TW200503948A - Carbon nanotube manufacturing device and method - Google Patents
Carbon nanotube manufacturing device and methodInfo
- Publication number
- TW200503948A TW200503948A TW092119855A TW92119855A TW200503948A TW 200503948 A TW200503948 A TW 200503948A TW 092119855 A TW092119855 A TW 092119855A TW 92119855 A TW92119855 A TW 92119855A TW 200503948 A TW200503948 A TW 200503948A
- Authority
- TW
- Taiwan
- Prior art keywords
- carbon nanotube
- nanotube manufacturing
- manufacturing device
- growth substrate
- electric
- Prior art date
Links
Abstract
As disclosed is the carbon nanotube manufacturing device and carbon nanotube manufacturing method. The carbon nanotube manufacturing device (1000, 2000, 3000) incorporates ionization means for ionizing vaporized gas of specially carbon containing compound (e.g. negative ion generator 10); electric-field generation means to generating the electric field (e.g. direct current source 21, cathode 22, and anode 23); and heating means (e.g. high-frequency heater 30) for heating the growth substrate (50, 55) located in the electric field 1 generated by the electric-field generation means. By passing the vaporized gas of ionized carbon containing compound through electric field to make contact with the heated growth substrate, the carbon nanotube manufacturing method enables the carbon nanotubes to be oriented and grown along the growth substrate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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TW092119855A TW200503948A (en) | 2003-07-21 | 2003-07-21 | Carbon nanotube manufacturing device and method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW092119855A TW200503948A (en) | 2003-07-21 | 2003-07-21 | Carbon nanotube manufacturing device and method |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200503948A true TW200503948A (en) | 2005-02-01 |
Family
ID=57798148
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW092119855A TW200503948A (en) | 2003-07-21 | 2003-07-21 | Carbon nanotube manufacturing device and method |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW200503948A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI386511B (en) * | 2005-11-25 | 2013-02-21 | Hon Hai Prec Ind Co Ltd | Apparatus and method for producing aligned carbon nanotube arrays |
US8557213B2 (en) | 2005-11-25 | 2013-10-15 | National Institute For Materials Science | Carbon nanotubes, substrate and electron emission device with such carbon nanotubes and carbon nanotube synthesizing substrate as well as methods of and apparatus for making them |
TWI461356B (en) * | 2006-03-14 | 2014-11-21 | Nat Inst For Materials Science | Carbon nanotube,substrate and electron releasing element having the carbon nanotube, substrate for synthesieing carbon nanotubes, method and apparatus for making such carbon nanotube, substrate,and electron releasing element |
TWI744174B (en) * | 2020-05-15 | 2021-10-21 | 台灣積體電路製造股份有限公司 | Method for manufacturing semiconductor device |
-
2003
- 2003-07-21 TW TW092119855A patent/TW200503948A/en unknown
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI386511B (en) * | 2005-11-25 | 2013-02-21 | Hon Hai Prec Ind Co Ltd | Apparatus and method for producing aligned carbon nanotube arrays |
US8557213B2 (en) | 2005-11-25 | 2013-10-15 | National Institute For Materials Science | Carbon nanotubes, substrate and electron emission device with such carbon nanotubes and carbon nanotube synthesizing substrate as well as methods of and apparatus for making them |
TWI461356B (en) * | 2006-03-14 | 2014-11-21 | Nat Inst For Materials Science | Carbon nanotube,substrate and electron releasing element having the carbon nanotube, substrate for synthesieing carbon nanotubes, method and apparatus for making such carbon nanotube, substrate,and electron releasing element |
TWI744174B (en) * | 2020-05-15 | 2021-10-21 | 台灣積體電路製造股份有限公司 | Method for manufacturing semiconductor device |
US11342181B2 (en) | 2020-05-15 | 2022-05-24 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor devices and methods of manufacture |
US11749528B2 (en) | 2020-05-15 | 2023-09-05 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of manufacturing semiconductor devices including the steps of removing a plurality of spacers that surrounds each of the plurality of nanotubes into a layer of nanotubes, and forming gate dielectric and/or gate electrode |
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