兩對相對的面36係—般而言會垂 直於該聚焦透鏡u所在之平面（雖然每—個係偏離α)，並 且會以該聚焦透鏡14 (以及該第二孔洞24)為中心。而該 等稜鏡34之第三、面向内表面37則—般而言係以所具有之 變化自-共同平面起最多α而延伸平行於彼此，並且係對相 對之稜鏡34而言，相關於彼此而偏離2以。 在此帛一連續LEDs 42形式的例子中，—光源係沿著 該殼體12之-内壁而進行延伸，而—第—附加光源，在此 J子中係為第組附加LEI)s 44 y形式，係被設置於該殼 體1 2的外面’並以至少該物體32之寬度而相間隔的方式， 在此實施例中，大約為該孔洞22之寬度，而圍繞於該第一 孔洞22的外側，該第一組附加LEDs 44的LEDs係以該中心 、良18為中〜’並加以延伸。一第二附加光源，在此例子中 係為第一組附加LEDs 46的形式，係被設置於該殼體12 之中A等直角稜鏡34面向内處。該第二組附加LEDs 46 200535399 的LEDs係猎由與延仲為卷一射士 甲在母對相對之直角稜鏡34之最遠距 離之點間的距離相接折夕阳雜& 々按近之距離而被間隔分開，該第二組附加 LEDs 46之LEDs係以該中心線」8為中心，該第二組附加胸 46之LEDs係亦相關於該中心線18而傾斜一角度β，而在此 實施例中係為大約3 〇。。J;卜罟& η λλ 士 ^ ^ 此配置的目的在於改善該物體32之 該面向内表面56的對比度。 一散光器48係延伸於該第一連續LEDs 42的前方，位 於該第一連續LEDs 42以及該中間殼體12之間。一第三光 線指向裝置’以-光束分光器5G做為例子，係以該中心線 18為中心而被設置於該殼體12的中間，並且，係與該第一 連、、賣LEDs 42以及5亥散光益48同高度。該光束分光器5〇係 以與該中心線18以及該散光器48夾45〇角的方式而加以配 置。而該光束分光器50則是加以配置，以改變或反射來自 该散光器於一第三方向的光束，使其進入朝向該等直角稜鏡 34以及該觀察位置30的一第四方g，而該光束分光器亦會 沒有偏斜地傳遞或傳輸來自該直角稜鏡34以及該觀察位置 30之已反射光束。在直角於該中心線μ的方向中，該光束 分光器50係會延伸較該等相對之直角棱鏡34間之間隔為寬 的一距離，再者，在此實施例中，此距離係亦較兩相對之直 角稜鏡34之最遠距離點間的距離為寬。而在平行於該中心 線1 8的方向中，該光束分光器5〇係會延伸微長於該第一連 12 200535399 矣貝LEDs 42之長度的一距雜，、， 離，亚在此貫知例中，此距離係亦 微長於该散光器48的异降 ^v. ^ . v ^ 長度。该先束分光器50，舉例而言，200535399 IX. Description of the invention: [Technical field to which the invention belongs] The present invention relates to an optical device for simultaneously observing multiple surfaces of a single object. [Prior Art] During the production of semiconductor devices, for example: components such as a Quad Flat No-Lead (QFN) unit. During this period, the components need to be inspected and inspected for quality control. This usually involves inspecting all aspects of the functional structure to determine its appearance, non-destruction, and determination. It does not overlap etc. where it is not needed. The inspection device is in the form of a viewer, and it provides a magnified image of the relevant surface for human inspection. For many products, for example ... QFN units. The sample system under inspection has a plurality of surfaces to be investigated. The QFN unit usually has a large number on a single semiconductor substrate, and the qfn units are individually embedded from the substrate (s | ngulated). In order to become a single 6L-sized parallel six-sided volume block, these units have contact points on the main surface and each of the four side surfaces. A normal inspection setup can only capture one observation image (MW) at a time, and in order to acquire other observation images 'the device must be moved to another observation position' or the sample must be flipped or observed The device must be moved. Therefore, the different faces are observed continuously in the condition that each face requires observation time. But as far as the inspection itself is concerned, this is a waste of time and therefore potentially inefficient work. Issued on December 2, 1997, U.S. Patent No. 5,694,250 by Char 1 es H. Anderson, the inventor, discusses a method of splitting an image in a horizontal direction and positioning in vertical steps. (vertical staged orientation) An optical guidance method for projecting the spectroscopic image, but such optical guidance is only applicable to capturing images from a one- or two-dimensional plane. [Summary of the Invention] According to the concept of the present invention, it provides a device for multi-face observation of images of multiple surfaces of an object, wherein the surface of the object is located in at least different first and second planes. . According to the aforementioned concept, the device includes a first light directing device, a second light directing device, a third light directing device, a first light receiving device, and an image plane. The first light directing device Is used to direct light to one or more first surfaces of the object, and the one or more first surfaces are extended in one or more first planes; the second light pointing device is used to point again to reflection The light from the one or more first planes of the object, so that the light moves into a first too / *! · External potential 4 »direction, the second line-pointing device is used to point the light to 6 Hai The object is on the second surface of the second plane, and the first and second planes are different; the first light receiving device is used to receive a second 200535399 force I spoon private reflection from s The light on the second surface of the object and for receiving light reflected from the one or more first surfaces of the object moving in the first direction; and the image plane is located in a third plane To receive the first and second The surface receives light and generates an image from it. According to a second concept of the present invention, it provides a device for performing multi-face observation on images of a plurality of surfaces of an object, wherein the plane of the object is located to In different first and second planes, and the device includes a plurality of reflectors, a beam splitter, and an image generating device. The plurality of reflectors are used to reflect light to an object in a plurality of The plurality of first surfaces in the first plane 'and used to reflect the light reflected from the plurality of first surfaces of the object so that the light moves into a first direction; the beam splitter is used for -The light moving in the third direction is reflected to a second surface of the plurality of reflectors and the object in a second plane, wherein the first and second planes are different and are used to transmit in the second direction The moving light is reflected from the second surface of the delta object, and the light moving in the first direction is reflected from the plurality of first surfaces of the object; the image generating device It is used to generate an image from the __ and the surface rays transmitted by the beam splitter, and the image is generated in a same second plane. According to a third concept of the present invention, it provides A device for performing multi-face observation on images of a plurality of surfaces of an object, wherein the object has a plane of 200535399 which stands at $ + •, different first and second planes, and the method includes ★ or The direction of light on a first surface, the change of light direction, the direction of light on a surface, and the reception of light and the generation of an image. The-or more first surface is an object on one or more The first surface in each of the first planes; the change in the direction of the Yishi ^ will change the direction of the light reflected from the one or more brother-surfaces of the object to move in a first direction; the first The two surfaces are a second surface of the object in a second plane, and the first and first surfaces are different. The% line receiving system will receive the reflection of the object moving in a second direction. Light of the second surface And light reflected from the one or more first surfaces of the object moving in a first direction, the image is generated by receiving an image from the light received from the first and second surfaces, and the image is Produced in an identical third plane. The female inspection striker m ^ w ^ τ magic β device in the first two aspects of the conception can be operated using the method of the third aspect of the conception. [Embodiment] / Here, the same reference symbols shown in the drawings of Yu Xili are used to indicate the same elements. By way of a non-limiting overview of the main embodiments, it is as follows: A multi-faceted viewer 1G will provide observation pictures of several surfaces of an object. The light is reflected onto a beam splitter 50 'and a second-to-front, front surface 56 of the inspected object 32', and the beam splitter 50 will reflect the light towards the complex 200535399. 1 34 ' The reflectors 34 then reflect the light onto the first and side surfaces 54 of the object 32. The image of the front table φ 56 is directly reflected from the front surface 56 back to the beam splitter 50, and the 4-heart images of the side surfaces M are also reflected back to the beam through the ytterbium reflector 34. Optical splitter 50. Each image system will reach a focusing lens 14 through the beam splitter 50, and the focusing lens 4 will focus the composite image onto an image capturing device 16, and the multi-facet viewer 10 is not needed In the case of rotating or flipping an object, capturing images of multiple observation images of the object. The first figure is a schematic cross-sectional view of a multi-facet viewer 10 according to an embodiment of the present invention. The multi-facet viewer 10 includes an observation image generator housing 12 ', a focusing lens 4 and an image capturing device. Here, a CCD camera is taken as an example. The observation map generator housing 12 has first and second holes 22, 24 in the first and second side surfaces 26, 28 which are parallel to each other, although there is no such line in itself. In the viewer, it is displayed through a series of centerlines 18 extending through one of the centers of the first and second holes 22, 24. The first hole 22 provides an entrance to an observation position 30 in the observation image generator housing 12 to receive an object 32 for study. The second hole 24 is connected to a second light receiving device. In contrast, in this embodiment, it is a focusing lens 14 disposed at a short distance outside the casing 12. The second hole 24 and the focusing lens 14 are generally arranged in parallel with each other, and the focusing lens 14 is centered on the second hole 24 (and the center line 1 8). The four first and second light reflecting devices are positioned around the observation position 30 (and the center, line} 8) as the center, and in this example, the '$ equality-and-th: light reflections The device is a reflector, in this case in the form of a right angle chirp. The purpose of the reflectors is to redirect the light to the first and side surfaces 54 of the object 32 in the first plane, and to redirect the light reflected from the side surfaces of the object 32 into a first- direction. The central axis systems passing through these right angles 稜鏡 34 are set in the same plane (extending perpendicular to the plane where the first figure is located), and each central axis system is at right angles to the two central axes closest to it. Each unit is tilted at an angle relative to the plane of I 3 and the isocentric axis, and the prisms are inclined so that the plane 36 of the unit faces the object and is closest to the first Hole 2 2 66 4 Jiayuan 1, edge θ is closer to the center green than the edges that are farther from the first hole 2 2! 5。 βι ,,, '8 ,, the angle ct is 1.5. . The reason for this tilt is to change the definition (deflnit1Qn) 'of a specific edge of the object U, because it may be unclear. The angle “M ′” in the first image is tilted to reflect light slightly into the Qiancha family, and the viewer will face the object M in a second plane in the second, Face inward ^ 衣 面 56 ', and this series makes the combination of the object's 32 xuanyun surface and the generation's copy, 5 6 and other edges have better sharpness. 10 200535399 After more details, it will fall to the other side at the edge of the temple. Different systems can be tilted at different angles or different directions. In this embodiment, the outward facing surfaces 36 of the right-angled 稜鏡 34 are substantially parallel to each other (although deviated by 2α), while the reflection tables φ38 of the right-angled prism 34 are almost at right angles to each other. (Though deviating by 2α). The two pairs of opposing faces 36 at right angles 稜鏡 34 are generally perpendicular to the plane on which the focusing lens u is located (although each system is deviated from α), and the focusing lens 14 (and the The second hole 24) is the center. The third and inner-facing surfaces 37 of these 稜鏡 34 are generally parallel to each other and extend parallel to each other with a maximum of α from the common plane, and are related to the relative 相对 34. Depart from each other by 2 to. In this example of a continuous LEDs 42 form, the light source extends along the inner wall of the housing 12, and the first additional light source is the second set of additional LEIs in this J) s 44 y The form is arranged on the outside of the casing 12 and is spaced apart by at least the width of the object 32. In this embodiment, it is about the width of the hole 22 and surrounds the first hole 22 On the outside, the LEDs of the first set of additional LEDs 44 are centered on the center and the good 18 is extended to the center. A second additional light source, in this example, is in the form of the first group of additional LEDs 46, and is arranged in the housing 12 at a right angle 稜鏡 34 such as A facing inward. The second group of additional LEDs 46 200535399 are connected by the distance between Yanzhong and Vol. 1 Archer Armor at the farthest point of the right angle 稜鏡 34 opposite to the female pair. The LEDs of the second group of additional LEDs 46 are centered on the center line "8, and the LEDs of the second group of additional chests 46 are also inclined at an angle β relative to the center line 18, and In this example, it is about 30. . J; 罟 罟 & η λλ ^ ^ The purpose of this configuration is to improve the contrast of the object 32 facing the inner surface 56. A diffuser 48 extends in front of the first continuous LEDs 42 between the first continuous LEDs 42 and the middle casing 12. A third light-directing device 'takes-a beam splitter 5G as an example, is placed in the middle of the housing 12 with the center line 18 as the center, and is connected to the first, selling LEDs 42 and 5 海 散光 益 48 Same height. The beam splitter 50 is arranged at an angle of 45 ° to the centerline 18 and the diffuser 48. The beam splitter 50 is configured to change or reflect the light beam from the diffuser in a third direction so that it enters a fourth square g toward the right angle 稜鏡 34 and the observation position 30, and The beam splitter also transmits or transmits the reflected light beam from the right angle 稜鏡 34 and the observation position 30 without skew. In a direction at right angles to the center line μ, the beam splitter 50 will extend a distance wider than the interval between the opposite right-angle prisms 34. Furthermore, in this embodiment, this distance is also relatively large. The distance between the opposite points of the rightmost angle 稜鏡 34 is wide. In the direction parallel to the center line 18, the beam splitter 50 will extend a distance slightly longer than the length of the first company 12 200535399 矣 贝 LEDs 42, here and there. In the example, this distance is also slightly longer than the length of the different drop ^ v. ^. V ^ of the diffuser 48. The first beam splitter 50, for example,
係可以為一鏡子形+ t I 式的光束分光器（mirror—type beara spli tter ) ° 該影像表面係以該⑽照相機16做為例子，並被配置 於該聚线鏡14相對於該殼體12的另—側上，而且，其係 經由在一第三平面中的該聚焦透鏡14而接收影像。該⑽ 照相機16係亦以該中心線18為中心並加以延伸。 。亥又視察之物體32係藉由可自動機械控制的一喷嘴 而被***並維持在該觀察位置’該物體32係以該中心線18 為中心、並位於該等直角稜鏡3"間而加以維持。當該物 體32為一平行六面體時，其係具有面對該四個直角棱鏡以 的四個側面54,每一個稜鏡34對一個側面。該等側面5“ 維持為與其分別之直角稜鏡34之該等面向表面36平行，該 物體32之透過該第一孔洞22而“進入該殼體12的面向〆 内表面56係可以是一主要表面，舉例而言，該物體犯之前 表® H次要表面。該面向内表^ 56係_般而言維持 與該中心線18垂直’而最終、面向外表面58係為支持臂所 連接依附者。 上述之配置係意欲於使得對位於或設置在該觀察位置 3〇的一物體32之四個側面54以及該面向内表面56的觀察 13 200535399 成為可能，正如下述： 该嘴嘴5 2係經由該第一孔洞2 2而維持該物體3 2並將 该物體32***該觀察位置30，該第一連續LEDs 42以及該 第與第一組附加LEDs 44、46係被開啟，以提供照明，該 CCD照相機16亦被開啟（步驟Si〇2 )，來自該第一連續LEDs 42的光線通過該散光器48 (步驟si04)，該散光器48係被 用於將該光線均勻地分散’而來自該第一連續42的光 線（經由該散光器48 )，係會擊中該光束分光器5〇的該第二、 前表面，並被反射向前朝向該直角稜鏡34以及該物體32(步 驟S106)，發散自最接近該殼體12之該第一側面26 (以及 最接近該物體32與該直角稜鏡34)的該第一連續LEDs 42 之LEDs的光線係會於到達該光束分光器1 8之前，先橫跨通 過該中心線18，此光線係藉由靠近該光束分光器5 〇、右手 邊末端、離該第一連續LEDs 42最遠、以及離該殼體12之 該第一側面26 (以及該物體32與該;直角稜鏡34)最近之末 端的一區域而被反射9 0。，而發散自離該殼體12之該第二側 面28最近（並且，離該物體32以及該直角稜鏡34最遠） 的該第一連續LEDs 42之LEDs的光線係於到達該光束分光 器50之前，不會移動與該中心線18 —樣遠的距離。此光線 係藉由靠近該光束分光器50、左手邊末端、離該第一連續 LEDs 42以及離該殼體12之該第二側面28最近（以及離該 14 200535399 物體32與該直角稜 90。〇 鏡3 4最遠）之末端的 一區域而被反射 *該第-以及第二組LEDs44、46係提供額外的光線而 &些光線中的—些係會出現在最後所產生的影像之中。 對顯不於第—圖中之該兩個稜鏡34而言沿著該棱鏡 車方向進入的光線係來自羊黃跨該光束分光$ 5〇並位於固 疋鬲度的線。對其他兩個稜鏡％而言，其中之一係於第一 圖中顯示其前觀測圖’沿著該稜鏡之軸方向進人的光線係來 自Μ著忒光束分光器50向上升的線（在第一圖中係為自左 至又傾斜向上）。 該光束为光器5 0所反射之光線係會移動朝向該觀察器 /V又體1 2之第一端，該光束分光器5〇之末端所反射之光係會 前進進入該兩對相對之直角稜鏡34，在此，該光線係藉由該 等棱鏡34之該反射表面38而被反射（9〇 — 2〇〇。，並且係被 指向於面對該兩對相對之直角稜鏡之該物體的該四個第 •一、側面54之上（步驟si08)，而由該光束分光束50之中 間所反射之光線則會直接被指向該物體3 2之該面向内表面 56之上（步驟sil〇)。 到達該物體32之該側面54的光線，其係會直接被反射 回在該物體32反射該光線的該等相對之直角稜鏡34，並且 係藉由該反射表面38而被以角度（90- 2α)。反射回該光束分 15 200535399 光器50 (步驟SI 1 2 )。同樣地，到達該物體32之該面向内 表面56的光線，其係被反射進入一第二方向（其係與該第 一方向相同）而回到該光束分光器5 0，雖然此係為直接反射 (步驟S114)。來自該物體32之反射光線（影像），不論是 經由該直角棱鏡34而來自該物體32之該等側面54,或是直 接來自該物體32之該等側面54，係會沒有任何偏向地通過 該光束分光器50 (步驟S116)。 而已經通過該光束分光器50的影像光線係會進入該聚 焦透鏡14，然後，該聚焦透鏡i 4係會將影像聚焦於該cCD 知、相機1 6之上（步驟si 18 )，而該CCD照相機16會擷取該 影像光線，並產生一影像訊號，以使得該被大的影像可以被 顯不出來，以利於觀察以及視察（步驟S12〇 )，如第四圖所 示 〇 弟二圖係為由該多面觀察器1 〇進行表 單元3〇 # 一透視圖。該㈣單元30(;位於原觀察位置3〇處 係具有四個側表面54,—面向内表面56，以及一背面" 顯示）。該面向内表面56係具有於兩個相對的邊緣向下的招 觸部分152，該等接觸部分係延伸而覆蓋至緊鄰那些相則 緣的該等側表面54,以作為侧㈣㈣154。 表面W有末雜觸部分156，且其係沒有延伸至任㈣ 他的平面之上。 、 200535399 第四圖係顯示該影像擷取裝置，ccl)照相機16，所擷取 之一結果影像200。該結果影像200係為一合成影像，其包 括該物體32之該面向内表面56的一中心影像部分2〇2，且 其係被該物體32之該四個側面54的四個側影像部分2〇2所 包圍。在第四圖的該影像中，該物體32係為—qfn，於該面 向内表面56上的該等前接觸部分152係延伸以作為在該物 體32之該等側面54之其中兩個上的側接觸部分} 54，並因 此而會顯示於該中心影像部分2G2之中，且於該四個側影像 部分的其中兩個之中，至於其他兩個側影像部分2〇4則包含 5亥專末端接觸部分1 5 6的影像。 要瞭解的是’在該等側影像部分204之中的該等側影像 係會相關於該物艚 夕I “㈤^ a —…It can be a mirror-type + t I beam splitter (mirror-type beara splitter) ° The image surface is based on the camera 16 as an example, and is arranged on the condenser 14 with respect to the housing 12 is on the other side, and it receives images via the focusing lens 14 in a third plane. The camera 16 is also centered on the centerline 18 and extended. . The object 32 inspected was inserted and maintained at the observation position by a nozzle that can be controlled by an automatic machine. The object 32 is centered on the center line 18 and is located between the right angles 3 " maintain. When the object 32 is a parallelepiped, it has four sides 54 facing each of the four right-angle prisms, each 稜鏡 34 facing a side. The side surfaces 5 "remain parallel to the respective facing surfaces 36 of their respective right angles 稜鏡 34, and the object 32 which penetrates through the first hole 22 and enters the 〆facing surface 56 of the housing 12 may be a major The surface, for example, the object commits the minor surface of the previous table ® H. The inward facing surface ^ 56 is generally maintained perpendicular to the centerline 18 ', and finally, the outward facing surface 58 is the attachment to which the support arm is attached. The above arrangement is intended to make it possible to observe the four sides 54 of an object 32 and the inner-facing surface 56 at or at the viewing position 30 2005 2005399, as follows: The mouth 5 2 is via The first hole 22 maintains the object 32 and inserts the object 32 into the observation position 30. The first continuous LEDs 42 and the first and first sets of additional LEDs 44 and 46 are turned on to provide lighting. The The CCD camera 16 is also turned on (step SiO2), and the light from the first continuous LEDs 42 passes through the diffuser 48 (step si04), which is used to evenly disperse the light 'from the The first continuous 42 rays (via the diffuser 48) will hit the second and front surface of the beam splitter 50 and be reflected forward toward the right angle 稜鏡 34 and the object 32 (step S106). ), The light emitted from the LEDs of the first continuous LEDs 42 closest to the first side 26 of the housing 12 (and closest to the object 32 and the right angle 稜鏡 34) will reach the beam splitter 1 Before 8, cross the centerline 18 first, this light system Close to the beam splitter 50, the right-hand end, the farthest from the first continuous LEDs 42, and the closest to the first side 26 of the housing 12 (and the object 32 and the; right angle 壳体 34) A region at the end is reflected by 90. , And the light emitted from the LEDs of the first continuous LEDs 42 closest to the second side 28 of the housing 12 (and farthest from the object 32 and the right angle 稜鏡 34) reaches the beam splitter Before 50, it will not move as far as 18 from the centerline. This light is near the beam splitter 50, the left-hand end, the closest continuous LEDs 42 and the second side 28 of the housing 12 (and the 14 200535399 object 32 and the right-angled edge 90). 〇 mirror 34 is the farthest) of the end of the image. * The first and second sets of LEDs44, 46 provide additional light and some of these lights will appear in the final image. in. For the two 稜鏡 34 shown in the first picture, the light entering along the direction of the prism vehicle is the line where the light beam splits $ 50 across the beam and is located at the solid line. For the other two 稜鏡%, one of them is shown in the first diagram, showing the previous observation image. 'The light entering along the axis of the 系 is from the line of the M beam splitter 50 rising upward. (In the first picture, it is tilted upward from left to right). The light beam reflected by the light beam 50 will move toward the first end of the viewer / V body 12, and the light beam reflected by the end of the beam splitter 50 will advance into the two opposite pairs. A right angle 稜鏡 34, where the light is reflected by the reflecting surfaces 38 of the prisms 34 (90-200 °), and is directed toward the two right angles facing each other. The four first and side surfaces 54 of the object (step si08), and the light reflected by the middle of the beam splitting beam 50 will be directed directly onto the inner surface 56 of the object 32 ( Step sil0). The light reaching the side surface 54 of the object 32 is directly reflected back to the opposite right angles 稜鏡 34 which reflect the light at the object 32, and is reflected by the reflecting surface 38. At an angle (90-2α). The light beam is reflected back into 15 200535399 optical device 50 (step SI 1 2). Similarly, the light reaching the inner-facing surface 56 of the object 32 is reflected into a second direction (Which is the same as the first direction) and returns to the beam splitter 50, although this system Is direct reflection (step S114). The reflected light (image) from the object 32, whether it is from the sides 54 of the object 32 through the right-angle prism 34, or directly from the sides 54 of the object 32, The system passes through the beam splitter 50 without any deflection (step S116). The image light system that has passed through the beam splitter 50 enters the focusing lens 14, and then the focusing lens i 4 system focuses the image on the cCD knows that the camera 16 is above (step si 18), and the CCD camera 16 will capture the image light and generate an image signal so that the enlarged image can not be displayed, which is convenient for observation and inspection (Step S12) As shown in the fourth figure, the second figure is a perspective view of the table unit 30 # performed by the multi-faced observer 10. The unit 30 (; located at the original observation position 30 has a Four side surfaces 54, facing the inner surface 56, and a back surface (" shown). The inward facing surface 56 has touch portions 152 facing down from two opposite edges, the contact portions extending to cover Close to those phases The side surfaces 54 are used as the side surfaces 154. The surface W has a terminal noise portion 156, and the system does not extend above any other plane. 200535399 The fourth image shows the image capture device (ccl) camera 16. One of the captured result images 200. The resulting image 200 is a composite image that includes a central image portion 202 of the object 32 that faces the inward surface 56, and is a four-side image portion 2 of the four side surfaces 54 of the object 32. 〇2 Surrounded. In the image in the fourth figure, the object 32 is -qfn, and the front contact portions 152 on the inward-facing surface 56 are extended as two on the two sides 54 of the object 32. Side contact part} 54, and will therefore be displayed in the central image part 2G2, and in two of the four side image parts, as for the other two side image parts 204, including Image of the end contact portion 1 5 6. It is to be understood that ′ the side images in the side image portion 204 will be related to the object 夕夕 I “㈤ ^ a —…
等側面54的該等影像。 w寸且月棱鏡34的目的係在於作為反射器 體32之該等側面54的影像導向或 該等直角稜鏡34 α砀夂射器，以將該物 變方向至該影像擷取裝 200535399 置’而其他可提供相同或相似的功能的光學光束引導，舉例 而言，一普通的鏡子，係亦可被用作為一替代的反射器。 上述的實施例係意欲於投影一物體32之四個側表面54 以及一面向前表面56的影像，因此，其係使用四個反射器， …i而若耑要其他觀測圖時，本發明亦可以使用其他數量、 相對角度及/或配置的反射器，舉例而言，為了視察僅具有 三個側表面的物體，則可能會有三個反射器，而若該物體係 為等邊三角形時，則該三個反射器係可以相關於彼此而有 的角度。而對五個側表面而言，則可能會有五個反射器， 舉例而言，配置以相關於彼此的1 〇8。角度。 再者，本發明係可以被用於視察一物體的外部表面（或 多個外部表面）。如此之配置的實施例係可以使用相關於該 光束分光器50之而朝向該物體外的另外兩個反射器（或可 月b的活’另外兩組）’而該等附加反應器的其中之一係會將 該光束反射朝向該中心線（相同的，，在第-圖之實施例中的 一反射器亦會如此），至於笼—伽 於第一個附加反射器則會將該光束 反射至該物體之該後面、外邱矣 又w 4表面之上，而回來的路徑將會 一樣。而如此的配置係靈I_网 i 1示而要間隔，以使得該光束穿出該殼 體之外，舉例而言，在_ 仕側表面之該等反射器的其中之一與 該物體間的一較大的間隔。 在前述實施例中的該影像擷 取裝置係以一 CCD照相機做 18 200535399 為例子。而其他擷取影像的裝置係亦可以加以使用，不論是 CCD衣置、CMOS照相機、或其他的，不論它們是以電子或其 他方式操取影像、以及是黑白或彩色。該觀察器1 〇甚至可 以疋一投影器’以使一物體的各個面的合成影像可被投影至 一螢幕上。 在上述第一圖的實施例中，第一連續LEDs 42的光線係 被心向違光束分光器5〇的前方，以及反射影像係會直接通 過4光束分光器50，而在另一替代實施例中，該光線係產生 自孩光束分光器50的後面，並直接通過該光束分光器5〇而 朝向該等反射器以及物體，接著，返回的影像係藉由該光束 分光器50而被反射至側邊。實際上，此係將會有關於該聚 焦透鏡U以及該影像#貞取裝置16而以該散光器18翻轉該 第一連續LEDs 42的位置。 在前述的實施例中，係具有一 主要光源42以及附加光 源44、46，但該附加光源 例如第一’與第二組的附加LEDs44 與 LEDs46 ， 係可以於上述（以及其他實 施例）中被省略。而 在上述貫施例中更進一 源亦可以加以使用， (incandescent)光源 步的光源係為LEDs，然而，其他光 舉例而言，螢光、雷射或白熱 ，至於光線之顏色或多種顏色則是取 決所尋找的是什麼。白光的平衡會有困難 色而言很好，但並非對特別的特徵报好。 ’因其對分辨顏 該主要以及附加 19 200535399 光源42、46亦可'丨ν π η a J以彼此疋不同的顏色，以 果，舉例而言，該主要井 同的效 要先源42《以是藍色，而該第 光源46可以是綠色，丨 一附加 、八糸路出該物體32 上的特徵。另一個例子則是，兮主I止、 门引表面 該第1力* 、"、、原42為紅色（以及 口茨弟附加光源44 )，並且哕坌 且垓弟一附加光源46為藍色， 該第二光源46所凸顯的特徵（舉例而言，在該面向 56上的傾斜邊緣)將會於最後的影像中顯現的更為明 此，該影像操取裳置係會對該第二光源46的光線：為敏 感’正如—⑽照相機係具有藍光—樣。而當具有兩個或多 個先線波長時，該影像擁取裝置係—般而言為顏色敏感 ί·生。再者，貧施例係不限定為可視光 士 非『視先，舉例而 5兔外線’亦可以被加以使用而作為替代，而其係可以 暴露出在該影像中的裂縫或其他缺陷，而若是由人加以視 察時，則這些缺陷係可以接著對可視光進行加工。 /習此技藝之人可以瞭解的是；’即使在前述的救逑中 已經提出本發明之較佳實施例的眾多變化，Wait for the images of side 54. The purpose of the w-inch and moon prism 34 is to serve as the image guide of the side surfaces 54 of the reflector body 32 or the right-angled 砀 夂 34 α emitters to change the direction of the object to the image acquisition device 200535399. 'While other optical beam guidance can provide the same or similar functions, for example, a common mirror can also be used as an alternative reflector. The above embodiment is intended to project images of the four side surfaces 54 and one front surface 56 of an object 32. Therefore, it uses four reflectors,... I, and if other observations are required, the present invention also Other numbers, relative angles, and / or configurations of reflectors may be used. For example, to inspect an object with only three side surfaces, there may be three reflectors, and if the object system is an equilateral triangle, then The three reflector systems can be related to each other. For five side surfaces, there may be five reflectors, for example, configured to be 108 relative to each other. angle. Furthermore, the present invention can be used to inspect the external surface (or multiple external surfaces) of an object. An embodiment so configured may use two other reflectors (or two 'other two') of the additional beams which are directed towards the outside of the object in relation to the beam splitter 50 and one of the additional reactors One will reflect the beam toward the centerline (the same, as in the embodiment in Figure-the same will be true for a reflector), as for the cage-gamma first reflector, it will reflect the beam The path to the back of the object, the outer surface of Qiu Qiu, and the top of w 4 will be the same. Such a configuration is shown in Fig. 1 and should be spaced so that the light beam passes out of the housing, for example, one of the reflectors on the side surface and the object A larger interval. The image capturing device in the foregoing embodiment is based on a CCD camera 18 200535399 as an example. Other devices that capture images can also be used, whether they are CCD clothing, CMOS cameras, or other, whether they are used to capture images electronically or in other ways, and are black and white or color. The viewer 10 can even use a projector 'so that the composite image of each side of an object can be projected onto a screen. In the embodiment of the first figure above, the light beams of the first continuous LEDs 42 are directed in front of the beam splitter 50, and the reflected image beams pass directly through the 4-beam beam splitter 50. In another alternative embodiment, The light beam is generated from the rear of the beam splitter 50 and directly passes through the beam splitter 50 toward the reflectors and objects. Then, the returned image is reflected by the beam splitter 50 to Side. In fact, this system will have the position of the first continuous LEDs 42 with the astigmatizer 18 as the focal lens U and the image capturing device 16. In the foregoing embodiment, the system has a main light source 42 and additional light sources 44 and 46, but the additional light sources such as the first and second sets of additional LEDs 44 and LEDs 46 can be used in the above (and other embodiments). Omitted. In the above embodiments, a further source can also be used. The light source of the incandescent light source step is LEDs. However, for other lights, for example, fluorescent light, laser light, or white heat, as for the color of the light or multiple colors, It depends on what you are looking for. White light balance can be difficult. Colors are good, but not good for special characteristics. 'Because it is important to distinguish Yan and to add 19 200535399 light sources 42, 46' 丨 ν π η a J in different colors from each other, as a result, for example, the main source of the same effect is 42 " It is blue, and the first light source 46 may be green, and an additional feature is provided on the object 32. Another example is that the main force I, the first force on the door surface *, ", the original 42 is red (and the mouth lighter additional light source 44), and the lighter one additional light source 46 is blue The characteristic highlighted by the second light source 46 (for example, the inclined edge on the face 56) will become more apparent in the final image. The image manipulation system will The light from the two light sources 46 is sensitive, just as the camera has blue light. When there are two or more forward wavelengths, the image capture device is generally color-sensitive. Furthermore, the poor example system is not limited to visible light, "see first, for example, and the 5 rabbit outside line" can also be used instead, and it can expose cracks or other defects in the image, and If inspected by humans, these defects can then be processed by visible light. / Those who are skilled in this art can understand that; ’Even in the foregoing rescue, many changes of the preferred embodiment of the present invention have been proposed,
1 一 it 匕# f 0 I 係僅作為舉例之用，其亦可以有其他的修飾特別是在不 脫本發明之範圍的情形下’且在本發明所附申請專利範圍 之廣義意義所指示之最大限度的原則範圍内的結構、部分 配置及/或步驟的内容變化。 【圖式簡單說明】 請參閱以下有關本發明一較佳實施例之詳細說明及其附 20 200535399 圖，將可進一步瞭解本發明之技術内容及其目# ，有關 的咅J面 』刀效 該實施例之附圖為： 第一圖：其係顯示根據〜實施例之一多面觀察哭 示意圖； 第二圖：其係顯示使用第一圖之該多面觀察器以掏取— 物體之多個觀測圖的一影像之程序流程圖； 第三圖：其係顯示用於映像之一 QFN單元的透視圖；以 第四圖：其係顯示由第一圖之該觀察器所擷取之一 qFN 單元的一示意影像。 【主要元件符號說明】 10 多面觀察器 14 聚焦透鏡 154 接觸部分 16 影像擷取裝置 200 結果影像 22 第一孔洞 26 第一側面 30 觀察位置 34 直角稜鏡 37 表面 42 LEDs 46 LEDs 50 分光器 54 側表面 12 觀測圖產生器殼體 152 接觸部分 156 接觸部分 18 中心線 2 0 2丨中心影像部分 24 苐-—孔洞 28 第二側面 3 2 物體 3 6 面 38 反射表面 44 LEDs 48 散光器 52 噴嘴 5 6 前表面1 一 it ## f 0 I is for example only, and it can also have other modifications, especially without departing from the scope of the present invention ', and indicated in the broad sense of the scope of the patent application attached to the present invention Changes in the structure, partial configuration and / or steps within the scope of the maximum principle. [Brief description of the drawings] Please refer to the following detailed description of a preferred embodiment of the present invention and its attached 20 200535399 drawings, which will further understand the technical content of the present invention and its objectives. The drawings of the embodiment are: The first diagram: it shows a schematic diagram of a multi-faceted observation cry according to one of the embodiments; the second diagram: it shows the use of the multi-faceted observer of the first picture to extract—a plurality of objects A flowchart of an image of an observation chart; the third chart: it shows a perspective view of a QFN unit for mapping; the fourth chart: it shows a qFN captured by the viewer of the first chart A schematic image of the unit. [Description of main component symbols] 10 Polyhedral viewer 14 Focusing lens 154 Contact part 16 Image capture device 200 Result image 22 First hole 26 First side 30 Observation position 34 Right angle 稜鏡 37 Surface 42 LEDs 46 LEDs 50 Beam splitter 54 side Surface 12 Observation pattern generator housing 152 Contact portion 156 Contact portion 18 Centerline 2 0 2 丨 Center image portion 24 苐 —hole 28 Second side 3 2 Object 3 6 Surface 38 Reflective surface 44 LEDs 48 Diffuser 52 Nozzle 5 6 front surface
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