TW200516651A - Manufacturing method of nano-dot floating gate, nano-dot flash memory and manufacturing method thereof - Google Patents
Manufacturing method of nano-dot floating gate, nano-dot flash memory and manufacturing method thereofInfo
- Publication number
- TW200516651A TW200516651A TW092130674A TW92130674A TW200516651A TW 200516651 A TW200516651 A TW 200516651A TW 092130674 A TW092130674 A TW 092130674A TW 92130674 A TW92130674 A TW 92130674A TW 200516651 A TW200516651 A TW 200516651A
- Authority
- TW
- Taiwan
- Prior art keywords
- nano
- manufacturing
- dot
- floating gate
- flash memory
- Prior art date
Links
Landscapes
- Non-Volatile Memory (AREA)
- Semiconductor Memories (AREA)
Abstract
A manufacturing method of nano-dot floating gate is provided. The method includes the steps of forming a tunneling dielectric layer on a substrate, forming a semiconductor silicide layer on the tunneling dielectric layer, oxidizing the semiconductor silicide layer to separating out semiconductor component in the semiconductor silicide layer and forming semiconductor nano-dot on the tunneling dielectric layer.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW92130674A TWI231531B (en) | 2003-11-03 | 2003-11-03 | Manufacturing method of nano-dot floating gate, nano-dot flash memory and manufacturing method thereof |
US10/904,294 US20050095786A1 (en) | 2003-11-03 | 2004-11-03 | Non-volatile memory and method of manufacturing floating gate |
US11/162,646 US20060003531A1 (en) | 2003-11-03 | 2005-09-18 | Non-volatile memory and method of manufacturing floating gate |
US11/461,780 US7235443B2 (en) | 2003-11-03 | 2006-08-02 | Non-volatile memory and method of manufacturing floating gate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW92130674A TWI231531B (en) | 2003-11-03 | 2003-11-03 | Manufacturing method of nano-dot floating gate, nano-dot flash memory and manufacturing method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI231531B TWI231531B (en) | 2005-04-21 |
TW200516651A true TW200516651A (en) | 2005-05-16 |
Family
ID=36121973
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW92130674A TWI231531B (en) | 2003-11-03 | 2003-11-03 | Manufacturing method of nano-dot floating gate, nano-dot flash memory and manufacturing method thereof |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI231531B (en) |
-
2003
- 2003-11-03 TW TW92130674A patent/TWI231531B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TWI231531B (en) | 2005-04-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |