TW200420734A - Coating apparatus - Google Patents
Coating apparatusInfo
- Publication number
- TW200420734A TW200420734A TW92107670A TW92107670A TW200420734A TW 200420734 A TW200420734 A TW 200420734A TW 92107670 A TW92107670 A TW 92107670A TW 92107670 A TW92107670 A TW 92107670A TW 200420734 A TW200420734 A TW 200420734A
- Authority
- TW
- Taiwan
- Prior art keywords
- gear
- opening
- substrate holding
- monitor
- coating apparatus
- Prior art date
Links
Landscapes
- Coating Apparatus (AREA)
Abstract
A coating apparatus includes a motive unit, a transition mechanism, a monitor mechanism, a substrate holding mechanism and a coating source. In this case, the motive unit has a rotation axle. The transition mechanism has a first gear and a second gear. Even more, the first gear is pivoted on the rotation axle and the second gear engages with the first gear. The center of the second gear has a first opening. The monitor mechanism has at least two testing units. The substrate holding mechanism that is connected with the second gear has a second opening. The second opening is set opposite to the first opening. The monitor mechanism sets through the first gear and the second gear through the first and second openings. The coating source sets corresponding to the substrate holding mechanism and the testing units.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW92107670A TWI223007B (en) | 2003-04-03 | 2003-04-03 | Coating apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW92107670A TWI223007B (en) | 2003-04-03 | 2003-04-03 | Coating apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200420734A true TW200420734A (en) | 2004-10-16 |
TWI223007B TWI223007B (en) | 2004-11-01 |
Family
ID=34546169
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW92107670A TWI223007B (en) | 2003-04-03 | 2003-04-03 | Coating apparatus |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI223007B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI468541B (en) * | 2010-04-07 | 2015-01-11 | Ulvac Inc | Film coating system |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI427171B (en) * | 2008-10-17 | 2014-02-21 | Hon Hai Prec Ind Co Ltd | Film coating device |
TWI447247B (en) * | 2008-10-24 | 2014-08-01 | Hon Hai Prec Ind Co Ltd | Sputtering tool, sputtering device and sputtering method |
CN109585695B (en) | 2017-09-29 | 2020-01-24 | 昆山国显光电有限公司 | Evaporation mask plate, OLED panel, system and evaporation monitoring method |
-
2003
- 2003-04-03 TW TW92107670A patent/TWI223007B/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI468541B (en) * | 2010-04-07 | 2015-01-11 | Ulvac Inc | Film coating system |
Also Published As
Publication number | Publication date |
---|---|
TWI223007B (en) | 2004-11-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DK1544504T3 (en) | Planetary gear for wind turbines | |
DE60205460D1 (en) | PLANET TRANSMISSION AND ITS USE | |
ATE332457T1 (en) | PLANETARY GEAR SYSTEMS | |
EP1577573A4 (en) | Hinge device and electronic apparatus using the same | |
TW200608176A (en) | Slidable and automatic rotatable apparatus | |
WO2006118798A3 (en) | Variable-rate scrolling of media items | |
DE50305499D1 (en) | TRANSMISSION DEVICE WITH AN ECCENTRIC TRANSMISSION AXIS ARRANGED AT THE BEARING AXLE OF THE PLANETARY WHEEL | |
FR2879833B1 (en) | DEVICE FOR LOCKING AN ELECTRICAL APPARATUS ON A SUPPORT RAIL | |
EP2133976A3 (en) | Communication device | |
DK1960753T3 (en) | Vehicle wheel rim holding device | |
WO2006129207A3 (en) | Method of connecting mass storage device | |
DK1757839T3 (en) | Heavy duty gear for roller plate mills | |
DE502007004341D1 (en) | ACTIVE DIFFERENTIAL | |
TW200642404A (en) | Process and system for reception of a multimedia signal, cryptographic entity for this reception process and system, process and black box for the production of the cryptographic entity | |
TW200531800A (en) | Apparatus for converting torque | |
WO2004017366A3 (en) | Reticle manipulating device | |
SE0101968D0 (en) | A planetary gear unit | |
TW200420734A (en) | Coating apparatus | |
TW200706698A (en) | Apparatus for etching a glass substrate | |
ATE537384T1 (en) | CONTINUOUSLY VARIABLE TRANSMISSION DEVICE FOR A VEHICLE | |
FR2851623B1 (en) | ARTICULATED JUNCTION DEVICE | |
AU304590S (en) | Gaming device | |
WO2004072819A3 (en) | System and method for self-supporting applications | |
TW200512565A (en) | Portable computer and external module thereof | |
WO2006071557A3 (en) | Method and system of digital advertising |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |