TW200523751A - Machine control system - Google Patents

Abstract

The invention is related to methods and apparatus that advantageously provide compatibility between two or more different computer systems, such as computers used in a manufacturing environment, e.g., a foundry for semiconductor fabrication. For example, a first computer system with a first operating system, such as OS/2 from IBM Corporation, and a second computer system with a second operating system, such as Windows NT from Microsoft Corporation. In one embodiment, a transfer module permits an application that executes in the IBM OS/2 operating system access to files maintained in a component object model (COM+) format from Microsoft Corporation. A routing module transfers data to and from a module with functions created in the component object model (COM+) format. One embodiment of the routing module routes data according to one of four selectable processing paths termed TAPCOM, COMTAP, TAPCOMTAP, and COMTAPCOM.

Description

200523751 08 1 63twf.doc/006 九、發明說明： 本申請案係依據美國專利法規35ϋ 於麗年5月6號向美國專利局申:^ =主張 第60/偏，323號的優先權，該專利申請案 係完整結合於本說明書中。 明案所揭路之内容 【發明所屬之技術領域】 本發明是有關於-種主機軟體，且 種可提高製程機台之函式處理效率的—種軟疋有關於一 【先别技術】 一 工作主機可用於例如工廠内之製 由於每-工作主機可能具有多種不同之組態作然而， 及程式語言，且一般的軟體使用者甚或軟;門二ί統以 ，人員需對陌生的機器或操作=軟=軟 導致時間與成本上的浪費。 域之開發， 此外，不相容的主機系統常常可 業環境中。舉例而言，-個加工環境中可能同的作 主機系統以及一較舊的主機系統，如新的 可提高不同主機系統之相容性的方法。 使而要—種 【發明内容】 本發明之實施㈣提出—種新技 統程式的更新。此外’本發明之實施例更可提 之不同主機系統的相容性，以使得原先使料似之一 系統的裝置，可有效率地使用其他的主機系統。例如，2 20〇52375wl.d〇c/006 用第一作業系統（如公司之OS/2⑧）之一第一主機， 以及使用第二作業系統（如微軟公司Microsoft之 Windows® NT⑧）之一第二主機。本發明之實施例具有一 種轉換模組，其可讓在⑧OS/2®操作系統下執行的應 用程式’對微軟公司之組件客體模式（Component Object Model，以下簡稱COM+)格式的槽案進行存取。 本發明之一實施例包括一路由模組（Routing Module)，其係可自一具有COM+格式之函式（Function) 的模組轉出及轉入資料。舉例而言，此路由模組係使用分 別稱為 TAPCOM、COMTAP、TAPCOMTAP 以及 COMTAPCOM的四個可選擇（Selectable )的程序路由 (Processing Route)。其中，TAPC〇M程序路由係對應 於由TAP模組至COM+模組之走向的資料流，而c〇MTAp 私序路由係對應於由COM+模組至TAP模組之走向的資 料流。此外，TAPCOMTAP程序路由係對應於由TAp模 組至COM+模組，並且再回到TAp模組之走向的資料流，、 而COMTAPCOM程序路由係對應於由c〇M+模組至TAp 模組，並且再回到C0M+模組之走向的資料流。 為讓本發明之上述和其他目的、特徵、和優點能更 明顯易懂，下文特舉較佳實施例，並配合所附圖 細說明如下： τ 【實施方式】 ，動化技術係普遍應用於例如工廢等製造環境，其 中大篁應⑽H進行生產製程之製造環境，其製程步驟之 2〇〇52375id 自動化更為常見，例如半導體製造之代工廠（Foundry) 即為一咼自動化之製造環境。此外，除文中所述之半導體 製造、以及IBM® OS/2⑧與Microsoft⑧Windows®操作系 統之外，本發明之技藝基於其原理以及優點，更可應用於 例如汽車製造、食品加工、藥物製造等其他類型的自動化 製造環境，以及其他的操作系統。 圖1繪示為一製造環境之主機系統的例子。半導體 製造代工廠以及其他較複雜的製造環境，通常具有較多相 互作用的主機系統。舉例而言，代工廠内的主機整合製造 (Computer Integrated Manufacturing，CIM)系統 100 通常 包括不同的系統，例如一製造執行系統（Manufacturing200523751 08 1 63twf.doc / 006 IX. Description of the invention: This application is based on US Patent Regulation 35. On May 6, 2006, the U.S. Patent Office applied for: ^ = claiming priority 60 / partial, No. 323, the The patent application is fully incorporated in this specification. Contents of the road revealed in the clear case [Technical field to which the invention belongs] The present invention relates to-a host software, and a method that can improve the function processing efficiency of a process machine-a kind of software related to a [pre-different technology]- The work host can be used for example in the factory. Because each work host may have a variety of different configurations, however, and the programming language, and the general software user or even software; the system requires personnel to be familiar with unfamiliar machines or Operation = soft = soft causes waste of time and cost. Domain development, in addition, incompatible host systems are often available in business environments. For example, a host system that may be the same in a processing environment and an older host system, such as the new one, can improve the compatibility of different host systems. [Requirement] [Summary of the Invention] The implementation of the present invention proposes a new technical program update. In addition, the embodiments of the present invention can further improve the compatibility of different host systems, so that the devices that originally look like one system can use other host systems efficiently. For example, 2 2005252wl.doc / 006 uses the first host computer of one of the first operating system (such as the company's OS / 2⑧), and one of the second operating system (such as Microsoft's Windows® NT⑧). Two hosts. An embodiment of the present invention has a conversion module that allows an application program running under the ⑧OS / 2® operating system to access a slot in the format of Component Object Model (COM +) of Microsoft Corporation. . An embodiment of the present invention includes a routing module, which can transfer and transfer data from a module with a function in COM + format. For example, this routing module uses four Selectable Processing Routes called TAPCOM, COMTAP, TAPCOMTAP, and COMTAPCOM. Among them, TAPCOM routing corresponds to the data flow from the TAP module to the COM + module, and coMTAp private sequence routing corresponds to the data flow from the COM + module to the TAP module. In addition, the TAPCOMTAP program routing corresponds to the data flow from the TAp module to the COM + module and back to the direction of the TAp module, while the COMTAPCOM program routing corresponds to the COM + module to the TAp module, and Back to the data flow of the C0M + module. In order to make the above and other objects, features, and advantages of the present invention more comprehensible, the following exemplifies a preferred embodiment and describes it in detail with the accompanying drawings as follows: τ [Embodiment], mobilization technology is generally applied For example, manufacturing environments such as industrial waste. Among them, the manufacturing environment in which the manufacturing process should be carried out. The automation of the process steps of the 200552375id is more common. For example, the foundry of semiconductor manufacturing is an automated manufacturing environment. In addition, in addition to the semiconductor manufacturing described in the article, and the IBM® OS / 2 文 and Microsoft 文 Windows® operating systems, the technology of the present invention is based on its principles and advantages, and can be applied to other types such as automobile manufacturing, food processing, and pharmaceutical manufacturing Automated manufacturing environment, and other operating systems. FIG. 1 illustrates an example of a host system in a manufacturing environment. Semiconductor manufacturing foundries and other more complex manufacturing environments often have more interacting host systems. For example, a Computer Integrated Manufacturing (CIM) system 100 in a foundry usually includes different systems, such as a Manufacturing Execution System (Manufacturing Execution System).

Execution System，MES )102、企業資源規劃管理（EnterpriseExecution System (MES) 102, Enterprise Resource Planning Management (Enterprise

Resource Planning, ERP)系統 104、排程軟體（SchedulingResource Planning (ERP) system 104. Scheduling software

Software )、工程系統（Engineering System )以及良率監 測系統（YieldMonitoring System)等。 製造執行系統（Manufacturing Execution System， MES) 102係控制最上級之產品製程，而此製造執行系統 102例如可為目前業界所使用之IBM公司的SiView標準 版。一般而言，一個代工廠所具有的製造執行系統並不多， 例如一個代工廠僅藉由一個製造執行系統運作。在一實施 例中，製ie執行糸統1〇2係相當於控制整個代工廠之製造 系統的一中央主機系統。當然，在合理的範圍内，製造執 行系統102村被分散，亦即藉由多個製造執行系統ι〇2 來控制一個代工廠。 200523751 08163twf.doc/006 製造執行系統102可耦接至一或多個機台控制系統 (Machine Control System，MCS )，而一個機台控制系統 110可耦接至一或多個製造裝置112，其中關於機台控制 系統110之詳細構造將配合後述之圖2進行說明。此外， 企業資源規劃管理系統104可整合例如企劃（planning)、 銷售（Sale)、存貨管理（inventory c〇ntr〇1)以及訂單追 蹤（Order tracking )等商業活動。 [機台控制系統110] 圖2係繪示本發明之較佳實施例的一種機台控制系 統110，而一製造環境中可能具有較多之機台控制系統。 在本實施例中’機台控制系統110係對應於一本區主機系 統’其係與製造執行系統102通訊（Communicate)，並 控制所對應之製造裝置112的運作。然而，由於機台控制 系統110可能被設定在習用之操作系統之下運作，例如 IBM⑧OS/2®，因此便可能發生經驗較為不足之軟體開 人員對此操作系統不熟悉的問題。 # x 請參考圖2，機台控制系、统110細接至製 統102、-或多個製造裝置112、-遠端資料庫模組(Rem〇;e Database Module ) 202、一資料庫顯示裴置（如沾咖 Display Device) 204以及其他適用的製造執行系統 當然’機台控制系統110以及繪示於圖1 盆 可與較圖2所示更多或較圖2所示為少的系統相更 圖2所It示之機#控·統UG包括—卫具 統（Tool Control System, TCS ) 210，—钱 ％ » 牙、 口貝核組（Access 200523751 08 1 63twf.d〇c/〇〇6Software), Engineering System, YieldMonitoring System, etc. The Manufacturing Execution System (MES) 102 controls the highest-level product manufacturing process, and the Manufacturing Execution System 102 can be, for example, the SiView standard version of IBM Corporation currently used in the industry. Generally speaking, a foundry does not have many manufacturing execution systems. For example, a foundry operates with only one manufacturing execution system. In one embodiment, the manufacturing system 102 is equivalent to a central host system that controls the manufacturing system of the entire foundry. Of course, within a reasonable range, the manufacturing execution system 102 is decentralized, that is, one manufacturing plant is controlled by multiple manufacturing execution systems ι02. 200523751 08163twf.doc / 006 The manufacturing execution system 102 may be coupled to one or more Machine Control System (MCS), and one machine control system 110 may be coupled to one or more manufacturing devices 112, of which The detailed structure of the machine control system 110 will be described in conjunction with FIG. 2 described later. In addition, the enterprise resource planning management system 104 can integrate business activities such as planning, sales, inventory management, and order tracking. [Machine Control System 110] FIG. 2 illustrates a machine control system 110 according to a preferred embodiment of the present invention. There may be many machine control systems in a manufacturing environment. In this embodiment, the 'machine control system 110 corresponds to a local host system', which communicates with the manufacturing execution system 102 (Communicate) and controls the operation of the corresponding manufacturing device 112. However, since the machine control system 110 may be set to operate under a conventional operating system, such as IBM (R) OS / 2®, a problem may occur in which software developers with less experience may be unfamiliar with the operating system. # x Please refer to Figure 2. The machine control system, system 110 is connected to the system 102,-or multiple manufacturing devices 112,-remote database module (Rem〇; e Database Module) 202, a database display Pei Zhi (such as Zhanca Display Device) 204 and other applicable manufacturing execution systems. Of course, the machine control system 110 and the system shown in FIG. 1 can be compared with the system shown in FIG. 2 or less. Compare the machine shown in Figure 2 It control-system UG includes-Tool Control System (TCS) 210,-%% »Dental and Mouth Nuclear Group (Access 200523751 08 1 63twf.d〇c / 〇 〇6

Module ) 212、一轉換模組（Transfer Module ) 214、— COM+ 模組216以及一本區資料庫模組（L〇calDatabaseModule) ’熟習此項技藝者當可得知，其可改變產品製程以生 產新的元件’並可改善良率、加速生產速度以及容許裝置 之變動等等。由於本發明之實施例包括機台控制系統，因 此有助於以較為快速且較有效率之方式進行修改與/或更 新0 工具控制系統210係對應於機台控制系統11〇所使 用之應用程式，以與製造執行系統102通訊 /^ommumcate)。因此，工具控制系統21〇可讓製造執 行系統102與耦接於機台控制系統11〇之製造裝置112通 Λ在實把例中，工具控制系統210係於Microsoft® Windows⑧以外之其他運作系統（如见“⑧〇s/2⑧）之下 運作。 [讀取模組212] ^讀取模組212包括一或多個TAP模組220,其中ΤΑρ 模組220係相當於工具控制系統21()所使用之^解釋器Module 212, a Transfer Module 214, — COM + Module 216, and a local database module (LocalDatabaseModule) 'Practitioners skilled in the art will know that it can change the product process to produce New components' also improve yield, speed up production, and allow for device variations. Since the embodiment of the present invention includes a machine control system, it is helpful to modify and / or update in a relatively fast and efficient manner. 0 The tool control system 210 is an application program corresponding to the machine control system 11 To communicate with the manufacturing execution system 102 (^ ommumcate). Therefore, the tool control system 21 can allow the manufacturing execution system 102 and the manufacturing device 112 coupled to the machine control system 11 to communicate. In the practical example, the tool control system 210 is based on an operating system other than Microsoft® Windows® ( See operation under "⑧〇s / 2⑧". [Reading module 212] ^ The reading module 212 includes one or more TAP modules 220, of which the ΤΑρ module 220 is equivalent to the tool control system 21 () ^ Interpreter used

Ume聊ter)，並對製造裝置112所提供之原始程式碼 (Source C〇de)進行解譯。在一實施例中，每一 置112係對應有一 TAp模組22〇。舉例而言，^心 可對應於IBM公司之TTc〇RTAPDLL槽案其係對庫 =動態連結程式庫檔案。此動態連結程式騎案可透^ 的=動=結iDLL槽，以提供函式及/或資料至其他 的應用’例如工具控制系統21〇。因此，ΤΑρ模組咖 10 2〇〇523?ad〇c/〇〇6 可設定、控制以及監測製造裳置112 中安TAP模組22。係、相當於延 父例 檔案。多種製造裝置112係可輕接至Tp f且：、 下係為可與文中所述之半導τ ^ A 棂、、且220，以 接之製造裝置的幾個例模組2、 送晶圓之機器人手臂、自動搬運或傳 需__二:；== 案之曝糾深紫外光機台、_用於所需圖荦2 描機台、用以植入離子之摻雜植入機台、用純氧 化之爐官、用錄騎料之_設備以及其他裝置等:乳 修改】台= 统係藉由TAP模組進行程式碼的 例中，tap模組細係相當於 =由項取核組212進行解譯之原始程式碼的模組。在另一 。，例中，TAP模組可包括已進行編譯（c卿之 ^式碼。TAP模組在設計上可能比藉由c〇M或c〇m+設 二難因此其軟體開發之效率相對較低。在習用的系統中， 當TAP模組有所改變時，習用的機台控制系統便處於無 去運作（Inoperative)的狀態。如此一來，不僅使得軟體 之開發成本昂貴，更使得整個機台控制系統無法使用於例 =碼⑹ing)、測試（Testing)以及除錯（Debugg^ 等需要延長時間週期之動作。 本發明之實施例讓TAP模組220之程式碼較為簡單， 因此有助於簡化軟體之開發，並可縮短機台控制系統11〇 之停機時間（Downtime)。TAP模組220之較為簡單的 200523751 08 1 63twf.d〇c/006 程式碼係參照（Reference )C〇M+模組216之功能程式碼。 舉例而言，在一實施例中，修正後之TAp模組223内的 原始程式碼係藉由增加一或多行具有關鍵字之程式碼， 如“funCTION，，，以進行修改。當讀取模組犯在程式石馬 内讀到此關鍵字時，便由轉換模組進行指令或參數之執 行，以進行進一步之程序。在上述之本發明的實施例中， 轉換模組212包括一前轉換模組222以及一路由模組 224，下文將有更詳細之描述。當讀取模組212讀到Tip 模組220之程式碼與/或參數内的關鍵字之指定，係由 COM+模組216進行進一步之步驟時，讀取模組212便連 結至轉換模組214 (經由前轉換模組222以及路由模組 224)，並與C0M+模組216連結。在一實施例中，由於 用以加入關鍵字及相關參數至合適的Tap模組220，以 及重新啟動機台控制系統110之總時間較短，因此有助於 縮短機台控制系統110的停機時間。有關於讀取模組 之使用上的例子，將於後述之圖3的相關敘述中詳細說 明。 [轉換模組214] 轉換模組214包括函式與/或資料，其係可由嵌入 (embeded )於TAP模組220之原始程式碼内的諸如函式 呼叫指令（function call)等進行讀取。在一習用的機台 控制糸統中’白用的轉換模組可相當於一 TTUrtap DLL 檔案。在本發明的實施例中，轉換模組214包括前轉換模 組222以及路由模組224，此兩者將於下文中詳細描述。 200523751 08 1 63 twf.doc/〇〇6 下面的例子係描述可被寫入TAP模組22〇之原始程 式碼内的一些類型之函式。舉例而言，TAp模組可 用以與基本運作系統（Underlying Operating System)通 訊。TAP模阻220更可用以透過工具控制系統21〇，而與 製造執行系統102通訊，以接受指令並提供狀態。TAp 模組220可用以控制並接收製造裝置112之狀態。τΑρ 模組220亦可用以執行計算動作，其中這些計算動作可被 編寫（Coded)至TAP模組中或C0M+模組216中，並可 參照自TAP模組220。TAP模阻220亦可用以供其他主 機系統（例如其他的製造執行系統2〇6)執行計篝 [C0M+模組 216] 在一實施例中，軟體開發人員可於機台控制系統11〇 仍在運作時，對C0M+模組内的適當檔案建立或修改原 始程式碼，因此有助於縮短機台控制系統11〇之停機時 間。在完成原始程式碼之修改之後，軟體開發人員可停止 機台控制系統110之運作，修改TAP模組至符合適當的 參照’例如一個“FUNCTION”呼叫參照以及相關參數（或 拷貝一離線修改的原始程式碼檔案至TAp模組），並重 新啟動機台控制系統11〇或讀取模組212來載入組態重置 (Reconfigured)之 TAP 模組。 在本發明之實施例中，COM+模組216可處理微軟公 司之COM或COM+格式的程式碼。組件客體模式係定義 客體以及客體間通訊的二位元標準。c〇M+模組216可包 括DLL檔案、執行檔以及上述二者之組合。此標準化動 f.d〇c/〇〇6 200523751 63 twf 軟體開發人員利用相對較多的時間實際編寫有作 私式碼，而利用較少的時間撰 ^ 之程式碼、移動資料之程式二 以:及其他程式碼等。此外’例如c〇m或c〇M: =用二之程式工具』 工具與/或軟義如包括W Ba祕、 於=執行1舰⑧〇S/2⑧之主機系統並不適用 ' 或COM+格式的處理程式碼。因此， ιιτ^\^ (Native ) „ ^ ^ ^ f，J ^ ^ ^ ^ ^ ^ 中，寫下#^ _贈⑧操作錢之程式碼） 寫下對於知式碼之修改或更新 =之機台控制系統之運作，軟體開發人員^ SI取模組212執行之原始程式碼。對讀取Ume chatter) and interpret the source code (Source Code) provided by the manufacturing device 112. In one embodiment, each device 112 corresponds to a TAp module 22o. For example, ^ xin can correspond to the TTcRTAPDLL slot of the IBM company, which is a library = dynamic link library file. This dynamic linking program can be used to pass through the = DLL = iDLL slot to provide functions and / or data to other applications' such as the tool control system 21〇. Therefore, the ΤΑρ module coffee 10 002523? Adoc / 〇〇6 can set, control, and monitor the manufacturing of 112 sets of Zhongan TAP module 22. Department, equivalent to Yan's parent case file. A variety of manufacturing devices 112 can be lightly connected to Tp f and :, the lower part is compatible with the semiconducting τ ^ A 所述 described in the text, and 220, a few examples of the manufacturing device connected to the module 2, send wafers Robot arm, automatic handling or transmission needs __ 二:; == case of exposure deep-correction UV light machine, _ for the required picture 荦 2 tracer machine, doped implantation machine for implanting ions , Using pure oxidizing furnace officer, recording equipment _ equipment and other devices, etc .: milk modification] platform = system is the example of the code through the TAP module, the tap module is equivalent to = by the item The kernel module 212 interprets the modules of the source code. In another. In the example, the TAP module may include compiled code (c code). The design of the TAP module may be more difficult than using com or com +, so its software development efficiency is relatively low. In the conventional system, when the TAP module is changed, the conventional machine control system is in an inoperative state. In this way, not only the software development cost is expensive, but also the entire machine control The system cannot be used for example = code ⑹ing), testing (testing), and debugging (Debugg ^, etc.) actions that need to extend the time period. The embodiment of the present invention makes the code of the TAP module 220 simpler, which helps to simplify the software Development, and can reduce the downtime of the machine control system 11o. The relatively simple 200523751 08 1 63twf.d〇c / 006 code of the TAP module 220 is the reference (COM) module 216 For example, in one embodiment, the original code in the modified TAp module 223 is implemented by adding one or more lines of code with keywords, such as "funCTION". Modify. When reading the module When the criminal reads this keyword in the program stone horse, the conversion module executes instructions or parameters to perform further procedures. In the embodiment of the present invention described above, the conversion module 212 includes a front conversion module The group 222 and a routing module 224 are described in more detail below. When the reading module 212 reads the code and / or parameters in the parameters of the Tip module 220, the designation is performed by the COM + module 216 In a further step, the reading module 212 is connected to the conversion module 214 (via the front conversion module 222 and the routing module 224), and is connected to the COM + module 216. In one embodiment, because it is used to add a key Word and related parameters to the appropriate Tap module 220, and the total time to restart the machine control system 110 is shorter, so it helps to reduce the downtime of the machine control system 110. The use of reading modules An example will be described in detail in the related description of FIG. 3 described below. [Transformation module 214] The conversion module 214 includes functions and / or data, which can be embedded in the source code of the TAP module 220. Function call (Function call) and so on. In a conventional machine control system, a 'white conversion module' can be equivalent to a TTUrtap DLL file. In the embodiment of the present invention, the conversion module 214 includes a front conversion module. Group 222 and routing module 224, both of which will be described in detail below. 200523751 08 1 63 twf.doc / 〇〇6 The following example describes some of the source code that can be written into the TAP module 22〇 Function of type. For example, TAp modules can be used to communicate with the Underlying Operating System. The TAP mode resistor 220 can be further used to communicate with the manufacturing execution system 102 through the tool control system 21 to receive instructions and provide status. The TAp module 220 can be used to control and receive the status of the manufacturing device 112. The τΑρ module 220 can also be used to perform calculation actions. These calculation actions can be coded into the TAP module or the COM + module 216, and can be referenced from the TAP module 220. The TAP mode resistor 220 can also be used by other host systems (such as other manufacturing execution systems 20) to perform calculation [C0M + module 216]. In one embodiment, a software developer can control the system 11 in During operation, the original code is created or modified for the appropriate files in the COM + module, thus helping to reduce the machine downtime of the machine control system. After completing the modification of the original code, the software developer can stop the operation of the machine control system 110 and modify the TAP module to meet the appropriate reference, such as a "FUNCTION" call reference and related parameters (or copy an offline modified original Code file to the TAp module), and restart the machine control system 110 or read the module 212 to load the reconfigured TAP module. In the embodiment of the present invention, the COM + module 216 can process the COM or COM + format code of Microsoft Corporation. The component object model defines a two-dimensional standard for objects and communication between objects. The com + module 216 may include a DLL file, an executable file, and a combination of the two. This standardization action fd〇c / 〇〇6 200523751 63 twf Software developers use a relatively large amount of time to actually write code that is private, but a program that uses less time to write ^, a program that moves data, and two: and Other code, etc. In addition, 'for example c〇m or c〇M: = using two programming tools' tools and / or soft meanings such as including WBa secret, in == 1 host ⑧〇S / 2⑧ host system is not applicable' or COM + format Processing code. Therefore, in ιιτ ^ \ ^ (Native) „^ ^ ^ f, J ^ ^ ^ ^ ^ ^, write # ^ _gift code for operating money) Write down the opportunity to modify or update the code Platform control system operation, the software developer ^ SI fetches the source code executed by module 212. For reading

Si::: 220或轉換模組-可能包含以丄 之軟體開發I員式碼’因而對於經驗不足 生。 在权式撰寫上較為困難也較為陌 本么月之實知例有助於讓軟 5 com ^ ^ 甚或备用之刪⑧os/2⑧的操作系統。此有助於讓機台控 14 200523751doc/006 ί :====!=新。舉例而 _模組加來執行。雖然這些;執:的 所對應的原始程式瑪亦可在機台控制系統或f COM+模組216内之可執行之程式碼的配^旦 修改之程式碼配置於機台控制系統丨i Q = ^丁 分。舉例而言，COM+模組216 易於5貝取的部 機#制系¥ If、、士 執行的程式碼利於在 機口控制糸、、充〇運作時進行修改。額外的函式亦可在 COM+模組216中執行，而TA 2 = 叫指令’以有效縮短機台控制系統11〇的停機時; 實施例中，COM’組216更選擇 : 系統施通訊，以糾檔案與連結。此動作可讓^〇執= 模組與例如其他代工廠共用與/或傳輸原 且216之詳細内容，將於後述之圖5A及5ΓΪ 模218可用以儲存資料，例如_ 。本區貧料庫模組218亦可_至遠端資料庫 _番篇 Γ f 儲存’並可接至資料庫顯示 進之檢查。資料庫顯示裝置綱係相 二於電腦螢幕、印表機、製圖機、揚聲器等裝置。值得- 提機械控制系統110更可輕接至資料輸入裝置，例 如鍵盤、滑鼠、移動式驅動器等裝置。 [月’J轉換核組222以及路由模組224] 200523751 08 1 63twf.doc/006 在本發明所述之實施例中，轉換模組214包括一前 轉換模組222以及一路由模、组224。在一實施例中，前轉 換模組222包括習用之轉換模組的功能，並且係一 dll 檔案。此外，前轉換模組222更包括藉由路由模组檢 復（Retrieve)額外函式與/或資料的功能。此有助於讓未 在前轉換模組222展示（Present)之函式透過前轉換模組 222進行檢復，因而可讓TAp模組讀取更多函式。在一 實施例中，前轉換模組222係使用同樣的關鍵字，例如τΑρ 模組所使用之“FUNCTION”，以讀取額外的函式。 路由模組224係對儲存有函式以及資料之c〇M+模 ，216所輸入或輸出的函式與/或資料進行轉換。c〇]v^ 模、、且216利於在Microsoft⑧Windows®的環境下使用。路 由拉組224係定義來自c〇M+模組之函式與/或資料的程 序路由（Processing Route)。在一實施例中，路由模組224 使用四個程序路由，在此分別稱作TAPCOM、COMTAP、 TAPCOMTAP以及C〇MTApc〇M。在另一實施例中路 由模，224係使用少於四個的程序路由，例如—個、兩個、 -個等選自上述族群的程序路由。在一實施例中，路由模 組224亦可為DLL檔案，並可於IBM® OS/2®之環境中 執订。此類型的路由模組可藉由以TAP模組220之函式 呼1的參數進行命名的程序路由來辨別。舉例而言， 勹函式呼叫指令可包括一關鍵字，例如“FUNCTION”，並 包括Ί程序路由，例如TAPC0MTAP，也包括所需函式 的名稱或其他例如槽案名稱、資料位置、資料大小等相關 200523751 08 1 63 twf.doc/006 資訊。 /APCOM程序路由係對應於由TAp模組細執行程 ，呼叫才曰令之後’經由前轉換模組222以及路由模组以， 而到達COM+模組216的資料流。TApc〇M程序路由利 22G進行函式呼叫，以決定進行例如儲 存/貝枓至本區資料庫模組叫或遠端資料庫模組2〇2，與 /或在資料庫顯示裝置2G4上展示資料等動作。本區資料 庫模組218或遠端資料庫模组逝所儲存之資料可在之Si ::: 220 or conversion module-may contain software developer I code based on 丄, so for inexperienced students. It is more difficult and unfamiliar to authorize writing. This month's practical examples help to make soft 5 com ^ ^ or even backup os / 2⑧ operating system. This helps the machine control 14 200523751doc / 006 ί: ====! = New. For example, _module is added to execute. Although these; the corresponding original program can be configured in the machine control system or the f COM + module 216. The modified code is configured in the machine control system.i Q = ^ Ding Fen. For example, the COM + module 216 is an easy-to-fetch part of the machine # system. If, and the code executed by the driver is helpful to modify the control of the machine port, and charging. Additional functions can also be executed in the COM + module 216, and TA 2 = call the command 'to effectively reduce the downtime of the machine control system 11o; In the embodiment, the COM' group 216 also chooses: the system to communicate, to Correct files and links. This action allows the ^ 〇 executive = module and other foundries to share and / or transmit the details of the original 216, which will be described later in Figures 5A and 5ΓΪ module 218 can be used to store data, such as _. The poor material library module 218 in this area can also _ go to the remote database _fan articles Γ f storage 'and can be connected to the database display for inspection. The database display device is similar to the computer screen, printer, drawing machine, speaker and other devices. It's worth-mentioning that the mechanical control system 110 can be easily connected to data input devices, such as keyboards, mice, and mobile drives. [Month'J conversion core group 222 and routing module 224] 200523751 08 1 63twf.doc / 006 In the embodiment described in the present invention, the conversion module 214 includes a front conversion module 222 and a routing module and group 224 . In one embodiment, the front conversion module 222 includes the functions of a conventional conversion module and is a dll file. In addition, the front conversion module 222 further includes a function of retrieving additional functions and / or data by a routing module. This helps the functions that were not presented by the front conversion module 222 to be checked by the front conversion module 222, so that the TAp module can read more functions. In one embodiment, the front conversion module 222 uses the same keywords, such as "FUNCTION" used by the τΑρ module, to read additional functions. The routing module 224 converts the function and / or data input and output in the com + module 216, which stores functions and data. c〇] v ^, and 216 is easy to use under the environment of Microsoft® Windows®. The routing pull group 224 defines a processing route of functions and / or data from the COM + module. In one embodiment, the routing module 224 uses four program routes, which are referred to herein as TAPCOM, COMTAP, TAPCOMTAP, and COMTApcOM. In another embodiment, the routing module, 224, uses less than four program routes, such as one, two,-and so on, program routes selected from the aforementioned groups. In one embodiment, the routing module 224 can also be a DLL file and can be subscribed in the IBM® OS / 2® environment. This type of routing module can be identified by a program routing named by the parameters of the function call 1 of the TAP module 220. For example, the function call instruction can include a keyword, such as "FUNCTION", and include a program routing, such as TAPC0MTAP, and also include the name of the required function or other such as the slot name, data location, data size, etc. Related 200523751 08 1 63 twf.doc / 006 information. The / APCOM program routing corresponds to the data flow that is executed by the TAp module. After the call is called, it passes through the front conversion module 222 and the routing module to reach the COM + module 216. The TApc〇M program calls 22G to make a function call to decide whether to make a save / call to the local database module or remote database module 202, and / or display it on the database display device 2G4. Data, etc. The data stored in the local database module 218 or the remote database module can be stored there.

收回以進行分析。TAPC0M程序路由之過程係於圖4A 及其相關敛述中詳細說明。 * COMTAP程序路由係對應於由c〇M+模組到達 模組220,以執行程式呼叫指令的資料流。在一實施例中， COMTAP程序路由之資料流係為命令TAp模組22〇停止 製造裝置112之指令。舉例而言，c〇M+模組216可計算 了個程序何時停止，而C0MTAP程序路由係提供一路徑， 以使TAP模組220接收COM+模組216所發出之程序何 =停止的指令。在一實施例中，當TAp模組22〇在等待 資料由COM+模組216回送時，tap模組22〇可暫停指 令的程序。TAPCOM程序路由之過程係於圖4B及其相= 敘述中詳細說明。 ^ TAPCOMTAP程序路由係對應於由ΤΑρ模組22〇到 達COM+模組216，再回到TAP模組220執行程式呼叫 指令的資料流。舉例來說，TAPCOMTAP程序路由可傳 送資料至COM+模組216中，以使COM+模組216對資 20052¾¾ 1 63twf.doc/006 料進行一些分析計算，再將結果回傳至TAp模組22〇。 TAPCOMTAP程序路由之過程係於圖扣及其相關敛述中 詳細說明。 COMTAPCOM程序路由係對應於由c〇M+模組216 到達TAP模組220，再回到C0M+模組216的資料流。 COMTAPCOM程序路由可用以達到與c〇MTAp程序路 由相同之目的。此外，COMTAPC〇M程序路由可讓資料 回到COM+模組，因此TAP模組22〇所收集之程序資料 可被儲存在本區資料庫模組218或遠端資料庫模組2〇2 ⑩ 内，與/或可被展示於資料庫顯示裳置204中。 COMTAPCOM程序路由之過程係於圖4D及其相關敘述 中詳細說明。 [使用讀取模組212] 圖3係繪不本文之讀取模組212應用於步進機 (Stepper) —例之程序的流程圖。在一實施例中，讀取 模組212之程序係由TAP模組220之對應於步進機的原 始程式碼所明確指定，且原始程式碼係由讀取模組212内 之一解譯器進行解譯。在另一實施中，TAP模組220包 括以完成編譯（Compiled)之程式碼。值得一提的是，上 述之原理亦可應用於其他類型之製造裝置U2。在不脫離 本發明的精神範圍内’熟習此技藝者當能以多種不同的方 式對上述之程序進行修飾。舉例而言，在另—實施例中， 上述之程序的不同部分可相互結合、相互交替排序、或被 移除等。此程序係由第一狀態310開始，其中步進機係進 18 200523751 08 1 63 twf.d〇c/〇〇6 ::化的動作。接著，程序由第一狀態進入第二狀 牛推ίίΓ狀態320中，程序係與步進機通訊，以得到 訊，例如步進機之識別符碼（id_fc)、 狀能等等、步進機可能使用之罩幕（Mask)的 =棒接者，程序由第二狀態32。進入第一決策方塊 機之ΐί:決策方塊顶巾，程序係決定是錢新步進 機之攻疋值。程序可與工具控制系統21()通訊，以 否使用新奴值。料f使騎設 則，程序係由第一決策方塊33〇進入第一二否 以計算新的設定值。 私决朿方塊340, ，料係蚊在本區或遠端進彳 ^ = ^ 例中，程序係藉由尋找原始程式 馬中的關鍵子（例如“ FUNCTI〇N，，）來做決 於本區執行，例如當TAp模組22〇的 : mn甘J 第一決朿方塊340進入到第 二狀怨350 ’其中係由讀取模組212進行上述之計曾。此 端執行時，程序係由第二決策方塊340 進入到第四狀態360 在第四狀態360中’程序係轉換對應之參數至轉換 對設定值進行遠端運算。轉換模組214係 依原始私式碼來決定執行運算，或依序傳 由模組224以及C0M+模組216中。接著、程序由第四 19 200523 75wlfd〇c/〇〇6 狀態360進入第五狀態370。 在第五狀態370中，程序係接收由轉換模組214 透過轉換模組214而由C0M+模組216傳送而來的新二 定值，並由第五狀態370進入第六狀態38〇。 认 在第六狀態380中，程序係傳遞新的設定值至步進 機。其中，新的設定值可透過第三狀態35〇進行本區運$， 或透過第四狀態360進行遠端運算而得。接著，結束程^， 並可視需求再反覆操作。 [使用路由模組224] 圖4A係繪示選擇一 TAPC〇M程序路由之路由模組 224所進行之程序的流程圖。在不脫離本發明的精神範圍 内，熟習此技藝者當能以多種不同的方式對上述之程序進 行修飾。此程序係由第一狀態4〇2開始。在第一狀態4〇2 中，路由模組224係連結至COM+模組216,以使用c〇M+ 模組216之資源。接著，程序由第一狀態4〇2進入 態 404。 — 、，在第二狀態404中，程序係轉換讀取模組212之資 料與/或指令至C0M+模組216中。當資訊轉換完成後，、 程序便移除與COM+模組216的連結。值得一提的是， 此私序亦可因應TAPCOM程序路由之呼叫而重複執行。Recall for analysis. The TAPC0M program routing process is described in detail in Figure 4A and its related summary. * COMTAP program routing corresponds to the data flow from the com + module to module 220 to execute program call instructions. In one embodiment, the data flow routed by the COMTAP program is an instruction to instruct the TAp module 22 to stop the manufacturing device 112. For example, the COM + module 216 can calculate when a program is stopped, and the COMTAP program routing provides a path for the TAP module 220 to receive the program STOP command from the COM + module 216. In one embodiment, when the TAp module 22 is waiting for data to be sent back by the COM + module 216, the tap module 22 may suspend the procedure of the instruction. The process of TAPCOM program routing is detailed in Figure 4B and its phase = description. ^ TAPCOMTAP program routing corresponds to the data flow from TAP module 22 to COM + module 216 and back to TAP module 220 to execute program call instructions. For example, the TAPCOMTAP program routing can send data to the COM + module 216, so that the COM + module 216 performs some analysis and calculation on the data of 20052¾¾ 63 63ff.doc / 006, and then returns the result to the TAp module 22. The process of TAPCOMTAP program routing is explained in detail in figure buckle and related convergence. The COMTAPCOM program routing corresponds to the data flow from the COM + module 216 to the TAP module 220 and back to the COM + module 216. COMTAPCOM program routing can be used to achieve the same purpose as the coMTAp program routing. In addition, the COMTAPCOM program routing allows data to return to the COM + module, so the program data collected by the TAP module 22 can be stored in the local database module 218 or the remote database module 202 , And / or can be displayed in the database display dress 204. The process of COMTAPCOM program routing is explained in detail in Figure 4D and related descriptions. [Using the reading module 212] FIG. 3 is a flowchart of a procedure in which the reading module 212 is applied to a stepper (example) in this article. In one embodiment, the program of the reading module 212 is explicitly specified by the source code of the TAP module 220 corresponding to the stepper, and the source code is an interpreter in the reading module 212 Interpret. In another implementation, the TAP module 220 includes code to complete the compilation. It is worth mentioning that the above principle can also be applied to other types of manufacturing devices U2. Those skilled in the art without departing from the spirit of the present invention can modify the above-mentioned procedures in a variety of different ways. For example, in another embodiment, different parts of the above-mentioned procedures may be combined with each other, alternately ordered with each other, or removed. This program starts from the first state 310, where the stepper enters the action of 18 200523751 08 1 63 twf.doc / 〇〇6 :. Next, the program enters the second state 320 from the first state, and the program communicates with the stepper to obtain information, such as the identification code (id_fc) of the stepper, the shape energy, etc. Possible to use = Mask, the program is in the second state 32. Enter the first decision-making machine: The top of the decision-making machine, the program is determined to be the attack value of Qian Xin stepping machine. The program can communicate with the tool control system 21 () to use the new slave value. It is expected that the riding rule will be used, and the program will enter the first and second no from the first decision block 33o to calculate the new set value. Private block 340, is expected to be mosquitoes in this area or remotely. ^ = ^ In the example, the procedure is determined by finding the key children (such as "FUNCTION,") in the original program horse. Zone execution, for example, when the TAp module 22: of the first decision block 340 enters the second state of complaint 350 ', which is performed by the reading module 212 as described above. When this end is executed, the program is The second decision block 340 enters the fourth state 360. In the fourth state 360, the program converts the corresponding parameter to the conversion and performs remote calculation on the set value. The conversion module 214 decides to perform the operation according to the original private code. Or sequentially transmitted by module 224 and COM + module 216. Then, the program enters the fifth state 370 from the fourth 19 200523 75wlfdoc / 〇〇6 state 360. In the fifth state 370, the program is received by the transition Module 214 The new two setting values transmitted by the COM + module 216 through the conversion module 214, and enter the sixth state 38 from the fifth state 370. It is recognized that in the sixth state 380, the program transfers the new settings Value to stepper. Among them, the new set value can be advanced through the third state 35 This area can be transported to $, or obtained through remote calculation through the fourth state 360. Then, end the process ^, and repeat the operation as needed. [Using the routing module 224] Figure 4A shows the selection of a TAPCOM routing. Flow chart of the procedure performed by the routing module 224. Without departing from the spirit of the present invention, those skilled in the art can modify the above-mentioned procedures in a variety of different ways. This procedure is from the first state 40. 2 starts. In the first state 402, the routing module 224 is connected to the COM + module 216 to use the resources of the com + module 216. Then, the program enters the state 404 from the first state 402. — In the second state 404, the program converts the data and / or instructions of the reading module 212 into the COM + module 216. After the information conversion is completed, the program removes the connection with the COM + module 216. It is worth It is mentioned that this private sequence can also be repeatedly executed in response to calls routed by the TAPCOM program.

圖4B係繪示選擇一 C0MTAP程序路由之路由模組 224所進行之程序的流程圖。在不脫離本發明的精神範園 内，熟習此技藝者當能以多種不同的方式對上述之程序進 行修飾。此程序例如可藉由一機台控制系統11〇之使用I 20 200523751 1 63twf.doc/006 進仃初始化。此程序係由第一狀態412開始，其中程序係 連結至讀取模組212。接著，程序由第一狀態412進入第 二狀態414。 在第二狀態414中，程序轉換c〇M+模組216之資 料與/或指令至讀取模組212中。此程序可藉由例如提供 一可將資料定位之資料，例如檔案名稱（Filename)、記 ，位址（Memory Address)與數元範圍（Byte Range)、 貧料庫記錄識別符碼（Database Record Identifier)等，來 增加資料轉換的速度。當資料之轉換結束後，程序便可移 籲 除與讀取模組212之連結。 圖4C係繪示選擇一 TAPCOMTAP程序路由之路由 模組224所進行之程序的流程圖。在不脫離本發明的精神 範圍内，熟習此技藝者當能以多種不同的方式對上述之程 序進行修飾。此程序係由一第一狀態422開始。在第一狀 態422中，路由模組224係連結至c〇m+模組216，以使 用COM+模組216之資源。接著，程序由第一狀態422 進入第二狀態424。 在第二狀態424中，程序轉換讀取模組212之資料 _ 與/或指令至COM+模組216中。當資料之轉換結束後， 程序便可移除在第一狀態422中與C0M+模組216所形 成之連結。接著，程序係由第二狀態424進入第三狀^ 426。在一實施例中，程序從第二狀態424至第三狀態426 時需等候一過渡期，直到C0M+模組216完成提供所需 資料的準備。舉例而言，TAPCOMTAP程序路由可用以 21 200523751 〇8 1《3 twf.doc/0〇6 3製f裝置112傳送資料至COM+模組216中，以對資 ^^’並回收分析後的資料^序可等候直到0— f 準備好輸出分析後之資料為止。值得-提的是， ί Ϊ與^由多種方式判斷，例如自CO胳模組216 收-斷訊號、徵詢（P〇lling ) 一狀態旗諸（s咖 ） 等。 在第三狀態426甲，程序係連結至讀取模組2〗2，以FIG. 4B is a flowchart illustrating a procedure performed by the routing module 224 for selecting a COMTAP program route. Those skilled in the art can modify the above procedures in many different ways without departing from the spirit of the invention. This program can be initialized, for example, by using a machine control system 110. I 20 200523751 1 63twf.doc / 006. This procedure starts from the first state 412, where the procedure is connected to the reading module 212. Then, the program goes from the first state 412 to the second state 414. In the second state 414, the program transfers the data and / or instructions of the COM + module 216 to the reading module 212. This procedure can provide data that can locate data, such as Filename, Memory, Memory Address, and Byte Range, and Database Record Identifier. ), Etc. to increase the speed of data conversion. After the data conversion is completed, the program can remove the connection with the reading module 212. FIG. 4C is a flowchart showing a procedure performed by the routing module 224 for selecting a TAPCOMTAP procedure route. Those skilled in the art can modify the above procedures in many different ways without departing from the spirit of the present invention. This process starts with a first state 422. In the first state 422, the routing module 224 is connected to the com + module 216 to use the resources of the COM + module 216. Then, the program enters the second state 424 from the first state 422. In the second state 424, the program converts the data _ and / or instructions of the reading module 212 into the COM + module 216. When the data conversion is completed, the program can remove the connection formed with the COM + module 216 in the first state 422. Then, the program enters the third state 426 from the second state 424. In one embodiment, the program needs to wait for a transition period from the second state 424 to the third state 426 until the COM + module 216 is ready to provide the required data. For example, the TAPCOMTAP program routing can be used to send data to the COM + module 216 in 21 200523751 〇1 1 3 twf.doc / 0〇3 3 f device 112, to analyze the data ^^ 'and recover the analyzed data ^ The sequence can wait until 0-f is ready to output the analyzed data. It is worth mentioning that ί and ^ are judged in various ways, such as receiving and breaking signals from the CO module 216, and inquiring (Polling) a status flag (sca). In the third state 426A, the program is linked to the reading module 2 2

回傳相關#料。接著，程序由第三狀態426進入第四狀態 428 〇 j第四狀態428中，程序由c〇M+模組216轉換資 料至4取模組212。此程序可藉由例如提供一可將資料定 位之資料，例如檔案名稱（Filename )、記憶位址（Mem〇iyReturn related # 料. Then, the program changes from the third state 426 to the fourth state 428. In the fourth state 428, the program changes the data from the com + module 216 to the 4 fetch module 212. This procedure can be provided by, for example, providing data that can locate data, such as file name (Filename), memory address (Mem〇iy

Address)與數元範圍（ByteRange)、資料庫記錄識別符 碼（Database RecordIdentifler)等，來增加資料轉換的速 度。當資料之轉換結束後，程序便可移除與讀取模組212 之連結。 'Address), ByteRange, Database RecordIdentifler, etc., to increase the speed of data conversion. After the data conversion is completed, the program can remove the connection with the reading module 212. '

圖4D係緣不選擇一 COMTAPCOM程序路由之路由 模組224所進行之程序的流程圖。在不脫離本發明的精神 範圍内，熟習此技藝者當能以多種不同的方式對上述之程 序進行修飾。此程序例如可藉由一機台控制系統11〇之使 用者進行初始化。此程序係由第一狀態432開始，其中程 序係連結至讀取模組212。接著，程序由第一狀態432進 入第一狀態434。 在第二狀態434中，程序轉換COM+模組216之資 22 2〇〇523751d〇c/〇〇6 料與/或指令至讀取模組212中。當資料之轉換結束後， 程序便可移除與讀取模組212之連結。在一實施例中，程 序從第二狀態434至第三狀態436時需等候一過渡期，直 到COM+模組216完成提供所需資料的準備。舉例而言， COMTAPCQM程序路由可用以從製造|置112傳送一命 々至COM+模組216巾’例如一停止程序的命令。此外， COMTAPCOM程序路由可用以接收製造裝置112回傳之 狀心例如特疋之程序是否成功執行之指示。程序可能需 等候’直到讀取模、组212輸出一指令，表示已在進入第三 狀態436之前完成第二狀態434之相關任務為止。值得一 提的是，資料就緒與否可由多種方式判斷，例如自讀取模 組216接收一中斷訊號、徵詢（p〇lling)一狀態旗誌（s^tus Flag)等。 在第三狀態436中，路由模組224係連結至c〇M+ 模組216，以回傳資料至c〇M+模組216。接著，程序由 第三狀態436進入第四狀態438。 在第四狀態438中，程序由讀取模組212轉換資料 至COM+模組216。當資料之轉換結束後，程序移 與COM+模組之連結。 移除 [使用COM+模組] 圖5A係繪示選擇一 TApc〇M程序路由戋 TAPCOMTAP程序路由之c〇M+模組216所進行之取^ 操作的流程圖。舉例而言，讀取模組212所解譯之一指人 可取決進行TAPCOM或TAPCOMTAP程序路由。在^ 23 8 1 63twf.d〇c/〇〇6 200523751 圍内，熟習此技藝者當能以多種不同 進行修部。舉例而言，在另-實施例 ϋ狡 序同部分可相互結合、相互交替排序、 或被移除等。此程序由第—狀態·開始。 之於510巾，程序係接收來自讀取模組212 ::”或貧料。值得-提的是，上述之指令盥/¾資料 資料’例如常駐於本區資料賴組= 退知貝料庫阻202之資μ 4立# 士 進入第二狀態520 4。接者，程序係由第一狀態510 隹弟 〜、 中，程序係執行由指令、所提供之 ^料等所指定之任務，复可Ab勺 b 八 ^ X 月匕包括靜恶分析等。當任務準 備凡成後:程序便由第二狀態別進人第三狀態53〇。 在第一狀恶530巾’程序依照指示配置資料。舉例 來說，若程序路由係由指令指定為—ΤΑρα)Μ路徑，則 =可儲雜算結果至本區㈣賴組2 ^搬中，並在資料庫顯示裝置綱中展示計算結果 1 寺。在另一例子中，程序路由係由指令指定為一 ^apcomtap路徑’難序可透過路由模組224回 算結果至讀取模組212中。 圖5B係繪示選擇一 c〇MTAp程序路由 COMTAPCOM程序路由之C0M+模组216所進行之取樣 操作的流程圖。在不脫離本發明的精神範圍内，熟習此技 藝者當能以多種不_方式對上述之程序進行修飾^例 而言’在另-實施射，上述之程序的不同部分可相互社 200523751 08 1 63 twf.doc/006 合、相互交替排序、或被移除等。此程序由第一狀態540 開始。 在第一狀態540中，程序係接收來自機台控制系統工1〇 =使=者的命令（command )或指示（Instmcti〇n )。值 得一，的是，上述之使用者並非限定為人員。命令係可取 自一資料輸入裝置，例如滑鼠或鍵盤，或可取自另一主機 系統。接著、，程序係由第一狀態54〇進入一決策方塊55〇。 在決策方塊550中，程序係決定程序路由選擇為 COMTAP程序路由或c〇MTApc〇M程序路由。當程序 路由為03MTAP型態時，程序係由決策方塊55〇進入一 第二狀態560。否則，程序則由決策方塊55〇進入一第三 狀態570。 、在第二狀態560中，程序轉換使用者選擇之資料與/ 或指令至讀取模組212内。舉例而言，上述之資料例如可 為一使製造裝置112停機之命令。接著，程序結束。 在第三狀態570中，程序亦會轉換使用者自c〇M+ 模組216所選擇之資料與/或指令至讀取模組212内。接 著，在由第三狀態570進入第四狀態58〇之前，程序便會 4待直到讀取模組212完成要求之動作。 在第四狀態580中，程序接收來自讀取模組212之 特定資訊，其例如可對應所選擇的命令是否由製造裝置 112成功執行。接著，程序結束，並可視需求再反覆操作。 雖然本發明已以佳實施例揭露如上，然其並非用以 限定本發明，任何熟習此技藝者，在不脫離本發明之精神 200523751 08 1 63twf.doc/〇〇6 和辄圍内，當可作些許之更動與潤飾，因此本發明 範圍當視_之申請專·圍所界定者鱗。 … 【圖式簡單說明】 圖1繪不為應用於製造環境之一主機系統的例子。 圖2繪不為本發明之較佳實施例的一種機台控制 、统。 ’、 圖3繪示為本文之讀取模組應用於步進機一例之 序的流程圖。 圖4A繪示為選擇一 TAPC〇M程序路由之路由模組 ❿ 所進行之程序的流程圖。 一 圖4B繪示為選擇一 C0MTAP程序路由之路由模組 所進行之程序的流程圖。 〜 圖4C繪示為選擇一 TAPC0MTAP程序路由之路由 模組所進行之程序的流程圖。 圖4D繪示為選擇一 COMTAPCOM程序路由之路由 模組所進行之程序的流程圖。 圖5A繪示為選擇一 TAPC0M程序路由或 TAPCOMTAP程序路由之C0M+模組所進行之取樣操作 ® 的流程圖。 μ 圖5Β繪示為選擇一 C0MTAP程序路由或 COMTAPCOM程序路由之COM+模組所進行之取樣操作 的流程圖。 μ 【主要元件符號說明】 100 :主機整合製造系統 26 200523751 0 8 1 6 3 twf. do c/0 0 6 102 製造執行系統 104 企業資源規劃管理系統 110 機台控制系統 112 裝置 202 遠端資料庫模組 204 資料庫顯示裝置 206 其他製造執行系統 210 工具控制系統 212 讀取模組 214 轉換模組 216 C0M+模組 218 本區資料庫模組 220 TAP模組 222 前轉換模組 224 路由模組 步驟310 :初始化 步驟320 :與步進機通訊 步驟330 :是否更新設定 步驟340 :是否使用轉換模組 步驟350 ··在本區計算新設定 步驟360 ··在遠端計算新設定 步驟370 :接收新設定 步驟380 ··傳送新設定至步進機 步驟402 :連結COM+模組 27 08 1 63twf.doc/006 200523751 步驟404 :轉換資料與/或指令 步驟412 :連結至讀取模組 步驟414 :轉換資料與/或指令 步驟422 :連結至COM+模組 步驟424 :轉換資料與/或指令 步驟426 :連結至讀取模組 步驟428 :轉換資料 步驟432 :連結至讀取模組 步驟434 :轉換資料與/或指令 ® 步驟436 :連結至COM+模組 步驟438 :轉換資料 步驟510 :接收指令與/或資料 步驟520 :執行要求之運算 步驟530 :依照指示配置資料 步驟540 :由使用者接收命令 步驟550 :決定路徑之類型 步驟560 :轉換資料與/或指令至讀取模組 _ 步驟570 :轉換資料與/或指令至讀取模組 步驟580:自讀取模組接收資訊 28FIG. 4D is a flowchart of a process performed by a routing module 224 that does not select a COMTAPCOM program route. Those skilled in the art can modify the above procedures in many different ways without departing from the spirit of the present invention. This program can be initialized, for example, by the user of a machine control system 110. This procedure starts from the first state 432, where the procedure is connected to the reading module 212. Then, the program enters the first state 434 from the first state 432. In the second state 434, the program converts the data of the COM + module 216 to 22 00523751doc / 006 into the reading module 212. After the data conversion is completed, the program can remove the connection with the reading module 212. In one embodiment, the program needs to wait for a transition period from the second state 434 to the third state 436 until the COM + module 216 is ready to provide the required data. For example, COMTAPCQM program routing can be used to transfer a command from the manufacturing device 112 to the COM + module 216 ', such as a command to stop the program. In addition, COMTAPCOM program routing can be used to receive an indication from the manufacturing device 112 that the center of gravity, such as a special program, was successfully executed. The program may need to wait until the read module and the group 212 output an instruction indicating that the tasks related to the second state 434 have been completed before entering the third state 436. It is worth mentioning that whether the data is ready or not can be determined in various ways, such as receiving an interrupt signal from the reading module 216, polling a status flag (s ^ tus Flag), and so on. In the third state 436, the routing module 224 is connected to the com + module 216 to return data to the com + module 216. Then, the program goes from the third state 436 to the fourth state 438. In the fourth state 438, the program converts data from the reading module 212 to the COM + module 216. When the data conversion is completed, the program moves to the COM + module. Remove [Use COM + module] Figure 5A is a flow chart showing the operation of selecting a TApc〇M program route 戋 TAPCOMTAP program route om + module 216. For example, one of the interpretations of the reading module 212 means that a person may depend on TAPCOM or TAPCOMTAP program routing. Within the range of ^ 23 8 1 63twf.d〇c / 〇〇6 200523751, those skilled in this art should be able to repair in many different ways. For example, in another embodiment, the same parts may be combined with each other, alternately sorted with each other, or removed. This procedure starts with the first state. For 510 towels, the program receives the data from the reading module 212 :: "or the poor material. It is worth mentioning that the above instruction / ¾ data information 'for example, the data resident group resident in this area = retired shellfish library 202202 的 资 μ 4 立 # 士 Enter the second state 520 4. Then, the program is from the first state 510 510 中, 〜, and the program is to perform the tasks specified by instructions, materials provided, etc. But Ab spoon b eight ^ X month dagger includes static and evil analysis, etc. When the task is ready to complete: the program will enter the second state into the third state 53. In the first state of evil 530, the program configures the data according to the instructions. . For example, if the program routing is specified by the instruction as-ΤΑρα) M path, then the miscellaneous calculation results can be stored in the local Lai Group 2 ^, and the calculation results will be displayed in the database display device outline. In another example, the program routing is designated by the instruction as a ^ apcomtap path 'difficult order can be returned to the reading module 212 through the routing module 224. Figure 5B shows the selection of a coMTAp program routing. Flow chart of the sampling operation performed by the COM0 COM module routing COM0 module 216. Without departing from the spirit of the present invention, those skilled in the art can modify the above-mentioned procedures in a variety of ways. For example, in the case of another-implementation, different parts of the above-mentioned procedures can be used by each other. 200523751 08 1 63 twf .doc / 006 combined, alternated with each other, or removed, etc. This program starts from the first state 540. In the first state 540, the program receives a command from the machine control system worker 10 = = = ( command) or instruction (Instmcti0n). It is worth noting that the above-mentioned users are not limited to personnel. Commands can be taken from a data input device, such as a mouse or keyboard, or can be taken from another host system. Then, the program system enters a decision block 55 from the first state 54. In decision block 550, the program decides whether the program routing is a COMTAP program routing or a coMTPApcm program routing. When the program routing is a 03MTAP type At this time, the program enters a second state 560 from decision block 55. Otherwise, the program enters a third state 570 from decision block 55. In the second state 560, the program converts the data selected by the user. / Or the instruction is read into the reading module 212. For example, the above-mentioned data may be, for example, a command to stop the manufacturing device 112. Then, the procedure ends. In the third state 570, the procedure also converts the user from c. 〇M + module 216 selects the data and / or instructions into the reading module 212. Then, before the third state 570 enters the fourth state 58, the program will wait until the reading module 212 completes the request In the fourth state 580, the program receives specific information from the reading module 212, which may correspond to, for example, whether the selected command was successfully executed by the manufacturing device 112. Then, the program ends and can be repeated as needed. Although the present invention has been disclosed in the preferred embodiment as above, it is not intended to limit the present invention. Any person skilled in the art will not depart from the spirit of the present invention 200523751 08 1 63twf.doc / 〇〇6 and should be able to Make a few changes and retouching, so the scope of the present invention should be defined by the application's application. … [Schematic description] Figure 1 is not an example of a host system used in a manufacturing environment. FIG. 2 illustrates a machine control system of a preferred embodiment of the present invention. ′, FIG. 3 shows a flowchart of an example of the application of the reading module in this paper to a stepper. FIG. 4A shows a flowchart of a process performed by the routing module 选择 for selecting a TAPCOM program route. FIG. 4B shows a flowchart of a process performed to select a routing module for a COMTAP process. ~ Figure 4C shows a flowchart of the process performed by a routing module that selects a TAPC0MTAP process route. FIG. 4D shows a flowchart of a process performed by a routing module for selecting a COMTAPCOM program route. FIG. 5A shows a flowchart of the sampling operation ® performed by selecting a COM + module of a TAPC0M program route or a TAPCOMTAP program route. Figure 5B shows a flowchart of the sampling operation performed by a COM + module that selects a COMTAP program route or COMTAPCOM program route. μ [Description of main component symbols] 100: Host integrated manufacturing system 26 200523751 0 8 1 6 3 twf. do c / 0 0 6 102 Manufacturing execution system 104 Enterprise resource planning management system 110 Machine control system 112 Device 202 Remote database Module 204 Database display device 206 Other manufacturing execution system 210 Tool control system 212 Read module 214 Conversion module 216 C0M + module 218 Database module in this area 220 TAP module 222 Front conversion module 224 Routing module steps 310: initialization step 320: communication with stepper step 330: whether to update the setting step 340: whether to use the conversion module step 350 ... calculate the new setting in this area step 360 ... calculate the new setting at the remote step 370: receive the new Setting step 380 · Send new settings to the stepper Step 402: Connect COM + module 27 08 1 63twf.doc / 006 200523751 Step 404: Convert data and / or instructions Step 412: Link to read module Step 414: Conversion Data and / or instruction Step 422: Link to COM + module Step 424: Convert data and / or instruction Step 426: Link to read module Step 428: Convert data step 432: Link to read module Step 434: Convert data and / or instructions® Step 436: Link to COM + module Step 438: Convert data Step 510: Receive instructions and / or data Step 520: Perform requested operation Step 530: Configure the data according to the instructions. Step 540: Receive the command by the user. Step 550: Determine the type of the path. Step 560: Convert the data and / or instructions to the reading module. Step 570: Convert the data and / or instructions to the reading module. Step 580. : Self-reading module receives information 28

Claims (1)

200523751 十、申請專利範圍： L一種機台控制系統，包括： 工具控制系統，用以與耦接至該機台控制系統 一製造執行系統通訊，以接收製造執行系統之一指二、、、，、 提供機台控制系統之狀態； 7 並 一讀取模組，用以與該工具控制系統以及至少— 造裝置通訊，其中讀取模組包括一解譯器，用以對一 i 式碼係適於控制該製造裝置； 一轉換模組，係與該讀取模組通訊，其中壹諸200523751 10. Scope of patent application: L A machine control system, including: a tool control system, used to communicate with a manufacturing execution system coupled to the machine control system, to receive one of the manufacturing execution system, two ,,,, Provide the status of the machine control system; 7 and a reading module to communicate with the tool control system and at least-manufacturing equipment, wherein the reading module includes an interpreter for the i-type code system Suitable for controlling the manufacturing device; a conversion module, which communicates with the reading module, of which 几心々;处狂LUlVl+格式之原始程式碼。A few heartfelt; mad at the source code of LUlVl + format. I '4 |；7^彳否· 一前轉換模組， 模組之原始喊碼騎解譯，且該TAP馳之該原3I '4 |; 7 ^ 彳 No · A forward conversion module, the original yaw code of the module is interpreted, and the original 3 用以控制該讀取模組與該 COM+模組 該指令傳送至該C〇M+模組；以及 一路由模組，用以控制該讀 間之資訊的通路。 機台控制系統，其中 4.如申請專利範圍第3項所述之 29 200523751 08 1 63twf.doc/006 該讀取模組、該前轉換模組以及該路由模組包括祖播 案’而COM+模組包括C0M+格式之播案。 ;5.如申專職圍第〗項所述之機台控制系統，其中 5亥TAP拉叙之原始程式碼包括可由該讀取模組解譯與執 行之指令，並包括呼叫輯取·之外部函式的指令。 6.如申請專利範圍第j項所述之機台控制系統，立中 該轉換模組係至少與選自 tapcomtap以及〇)MTAPC〇m四個程序路由的至少 其中之一相呼應（ResPGnsive)，該TAPCOM程序路由 係對應於由該TAP触至該〇)驗模組之走向的資料 流，而該COMTAP程序路由係對應於由該c〇M+模組至 該TAP模組之走向的資料流，該TApc〇MTAp程序路由 係對應於㈣TAP额至該CQM+Hji且再回到該 TAP模組之走向的資料流，而該c〇Mtapc〇m程序路^ 係對應於由該COM+模組至該TAP模組，並且 COM+模組之走向的資料流。 7.如申請專利範圍第6項所述之機台控制系統，其 該轉換模組更用以等待該TAPC0MTAP程序路由處ς一 指令，當提供該COM+模組資訊時，便開始等待的動作了 而在COM+模組準備好提供資料之後，便結束等待的動 8.如申請專利範圍第6項所述之機台控制系統，其 該轉換模組更用以等待該COMTAPCOM程序路由處^里一 指令，當提供該TAP模組資訊時，便開始等待的動作— 30 200523751 08 1 63twf.doc/0〇6 而在TAP模組準備好提供要求的資料之後，便結束等待 的動作。 9·一種控制製造裝置的方法，包括·· 與一製造執行系統通訊，而決定是否使用新設定； 自該製造執行系統接收關於新設定之一第一組參 數； 依據一第一組指令，而控制一製造裝置； 在該第一組指令内擷取關於新設定之一指令； 連結至一 COM+模組，以轉換該第一組參數至該 COM+模組；以及 卜等待直到該COM+模組完成對一第二組參數之運 算，其中忒第二組參數係由該第一組參數計算而得，並可 直接為該製造裝置所用。 10·如申請專利範圍第9項所述之方法，其中該製造 裝置包括半導體製造裝置。 11·如申請專利範圍第9項所述之方法，更包括執行 該COM+模組内的程式碼，其係以c〇M+格式所寫成。 12·如申請專利範圍第u項所述之方法，其中該製造 虞置係由一第一操作系統控制，而於該c〇M+模組内執 行之程式碼係由不同於該第—操作系統之—第二操 所產生。 、％ ^ U·如申請專利範圍第12項所述之方法，其中該第一 操作系統係IBM® 〇獅，而該第二操作系 Microsoft⑧ Windows⑧。 糸 200523751 08 1 63twf.doc/〇〇6 • 14·如申請專利範圍第13項所述之方法，更包括使用 Visual Basic®、java以及C++至少其中之一所產生之可執 行的程式碼，以作為該第二操作系統之該COM+模組所 執行的程式碼。 b·如申請專利範圍第9項所述之方法，其中控制該 製造裝置係指對原始程式碼進行解譯。 16.—種控制一主機指令之程序路徑的方法，包括： 接收來自一 TAP模組之一指令，其係指定一讀取模 組遠端之一函式的執行，其中該TAP模組係於該讀取模 組内執行，且該TAP模組係控制一製造裝置之程序；、 檢閱該指令，以找出一對應參數，其係指定該遠端 所執行之一程序路徑； 連結至具有該函式之執行程式碼的該C〇m+模組， 且當該參數指定由該TAP模組至該C0M+模組之一程序 路徑時，提供該C0M+模組所對應之資訊；以及 連結至具有該函式之執行程式碼的該c〇M+模組， 提供該COM+模組所對應之資訊，等待該c〇M+模組完 成該函式的計算，當該COM+模組準備好提供資料時， 連結至用以執行來自該TAP模組之程式碼的該讀取模 、、且^該參數指疋由5亥TAP模組流出之一程序路徑時， 提供運算的結果，繼續進行至該C〇m+模組，並回到該TAp 模組。 17·如申請專利範圍第16項所述之方法，其中該 COM+模組所對應之資訊包括資料與指令。 32 200523751 08 1 63twf.doc/〇〇6 18:如申請專利範圍第16項所述之方法，更包括： 自遠COM+模組接收一指令，以作為將於該TAp模 組内執行之一函式所用；以及 連結至該讀取模組，並提供該讀取模組對應之資訊， 以在該參數指定由該CQM+歡至該TAP模組之一程序 參數時，可為TAP模組所用。 19·如申請專利範圍第16項所述之方法，更包括： 自該COM+模組接收一指令，以作為將於該 TAP模 組内執行之-函式所用，其中該指令更指㈣τΑρ模組 # 回送一第二資訊；以及 連結至邊項取模組，並提供該讀取模組一第一資訊， 以使該TAP模組可使用該第一資訊，等待該TAp模組準 備好提供該第二資訊，自該讀取模組接收該第二資訊，當 該參數指定自該COM+模組流至該TAP模組，再回到二 COM+模組之一程序路徑時，提供該第二資訊至該c〇M^ 模組。 ^ 2〇·如申請專利範圍第16項所述之方法，其中該TAp ^ 模組係對應至原始程式碼，且該讀取模組藉由對該ΤΑρ 模組之原始程式碼進行解譯，以執行該原始程式碼。 21·如申請專利範圍第16項所述之方法，其中該製造 裝置包括半導體製造裝置。 人、 22·—種具有主機-可執行指令之主機—可讀式媒體 (Medium)，用以執行一方法，包括·· 接收來自一 TAP模組之一指令，其係指定一讀取模 33 200523751 08 1 63twf.doc/006 函式的執行’其中該TAP模組係於該讀取模 組内^丁，且該TAP模組係控制-製造裝置之程序’· 檢閱m旨令，域出—對應參數 定 所執行之一程序路徑； 响 連、、、口至具有该函式之執行程式碼的該⑶模組， TAP模組至該c〇m+模組之一程序 禮時，提供該COM+模組所對應之資訊；以及 連結至具有该函式之齡程柄之該CQM+模組， ^供該c〇M+模組所對應之資訊，等待該c〇m+模组完 函式的計算，f C0M+模組準備好提供資料時，連 : = 來㈣TAP模組之程式碼的該讀取模組， 指疋由TAP模組流出之一程序路徑時，提供運 异的、、、。果’繼續進行至CQM+模組，並_ TAp模组。 23—如巾料鄕圍第22顿叙魅機可讀式媒 一更匕括主機·可執行指令，以執行一方法，包括： 自該COM+模組接收一指令，以作為將於該ΤΑρ模 、，且内執行之一函式所用；以及 、 、連結至該讀取模組，並提供該讀取模組對應之資訊， 以在該參數指定由該COM+模組至該TAp模組之一程 參數時，可為TAP模組所用。 、、、 壬 24·如申請專利範圍第22項所述之該主機_可讀式媒 體，更包括主機-可執行指令，以執行一方法，包括： 自該COM+模組接收一指令，以作為將於該τΑρ模 組内執行之一函式所用，其中該指令更指定該τΑρ模= 34 200523751 08 1 63 twf.doc/006 回送一第二資訊；以及 連結至該讀取模組，並提供該讀取模組一第一資訊， 以使該TAP模組可使用該第一資訊，等待該TAP模組準 備好提供該第二資訊，自該讀取模組接收該第二資訊，當 該參數指定自該COM+模組流至該TAP模組，再回到該 COM+模組之一程序路徑時，提供該第二資訊至該COM+ 模組。It is used to control the reading module and the COM + module. The command is transmitted to the COM + module; and a routing module is used to control the information path of the reading room. Machine control system, including 4. As described in item 3 of the scope of patent application 29 200523751 08 1 63twf.doc / 006 The reading module, the front conversion module and the routing module include the ancestral case, and COM + Modules include broadcasts in C0M + format. ; 5. The machine control system as described in the section of Shenzhezhuanwei, where the original code of 5H TAP pull-out includes instructions that can be interpreted and executed by the reading module, and includes external call collection Function instructions. 6. The machine control system as described in item j of the scope of patent application, the conversion module of Lizhong responds to at least one of four program routes selected from tapcomtap and 0) MTAPC0m (ResPGnsive), The TAPCOM program route corresponds to the data flow from the TAP to the test module, and the COMTAP program route corresponds to the data flow from the com + module to the TAP module. The TApc〇MTAp program route corresponds to the data flow from the ㈣TAP amount to the CQM + Hji and back to the TAP module, and the coMtapc〇m program route ^ corresponds to the COM + module to the TAP module, and the data flow of COM + module. 7. According to the machine control system described in item 6 of the scope of patent application, the conversion module is further used to wait for an instruction from the TAPC0MTAP program routing office. When the COM + module information is provided, the waiting action is started. After the COM + module is ready to provide the data, the waiting operation ends. 8. As for the machine control system described in item 6 of the scope of patent application, the conversion module is used to wait for the COMTAPCOM program routing office. Command, when the TAP module information is provided, it starts the waiting action — 30 200523751 08 1 63twf.doc / 0〇6 and after the TAP module is ready to provide the required information, the waiting action ends. 9. A method of controlling a manufacturing device, comprising: communicating with a manufacturing execution system to determine whether to use a new setting; receiving a first set of parameters regarding the new setting from the manufacturing execution system; and according to a first set of instructions, and Control a manufacturing device; retrieve one of the new settings within the first set of instructions; link to a COM + module to convert the first set of parameters to the COM + module; and wait until the COM + module is complete The calculation of a second set of parameters, where the second set of parameters is calculated from the first set of parameters and can be directly used by the manufacturing device. 10. The method according to item 9 of the scope of patent application, wherein the manufacturing apparatus includes a semiconductor manufacturing apparatus. 11. The method described in item 9 of the scope of patent application, further comprising executing the code in the COM + module, which is written in the format of com +. 12. The method as described in item u of the scope of patent application, wherein the manufacturing equipment is controlled by a first operating system, and the code executed in the coM + module is different from the first operating system -The second exercise. % ^ U. The method as described in item 12 of the patent application scope, wherein the first operating system is IBM® Lion and the second operating system is Microsoft® Windows®.糸 200523751 08 1 63twf.doc / 〇〇6 • 14. The method described in item 13 of the scope of patent application, including the use of executable code generated by at least one of Visual Basic®, java, and C ++, to As the code executed by the COM + module of the second operating system. b. The method according to item 9 of the scope of patent application, wherein controlling the manufacturing device means interpreting the original code. 16. A method for controlling a program path of a host command, including: receiving a command from a TAP module, which specifies the execution of a function at the remote end of a reading module, wherein the TAP module is Executed in the reading module, and the TAP module is a program that controls a manufacturing device; Review the instruction to find a corresponding parameter, which specifies a program path executed by the remote end; Function to execute the code of the Cm + module, and when the parameter specifies a program path from the TAP module to the C0M + module, provide information corresponding to the C0M + module; The com + module that executes the code of the function provides the information corresponding to the COM + module, waiting for the com + module to complete the calculation of the function. When the COM + module is ready to provide data, link To the reading module for executing the code from the TAP module, and ^ the parameter refers to a program path flowing out of the 5H TAP module, providing the result of the operation, and proceeding to the Cm + Module and return to the TAp module. 17. The method according to item 16 of the scope of patent application, wherein the information corresponding to the COM + module includes data and instructions. 32 200523751 08 1 63twf.doc / 〇〇6 18: The method described in item 16 of the scope of patent application, further comprising: receiving a command from Yuan COM + module as a function to be executed in the TAp module And is connected to the reading module and provides the corresponding information of the reading module, so that when the parameter specifies a program parameter from the CQM + to the TAP module, it can be used by the TAP module. 19. The method as described in item 16 of the scope of patent application, further comprising: receiving an instruction from the COM + module as a function to be executed in the TAP module, wherein the instruction further refers to the ㈣τΑρ module # Return a second information; and link to the side item fetch module, and provide the read module a first information, so that the TAP module can use the first information, waiting for the TAp module to be ready to provide the The second information is received from the reading module, and the second information is provided when the parameter specifies the flow from the COM + module to the TAP module and then returns to one of the program paths of the two COM + modules. To the coM ^ module. ^ 2〇. The method as described in item 16 of the scope of patent application, wherein the TAp ^ module corresponds to the original code, and the reading module interprets the original code of the TAP module, To run the source code. 21. The method according to item 16 of the scope of patent application, wherein the manufacturing apparatus includes a semiconductor manufacturing apparatus. Human, 22 · —A host with a host-executable instruction—a readable medium (Medium) for performing a method, including receiving a command from a TAP module, which specifies a reading module 33 200523751 08 1 63twf.doc / 006 The execution of the function 'where the TAP module is in the reading module ^, and the TAP module is a control-manufacturing device process' — Corresponding parameters determine one program path to be executed; Xianglian, ,, mouth to the ⑶ module with the execution code of the function, TAP module to one of the com + modules The information corresponding to the COM + module; and the CQM + module linked to the aging handle of the function, ^ for the information corresponding to the coM + module, waiting for the function calculation of the com + module, f When the C0M + module is ready to provide data, connect: = the reading module that comes from the code of the TAP module, which means that when a program path flows out of the TAP module, it provides different operations. Result ’continues to the CQM + module and _ TAp module. 23—If the material is around the 22nd frame, the machine can read the media. The host can execute the instructions to execute a method, including: receiving an instruction from the COM + module as a command to the ATP , And used to execute one of the functions; and,, connected to the reading module and providing the corresponding information of the reading module to specify from the COM + module to one of the TAp modules in the parameter It can be used by the TAP module when the parameters are set. 24. The host-readable medium as described in item 22 of the scope of patent application, including host-executable instructions to execute a method, including: receiving an instruction from the COM + module as A function to be executed in the τΑρ module, where the command specifies the τΑρ module = 34 200523751 08 1 63 twf.doc / 006 returns a second message; and links to the reading module and provides The reading module has first information so that the TAP module can use the first information, wait for the TAP module to be ready to provide the second information, and receive the second information from the reading module. The parameter specifies that when the COM + module flows to the TAP module and returns to a program path of the COM + module, the second information is provided to the COM + module.