200526947 (υ 九、發明說明 【發明所屬之技術領域】 本發明，係關於一種板片薄膜之缺陷檢查裝置。詳述 之，係關於一種以光學方式高精度且容易全面地檢查翹起 等變形之板片薄膜的缺陷的裝置。 【先前技術】 偏光板、位相差板等的光學薄膜等，係做爲連續薄膜 φ 或板片薄膜來製品化後，於該狀態下進行缺陷檢查。 如大家所習知的檢查方法，係將光照射到光學薄膜等 的透明薄膜後’接收該透過光來檢查薄膜的缺陷。 在於利用滾筒邊搬送薄膜邊進行缺陷檢查的方法，雖 然針對檢查樹脂板的硬質板狀物的情形、或以滾筒將連續 的薄膜保持在拉緊狀態下檢查的情形時不會發生問題，但 是針對光學薄膜等的柔軟的板片薄膜而言，周邊會彎曲， 或在搬送裝置上翹起、下垂的緣故，檢查缺陷用的攝影機 馨 的焦點無法對準被檢查物之薄膜，進而導致缺陷未被發現 到。 做爲橋正板片薄膜的變形予以檢查的方法，係有利用 透明的樹脂板或玻璃板來挾持該薄膜的方法；固定周圍的 方法；由吸著片吸著的方法或利用拉伸治具來拉伸的方法 等’但是仍然會發生夾入環境中的異物、或不夠平坦、或 無法全面檢查、或者矯正變形過於麻煩等的問題。 200526947 (2) 【發明內容】 [發明所欲解決的課題] 本發明的目的，係提供一種以光學方式高精度且容易 全面地檢查翹起等變形之板片薄膜的缺陷的裝置。 [解決課題的手段] 本發明人爲了解決所發生的問題，對板片薄膜之缺陷 檢查裝置詳細檢討的結果，利用***板片薄膜到一對送出 φ 滾筒略呈水平來抑制被搬送的板片薄膜的前端部的翹起或 下垂，並且利用在於送出滾筒的前方設置上側爲浮上矯正 滾筒及下側爲保持高度滾筒所形成的一對的滾筒將板片薄 月旲***到一對送出滾筒略呈水平，其結果，板片薄膜可以 幾乎呈水平地在送出滾筒及承接滾筒之間搬送，完成可以 高精度地全面地檢查板片薄膜的缺陷。 換句話說，本發明，係屬於邊搬送板片邊檢查缺陷的 裝置，且依搬送板片薄膜的方向的順序，設置上側爲浮上 φ 矯正滾筒及下側爲保持高度的滾筒所形成的一對滾筒；及 配置在上下方向的一對送出滾筒及配置在上下方向的一對 承接滾筒，朝水平方向搬送板片薄膜，且在送出滾筒與承 接滾筒之間的上下，配置將光線照射到板片薄膜後，接收 該透過光來檢查缺陷用的光源及攝影機所形成的板片薄膜 之缺陷檢查裝置。 【實施方式】 -5- 200526947 (3) 偏光板、位相差板、層積這些等的光學薄膜等’係做 成配合使用這些的液晶顯示裝置的大小後被裁斷的板片薄 膜來製品化使用者較多。在於這種板片薄膜，一般而言’ 有表面波紋，會受到種類、大小、厚度或放置的環境所影 響，但是放置在平板上時可發現大約會翹起4至6 mm左 右。此外，當這種薄膜的前端部突出平板約3 0 mm時，會 因爲薄膜的表面波紋狀態形成前端下垂約3至1 2 mm。 當在於透明平板或搬送滾筒上檢查這種板片薄膜時， 板片薄膜會下垂、或翹起、或者浮起，導致攝影機無法與 薄膜對焦而無法檢查缺陷。 但是，只要想檢查的缺陷可以在檢查的焦點深度內的 話，薄膜些許的變形是可以被接受。當使用焦點距離爲 5 0mm的標準鏡片，且允許缺陷像在3至5μπι左右的模糊 度時，光圈爲4至5 · 6時焦點深度爲1 mm。換句話說，通 常，只要是1 mm左右的翹起或下垂的話，就可以檢查出 該缺陷。 利用***板片薄膜到上下配置的一對的滾筒略呈水平 可以抑制板片薄膜的翹起或下垂在1 mm左右。由於*** 板片薄膜到一對的滾筒略呈水平的緣故，可以藉由在前方 配置上側爲浮上矯正滾筒4及下側爲保持高度滾筒5所組 成的一對滾筒來完成。 弟1 Η ’係表不本發明之板片薄膜缺陷檢查裝置的一 範例之斷面模式圖。依搬送板片薄膜1的方向的順序（白 色箭頭）’設置上側爲浮上矯正滾筒4及下側爲保持高度 -6 - 200526947 (4) 的滾筒5所形成的一對的滾筒；及配置在上下方向的一對 送出滾筒2及配置在上下方向的一對承接滾筒3水平搬送 板片薄膜。在送出滾筒與承接滾筒之間的上下，配置將光 線照射到板片薄膜後，接收該透過光來檢查缺陷用的光源 6及攝影機機7。 利用設置上側爲浮上矯正滾筒4及下側爲保持高度滾 筒5所形成的滾筒邊矯正板片薄膜1的浮上或下垂，可以 略呈水平地將板片薄膜1從送出滾筒2搬送到承接滾筒3 〇 當板片薄膜1被滾筒挾持且搬送後，在送出滾筒2與 承接滾筒3之間進行缺陷檢查。 第2圖，係表示關於送出滾筒2的高度異常檢知器的 模式圖。在於送出滾筒2的後方側部設置高度異常檢知器 8。當利用此一檢知器測出被搬送的板片薄膜1的高度超 出設定値時，由滾筒上下調整機構（未圖示）來上下調整 滾筒，進而調整板片薄膜的高度。 這種高度異常檢知器及滾筒上下調整機構係也可以同 樣地被設置在承接滾筒3的前方側部，將承接滾筒上下移 動。 送出滾筒、承接滾筒、浮上矯正滾筒及保持滾筒的表 面材質，係有聚氨酯橡膠、氯丁橡膠·丁二烯橡膠、硅橡 膠或樹脂，使用聚氨酯橡膠會較理想。使用表面硬度在4 0 至1 00會較理想。此外，利用組入黏著式的去除塵埃滾筒 到送出滾筒更能強化因爲無環境異物造成的誤檢查的效果 -7- 200526947 (5) 送出滾筒及承接滾筒的直徑可以相同也可以不同，爲 了抑制薄膜的彈性變形到最小限，選用小徑的滾筒會較理 想，約爲5至30 mm，1 0至25 mm會更佳。將浮上矯正 滾筒及保持滾筒所形成的挾持部與送出滾筒及承接滾筒所 形成的挾持部的間隔做成小一些會較理想，因爲板片薄膜 的變形小’且可以確實地承接的緣故，因此浮上矯正滾筒 及保持滾筒的直徑比送出滾筒的直徑小會比較理想。 送出滾筒的外周部及承接滾筒的外周部之最小間隔， 係在5至3 0 m m範圍內的小距離會較理想。只要間隔距離 爲5 mm的話都可以照射、接收光線。 浮上矯正滾筒及/或保持滾筒的外周部與送出滾筒的 外周部的最小間隔約爲1至3 0 m m會較理想，1至2 0 m m 會更佳。 [實施例1] 如第1圖所示，配置了浮上矯正滾筒4、保持高度滾 筒5、一對的送出滾筒2及一對的承接滾筒3。 浮上矯正滾筒及保持高度滾筒的軸徑爲1 5 0 mm，且 利用2.5mm之硬度40的聚氨酯橡膠來捲繞成直徑爲20 0 mm的滾筒，一對送出滾筒及承接滾筒的軸徑皆爲150 m m，且利用2.5 m m之硬度4 0的聚氨酯橡膠來捲繞成直徑 爲 2 0 0 m m 〇 將送出滾筒間的間隙、承接滾筒間的間隙設定成要檢 200526947 (6) 查的板片薄膜的厚度以下。將送出滾筒的外周部與承接滾 筒的外周部之最小間隔設定成5mm。此外，將浮上矯正滾 筒的外周部與送出滾筒的外周部間的最小間隔設定成3mm 〇 在於送出滾筒與承接滾筒之間的下部配置光源夕 八歹傳送燈），上部配置CCD線上檢知器（SCANTEC ( 登錄商標）6000長瀬產業（株）製、畫素數：5000)。 使用本裝置來搬送板片的層積光學薄膜（構成：保護 薄膜/偏光薄膜/位相薄膜/分離薄膜，大小： 310mmx385mm，厚度：〇.4mm)後，全面地檢查薄膜的缺 在於送出滾筒與承接滾筒之間的的薄膜的變形（翹起 、下垂）約1mm。不會錯過30μπι的缺陷。 此外，也找不到保護薄膜或分離薄膜的剝離。 [發明的效果] 利用本發明，可以以一種以光學方式高精度且容易全 面地檢查翹起等變形之板片薄膜的缺陷的裝置。 【圖式簡單說明】 第1圖，係表示本發明之板片薄膜缺陷檢查裝置的一 範例之斷面模式圖。 第2圖，係表示關於送出滾筒的高度異常檢知器的模 式圖 -9- 200526947 (7) 【主要元件符號說明】 1…板片薄膜 2…送出滾筒 3···承接滾筒 4…浮上矯正滾筒 5···保持高度滾筒 6…光源 7…攝影機 8…高度異常檢知器200526947 (υ IX. Description of the invention [Technical field to which the invention belongs] The present invention relates to a defect inspection device for a sheet film. In detail, it relates to an optical method with high accuracy and easy and comprehensive inspection of deformation such as warping. Device for defects in plate film. [Prior art] Optical films such as polarizing plates and phase difference plates are manufactured as continuous films φ or plate films, and defect inspection is performed in this state. A conventional inspection method is to irradiate light to a transparent film such as an optical film and to 'receive the transmitted light to inspect the defect of the film. The method is to inspect the defect while using a roller to transport the film, although it is aimed at inspecting rigid plates of resin plates. No problem occurs when the continuous film is held under tension with a roller and inspection is performed. However, for a flexible sheet film such as an optical film, the periphery is bent, or it is on a conveying device. Due to the tilting and sagging, the focus of the camera used to inspect the defect cannot be aligned with the film of the object to be inspected, leading to defects. It has been found that, as a method for inspecting the deformation of the bridge positive plate film, there are a method of holding the film by a transparent resin plate or a glass plate; a method of fixing the surroundings; a method of absorbing by an absorbing sheet or using Methods such as a stretching jig to stretch, etc. However, problems such as foreign objects trapped in the environment, insufficient flatness, comprehensive inspection, or too much trouble to correct deformation may still occur. 200526947 (2) [Summary of the Invention] [Invention Problem to be Solved] An object of the present invention is to provide an apparatus for optically inspecting defects of a deformed sheet film such as warpage and the like with high accuracy and comprehensively. [Means for Solving the Problem] In order to solve the problem As a result of a detailed review of the defect inspection device for the sheet film, inserting the sheet film to a pair of sending-out φ rollers is slightly horizontal to suppress the lifting or sagging of the front end of the sheet film being transported, and the use is A pair of rollers formed on the front side of the feed roller are a floating upper correction roller and a lower roller to maintain the height. The pair of delivery rollers is slightly horizontal. As a result, the sheet film can be transported between the delivery roller and the receiving roller almost horizontally, and the defects of the sheet film can be inspected comprehensively with high accuracy. In other words, the present invention, It is a device for inspecting defects while conveying the sheet, and in the order of the direction of conveying the sheet film, a pair of rollers formed by a φ correction roller floating on the upper side and a roller maintaining the height on the lower side; and arranged in the vertical direction A pair of sending-out rollers and a pair of receiving rollers arranged in the up-and-down direction convey the sheet film in a horizontal direction, and the upper and lower portions between the sending-out roller and the receiving roller are arranged to irradiate light to the sheet film and receive the transmitted light A light source for inspecting defects and a defect inspection device for a sheet film formed by a camera. [Embodiment] -5- 200526947 (3) Polarizing plates, phase difference plates, laminated optical films, etc. A large number of users use the plate film that has been cut after the size of these liquid crystal display devices. In general, this kind of sheet film has a surface ripple, which is affected by the type, size, thickness, or environment in which it is placed. However, when placed on a flat plate, it can be seen that it will lift about 4 to 6 mm. In addition, when the front end of such a film protrudes about 30 mm from the flat plate, the front end sags by about 3 to 12 mm due to the surface wavy state of the film. When inspecting such a sheet film on a transparent flat plate or a conveying roller, the sheet film may sag, or warp, or float, causing the camera to fail to focus on the film and fail to inspect defects. However, as long as the defect to be inspected can be within the depth of focus of the inspection, slight deformation of the film is acceptable. When a standard lens with a focal distance of 50mm is used and the defect image is allowed to have a blur of about 3 to 5μm, the focal depth is 1mm when the aperture is 4 to 5 · 6. In other words, the defect can usually be detected as long as it is warped or sagging about 1 mm. The pair of rollers inserted into the upper and lower sides of the sheet film is slightly horizontal to prevent the sheet film from rising or sagging at about 1 mm. Since the plate film is inserted into a pair of rollers which are slightly horizontal, this can be accomplished by arranging a pair of rollers on the front side with a floating correction roller 4 on the upper side and a roller 5 on the lower side. Brother 1 'is a schematic sectional view showing an example of the sheet film defect inspection device of the present invention. In the order (white arrow) of the direction of conveying the sheet film 1 (the white arrow), a pair of rollers formed by a floating roller 5 on the upper side and a roller 5 on the lower side to maintain a height of -6-200526947 (4); The pair of delivery rollers 2 in the vertical direction and the pair of receiving rollers 3 arranged in the vertical direction convey the sheet film horizontally. A light source 6 and a camera 7 for inspecting defects are arranged on the upper and lower sides between the sending-out roller and the receiving roller to irradiate light onto the sheet film, and then receive the transmitted light to inspect defects. By setting the floating edge correction roller 4 on the upper side and the roller edge correction plate film 1 formed on the lower side to maintain the height roller 5, the plate film 1 can be transported from the delivery roller 2 to the receiving roller 3 horizontally. 〇 After the sheet film 1 is held by the roller and transported, a defect inspection is performed between the delivery roller 2 and the receiving roller 3. FIG. 2 is a schematic diagram showing a height abnormality detector of the delivery drum 2. FIG. A height abnormality detector 8 is provided on the rear side of the delivery drum 2. When it is detected by this detector that the height of the sheet film 1 being conveyed exceeds the setting threshold, the roller is adjusted vertically by a roller up-and-down adjustment mechanism (not shown) to adjust the height of the sheet film. The height abnormality detector and the roller up-and-down adjustment mechanism may be similarly provided on the front side of the receiving roller 3 and move the receiving roller up and down. The surface materials of the delivery roller, receiving roller, floating correction roller and holding roller are polyurethane rubber, neoprene butadiene rubber, silicone rubber or resin. Polyurethane rubber is ideal. It is ideal to use a surface hardness of 40 to 100. In addition, the use of an adhesive-type dust-removal roller to the delivery roller can further enhance the effect of false inspections caused by environmentally-free foreign matter. 7- 200526947 (5) The diameter of the delivery roller and the receiving roller can be the same or different. The elastic deformation to the minimum is ideal. It is ideal to choose a roller with a small diameter, about 5 to 30 mm, and more preferably 10 to 25 mm. It is desirable to make the distance between the holding portion formed by the floating correction roller and the holding roller and the holding portion formed by the delivery roller and the receiving roller smaller, because the deformation of the sheet film is small, and it can be reliably received. It is desirable that the diameter of the floating correction roller and the holding roller is smaller than the diameter of the delivery roller. The minimum distance between the outer peripheral part of the sending drum and the outer peripheral part of the receiving drum is preferably a small distance in the range of 5 to 30 mm. As long as the separation distance is 5 mm, it can illuminate and receive light. The minimum interval between the outer peripheral portion of the floating correction roller and / or the holding roller and the outer roller portion of the delivery roller is preferably about 1 to 30 mm, and more preferably 1 to 20 mm. [Embodiment 1] As shown in Fig. 1, a floating correction roller 4, a holding height roller 5, a pair of delivery rollers 2 and a pair of receiving rollers 3 are arranged. The shaft diameter of the floating correction roller and the height-retaining roller is 150 mm, and the roller with a hardness of 40 mm is used to wind the roller with a diameter of 200 mm. The diameters of a pair of sending rollers and receiving rollers are 150 mm, and 2.5 mm urethane rubber with a hardness of 40 to be wound into a diameter of 200 mm. 〇Set the gap between the delivery rollers and the gap between the receiving rollers to be inspected. 200526947 (6) The plate film to be inspected The thickness is below. The minimum distance between the outer peripheral portion of the delivery roller and the outer peripheral portion of the receiving roller was set to 5 mm. In addition, the minimum interval between the outer peripheral portion of the floating correction roller and the outer roller is set to 3 mm. The lower part is between the sending roller and the receiving roller. A light source is provided at the lower part of the roller. The upper part is equipped with a CCD online detector ( SCANTEC (registered trademark) 6000 (manufactured by Nagato Industries Co., Ltd., number of pixels: 5000). After using this device to transport the laminated optical film (composition: protective film / polarizing film / phase film / separation film, size: 310mmx385mm, thickness: 0.4mm), comprehensively check the lack of the film due to the delivery roller and receiving The deformation (lifting, sagging) of the film between the rollers is about 1 mm. Don't miss the 30μm defect. In addition, no peeling of the protective film or the release film was found. [Effects of the Invention] According to the present invention, it is possible to optically inspect the defects of a deformed sheet film, such as warping, with high accuracy and easily and comprehensively. [Brief Description of the Drawings] Fig. 1 is a schematic sectional view showing an example of a sheet film defect inspection device of the present invention. Figure 2 shows the pattern of the height abnormality detector of the sending roller. -9- 200526947 (7) [Description of the main component symbols] 1 ... sheet film 2 ... sending roller 3 ... receiving roller 4 ... floating correction Roller 5 ... Height holding roller 6 ... light source 7 ... camera 8 ... height abnormality detector