TW200519327A - Processing system and method of hydrogen exhausts - Google Patents
Processing system and method of hydrogen exhaustsInfo
- Publication number
- TW200519327A TW200519327A TW092134730A TW92134730A TW200519327A TW 200519327 A TW200519327 A TW 200519327A TW 092134730 A TW092134730 A TW 092134730A TW 92134730 A TW92134730 A TW 92134730A TW 200519327 A TW200519327 A TW 200519327A
- Authority
- TW
- Taiwan
- Prior art keywords
- hydrogen
- exhausts
- processing system
- provides
- present
- Prior art date
Links
- 239000001257 hydrogen Substances 0.000 title abstract 6
- 229910052739 hydrogen Inorganic materials 0.000 title abstract 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title abstract 5
- 238000000034 method Methods 0.000 title abstract 2
- 238000006243 chemical reaction Methods 0.000 abstract 2
- 238000001816 cooling Methods 0.000 abstract 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 239000007795 chemical reaction product Substances 0.000 abstract 1
- 238000002485 combustion reaction Methods 0.000 abstract 1
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 238000005979 thermal decomposition reaction Methods 0.000 abstract 1
Landscapes
- Processing Of Solid Wastes (AREA)
Abstract
The present invention provides a processing system and method of hydrogen exhausts, wherein plasma torch is employed to directly contact the hydrogen exhausts for efficient thermal decomposition of the hydrogen and enhancing the hydrogen to completely react with oxygen contained in air for being converted into non-damaging steam. Since the reaction gives off a great amount of heat, the present invention provides an outer cooling structure incorporated in the combustion chamber and various cooling facility to lower the temperature of the reaction product to a suitable temperature for discharge to the surroundings. The device introduced in this invention is not easily damaged under high temperature reactions and is thus fit for mass processing of hydrogen exhausts.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW92134730A TWI255897B (en) | 2003-12-09 | 2003-12-09 | Processing system and processing method for hydrogen exhausts |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW92134730A TWI255897B (en) | 2003-12-09 | 2003-12-09 | Processing system and processing method for hydrogen exhausts |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200519327A true TW200519327A (en) | 2005-06-16 |
TWI255897B TWI255897B (en) | 2006-06-01 |
Family
ID=37614009
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW92134730A TWI255897B (en) | 2003-12-09 | 2003-12-09 | Processing system and processing method for hydrogen exhausts |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI255897B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI691359B (en) * | 2018-05-29 | 2020-04-21 | 大陸商四川天采科技有限責任公司 | Method for pressure swing adsorption, purification and reuse of full-pressure waste hydrogen gas in semiconductor process |
CN114904355A (en) * | 2022-05-31 | 2022-08-16 | 北京北方华创微电子装备有限公司 | Tail gas treatment device |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI714201B (en) * | 2019-08-07 | 2020-12-21 | 華懋科技股份有限公司 | Catalyst refluxing high-efficiency organic waste gas treatment system and method |
KR20220017469A (en) * | 2019-11-21 | 2022-02-11 | 에코시스 피티이.엘티디. | gaseous pollutant treatment equipment |
-
2003
- 2003-12-09 TW TW92134730A patent/TWI255897B/en not_active IP Right Cessation
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI691359B (en) * | 2018-05-29 | 2020-04-21 | 大陸商四川天采科技有限責任公司 | Method for pressure swing adsorption, purification and reuse of full-pressure waste hydrogen gas in semiconductor process |
CN114904355A (en) * | 2022-05-31 | 2022-08-16 | 北京北方华创微电子装备有限公司 | Tail gas treatment device |
CN114904355B (en) * | 2022-05-31 | 2023-10-13 | 北京北方华创微电子装备有限公司 | Tail gas treatment device |
Also Published As
Publication number | Publication date |
---|---|
TWI255897B (en) | 2006-06-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |