TW200420734A - Coating apparatus - Google Patents

Coating apparatus

Info

Publication number
TW200420734A
TW200420734A TW92107670A TW92107670A TW200420734A TW 200420734 A TW200420734 A TW 200420734A TW 92107670 A TW92107670 A TW 92107670A TW 92107670 A TW92107670 A TW 92107670A TW 200420734 A TW200420734 A TW 200420734A
Authority
TW
Taiwan
Prior art keywords
gear
opening
substrate holding
monitor
coating apparatus
Prior art date
Application number
TW92107670A
Other languages
Chinese (zh)
Other versions
TWI223007B (en
Inventor
Chen-Yuan Hsu
Wai-Song Liao
Chih-Hung Hsieh
Original Assignee
Prodisc Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Prodisc Technology Inc filed Critical Prodisc Technology Inc
Priority to TW92107670A priority Critical patent/TWI223007B/en
Publication of TW200420734A publication Critical patent/TW200420734A/en
Application granted granted Critical
Publication of TWI223007B publication Critical patent/TWI223007B/en

Links

Landscapes

  • Coating Apparatus (AREA)

Abstract

A coating apparatus includes a motive unit, a transition mechanism, a monitor mechanism, a substrate holding mechanism and a coating source. In this case, the motive unit has a rotation axle. The transition mechanism has a first gear and a second gear. Even more, the first gear is pivoted on the rotation axle and the second gear engages with the first gear. The center of the second gear has a first opening. The monitor mechanism has at least two testing units. The substrate holding mechanism that is connected with the second gear has a second opening. The second opening is set opposite to the first opening. The monitor mechanism sets through the first gear and the second gear through the first and second openings. The coating source sets corresponding to the substrate holding mechanism and the testing units.
TW92107670A 2003-04-03 2003-04-03 Coating apparatus TWI223007B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW92107670A TWI223007B (en) 2003-04-03 2003-04-03 Coating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW92107670A TWI223007B (en) 2003-04-03 2003-04-03 Coating apparatus

Publications (2)

Publication Number Publication Date
TW200420734A true TW200420734A (en) 2004-10-16
TWI223007B TWI223007B (en) 2004-11-01

Family

ID=34546169

Family Applications (1)

Application Number Title Priority Date Filing Date
TW92107670A TWI223007B (en) 2003-04-03 2003-04-03 Coating apparatus

Country Status (1)

Country Link
TW (1) TWI223007B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI468541B (en) * 2010-04-07 2015-01-11 Ulvac Inc Film coating system

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI427171B (en) * 2008-10-17 2014-02-21 Hon Hai Prec Ind Co Ltd Film coating device
TWI447247B (en) * 2008-10-24 2014-08-01 Hon Hai Prec Ind Co Ltd Sputtering tool, sputtering device and sputtering method
CN109585695B (en) 2017-09-29 2020-01-24 昆山国显光电有限公司 Evaporation mask plate, OLED panel, system and evaporation monitoring method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI468541B (en) * 2010-04-07 2015-01-11 Ulvac Inc Film coating system

Also Published As

Publication number Publication date
TWI223007B (en) 2004-11-01

Similar Documents

Publication Publication Date Title
DK1544504T3 (en) Planetary gear for wind turbines
DE60205460D1 (en) PLANET TRANSMISSION AND ITS USE
ATE332457T1 (en) PLANETARY GEAR SYSTEMS
EP1577573A4 (en) Hinge device and electronic apparatus using the same
TW200608176A (en) Slidable and automatic rotatable apparatus
WO2006118798A3 (en) Variable-rate scrolling of media items
DE50305499D1 (en) TRANSMISSION DEVICE WITH AN ECCENTRIC TRANSMISSION AXIS ARRANGED AT THE BEARING AXLE OF THE PLANETARY WHEEL
FR2879833B1 (en) DEVICE FOR LOCKING AN ELECTRICAL APPARATUS ON A SUPPORT RAIL
EP2133976A3 (en) Communication device
DK1960753T3 (en) Vehicle wheel rim holding device
WO2006129207A3 (en) Method of connecting mass storage device
DK1757839T3 (en) Heavy duty gear for roller plate mills
DE502007004341D1 (en) ACTIVE DIFFERENTIAL
TW200642404A (en) Process and system for reception of a multimedia signal, cryptographic entity for this reception process and system, process and black box for the production of the cryptographic entity
TW200531800A (en) Apparatus for converting torque
WO2004017366A3 (en) Reticle manipulating device
SE0101968D0 (en) A planetary gear unit
TW200420734A (en) Coating apparatus
TW200706698A (en) Apparatus for etching a glass substrate
ATE537384T1 (en) CONTINUOUSLY VARIABLE TRANSMISSION DEVICE FOR A VEHICLE
FR2851623B1 (en) ARTICULATED JUNCTION DEVICE
AU304590S (en) Gaming device
WO2004072819A3 (en) System and method for self-supporting applications
TW200512565A (en) Portable computer and external module thereof
WO2006071557A3 (en) Method and system of digital advertising

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees