TW200519327A - Processing system and method of hydrogen exhausts - Google Patents

Processing system and method of hydrogen exhausts

Info

Publication number
TW200519327A
TW200519327A TW092134730A TW92134730A TW200519327A TW 200519327 A TW200519327 A TW 200519327A TW 092134730 A TW092134730 A TW 092134730A TW 92134730 A TW92134730 A TW 92134730A TW 200519327 A TW200519327 A TW 200519327A
Authority
TW
Taiwan
Prior art keywords
hydrogen
exhausts
processing system
provides
present
Prior art date
Application number
TW092134730A
Other languages
Chinese (zh)
Other versions
TWI255897B (en
Inventor
Shih-Yin Liu
Pang-Chin Liu
Shui-Sheng Chen
Shih-Chih Cheng
Original Assignee
Desiccant Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Desiccant Technology Corp filed Critical Desiccant Technology Corp
Priority to TW92134730A priority Critical patent/TWI255897B/en
Publication of TW200519327A publication Critical patent/TW200519327A/en
Application granted granted Critical
Publication of TWI255897B publication Critical patent/TWI255897B/en

Links

Landscapes

  • Processing Of Solid Wastes (AREA)

Abstract

The present invention provides a processing system and method of hydrogen exhausts, wherein plasma torch is employed to directly contact the hydrogen exhausts for efficient thermal decomposition of the hydrogen and enhancing the hydrogen to completely react with oxygen contained in air for being converted into non-damaging steam. Since the reaction gives off a great amount of heat, the present invention provides an outer cooling structure incorporated in the combustion chamber and various cooling facility to lower the temperature of the reaction product to a suitable temperature for discharge to the surroundings. The device introduced in this invention is not easily damaged under high temperature reactions and is thus fit for mass processing of hydrogen exhausts.
TW92134730A 2003-12-09 2003-12-09 Processing system and processing method for hydrogen exhausts TWI255897B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW92134730A TWI255897B (en) 2003-12-09 2003-12-09 Processing system and processing method for hydrogen exhausts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW92134730A TWI255897B (en) 2003-12-09 2003-12-09 Processing system and processing method for hydrogen exhausts

Publications (2)

Publication Number Publication Date
TW200519327A true TW200519327A (en) 2005-06-16
TWI255897B TWI255897B (en) 2006-06-01

Family

ID=37614009

Family Applications (1)

Application Number Title Priority Date Filing Date
TW92134730A TWI255897B (en) 2003-12-09 2003-12-09 Processing system and processing method for hydrogen exhausts

Country Status (1)

Country Link
TW (1) TWI255897B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI691359B (en) * 2018-05-29 2020-04-21 大陸商四川天采科技有限責任公司 Method for pressure swing adsorption, purification and reuse of full-pressure waste hydrogen gas in semiconductor process
CN114904355A (en) * 2022-05-31 2022-08-16 北京北方华创微电子装备有限公司 Tail gas treatment device

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI714201B (en) * 2019-08-07 2020-12-21 華懋科技股份有限公司 Catalyst refluxing high-efficiency organic waste gas treatment system and method
KR20220017469A (en) * 2019-11-21 2022-02-11 에코시스 피티이.엘티디. gaseous pollutant treatment equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI691359B (en) * 2018-05-29 2020-04-21 大陸商四川天采科技有限責任公司 Method for pressure swing adsorption, purification and reuse of full-pressure waste hydrogen gas in semiconductor process
CN114904355A (en) * 2022-05-31 2022-08-16 北京北方华创微电子装备有限公司 Tail gas treatment device
CN114904355B (en) * 2022-05-31 2023-10-13 北京北方华创微电子装备有限公司 Tail gas treatment device

Also Published As

Publication number Publication date
TWI255897B (en) 2006-06-01

Similar Documents

Publication Publication Date Title
WO2005004257A3 (en) Efficient micro fuel cell systems and methods
WO2005004256A3 (en) Annular fuel processor and methods
GB2407372B (en) Water combustion technology-methods,processes,systems and apparatus for the combustion of hydrogen and oxygen
HK1063457A1 (en) Hydrogen generation apparatus and method for using same
WO2006104607A3 (en) Hydrolysis of chemical hydrides utilizing hydrated compounds
WO2006034130A3 (en) Apparatus and process for surface treatment of substrate using an activated reactive gas
GB2363674A (en) Enclosure for electrical components installed in locations where a flammable gas or vapor is expected to be present
TW354364B (en) Method for cooling the waste gas in the incinerator furnace and the device of the same
AU2003216719A1 (en) Method and installation for the densification of substrates by means of chemical vapour infiltration
MX2010008808A (en) Catalytic reaction module.
CA2316066A1 (en) Fuel cell cooling apparatus and fuel cell system
FR2866414B1 (en) DEVICE AND METHOD FOR DESTRUCTION OF LIQUID, PULVERULENT OR GASEOUS WASTE BY INDUCTIVE PLASMA
MXPA04001280A (en) Fuel processors utilizing heat pipe cooling.
EP0921713A3 (en) Plasma processing apparatus and method
TW200519327A (en) Processing system and method of hydrogen exhausts
EA200500484A1 (en) METHOD OF THERMAL TREATMENT OF METAL TAPE
BR0105894A (en) Process for the heat treatment of components in an atmospheric heat treatment furnace, and apparatus for the treatment of components by a gas inside an oven
CA2464224A1 (en) Apparatus for cooling fuel cell
BR0211867A (en) Method for processing organic material, and processing apparatus for use in processing organic material
WO2005112158A3 (en) Portable fuel cell device
AU2003274556A8 (en) A micro-combustor system for the production of electrical energy
TW350981B (en) Method and system for plasma-processing
EP1387125A3 (en) Apparatus and method for thermal neutralization of gaseous mixtures
Perrone et al. Spectroscopic studies of the CH and NH radicals during laser ablation of graphite in ammonia
ATE210194T1 (en) APPARATUS AND METHOD FOR COOLING AN OXYGEN INFLATION CONVERTER SUPPORT RING

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees