TW200424528A - Apparatus for inspecting substrate - Google Patents

Apparatus for inspecting substrate Download PDF

Info

Publication number
TW200424528A
TW200424528A TW092121179A TW92121179A TW200424528A TW 200424528 A TW200424528 A TW 200424528A TW 092121179 A TW092121179 A TW 092121179A TW 92121179 A TW92121179 A TW 92121179A TW 200424528 A TW200424528 A TW 200424528A
Authority
TW
Taiwan
Prior art keywords
substrate
patent application
item
platform
scope
Prior art date
Application number
TW092121179A
Other languages
Chinese (zh)
Other versions
TWI247899B (en
Inventor
Jae-Sin Sim
Joo-Hwan Kim
Dong-In Lee
Original Assignee
De & T Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by De & T Co Ltd filed Critical De & T Co Ltd
Publication of TW200424528A publication Critical patent/TW200424528A/en
Application granted granted Critical
Publication of TWI247899B publication Critical patent/TWI247899B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8835—Adjustable illumination, e.g. software adjustable screen

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

Apparatus for inspecting a flat substrate for existence of defect including a base part in an upper part of a body, an inspection stage mounted on the base part, having one end to be rotatable around a rotation shaft for detachably placing a substrate to be inspected thereon, a turning means for turning the inspection stage to a required angle, and a back light unit for directing a light to the substrate to be inspected on the inspection stage from a rear side of the inspection stage, thereby permitting more accurate defect verification in making macro and micro observations by detachably attaching a back light unit just rear of the inspection stage the substrate is placed thereon for directing a bright light to entire surface of the substrate to be inspected.

Description

200424528 五、發明說明（1) 【發明所屬之技術領域】 ‘ 、、本發明是關於-種基板檢測裝置，特別是關於一種檢 測液晶顯示器、電漿顯示面板或類似產品基板之肉眼可見 缺陷的裝置。 【先前技術】 、現有的液晶顯示器、電漿顯示面板或類似產品之基板 檢測衣置，係具有一裝置將巨觀的檢驗轉換至微觀的檢 驗。巨觀的檢驗係以光線直接照射玻璃基板表面來檢查其 缺卩曰邛分，如裂縫或污染等；而微觀的檢驗，係將巨觀檢 驗之缺陷部分放大並進行更準確的檢測。 習知的基板檢測裝置，如日本第H5 —322783號特許專 利所述，係將基板置於可往X一 γ方向移動的平台，此平台 可作兩維度的移動以分別配合具有巨觀檢測功能之巨觀檢 測f統和微觀檢測功能之微觀檢測系統，然而其無法符合 目七成為趨勢的大尺寸平面顯示器之檢測需求。 為了解決上述之大尺寸平面顯示器基板檢測問題，於 200 1年8月所提出的韓國第2〇一〇238 629號專利係揭露一種 基板檢測裝置，將基板置於可旋轉的平台，其巨觀的檢驗 係^用安裝於裝置並旋轉至偏向巨觀檢驗平台的可見光源 所，供^照明光線來進行檢測。微觀的檢驗則需將設置於 可旋轉平台且本身具有光源的微觀檢測系統設置為水平狀 態’並使其依據水平方向移動來進行檢測。 然而’前述習知技術之基板檢測裝置具有難以驗證其 缺陷的問題，由於檢驗時照明光線係遠從基板的上方或下200424528 V. Description of the invention (1) [Technical field to which the invention belongs] The invention relates to a substrate inspection device, in particular to a device for detecting visible defects of a liquid crystal display, a plasma display panel, or a substrate of a similar product. . [Previous technology], the existing liquid crystal display, plasma display panel, or similar product substrate inspection clothing, has a device to convert the macroscopic inspection to microscopic inspection. Macroscopic inspection uses light to directly irradiate the surface of the glass substrate to check its defects, such as cracks or pollution; and microscopic inspection is to enlarge the defective part of the macroscopic inspection and perform more accurate inspection. The conventional substrate inspection device, as described in Japanese Patent No. H5-322783, places the substrate on a platform that can move in the X-γ direction. This platform can be moved in two dimensions to cooperate with the macroscopic inspection function. The micro-view inspection system and the micro-detection function of the micro-view inspection system, however, it cannot meet the inspection requirements of the large-size flat-panel monitors that have become the trend of the head. In order to solve the above-mentioned large-size flat display substrate inspection problem, Korean Patent No. 20100238 629 filed in August 2001 discloses a substrate inspection device. The substrate is placed on a rotatable platform. The inspection system uses a visible light source installed on the device and rotated to a giant viewing platform for inspection. For microscopic inspection, the microscopic inspection system installed on the rotatable platform and with its own light source is set to a horizontal state 'and it is inspected according to the horizontal movement. However, the substrate inspection device of the aforementioned conventional technology has a problem that it is difficult to verify its defects, because the illumination light is far from above or below the substrate during the inspection.

200424528 五、發明說明（2) 方位置照射 的。此外， 板時，無法 充狀悲的檢 檢測成本的 【發明内容 本發明 習知技術的 本發明 檢驗和微觀 本發明 闡明，其中 中獲知。而 吞兒明、其中 加以瞭解得 為了達 據本發明的 以檢測平面 面的一基底 可旋轉一可 控制檢測平 板檢测時由 基板，藉由 確的檢驗缺 至整個基 知明光線 檢測於基 測需與基 負擔。 ] 提出一種 堵多限制 的目的在 的檢驗時 的其它特 一部分會 本發明的 的申請專 到。 到上述及 一種基板 基板缺陷 部，設於 動角並用 台至所需 檢測平台 裝设背光 陷0 板表面，一般的照明光線是不足夠 的不足也導致於檢測液晶顯示器之基 板間的液晶填充狀態。基板之液晶填 板表面缺陷檢測分別進行，而加重了 基板檢測裝置的製造方法，能夠避免 與缺點。 提供一種基板檢測裝置於進行巨觀的 ’可提供更準確的缺陷檢測。 徵及優點，將在接下來的說明中將以 被明白地說明或可由發明所舉的實例 其它目的及優點，亦可由發明之文字 利範圍以及附圖所具體提出的架構中 其它優點並與本發明的目的一致，根 檢測裝置之實施例大致上所述，其用 之檢測裝置包含設於一主體之一上表 基底部上方之一檢測平台，其一端係 來置放待測基板，一旋轉裝置係用來 的角度，以及一背光單元，於進行基 的背部直接提供照明光線至其上方的 單元於置放基板的檢測平台可以更精200424528 V. Description of the invention (2) Irradiated at the square position. In addition, when the plate is not filled, it is impossible to detect the cost of the test. [Summary of the Invention The present invention is a conventional technique of the present invention. And Tun Erming, which is understood in order to achieve a substrate with a detection plane in accordance with the present invention, can be rotated and a controllable detection plate is inspected by the substrate, and the entire light is detected in the basic measurement by the correct inspection. Need to bear the burden. ] The purpose of proposing a plug-in restriction is to examine the other special parts of the application of the present invention. To the above and a substrate substrate defect portion, set at a moving angle and use a stage to install the backlight trap on the surface of the required plate. The general illumination light is insufficient and it also causes the liquid crystal filling state between the substrates of the liquid crystal display to be detected. . The liquid crystal filling of the substrate is inspected separately on the surface of the substrate, and the manufacturing method of the substrate inspection device is aggravated, which can avoid the disadvantages. Providing a substrate inspection device for performing a large-scale inspection can provide more accurate defect detection. The advantages and disadvantages will be clearly explained in the following description, or can be cited by the invention as examples of other purposes and advantages, but also by the scope of the invention and other advantages in the structure specifically proposed in the drawings and the same as this The purpose of the invention is the same. The embodiment of the root detection device is roughly described. The detection device used for the root detection device includes a detection platform provided on the bottom of the upper surface of one of the main bodies. One end is used to place the substrate to be tested. The device is used for the angle, and a backlight unit, which provides the illumination light directly on the back of the base to the unit above it on the detection platform on which the substrate is placed.

200424528 五、發明說明（3) 電 為了進行微觀檢驗’其具有包含顯微鏡之微觀檢驗 單元’顯微鏡可藉由可動元件沿著基底部的頂端部分做水 平方向的往復移動，以便於微觀檢驗單元在進行檢測時， 使微觀檢驗單元沿著置放基板的檢測平台頂端做水平方向 的移動。背光單元可於基底部的上方上下移動，並且可和 檢測平台的背部分離。因此，本發明更包含一拆裝元件用 以拆卸或安裝背光單元至檢測平台的背部。 、 於進行巨觀的檢驗時，背光單元係安裝於檢測平台 並提供大量的照明光線，而在進行微觀檢驗時，背光單元 ，卸除於檢測平台以保留空間使穿透式照明光源移至背光 單元和檢測平台之間。 為使對本發明的目的、構造特徵及其功能有進一步的 了解’茲配合圖示詳細說明如下： 【實施方式】 义如第1圖所不，其為本發明實施例之基板檢測裝置的 明多考第1圖，於基板檢測裝置的主體1上方係設置；^ 於避ΐ Ϊ if架3，用以吸收外來的振動，基底部2則設3 可誇荖J二絲之卢，且檢測平台4安裝在基底部2，基底部: 位置。疋衿41轉動進而活動地將基板調至不同的檢須 月光單元5係設於檢測平台4和基底部2 背氺罝；c； -r ^ 八々、佩㊇丁石4和丞底部2之間 至檢測平台：。接由檢測平台4的背面提供光 為了使月光單元5上下移動，於基底部2 _200424528 V. Description of the invention (3) For micro inspection, it has a micro inspection unit including a microscope. The microscope can move the reciprocating element horizontally along the top part of the base to facilitate the micro inspection unit. During the inspection, the micro inspection unit is moved horizontally along the top of the inspection platform on which the substrate is placed. The backlight unit can be moved up and down above the base and can be separated from the back of the inspection platform. Therefore, the present invention further includes a detachable element for removing or mounting the backlight unit to the back of the detection platform. When the macro inspection is performed, the backlight unit is installed on the inspection platform and provides a large amount of illumination light. When the micro inspection is performed, the backlight unit is removed from the inspection platform to reserve space for the penetrating illumination light source to be moved to the backlight. Between the unit and the detection platform. In order to further understand the purpose, structural features, and functions of the present invention, the following detailed description is given in conjunction with the drawings: [Embodiment] The meaning is as shown in FIG. As shown in Figure 1, it is installed above the main body 1 of the substrate inspection device; ^ in the avoidance Ϊ if frame 3 to absorb external vibrations, and the base 2 is set to 3 to exaggerate J Ersilu, and the detection platform 4 Installed at base 2, Base: location.疋 衿 41 rotates and adjusts the substrate to different inspection moustaches. Moonlight unit 5 is located on the test platform 4 and the base 2 back; c; -r ^ 々, ㊇ ㊇ 4 and 丞 bottom 2 Time to detection platform :. To provide the light from the back of the detection platform 4 In order to make the moonlight unit 5 move up and down, the base 2 _

第10頁 200424528 五、發明說明（4) 方係具有用以設置背光單元5之底座6，並且有複數個連接 桿7其各有一頂端通過基底部2連接於底座6，操作板8則設 在基底部2的下方與每一連接桿7的另一底端連接，以及設 於基底部2下方的升降氣壓缸9以使操作板8上升或下降。 背光單元5係於一方框5 1内包含發光元件陣列（無圖 示）用以發出光線。於基底部2上設置有一對平行的^ μ導執 15，於每一LM導執15上安裝可動件14，可動件14上之一端 ϋ =觀5驗單元10，可動件14之另一端係連接至lm導軌 1 5使其沿著水平方向來回移動。 微觀檢驗單元1〇包含設於可動件14上並可和可動件“ 一起於水平方向左右移動的顯微鏡11 ;以及設於可動件1 4 2狀之穿透式照明光源12 ’使可動件14沿著LM 動至：透式照明光源12移至檢測平台4和背光單元5 ΐ缺以接提供穿透光至置放於檢測平台4的基板G。 透過無標示，其可動件14沿著LM導軌15移動可以 i ii:伺服馬達來達成，或著其他已知的驅動機 和伺服气、*馬達及其他類似的機械裝置。如使用滾珠螺桿 Γ^ί技滾珠螺桿係安裝於平行的LM導軌上，同; 沿著滾以螺帽"，滚珠螺帽係 #卑_ π/t 使用線性馬達，其線性馬達的定子 相同功能的元： 可使用齒輪、皮帶輪或是其他具有 :、、、將檢'則平台4旋轉至所需的角度，於檢測平台的Page 10 200424528 V. Description of the invention (4) The square is provided with a base 6 for setting the backlight unit 5, and there are a plurality of connecting rods 7, each of which has a top end connected to the base 6 through the base 2 and an operation panel 8 provided on the The lower part of the base part 2 is connected to the other bottom end of each connecting rod 7, and the lifting pneumatic cylinder 9 is provided below the base part 2 to raise or lower the operation panel 8. The backlight unit 5 includes a light emitting element array (not shown) in a box 51 for emitting light. A pair of parallel ^ μ guides 15 are provided on the base 2. A movable member 14 is mounted on each LM guide 15. One end of the movable member 14 is equal to 5 inspection unit 10, and the other end of the movable member 14 is connected. Connected to the lm rail 15 to move it back and forth in the horizontal direction. The micro inspection unit 10 includes a microscope 11 provided on the movable member 14 and capable of moving horizontally with the movable member 11 in a horizontal direction; and a penetrating illumination light source 12 'arranged on the movable member 1 4 2 to move the movable member 14 along Moving toward LM: The translucent illumination light source 12 moves to the detection platform 4 and the backlight unit 5 to provide penetrating light to the substrate G placed on the detection platform 4. Through no marking, its movable member 14 is along the LM guide. 15 Movement can be achieved by i ii: servo motor, or other known driving machines and servo motors, * motors and other similar mechanical devices. For example, using ball screw Γ ^ ί technology ball screw system is installed on parallel LM rail ， With rolling nuts and ball screws, the ball nut system #Base_ π / t uses a linear motor, which has the same function as the stator of the linear motor: You can use gears, pulleys, or other components that have: ,,, Check 'the platform 4 is rotated to the required angle,

第11頁 200424528 五、發明說明（5) 相對側係安裝有鏈結桿丨6，其連於一 ^ | 並透過兩者自由诮敫备厣ϋ動的操作桿1 7 ?所設的馬達18上，並分別連接於鏈結桿16較=2下。 猎由馬達1 8驅動操作桿i 6可使操作桿丨7和鏈社 同角=習疊情形並以此控制檢測平台4至所… 咬失去圖^第7圖所不，其為檢測平台的結構示意圖。 部八。ί //於㈣平台主體42之正面開口的外側 口ρ刀係权有複數個依一定間隔排列的基板吸附墊43， 八空吸附住基板G。橫跨矩形平台主體42之正面開口係以 :定間隔設置複數個透明支撐桿48，用以支撐置於開'口的 基板G，於每一透明支撐桿48上具有複數個垂直的陶瓷支 撐接腳48 1，基板G係置於其上，以避免置於檢測平台的爲 板G產生凹陷並維持基板g於所需的平整度。 土 並且，於矩形之平台主體42之正面具有複數個定位件 44 ’使基板G適當的定位於檢測平台。定位件44包含有— 圓筒441、一可動桿442以及複數個L形或I形定位扣443， 可動桿442和圓筒441可沿其側面方向一起移動，定位扣 443係連接於平台主體42，並以其作為旋轉支點，定位扣 443經過旋轉連接於可動桿以固定基板g之外側邊緣。於定 位扣443中，L形的定位扣係固定基板g的邊緣，I形則用以 固疋基板G的角落。於平台主體42的角落更具有穿透孔 4 5、U形連接件4 6 1和圓柱件4 6 2，以作為背光模組的固定 之用。 請參考第3圖，於平台主體42的背面係具有複數個背Page 11 200424528 V. Description of the invention (5) The opposite side is equipped with a link lever 丨 6, which is connected to a ^ | Up and connected to the link rods 16 and 2 respectively. The hunting lever i 6 is driven by the motor 1 8 to make the operating lever 丨 7 and the chain company at the same angle = learn the situation and use this to control the detection platform 4 to the place ... Bite the loss picture ^ Figure 7 is not, it is the detection platform Schematic. Ministry eight. ί // There are a plurality of substrate suction pads 43 arranged at a certain interval on the outer side of the front opening of the front platform main body 42, and the substrate G is adsorbed by Bakong. The front opening across the rectangular platform body 42 is provided with a plurality of transparent support rods 48 at regular intervals to support the substrate G placed at the opening, and each transparent support rod 48 has a plurality of vertical ceramic support connections. The foot 481 and the substrate G are placed on it to avoid the depression of the plate G placed on the detection platform and to maintain the substrate g at the required flatness. Also, a plurality of positioning members 44 'are provided on the front surface of the rectangular platform main body 42 to appropriately position the substrate G on the detection platform. The positioning member 44 includes a cylinder 441, a movable rod 442, and a plurality of L-shaped or I-shaped positioning buckles 443. The movable rod 442 and the cylinder 441 can move together along the side direction thereof. The positioning buckle 443 is connected to the platform body 42. The positioning buckle 443 is rotatably connected to the movable rod to fix the outer edge of the substrate g through rotation. In the positioning buckle 443, the L-shaped positioning buckle is used to fix the edge of the substrate g, and the I-shaped buckle is used to fix the corner of the substrate G. The corners of the platform main body 42 are further provided with penetrating holes 45, U-shaped connecting members 4 61 and cylindrical members 4 62 for fixing the backlight module. Please refer to FIG. 3, the back surface of the platform main body 42 has a plurality of backs.

第12頁 200424528 五、發明說明（6) 光單元吸附墊47，以真空吸附背光單元5進行固定。檢、、則· 平台4更具有補強固定件來避免真空吸附失效時背光單 脫落於檢測平台4，藉由機械設計對於背光單元5進行 固定，於平台主體42之角落具有穿透孔45。如第4圖所 示，複數個背光單元吸附墊47設於平台主體42的背面。咬 參考第6圖，於背光單元5係具有對應穿透孔“的丁形連接％ 扣5 2，其具有一垂直部，垂直於檢測平台4，以及一水 部設=垂直部的頂端。以及請參考第5圖，於平台主體42 之角落上設有檢測平台4設有υ形連接件46 1其耦接於圓柱 件462，並和圓柱件462沿著LM導桿463 —起進行往復運 =，U形連接件461係使第6圖之Τ形連接扣52嵌入以進行卡 以下描述基板檢測平台裝置之基板檢測操作情形， 檢測的起始狀態，檢測平台係於一水平位置。由機器臂 (無圖^)置放基板G至檢測平台4的正面，再如第7圖°所 示，定位扣443係與操作狀態中的圓筒441同時旋轉，定位 扣443卡住可動桿442並與基板(；的邊緣接觸以固定基板g。 之後才利用基板吸附墊43使基板G真空吸附於檢測平台4。 然後，操作設於基底部2下方的升降氣壓缸9 " 8與連接桿7同時抬起’以抬起底座6以及其上方的背=乍模板 組5，使背光模組與檢測平台接觸。背光單元5的了形連 扣5 2係對應於檢測平台4的穿透孔4 5。 背光模組5係藉由背光吸附墊47附著於檢測平台4， 時u形連接件461透過圓柱件462的操作卡合於τ形連接扣Page 12 200424528 V. Description of the invention (6) The light unit suction pad 47 is fixed by vacuum suction of the backlight unit 5. The inspection platform 4 further has a reinforcing fixing member to prevent the backlight unit from falling off the inspection platform 4 when the vacuum adsorption fails. The backlight unit 5 is fixed by a mechanical design, and a penetrating hole 45 is provided at the corner of the platform body 42. As shown in FIG. 4, a plurality of backlight unit suction pads 47 are provided on the back surface of the platform main body 42. Referring to FIG. 6, the backlight unit 5 has a D-shaped connection% buckle 5 2 corresponding to the penetration hole “, which has a vertical portion perpendicular to the detection platform 4 and a water portion provided at the top of the vertical portion. Please refer to FIG. 5. A detection platform is provided on the corner of the platform body 42. A υ-shaped connecting member 46 is provided. The coupling member is coupled to the cylindrical member 462, and reciprocates with the cylindrical member 462 along the LM guide rod 463. =, U-shaped connecting piece 461 is used to insert the T-shaped connecting buckle 52 of FIG. 6 to perform the card. The following describes the substrate inspection operation of the substrate inspection platform device. The initial state of the inspection, the inspection platform is in a horizontal position. The arm (not shown ^) places the substrate G to the front of the detection platform 4, and as shown in Figure 7 °, the positioning buckle 443 is rotated at the same time as the cylinder 441 in the operating state. It is in contact with the edge of the substrate (;) to fix the substrate g. Then, the substrate G is vacuum-adsorbed on the detection platform 4 by using the substrate suction pad 43. Then, the lift cylinder 9 " 8 and the connecting rod 7 provided below the base 2 are operated. Lift 'simultaneously to lift the base 6 and the back above it = The template group 5 makes the backlight module contact the detection platform. The buckle 5 2 of the backlight unit 5 corresponds to the penetration hole 45 of the detection platform 4. The backlight module 5 is attached to the detection by a backlight adsorption pad 47 The platform 4, when the u-shaped connecting member 461 is engaged with the τ-shaped connecting buckle through the operation of the cylindrical member 462

II

I 第13頁 200424528 五、發明說明（7) 52 ’以確實固定背光模組5。 it I, t ί J i i6® ^ ^ 摺叠情形，檢測平台角度的 度。當檢測平台4抬升至—角度，檢 ：的角 透過肉眼來檢查其缺陷。由：土的基板G可以 面提供足夠能量的井_由=月先模組5從檢測平台的背 易。^里的先線’相較於前案其基板檢測較為容 巨觀檢驗如發現缺陪> ^么日兩 Η向反方向旋轉將操作二； = =馬達 ^#42^τΛ;6 Λ7 Τ形吸Λ塾扣Γ’^Λ放^ 柘孫ώ斗赂a r以兀王为開檢測平台4和背光模組5。操作、 放Λ9降下’同時放下底座6及連接桿心 R 2卩2的頂鳊表面成為起始狀態。 明參考弟9圖，使可動件14沿著!^導執移 檢驗單元10的顯微鏡U蒋s苴aa从伙各動直至…員U 、悉、m祐w妙、、隹士 1 移基板G的缺陷處，使其缺陷可 1 〇 t ; V::廢目。於可動件14移動時，顯微檢驗單元 m透光源則移動至檢測平台4和背光單元5之 線由基板G下方照射至缺陷處。 I九 的背Π:為ΐ:ίΓ;ί板；：J置設於檢測平台 刀雕的，於進打巨觀檢驗時，背光單 係附於檢測平台的背面以提供足夠的光線，可以簡單而精 確的檢驗出缺陷，同時亦可繼續進行液晶填充的檢測。 第14頁 200424528 五、發明說明（8) 雖然本發明之較佳實施例揭露如上所述，然其並非用 以限定本發明，任何熟習相關技藝者，在不脫離本發明之 精神和範圍内，當可作些許之更動與潤飾，因此本發明之 專利保護範圍須視本說明書所附之申請專利範圍所界定者 為準。I Page 13 200424528 V. Description of the invention (7) 52 ′ to securely fix the backlight module 5. it I, t ί J i i6® ^ ^ Folding situation to detect the degree of platform angle. When the inspection platform 4 is lifted to an angle, the angle of the inspection is inspected by naked eyes to check its defects. Reason: The substrate G of the soil can face a well that provides sufficient energy. The module 5 is easy to access from the detection platform. Compared with the previous case, the inspection of the substrate is more tolerant than the previous case. If it is found to be unaccompanied, it will be operated if the two sides rotate in opposite directions; = = Motor ^ # 42 ^ τΛ; 6 Λ7 Τ Shape suction Λ 塾 扣 Γ ′ ^ Λ 放 ^ The grandson ’s fighting platform ar takes the king of the wood as the detection platform 4 and the backlight module 5. Operate, lower Λ9 and lower 'while lowering the base 6 and the top surface of the connecting rod core R 2 卩 2 to the initial state. Referring to Figure 9 of the next step, move the movable member 14 along the microscope U Jiang s 苴 aa of the inspection unit 10 from the group to the member U, S, M, W, W, and G 1 to move the substrate G Defects, so that their defects can be 10t; V :: Obsolete. When the movable member 14 moves, the light transmission source of the microscopic inspection unit m moves to the line between the inspection platform 4 and the backlight unit 5 and shines from the bottom of the substrate G to the defect. The back of IIX: is: ΐ: ίΓ; ί plate;: J is placed on the knife platform of the inspection platform. During the macroscopic inspection, the backlight is attached to the back of the inspection platform to provide sufficient light. It can be simple. Defects are accurately detected, and liquid crystal filling inspection can be continued. Page 14 200424528 V. Description of the invention (8) Although the preferred embodiment of the present invention is disclosed as described above, it is not intended to limit the present invention. Any person skilled in the relevant arts does not depart from the spirit and scope of the present invention. When some modifications and retouching can be made, the scope of patent protection of the present invention must be determined by the scope of the patent application attached to this specification.

第15頁 200424528 圖式簡單說明 第1圖為本發明實施例之基板檢測裝置的前視圖； 第2圖至第7圖為檢測平台的結構示意圖； 第8圖為本發明進行巨觀檢驗之操作示意圖；及 第9圖為本發明進行微觀檢驗之操作示意圖。 【圖式符號說明】 1 主體 2 基底部 3 避震框架 4 檢測平台 41 旋轉桿 42 平台主體 43 基板吸附墊 4 4 定位件 441 圓筒 442 可動桿 4 4 3 定位扣 45 穿透孔 461 U形連接件 462 圓柱件 463 LM導桿 4 7 背光單元吸附墊 48 透明支撐桿 481 陶瓷支撐接腳 5 背光單元Page 15 200424528 Brief Description of Drawings Figure 1 is a front view of a substrate testing device according to an embodiment of the present invention; Figures 2 to 7 are schematic diagrams of the structure of a testing platform; Figure 8 is a macroscopic inspection operation of the present invention Schematic diagram; and FIG. 9 is a schematic diagram of the micro inspection operation of the present invention. [Illustration of Symbols] 1 Main body 2 Base 3 Suspension frame 4 Detection platform 41 Rotating rod 42 Platform body 43 Substrate suction pad 4 4 Positioning member 441 Cylinder 442 Movable rod 4 4 3 Positioning buckle 45 Penetrating hole 461 U-shape Connecting piece 462 Cylindrical piece 463 LM guide 4 7 Backlight unit suction pad 48 Transparent support rod 481 Ceramic support pin 5 Backlight unit

第16頁 200424528Page 16 200424528

第17頁Page 17

Claims (1)

200424528 六、申請專利範圍 1. 一種基板檢測 一基底部 一檢測平 以進行檢驗， 整該檢測平台 一旋轉裝 度；及 一背光單 的背部至該檢 2 ·如申請專利範 光單元係固定 3 ·如申請專利範 光單元係固定 4 ·如申請專利範 光單元可於基 背部係可分離 5 ·如申請專利範 含一拆裝元件 的背部。 6 ·如申請專利範 t元件係為複 真空吸附該背 7 ·如申請專利範 測平台包含： 其中該背 虞置 > 用以檢測基板缺陷，其包含有： 二係設2 一主體的上表面； :’係安裝於該基底部，用以置放一基板 該檢測平台的一端係繞著旋轉桿轉動以調 的位置； 置係用朿控制該檢測平台至所需的角 元’係直接提供照明光線通過該檢測平台 測平台上方的該基板以進行基板檢測。· 圍第1項所述之基板檢測裝置，其中該背 於該檢測平台的背部。 圍第1項所述之基板檢測裝置 於該基底部的頂端表面。 圍第1項所述之基板檢測裝置，其中該背 底部的上方上下移動，且和該檢測平台的 〇 圍第4項所述之基板檢測裝置，其中更包 用以拆卸/安装該背光單元至該檢測平台 圍第5項所述之基板檢測裝置，其中該拆 數個吸附墊’其設於檢測平台的背部藉以 光模組。 圍第5項所述之基板檢測裝置’其中該檢200424528 6. Scope of patent application 1. A substrate inspection, a base and a detection plane for inspection, the inspection platform is rotated and installed; and the back of a back light sheet to the inspection 2 · If the patent application unit is fixed 3 · If the patent application Fanguang unit is fixed 4 · If the patent application Fanguang unit can be detached on the base back 5 · If the patent application fan contains a back part that can be disassembled and assembled. 6 · If the patent application element is a complex vacuum adsorption of the back 7 · If the patent application application testing platform includes: Where the back device is used to detect substrate defects, which includes: Surface;: 'Mounted on the base, used to place a substrate. One end of the detection platform is rotated around a rotating rod to adjust the position; placement system is used to control the detection platform to the required angular element' is directly Illumination light is provided to pass through the substrate above the detection platform to detect the substrate. · The substrate inspection device according to item 1, wherein the back is on the back of the inspection platform. The substrate inspection device described in item 1 is on the top surface of the base. The substrate inspection device described in item 1 above, wherein the upper part of the back bottom moves up and down, and the substrate inspection device described in item 4 in the detection platform, wherein the package is also used to remove / install the backlight unit to The inspection platform surrounds the substrate inspection device according to item 5, wherein the plurality of adsorption pads are removed and disposed on the back of the inspection platform to use a light module. The substrate inspection device described in item 5 ’, wherein the inspection 200424528 六、申請專利範圍 一平台主體，係為矩形，其具有小於欲進行檢測之 該基板的一開U ; 複數個定位件，係用以定位該基板於該平台主體； 及 ， 一固定件，以自由地使基板和平台主體固定和分 離。 8 ·如申請專利範圍第7項所述之基板檢測裝置，其中該固 定元件係為複數個吸附墊，依一定間隔排列於該平台主 體之開口的外側部分之邊緣以真空吸附該基板。200424528 VI. Patent application scope A platform body is rectangular and has an opening U smaller than that of the substrate to be tested; a plurality of positioning members are used to position the substrate on the platform body; and, a fixing member, In order to freely fix and separate the substrate and the platform body. 8. The substrate detection device according to item 7 of the scope of the patent application, wherein the fixed element is a plurality of suction pads, which are arranged at a certain interval on the edge of the outer part of the opening of the platform main body to vacuum suction the substrate. 9 ·如申請專利範圍第7項所述之基板檢測裝置，其中更包 含複數個支撐件，係設於該平台主體之正面開口以支推 该基板。 I 〇 ·如申請專利範圍第5項所述之基板檢測裝置，其中更包 含一補強固定件以握持該背光模組，於背光模組藉由 β亥拆裝元件安裝於該檢測平台的背部時。 II ·如申請專利範圍第1 〇項所述之基板檢測裝置，其中該 補強固定件包含： 複數個穿透孔，係設於檢測平台；9 · The substrate inspection device as described in item 7 of the scope of the patent application, which further includes a plurality of support members, which are arranged on the front opening of the platform body to support the substrate. I. The substrate inspection device as described in item 5 of the scope of the patent application, which further includes a reinforcing fixture to hold the backlight module, and the backlight module is installed on the back of the inspection platform through a beta-hailing disassembly component. Time. II. The substrate inspection device as described in Item 10 of the scope of patent application, wherein the reinforcing fixture includes: a plurality of penetration holes, which are provided on the inspection platform; 複數個連接元件，係突出於該背光單元，該連接 元件經由該複數個穿透孔使該背光單元安置於該檢測 平台；及 複數個耦接元件，係設置於該檢測平台並耦接該 連接元件。 12 ·如申請專利範圍第丨丨項所述之基板檢測裝置，其中該A plurality of connection elements protruding from the backlight unit, the connection element allowing the backlight unit to be disposed on the detection platform via the plurality of penetration holes; and a plurality of coupling elements disposed on the detection platform and coupled to the connection element. 12 · The substrate inspection device according to item 丨 丨 of the patent application scope, wherein .—-— 200424528 六、申請專利範圍 連接元件包含一T形連接扣，係具有一垂直部，垂直於 J檢測平台，和一水平部設於該垂直部的頂端，該耦 =件包含一U形連接件，該U形連接件係使該7形連接 扣嵌入，該U形連接件之一側係連接於一導執，另連接 於一圓柱件以進行沿著該導執進行往復運動。 1 3 · 士申明專利範圍第4項所述之基板檢測裝置，其中該檢 測平台包含： 一平台主體，係為矩形，其具有小於欲進行檢測 之邊基板的一開口； 複數個定位件，係用以定位該基板於該平台主 體；及 一固定件，以自由地使基板和平台主體固定和分 離。 1 4 ·如申請專利範圍第1 3項所述之基板檢測裝置，其中該 固定元件係為複數個吸附墊，依一定間隔排列於該平 口主體之開口的外侧部分之邊緣以真空吸附該基板。 1 5 ·如申請專利範園第丨3項所述之基板檢測裝置，其中更 包含複數個支撑件，係設於該平台主體之正面開口以 支撐該基板。 1 6 ·如申請專利範園第丨5項所述之基板檢測裝置，其中該 支撐件包含： ' 複數個透明支撐桿，係橫跨該平台主體之正面開 口；及 牙千 複數個支待接腳，係以一定間隔垂直地設置於該 ΐϊβ^Ίΐη 第2〇頁 200424528 六、申請專利範圍 透明支撐桿，以支撐該基板。 1 7 ·如申請專利範圍第1 β項所述之基板檢測裴置，其中該 支撐接腳之材質係為陶瓷。 1 8.如申請專利範圍第4項所述之基板檢測裝置，其中該背 光單元包含： 一方框，係具有一中央開口；及 一發光元件陣列，係由複數個發光元件排列於該 方框所形成。 1 9 ·如申請專利範圍第4項所述之基板檢測裝置，其中更包 含一升降元件以移動該背光單元，調整該背光單元和 檢測平台的位置。 2 〇 ·如申請專利範圍第1 9項所述之基板檢測裝置，其中該 升降元件包含： 一底座，係用以置放該背光模組；及 一操作部，係安裝於該基底部，以控制該底座上 升和下降。 2 1 ·如申請專利範圍第2 〇項所述之基板檢測裝置，其中該 操作部包含： 複數個連接桿，其一頂端係通過基底部固定於該 底座； 一操作板，設在該基底部的下方與每一該連接桿 的一底端連接；及 一升降氣壓缸，係設於該基底部下方以使該操作 板上升或下降。.—-— 200424528 6. The scope of patent application The connecting element includes a T-shaped connecting buckle, which has a vertical portion, perpendicular to the J detection platform, and a horizontal portion at the top of the vertical portion. The coupling element includes a U The U-shaped connecting piece engages the 7-shaped connecting buckle. One side of the U-shaped connecting piece is connected to a guide, and the other is connected to a cylindrical piece for reciprocating movement along the guide. 1 3 · The substrate inspection device according to item 4 of the patent claim, wherein the inspection platform includes: a platform body, which is rectangular and has an opening smaller than the side substrate to be inspected; a plurality of positioning members, It is used for positioning the substrate on the platform body; and a fixing member for freely fixing and separating the substrate and the platform body. 1 4 · The substrate detecting device according to item 13 of the scope of patent application, wherein the fixing element is a plurality of suction pads, which are arranged at a certain interval on the edge of the outer part of the opening of the mouth main body to vacuum suction the substrate. 1 5 · The substrate inspection device according to item 丨 3 of the patent application park, which further includes a plurality of support members, which are provided on the front opening of the platform body to support the substrate. 1 6 · The substrate inspection device described in item 5 of the patent application park, wherein the support includes: '' a plurality of transparent support rods, which open across the front surface of the platform body; and a plurality of supports to be connected The feet are vertically arranged on the ΐϊβ ^ Ίΐη at a certain interval. Page 20 200424528 6. Patent application scope Transparent support rods to support the substrate. 1 7 · The substrate detection device described in item 1 β of the scope of patent application, wherein the material of the supporting pin is ceramic. 1 8. The substrate inspection device according to item 4 of the scope of patent application, wherein the backlight unit includes: a frame having a central opening; and a light emitting element array arranged by a plurality of light emitting elements in the frame. form. 19 • The substrate inspection device according to item 4 of the scope of patent application, further comprising a lifting element to move the backlight unit, and adjust the positions of the backlight unit and the detection platform. 2 〇. The substrate inspection device according to item 19 of the scope of patent application, wherein the lifting element includes: a base for placing the backlight module; and an operation part installed at the bottom of the base to Control the base up and down. 2 1 · The substrate inspection device according to item 20 of the scope of the patent application, wherein the operation part includes: a plurality of connecting rods, one of which is fixed at the base through the base; an operation board is provided at the base The lower part of the connecting rod is connected to a bottom end of each of the connecting rods; and a lifting pneumatic cylinder is arranged below the base portion to make the operation board rise or fall. 200424528 六、申請專利範圍 2 2 ·如申請專利範圍第4項所述之基板檢測裝置，其中更包 含一微觀檢驗單元，可沿著基底部的頂端部分做水平 方向的往復移動，於進行該基板檢測時，該微觀檢驗 單元係沿著置放該基板的該檢測平台做水平方向的移 動，以及一可動元件，係用以移動該微觀檢驗單元沿 著該基底部作水平方向的往復運動。 2 3 ·如申請專利範圍第2 2項所述之基板檢測裝置，其中該 可動元件包含·· 一導執，係設置於水平方向，並且分別平行於該 基底部的相對側； 一可動件，該可動件之一端設置該微觀檢驗單元 ，該可動件之另一端係連接至該導執以沿著水平方向 來回移動；及 一驅動機構，係用以驅動該可動件。 2 4.如申請專利範圍第23項所述之基板檢測裝置，其中該 驅動機構包含： 一滾珠螺桿，係安裝於該導執； 一滚珠螺帽’係沿者该滚珠螺桿移動，該可動件 係連接於該滾珠螺帽的一側；及 一馬達，用以旋轉該滾珠螺桿。 2 5 ·如申請專利範圍第2 3項所述之基板檢測裝置，其中今 驅動機構係為一線性馬達，其包含一定子係安裝於^ 導執，及一轉子係固定於該可動件，該轉子係沿著^200424528 6. Scope of patent application 2 2 · The substrate inspection device described in item 4 of the scope of patent application, which further includes a micro inspection unit that can reciprocate horizontally along the top end of the base to perform the substrate. During the inspection, the micro inspection unit is moved horizontally along the inspection platform on which the substrate is placed, and a movable element is used to move the micro inspection unit for reciprocating movement in the horizontal direction along the base. 2 3 · The substrate inspection device according to item 22 of the scope of patent application, wherein the movable element includes a guide, which is arranged in a horizontal direction and is parallel to the opposite side of the base; respectively, a movable element, One end of the movable member is provided with the micro inspection unit, and the other end of the movable member is connected to the guide to move back and forth along the horizontal direction; and a driving mechanism is used to drive the movable member. 2 4. The substrate inspection device according to item 23 of the scope of the patent application, wherein the driving mechanism includes: a ball screw, which is mounted on the guide; a ball nut 'which moves along the ball screw, and the movable member Is connected to one side of the ball nut; and a motor for rotating the ball screw. 2 5 · The substrate inspection device as described in item 23 of the scope of patent application, wherein the drive mechanism is a linear motor, which includes a certain sub-system mounted on the ^ guide, and a rotor system fixed on the movable part, the The rotor is along ^ 22頁 200424528 六、申請專利範圍 ^ 2 6 ·如申請專利範圍第2 2項所述之基板檢測裝置，其中該 顯微檢驗單元包含： 一顯微鏡’係安裝於該可動件以檢驗置放於該檢 測平台之該基板；及 一穿透式照明光源，設於該可動件較低處，係可 移至該檢測平台和遠背光早元之間，以亩接提由下 而上的穿透光至該檢測平台。 2 7 ·如申请專利範圍第1項所述之基板檢測裝置，其中该背 光單元包含： 一方框，係具有一中央開口；及 一發光元 方框所形成。 2 8 ·如申請專利範 含一微觀檢驗 方向的往復移 單元係沿著置 動，以及一可 者该基底部作 2 9 ·如申請專利範 可動元件包含 一導執， 基底部的相對 一可動件 ，該可動件之 件陣列，係由複數個發光元件排列於該 圍第1項所述之基板檢測裝置，其中更包 單元，可沿著基底部的頂端部分做水平 動’於進行該基板檢測時，該微觀檢驗 放該基板的該檢測平台做水平方向的移 動元件，係用以移動該微觀檢驗單元沿 水平方向的往復運動。 圍第2 8項所述之基板檢測裝置，其中該 係設置於水平方向，並且分別平行於該 側； ’該可動件之一端設置該微觀檢驗單元 另一端係連接至該導執以沿著水平方向 200424528 六、申請專利範圍 來回移動；及 一驅動機構，係用以驅動該可動件。 3 0 ·如申請專利範圍第2 9項所述之基板檢測裝置，其中該 驅動機構包含： 、 一滾珠螺桿，係安裝於該導軌； 一滾珠螺帽，係沿著該滾珠螺桿移動，該可動件 係連接於該滾珠螺帽的/側；及 一馬達，用以旋轉該滾珠螺桿。 3 1 ·如申請專利範圍第2 9項所述之基板檢測裝置，其中該 驅動機構係為一線性馬達，其包含一定子係安裝於該 導執’及一轉子係固定於該可動件，該轉子係沿著該 定子轉動。 32·如申晴專利範圍第28項所述之基板檢測裝置，其中該 顯微檢驗單元包含： 一顯微鏡，係安裝於該可動件以檢驗置放於該檢 測平台之該基板；及 二牙透式照明光源，設於該可動件較低處，係可 移至該檢測平台和該背光單元之間，以直接提供由下 而上的穿透光至該檢測平台。 33· ^ =專利範圍第1項所述之基板檢測裝置，纟中該旋 轉I置係包含： 龍複ΐ個鏈結桿，其一端係連接至該檢測平台的相 對侧，及 複數個操作桿，其一端連接於該鍵結桿，另^端22 pages of 200424528 6. Scope of patent application ^ 2 6 · The substrate inspection device as described in item 22 of the scope of patent application, wherein the microscopic inspection unit includes: A microscope 'is mounted on the movable member for inspection and placement on the substrate. The substrate of the detection platform; and a penetrating illumination light source, which is located at the lower part of the movable part, can be moved between the detection platform and the far-backlit early element to pick up the penetrating light from the bottom up. To the detection platform. 27. The substrate inspection device according to item 1 of the scope of patent application, wherein the backlight unit comprises: a frame having a central opening; and a light emitting element frame. 2 8 · If the patent application includes a micro-reciprocating unit moving along the direction, and if the base is 2 9 · If the patent application includes a guide, the base is relatively movable Piece, the movable piece piece array is a substrate detecting device according to the first item of the plurality of light emitting elements arranged in the enclosure, wherein the package unit can be moved horizontally along the top portion of the base to perform the substrate During the inspection, the micro-inspection placing the inspection platform of the substrate as a horizontal moving element is used to move the micro-inspection unit to a reciprocating motion in the horizontal direction. The substrate inspection device according to item 28, wherein the system is disposed in a horizontal direction and is parallel to the side respectively; 'One end of the movable member is provided with the micro inspection unit and the other end is connected to the guide to run along the horizontal Direction 200424528 6. The patent application scope moves back and forth; and a drive mechanism is used to drive the movable member. 30. The substrate inspection device according to item 29 of the scope of the patent application, wherein the driving mechanism includes: a ball screw, which is installed on the guide rail; a ball nut, which moves along the ball screw, and the movable The parts are connected to the / side of the ball nut; and a motor for rotating the ball screw. 3 1 · The substrate inspection device according to item 29 of the scope of the patent application, wherein the driving mechanism is a linear motor, which includes a certain sub-system mounted on the guide, and a rotor system fixed on the movable part, the The rotor system rotates along the stator. 32. The substrate inspection device according to item 28 of the Shen Qing patent scope, wherein the microscopic inspection unit includes: a microscope mounted on the movable member to inspect the substrate placed on the inspection platform; The type illumination light source is located at the lower part of the movable part and can be moved between the detection platform and the backlight unit to directly provide the bottom-up penetrating light to the detection platform. 33 · ^ = The substrate inspection device described in item 1 of the patent scope, wherein the rotation I system includes: Long Fuΐ a link rod, one end of which is connected to the opposite side of the detection platform, and a plurality of operating levers , One end is connected to the key rod, and the other ^ end 200424528 六、申請專利範圍 1 係連接至一馬達，並藉由馬達來調整該鏈結桿和該操 作桿的角度。 3 4.如申請專利範圍第1項所述之基板檢測裝置，其中更包 含一吸震元件，係設於檢測平台和該基底部之間以吸 收外部的振動。 3 5.如申請專利範圍第34項所述之基板檢測裝置，其中該 吸震元件係為一彈性避震框架。200424528 6. Scope of patent application 1 It is connected to a motor, and the angle of the link lever and the operating lever is adjusted by the motor. 3 4. The substrate testing device according to item 1 of the scope of patent application, further comprising a shock absorbing element, which is arranged between the testing platform and the base to absorb external vibration. 3 5. The substrate inspection device according to item 34 of the scope of the patent application, wherein the shock absorbing element is an elastic shock-absorbing frame. 第25頁Page 25
TW092121179A 2003-05-06 2003-08-01 Apparatus for inspecting substrate TWI247899B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-2003-0028633A KR100506702B1 (en) 2003-05-06 2003-05-06 Substrate Inspection Apparatus

Publications (2)

Publication Number Publication Date
TW200424528A true TW200424528A (en) 2004-11-16
TWI247899B TWI247899B (en) 2006-01-21

Family

ID=34374085

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092121179A TWI247899B (en) 2003-05-06 2003-08-01 Apparatus for inspecting substrate

Country Status (3)

Country Link
KR (1) KR100506702B1 (en)
CN (1) CN1288435C (en)
TW (1) TWI247899B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI737932B (en) * 2017-09-19 2021-09-01 南韓商細美事有限公司 Die stage unit and die bonding apparatus having the same

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100965417B1 (en) * 2004-11-18 2010-06-24 엘아이지에이디피 주식회사 Inspection method of substrate and Apparatus for testing substrate
KR100748108B1 (en) * 2005-02-23 2007-08-09 참앤씨(주) apparatus and method for inspecting CRT panel
TWI307929B (en) * 2005-05-12 2009-03-21 Olympus Corp Substrate inspection apparatus
JP2007093411A (en) * 2005-09-29 2007-04-12 Olympus Corp Substrate inspection apparatus
KR100935259B1 (en) * 2008-03-28 2010-01-06 주식회사 사이보그-랩 Macro inspection device for lcd glass
CN103604812A (en) * 2013-10-23 2014-02-26 上海华力微电子有限公司 Multipoint positioning method for wafer macroscopic defect
CN104176528B (en) * 2014-08-08 2017-08-25 昆山精讯电子技术有限公司 Switching mechanism for carrying out picture inspection to liquid crystal panel
CN106198547A (en) * 2016-06-24 2016-12-07 华为技术有限公司 A kind of display screen detection device
CN106950485A (en) * 2017-03-24 2017-07-14 京东方科技集团股份有限公司 A kind of tester substrate microscope carrier and substrate test equipment
CN107907549A (en) * 2017-11-13 2018-04-13 武汉华星光电半导体显示技术有限公司 Inspecting substrate equipment and substrate inspecting method
CN108613990A (en) * 2018-07-13 2018-10-02 江苏东旭亿泰智能装备有限公司 A kind of microcosmic and compound check machine of macroscopic view
CN109211907B (en) * 2018-10-24 2022-01-04 北京控制工程研究所 Tool device for detecting silver ion migration

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI737932B (en) * 2017-09-19 2021-09-01 南韓商細美事有限公司 Die stage unit and die bonding apparatus having the same

Also Published As

Publication number Publication date
CN1288435C (en) 2006-12-06
KR20040095036A (en) 2004-11-12
CN1548946A (en) 2004-11-24
KR100506702B1 (en) 2005-08-09
TWI247899B (en) 2006-01-21

Similar Documents

Publication Publication Date Title
TW200424528A (en) Apparatus for inspecting substrate
TW301099B (en)
JP6556269B2 (en) Inspection equipment
TWI393875B (en) Panel holder of panel testing apparatus and panel testing apparatus
KR101286250B1 (en) Array test apparatus having multiple head unit
KR100730450B1 (en) Substrate measuring apparatus
JP2006133099A (en) Inspection device of display panel
JP2008064666A (en) Substrate holding mechanism of visual inspection system
JP2019052914A (en) Inspection device
KR101236286B1 (en) Apparatus for inspecting defect of panel
JP2007278715A (en) Substrate inspection device
JP2000275140A5 (en)
KR101172686B1 (en) Apparatus for repairing a substrate
KR20110032016A (en) Work table of display panel inspection system
KR100837599B1 (en) Stage for glass panel
JP3897469B2 (en) Inspection apparatus and inspection method for flat object
JP4084653B2 (en) 2D measuring machine
KR100813291B1 (en) Apparatus for inspecting and repairing substrate
JP2003302346A (en) Surface inspection device for sheet work
CN114235839A (en) Automatic detection device for grid defects
JP3139179U (en) Inspection device for flat panel display
KR20090078520A (en) Device for supporting substrate and apparatus for inspecting substrate with it
KR100811544B1 (en) Inspection and repair apparatus for plane display
JP4031491B2 (en) Panel inspection device
CN220863963U (en) Measuring platform

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees