TW200520023A - Imager with tuned color filter - Google Patents

Imager with tuned color filter

Info

Publication number
TW200520023A
TW200520023A TW093116557A TW93116557A TW200520023A TW 200520023 A TW200520023 A TW 200520023A TW 093116557 A TW093116557 A TW 093116557A TW 93116557 A TW93116557 A TW 93116557A TW 200520023 A TW200520023 A TW 200520023A
Authority
TW
Taiwan
Prior art keywords
color filter
imager
tuned color
layers
filter array
Prior art date
Application number
TW093116557A
Other languages
English (en)
Other versions
TWI245318B (en
Inventor
William M Hiatt
Ulrich C Boettiger
Jeffrey A Mckee
Original Assignee
Micron Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micron Technology Inc filed Critical Micron Technology Inc
Publication of TW200520023A publication Critical patent/TW200520023A/zh
Application granted granted Critical
Publication of TWI245318B publication Critical patent/TWI245318B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/1462—Coatings
    • H01L27/14621—Colour filter arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
    • H01L27/14685—Process for coatings or optical elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0232—Optical elements or arrangements associated with the device
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/10—Circuitry of solid-state image sensors [SSIS]; Control thereof for transforming different wavelengths into image signals
    • H04N25/11—Arrangement of colour filter arrays [CFA]; Filter mosaics
    • H04N25/13—Arrangement of colour filter arrays [CFA]; Filter mosaics characterised by the spectral characteristics of the filter elements
    • H04N25/134—Arrangement of colour filter arrays [CFA]; Filter mosaics characterised by the spectral characteristics of the filter elements based on three different wavelength filter elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/14625—Optical elements or arrangements associated with the device

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Optical Filters (AREA)
  • Color Television Image Signal Generators (AREA)
TW093116557A 2003-06-09 2004-06-09 Imager with tuned color filter TWI245318B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/456,585 US7502058B2 (en) 2003-06-09 2003-06-09 Imager with tuned color filter

Publications (2)

Publication Number Publication Date
TW200520023A true TW200520023A (en) 2005-06-16
TWI245318B TWI245318B (en) 2005-12-11

Family

ID=33490197

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093116557A TWI245318B (en) 2003-06-09 2004-06-09 Imager with tuned color filter

Country Status (7)

Country Link
US (2) US7502058B2 (zh)
EP (1) EP1639647B1 (zh)
JP (2) JP2007516609A (zh)
KR (3) KR20090069345A (zh)
CN (1) CN100442529C (zh)
TW (1) TWI245318B (zh)
WO (1) WO2004112137A2 (zh)

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US20090086064A1 (en) * 2007-09-27 2009-04-02 Micron Technology, Inc. Dynamic adaptive color filter array
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US20110068426A1 (en) * 2009-09-22 2011-03-24 Intersil Americas Inc. Photodiodes and methods for fabricating photodiodes
JP5937767B2 (ja) * 2013-09-27 2016-06-22 富士フイルム株式会社 撮像装置及び撮像方法
EP3171587A4 (en) * 2014-07-16 2018-03-14 Sony Corporation Compound-eye imaging device
US10367019B2 (en) * 2015-01-29 2019-07-30 Taiwan Semiconductor Manufacturing Co., Ltd. CMOS image sensor structure with crosstalk improvement
US10515991B2 (en) * 2015-04-17 2019-12-24 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor structure and manufacturing method thereof
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Also Published As

Publication number Publication date
KR20060017857A (ko) 2006-02-27
US8105862B2 (en) 2012-01-31
CN1833321A (zh) 2006-09-13
KR20090069345A (ko) 2009-06-30
US7502058B2 (en) 2009-03-10
WO2004112137A3 (en) 2005-04-14
WO2004112137A2 (en) 2004-12-23
KR100916275B1 (ko) 2009-09-10
TWI245318B (en) 2005-12-11
CN100442529C (zh) 2008-12-10
JP5335747B2 (ja) 2013-11-06
JP2011049564A (ja) 2011-03-10
KR100815344B1 (ko) 2008-03-19
US20090142709A1 (en) 2009-06-04
JP2007516609A (ja) 2007-06-21
KR20080005315A (ko) 2008-01-10
EP1639647A2 (en) 2006-03-29
EP1639647B1 (en) 2014-07-02
US20040246351A1 (en) 2004-12-09

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