TW200503948A - Carbon nanotube manufacturing device and method - Google Patents

Carbon nanotube manufacturing device and method

Info

Publication number
TW200503948A
TW200503948A TW092119855A TW92119855A TW200503948A TW 200503948 A TW200503948 A TW 200503948A TW 092119855 A TW092119855 A TW 092119855A TW 92119855 A TW92119855 A TW 92119855A TW 200503948 A TW200503948 A TW 200503948A
Authority
TW
Taiwan
Prior art keywords
carbon nanotube
nanotube manufacturing
manufacturing device
growth substrate
electric
Prior art date
Application number
TW092119855A
Other languages
Chinese (zh)
Inventor
Norio Akamatsu
Hiroshi Nishizumi
Kennori Yano
Original Assignee
Norio Akamatsu
Hiroshi Nishizumi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Norio Akamatsu, Hiroshi Nishizumi filed Critical Norio Akamatsu
Priority to TW092119855A priority Critical patent/TW200503948A/en
Publication of TW200503948A publication Critical patent/TW200503948A/en

Links

Abstract

As disclosed is the carbon nanotube manufacturing device and carbon nanotube manufacturing method. The carbon nanotube manufacturing device (1000, 2000, 3000) incorporates ionization means for ionizing vaporized gas of specially carbon containing compound (e.g. negative ion generator 10); electric-field generation means to generating the electric field (e.g. direct current source 21, cathode 22, and anode 23); and heating means (e.g. high-frequency heater 30) for heating the growth substrate (50, 55) located in the electric field 1 generated by the electric-field generation means. By passing the vaporized gas of ionized carbon containing compound through electric field to make contact with the heated growth substrate, the carbon nanotube manufacturing method enables the carbon nanotubes to be oriented and grown along the growth substrate.
TW092119855A 2003-07-21 2003-07-21 Carbon nanotube manufacturing device and method TW200503948A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW092119855A TW200503948A (en) 2003-07-21 2003-07-21 Carbon nanotube manufacturing device and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW092119855A TW200503948A (en) 2003-07-21 2003-07-21 Carbon nanotube manufacturing device and method

Publications (1)

Publication Number Publication Date
TW200503948A true TW200503948A (en) 2005-02-01

Family

ID=57798148

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092119855A TW200503948A (en) 2003-07-21 2003-07-21 Carbon nanotube manufacturing device and method

Country Status (1)

Country Link
TW (1) TW200503948A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI386511B (en) * 2005-11-25 2013-02-21 Hon Hai Prec Ind Co Ltd Apparatus and method for producing aligned carbon nanotube arrays
US8557213B2 (en) 2005-11-25 2013-10-15 National Institute For Materials Science Carbon nanotubes, substrate and electron emission device with such carbon nanotubes and carbon nanotube synthesizing substrate as well as methods of and apparatus for making them
TWI461356B (en) * 2006-03-14 2014-11-21 Nat Inst For Materials Science Carbon nanotube,substrate and electron releasing element having the carbon nanotube, substrate for synthesieing carbon nanotubes, method and apparatus for making such carbon nanotube, substrate,and electron releasing element
TWI744174B (en) * 2020-05-15 2021-10-21 台灣積體電路製造股份有限公司 Method for manufacturing semiconductor device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI386511B (en) * 2005-11-25 2013-02-21 Hon Hai Prec Ind Co Ltd Apparatus and method for producing aligned carbon nanotube arrays
US8557213B2 (en) 2005-11-25 2013-10-15 National Institute For Materials Science Carbon nanotubes, substrate and electron emission device with such carbon nanotubes and carbon nanotube synthesizing substrate as well as methods of and apparatus for making them
TWI461356B (en) * 2006-03-14 2014-11-21 Nat Inst For Materials Science Carbon nanotube,substrate and electron releasing element having the carbon nanotube, substrate for synthesieing carbon nanotubes, method and apparatus for making such carbon nanotube, substrate,and electron releasing element
TWI744174B (en) * 2020-05-15 2021-10-21 台灣積體電路製造股份有限公司 Method for manufacturing semiconductor device
US11342181B2 (en) 2020-05-15 2022-05-24 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor devices and methods of manufacture
US11749528B2 (en) 2020-05-15 2023-09-05 Taiwan Semiconductor Manufacturing Co., Ltd. Method of manufacturing semiconductor devices including the steps of removing a plurality of spacers that surrounds each of the plurality of nanotubes into a layer of nanotubes, and forming gate dielectric and/or gate electrode

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