TW200416728A - Defect detection method of disc substrate, apparatus for the same, and method for manufacturing substrate for optical disc - Google Patents
Defect detection method of disc substrate, apparatus for the same, and method for manufacturing substrate for optical disc Download PDFInfo
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200416728 (1) 玖、發明說明 【發明所屬之技術領域】 本發明是關於一種檢測作爲C D，D V D等圓盤狀光記錄 媒體（光碟）的圓盤狀基板的缺陷的方法，其裝置及光碟 用基板的製造方法。 【先前技術】 作爲記錄資料或影像所用的記錄媒體，有CD或DVD等 所代表的光碟廣泛地被使用，惟近幾年來，被要求可記錄， 再生更大容量的資料或長時間的影像的光記錄媒體的開發， 以提昇光碟的記錄密度。 爲了提高光碟的記錄密度，必須減小被照射在光碟的記 錄，再生用的雷射光的光束點徑，又雷射光的光束點徑是正 比例於雷射光的波長與透鏡的數値口徑之比率之故，因而必 須使用短波長的雷射光，與數値口徑較大的透鏡，而在光碟 記錄，再生資料。 然而，使用數値口徑較大的透鏡時，雷射光的焦距變短 之故，因而在具有如CD或DVD的厚約1.2mm的基板，無法將 雷射光經由基板照射在記錄層。因此，在記錄層上形成薄約 0.1 mm的光透過層，而經由該光透過層，將雷射光照射在記 錄層被提案者。 如此地CD或DVD等，是記錄，再生用雷射光經由基板 被照射之故，因而依在基板的表面與內部雙方的異物或基板 材料的凝聚物等所產生的缺陷會在記錄’再生時有不良影響 (2) (2)200416728 。所以’生產光碟時的基板檢查時，不管缺陷存在於基板表 面或內部的任何地方，能除去具有缺陷的基板。 作爲光碟的製程的圓盤狀基板表面的缺陷檢查裝置及 檢查方法，將光線照射在圓盤狀基板的被檢查面，並將該 光線的反射光或透過光從上述圓盤狀基板中心朝外周藉由 線狀地排列多數像素的受光手段進行受光，一面旋轉上述 圓盤狀基板一面從受光手段接收資訊，依據資訊來判別正 常部與缺陷部，而檢查上述圓盤狀體的缺陷的檢查方法及 裝置（參照專利文獻1:日本特開200 1 -24 1 93 1號公報）。 在此’上述受光手段是線性攝影機；一面旋轉圓盤狀 基板一面藉由線性攝影機掃描一周分，以畫像處理裝置畫像 處理該錄影輸出信號，依照該處理資訊而藉由CPU進行缺陷 的解析。 例如，圓盤狀記錄媒體的基板的內部缺陷，是與藉由 反射光檢測表面缺陷不相同，藉由透過光進行檢測。 然而，有關於經由光透過層來照射記錄，再生用的雷射 光的光碟，記錄再生用的雷射光是爲了來入射在基板；而 基板內部的缺陷是成爲記錄，再生時不會給於不良影響。但 是，存在於設置基板的記錄層側的表面的缺陷，是會給於設 在其上面的記錄層不良影響。因此，在生產該光碟的生產時 的基板的檢查工程中，成爲僅除去設置基板的記錄層側的表 面上具有缺陷的基板就足夠。 然而，在習知的檢查方法中，沒有簡單地判別缺陷是否 爲基板的表面者或內部者的方法之故，因而也除去僅在內部 -5- (3) (3)200416728 具有缺陷的基板，而成爲降低製造良品率的原因。 【發明內容】 本發明是鑑於上述缺點問題而創作者，其目的是在於提 供一種判別圓盤狀基板表面與內部的缺陷而加以檢測，並 可提昇製造良品率的圓盤狀基板的缺陷檢測方法，其裝置 及光碟的製造方法。 本發明人是專心硏究的結果，發現一面旋轉光透過性材 料所構成的圓盤狀基板一面從表面斜斜地入射光線，而受 光在背面的反射光時，則缺陷被檢測到在入射光的光路上時 及在反射光的光路上時的兩次，且該兩次檢測時機的錯開是 在表面缺陷與內部缺陷上不相同。又，發現到該兩次檢測的 圓盤狀基板旋轉方向的距離爲一定時則爲表面缺陷，而一 定値以下時是內部缺陷，由此，知道僅除去具表面缺陷的 圓盤狀基板，就可提高良品率。 亦即，利用以下本發明可解決上述目的。 (1) 一種圓盤狀基板的缺陷檢測方法，其特徵爲具有 一面旋轉光透過性材料所構成的圓盤狀基板，一面將 照射光朝對於該表面的垂線傾斜於旋轉方向的一方地入射在 其表面的過程，及將從上述表面入射於圓盤狀基板內的照 射光的在背面的反射光，從傾斜於對於上述垂線與上述照射 光相反側的方向，依次錯開時間施以受光，使得受光的反射 光量比設定値還小時或是還大時判定作爲異常部的過程，及 (4) (4)200416728 上述異常部因時間錯開成爲兩個時，則判定這些兩個異常部 是否爲相似形，而藉由畫像處理測定相似形時的此些兩個異 常部的圓盤狀基板的旋轉方向的距離的過程，及判定上述 距離爲設定値的過程，及在上述距離爲設定値時判定有表面 缺陷的過程。 (2) —種圓盤狀基板的缺陷檢測方法，其特徵爲具有 一面旋轉光透過性材料所構成的圓盤狀基板，一面將 照射光朝對於該表面的垂線傾斜於旋轉方向的一方地入射在 其表面的過程，及將從上述表面入射於圓盤狀基板內的照 射光的在背面的反射光，從傾斜於對於上述垂線與上述照射 光相反側的方向，依次錯開時間施以受光，使得受光的反射 光量比設定値還小時或是還大時判定作爲異常部的過程，及 上述異常部因時間錯開成爲兩個時，則判定這些兩個異常部 是否爲相似形，而藉由畫像處理測定相似形時的此些兩個異 常部的圓盤狀基板的旋轉方向的距離，俾測定缺陷的圓盤 狀基板內的厚度方向位置的過程。 (3) 判定作爲上述異常部的過程，又包含檢測受光的 反射光量比設定値還小時或還大時所產生的異常點的過程， 及將該異常點顯示於對應於圓盤狀基板的表面上位置的圖 式’判定是否所顯示的異常點的集合具有作爲異常部的形狀 的過程’作爲特徵的（1)或（2)的圓盤狀基板的缺陷檢 測方法。 (4)藉由從上述圓盤狀基板的中心一直到外周，將多數 (5) 200416728 像素排列於圓盤狀基板的半徑方向的線性攝影機來 述反射光，俾畫像處理藉由該線性攝影機所存取的資 定上述兩個異常部間的距離，爲其特徵的（1)， (3)的圓盤狀基板的缺陷檢測方法。 (5) 作爲上述兩個異常部間的距離的判定基準 値L (mm)是將上述光透過性材料的折射率爲η，將 爲ί (mm)，將上述照射光對於圓盤狀基板表面的入 β 2，在作成 sin 0 2 /sin 0 χ 時，設定成 L = 2tTan 0 1， 徵的（1)至（4)的任一項的圓盤狀基板的缺陷檢 〇 (6) 將上述照射光的波長作爲600〜700nm，爲 的（1)至（5)的任一項的圓盤狀基板的缺陷檢測方 (7) 將上述照射光的上述光透過性材料層表面 線的角度的入射再作爲15°〜85°，較理想是作爲30 ’爲其特徵者的（1)至（6)的任一項的圓盤狀基 陷檢測方法。 (8) —種圓盤狀基板的缺陷檢測裝置，其特徵 裝載由光透過性材料所形成的圓盤狀基板，且 基板的旋轉支持裝置，及將照射光以對於該表面的垂 轉方向的一方傾斜地入射於上述圓盤狀基板表面的 置’及一面旋轉上述圓盤狀基板一面朝半徑方向同 次地測定從圓板狀基板的表面一直到外周爲止，並 述照射光從上述圓盤狀基板的表面入射於內部，錯 受光上 訊來測 (2)或 的設定 厚度作 射角爲 爲其特 測方法 其特徵 法。 對於法 。〜45 〇 板的缺 爲具備 旋轉該 線朝旋 照射裝 時或依 使得上 開時間 -8 - (6) (6)200416728 而依次受光產生在其背面的反射光的光檢測裝置，及藉由該 光檢測裝置所受光的反射光量比設定値還小或是較大時判定 作爲異常部，而且上述異常部錯開時間至少有兩個時，判定 此些異常部是否爲相似形，若爲相似形時，測定兩個異常部 間的圓盤狀基板旋轉方向的距離的畫像處理裝置，及上述 測定的距離爲設定値時判定爲有表面缺陷的判定裝置。 (9)上述畫像處理裝置是藉由上述光檢測裝置所受光 的反射光量比設定値還小或還大時檢出作爲異常點，且將該 異常點顯示於對應在圓盤狀基板的表面上位置的圖式，判 定是否所顯示的異常點的集合具有作爲異常部的形狀，爲其 特徵的（8)的圓盤狀基板的缺陷檢測裝置。 (1 0)上述光檢測裝置是從上述圓盤狀基板的中心一 直到外周，將多數像素排列於圓盤狀基板的半徑方向所形 成的線性攝影機，爲其特徵的（8)的圓盤狀基板的缺陷檢 測裝置。 (1 1)上述判定裝置是作爲上述兩個異常部間的距離的 判定基準的設定値L (mm)，將上述光透過性材料的折射率 爲η，將厚度作爲t (mm)，將上述照射光對於圓盤狀基板表 面的入射角爲θ2，在作成nuneVsine】時，設定成 L = 2tTan 0 !，爲其特徵的（8) ， （9)或（10)的圓盤狀基 板的缺陷檢測裝置。 (12)在從上述照射裝置一直到上述圓盤狀基板的照 射光的光路上’設置僅透過以特定波長作爲中心的所定寬的 波長領域的光線的帶通濾波器’爲其特徵的（8)至 （11) (7) (7)200416728 的任一項的圓盤狀的缺陷檢測裝置。 (1 3)設置將透過上述帶通濾波器的光線偏光於左旋或 右旋圓偏光，偏光面互相地正交的兩個直線偏光的一方的任 一方的偏光板，而且在從上述圓盤狀基板一直到上述光檢 測裝置的反射光路中，設置反射光通過上述偏光板的偏光與 僅透過相位僅位移π的偏光的受光側偏光板’爲其特徵的 (1 2)的圓盤狀基板的缺陷檢測裝置。 (14) 一種光碟的製造方法，其特徵爲具有： 由光透過性材料連續地形成圓盤狀基板的過程，及一 面旋轉上述圓盤狀基板’一面將照射光朝對於該表面的垂 線傾斜於旋轉方向的一方地入射在其表面的過程，及將從上 述表面入射於圓盤狀基板內的照射光的在背面的反射光， 從傾斜於對於上述垂線與上述照射光相反側的方向，依次錯 開時間施以受光，使得受光的反射光量比設定値還小時或是 還大時判定作爲異常部的過程，及上述異常部因時間錯開成 爲兩個時，則判定這些兩個異常部是否爲相似形，而藉由畫 像處理測定相似形時的此些兩個異常部的圓盤狀基板的旋 轉方向的距離的過程，及判定上述距離爲設定値的過程，及 在上述距離爲設定値時判定有表面缺陷的過程，及至少將記 錄層及光透過層以該順序形成於判定有上述表面缺陷以外的 圓盤狀基板的過程。 (15) —種光碟的製造方法，其特徵爲具有： 由光透過性材料連續地形成圓盤狀基板的過程，及一 面旋轉上述圓盤狀基板，一面將照射光朝對於該表面的垂 -10- (8) (8)200416728 線傾斜於旋轉方向的一方地入射在其表面的過程，及將從上 述表面入射於圓盤狀基板內的照射光的在背面的反射光， 從傾斜於對於上述垂線與上述照射光相反側的方向，依次錯 開時間施以受光，使得受光的反射光量比設定値還小時或是 還大時判定作爲異常部的過程，及上述異常部因時間錯開成 爲兩個時，則判定這些兩個異常部是否爲相似形，而藉由畫 像處理測定相似形時的此些兩個異常部的圓盤狀基板的旋 轉方向的距離，俾測定缺陷的圓盤狀基板內的厚度方向位 置的過程，及至少將記錄層及光透過層以該順序形成於判定 有上述表面缺陷以外的圓盤狀基板的過程。 (1 6)判定作爲上述異常部的過程，又包含檢測受光的 反射光量比設定値還小時或還大時所產生的異常點的過程， 及將該異常點顯示於對應於圓盤狀基板的表面上位置的圖 式，判定是否所顯示的異常點的集合具有作爲異常部的形狀 的過程，作爲特徵的（14)或（15)的光碟的製造方法。 (1 7)藉由從上述圓盤狀基板的中心一直到外周，將多 數像素排列於圓盤狀基板的半徑方向的線性攝影機來受光 上述反射光，俾畫像處理藉由該線性攝影機所存取的資訊來 測定上述兩個異常部間的距離，爲其特徵的（14)或（15) 的光碟的製造方法。 (1 8)作爲上述兩個異常部間的距離的判定基準的設定 値L (mm)是將上述光透過性材料的折射率爲^，將厚度作 爲t (mm)，將上述照射光對於圓盤狀基板表面的入射角爲 0 2，在作成sin Θ 2 /sin 0 i時，設定成L = 2tTan 0 !，爲其特 -11 - (9) (9)200416728 徵的（1 4)至（1 7)中的任一項的光碟的製造方法。 (發明的效果） 本發明是如上述地構成之故，因而藉由同一光學系確實 地判別圓盤狀基板表面的缺陷與內部的缺陷並可加以檢測 ，又，具有可提昇光碟的製造良品率的優異效果。 【實施方式】 如第1圖所示地，本發明的實施最良好形態的圓盤狀基 板的缺陷檢測裝置10是構成光碟製造裝置50 (參照第8圖的 一部分，以基板製造裝置60所製造，將由光透過性材料所形 成的圓盤狀基板（在下一工程形成各種膜而成爲光碟）12, 靈出膜形成側予以載置，且旋轉該基板的旋轉支持裝置1 6， 及對上述膜形成側，在第1圖中，從上方傾斜地入射照射光 的照射裝置1 8，及一面旋轉上述圓盤狀基板1 2 —面朝半徑 方向同時地測定從該圓盤狀基板1 2的中心一直到外周；並 受光來自上述照射裝置1 8的照射光的上述圓盤狀基板1 2的 表面及背面（詳細下述）的反射光的線性攝影機20，及藉由 該線性攝影機20所受光的反射光量是將藉由圓盤狀基板1 2 的表面或內部的缺陷比設定値還小時所產生的暗點或是還大 時所產生的明點檢測作爲異常點，而在將該異常點排列於基 板表面時，將藉由異常點所形成的集合作爲異常部。因此， 成爲該異常部的形狀成爲表示缺陷的大小或形狀。 具有檢測該異常部之同時，異常部錯開時間被檢測兩次 -12- (10) (10)200416728 時’則判定此些兩個異常部的形狀是否相似形，而相似形時 ’測定兩個異常部的圓盤狀基板旋轉方向的距離的畫像處 理裝置22，及上述測定的距離爲設定値時判定有表面缺陷的 判定裝置的CPU 24所構成。 第1圖中記號26是表示構成旋轉支持裝置16的一部分的 電動機；28是表示用以控制該電動機26的轉速的電動機控制 裝置；30是表示用以顯示上述CPU24的判定結果的顯示器；32 是表示輸出同判定結果的印表機；34是表示將配合CPU24的 判定結果所檢查的圓盤狀基板搬運至下一工程或作爲缺陷 品加以排出的搬運裝置；36是表示將來自CPU24的判定結果 信號傳送至搬運裝置34的序列器。上述旋轉支持裝置16是設 在下述的檢查台40上。 上述圓盤狀基板12是如其一部分的斷面擴大模式地表 示於第2圖所示地，爲聚碳酸酯（PC)基板，在該PC基板12 的膜形成側的表面1 2 A，依次地形成有反射膜1 4 A，耐熱保 護膜14B，記錄膜14C，界面層14D，耐熱保護膜14E，光透 過層14F，又，形成有最外側的硬敷層14G而成爲光碟14。 以藉由上述缺陷檢測裝置1 0來檢查圓盤狀基板1 2之後 的工程（成膜線70:參照第8圖），形成有上述反射膜14A至 硬敷層1 4 G。 如第3圖所示地，上述照射裝置1 8是成爲照射從圓盤狀 基板1 2的內周至外周半徑方向直線狀地橫斷的帶狀照射領域 19。如第4圖所示地，該照射裝置18是包含鹵素燈等所構成 的光源1 8 A，及依次地配置在從該光源1 8 A —直到上述圓盤 -13- (11) (11)200416728 狀基板12的照射光的光路上的帶通濾波器18B，SC (銳截止 式）濾波器18C，直線偏光板18D，λ /4相位差板18E所構成： 作成將右旋或左旋圓偏光作爲照射光能入射於上述圓盤狀 基板1 2的表面。 在此，上述帶通濾波器18Β是將波長650nm作爲峰値而 能透過一定帶寬的波長光，又SC濾波器18C是作成能截止不 足610nm的波長光。 上述線性攝影機20是從上述圓盤狀基板1 2中心朝外周 線狀地排列多數像素（例如4096像素）所構成，配合受光於 每一像素的反射光的光量，可將視頻輸出信號輸出至畫像處 理裝置22。 在上述線性攝影機20與上述圓盤狀基板1 2之間的反射 光的光路上，配置有圓偏光板20A。該圓偏光板20A是從上 述照射裝置1 8所照射的左旋或右旋圓偏光在圓盤狀基板1 2 的背面被反射，僅轉換相位7Γ而僅可透過成爲右旋或左旋圓 偏光的反射光。 如第5圖所示地，上述照射裝置1 8及線性攝影機20的 配置，是依照射裝置18的照射光I從圓盤狀基板12的表面12A 入射於內部，且在背面12B所反射的反射光R，能入射於線 性攝影機20。 上述照射光1是對於表面1 2 A的垂線，朝圓盤狀基板1 2 的旋轉方向亦即切線方向的一方傾斜，且對於圓盤狀基板 12的表面12A的垂線的角度，亦即入射角0 2作成丨5。至85。 。若在該角度範圍內，則照射光不會被全反射，而從圓盤 -14- (12) (12)200416728 狀基板12的表面12A入射於斷面內，且在背面12B被反射。 反射光是對於上述表面1 2 A的垂線，在與上述照射光傾斜相 反的位置被受光於線性攝影機20。 特別是，即使在所測定的實像與陰影（參照下述）的 距離較大的缺陷也不重疊可測定般地，須將0 2變大，又， 若將0 2變過大，則實像與陰影之距離會變大，而用以判斷 爲這些相似形的資料處理量變大，因此02是30°至45。較理 想。 如第6圖所示地，上述畫像處理裝置22是從圓盤狀基板 1 2的中心側朝外周側在橫軸取線性攝影機20的各像素號碼， 且在縱軸取受光量（反射光量時，以反射光量低的設定値 (低臨限位準）與高設定値（高臨限位準）作爲基準，比低 臨限位準還小時’則將此檢測作爲暗點。第7圖是線性攝影 機的1〜4096像素號碼的像素檢測受光量，將所得到的判定結 果橫向地排列顯示’將該線性攝影機依次錯開時間（施以 掃描）來檢測受光量所得到的判定結果縱向地排列顯示作 爲圖式。一像素的一掃描分的判定結果是在第7圖中以一質 量（一點）被顯示。以4096 X 24000點表示圓盤狀基板的全 表面上位置。如第7圖所示地，將如第6圖所檢測的暗點集合 體，記錄作爲徑方向三點，掃描方向四點的異常部，且能算 出該異常部與其他異常部之相似關係及兩者間的圓盤狀基 板圓周方向的距離。又，以缺陷的光透過率比圓盤狀基板 1 2的材料還大時等，而在反射光量比高設定値（高臨限位準 )還高時檢測作爲明點，其集合體也成爲異常部。 -15- (13) (13)200416728 如下述地，在第7圖中先行的（上側）異常部（暗點的 集合體或明點的集合體：以下相同）D!是被認識的實像，而後 行（下側）異常部D:是被認識爲陰影。 上述CPU24是將上述兩個異常部〇1與〇2間的距離，與事 先所設定的設定基準値相比較，若與該値大約一致則判定爲 表面缺陷，若小則判定爲內部缺陷，將判定結果經由序列器 3 6搬運至搬運裝置34，搬運裝置34是依據所輸入的結果資訊 ，將檢查的圓盤狀基板1 2搬運至圓盤狀基板丨2，或是作爲 NG從線排出。 在此，成爲上述兩個異常部間的距離的判定基準的設定 値L (mm)是上述圓盤狀基板12的折射率爲η，厚度爲 t (mm) ，上述照射光對於圓盤狀基板的表面1 2 A的入射角爲0 2， n = sin(9 2/sin0 1時，作爲L = 2tTan0 】。 如第8圖所示地，上述搬運裝置34是由：將在基板製造裝 置60所製造的圓盤狀基板12，從前一工程搬運線的終端38 移載至檢查台40的第一移載裝置42，及將終了檢查的圓盤 狀基板12從檢查台40選擇性地篩選至後續工程搬運線44或是 排出線46的第二移載裝置48所構成。上述後續工程搬運線44 是將檢查合格的圓盤狀基板12搬運至形成反射膜14A，耐熱 保護膜14B，記錄膜14C，界面層14D，耐熱保護膜14E，光 透過層14F，及硬敷層14G的成膜線70。 以下，參照第9圖，說明將從基板製造裝置60所搬運的 圓盤狀基板1 2，藉由上述缺陷檢測裝置1 0，檢測表面的缺 陷或內部缺陷，且完成作爲光碟1 4的過程。 -16- (14) (14)200416728 利用基板製造裝置60連續地製造圓盤狀基板12，藉第 一移載裝置42，將上述製造的圓盤狀基板12，以其表面12A 朝上方’從搬運終端38移載檢查台40上的旋轉支持裝置16上200416728 (1) 发明 Description of the invention [Technical field to which the invention belongs] The present invention relates to a method for detecting defects in a disc-shaped substrate as a disc-shaped optical recording medium (optical disc) such as a CD, DVD, and the like, and an apparatus and an optical disc therefor Method for manufacturing a substrate. [Prior art] As a recording medium for recording materials or images, optical disks such as CDs or DVDs are widely used. However, in recent years, it has been required to record and reproduce larger-capacity materials or long-term images. Development of optical recording media to increase the recording density of optical discs. In order to increase the recording density of the optical disc, it is necessary to reduce the beam spot diameter of the laser light that is irradiated on the disc for recording and reproduction, and the beam spot diameter of the laser light is proportional to the ratio of the wavelength of the laser light to the number aperture of the lens Therefore, it is necessary to use a short-wavelength laser light and a lens with a larger diameter to record and reproduce data on the optical disc. However, when a lens having a large diameter is used, the focal length of the laser light becomes short. Therefore, a substrate having a thickness of about 1.2 mm, such as a CD or DVD, cannot radiate the laser light to the recording layer through the substrate. Therefore, a light transmitting layer having a thickness of about 0.1 mm was formed on the recording layer, and laser light was irradiated to the recording layer through the light transmitting layer. In this way, CDs, DVDs, and the like are irradiated with laser light for recording and reproduction through the substrate. Therefore, defects caused by foreign matter on the surface and inside of the substrate or agglomerates of the substrate material may occur during recording and reproduction. Adverse effects (2) (2) 200416728. Therefore, during the inspection of the substrate during the production of the optical disc, the defective substrate can be removed regardless of whether the defect is present on the surface or inside the substrate. As a defect inspection device and inspection method for the surface of a disk-shaped substrate as a process of optical discs, light is irradiated onto the inspected surface of the disk-shaped substrate, and reflected or transmitted light of the light is directed from the center of the disk-shaped substrate toward the outer periphery. Receiving light by a light receiving means in which a plurality of pixels are arranged linearly, receiving information from the light receiving means while rotating the disk-shaped substrate, judging a normal part and a defective part based on the information, and inspecting the defect of the disk-shaped body And device (refer to Patent Document 1: Japanese Patent Laid-Open No. 200 1 -24 1 93 1). Here, the above-mentioned light receiving means is a linear camera; while rotating the disc-shaped substrate, the linear camera is scanned for one minute, and the video output signal is processed by an image processing device image, and the CPU analyzes the defect according to the processing information. For example, the internal defects of the substrate of the disc-shaped recording medium are different from the surface defects detected by the reflected light, and are detected by the transmitted light. However, with regard to optical discs irradiated with recording and reproducing laser light through a light-transmitting layer, the recording and reproducing laser light is incident on the substrate; the defect inside the substrate is recording, and it will not adversely affect the reproduction. . However, a defect existing on the surface of the recording layer side of the substrate is adversely affected by the recording layer provided thereon. Therefore, in the inspection process of the substrate at the time of production of the optical disc, it is sufficient to remove only the substrate having a defect on the surface of the recording layer side where the substrate is provided. However, in the conventional inspection method, there is no simple method to determine whether the defect is the surface or the inside of the substrate. Therefore, the substrate with the defect only in the internal-5- (3) (3) 200416728 is also removed. It becomes the cause of reducing the manufacturing yield. [Summary of the Invention] The present invention is made by the creator in view of the above-mentioned disadvantages, and an object thereof is to provide a disc-shaped substrate defect detection method that discriminates and detects defects on the surface and inside of the disc-shaped substrate, and can improve the manufacturing yield. , Its device and manufacturing method of optical disc. As a result of intensive research, the present inventor found that a disc-shaped substrate made of a rotating light-transmitting material incident light obliquely from the surface while receiving light reflected from the back surface, a defect was detected in the incident light. Twice on the optical path of the light and on the optical path of the reflected light, and the deviation of the two detection timings is different in the surface defect and the internal defect. In addition, it was found that when the distance between the two directions of the disc-shaped substrate in the rotation direction is constant, it is a surface defect, and when the distance is less than or equal to an internal defect, it is known that only the disc-shaped substrate with surface defects is removed. Can improve yield. That is, the above-mentioned object can be solved by the following invention. (1) A defect detection method for a disk-shaped substrate, characterized in that it has a disk-shaped substrate made of a light-transmitting material that rotates and irradiates incident light on a surface that is inclined to the direction of rotation with respect to a vertical line to the surface. The process of the surface, and the reflected light on the back side of the irradiated light incident from the above surface into the disc-shaped substrate are sequentially shifted in time from the direction inclined to the side opposite to the perpendicular to the irradiated light, so that the light is received in order. The process of judging as abnormal parts when the amount of reflected light received is smaller or larger than the set value, and (4) (4) 200416728 When the above abnormal parts become two due to time shift, it is determined whether the two abnormal parts are similar. Shape, and the process of measuring the distance in the direction of rotation of the disc-shaped substrate of these two abnormal parts when the shape is similar by image processing, and the process of determining that the distance is a set value, and determining when the distance is a set value, Processes with surface defects. (2) A defect detection method for a disk-shaped substrate, characterized in that it has a disk-shaped substrate made of a light-transmitting material while rotating, and an incident light is incident on a surface inclined to a direction perpendicular to the vertical line of the surface. The process on the surface and the reflected light on the back side of the irradiated light incident from the above surface into the disc-shaped substrate are sequentially shifted in time from the direction inclined to the side opposite to the perpendicular line to the irradiated light, The process of determining when the amount of reflected light received is smaller or larger than the set value, and when the abnormal part becomes two due to time shift, it is determined whether the two abnormal parts are similar, and by the image The process of measuring the distance in the rotation direction of these two abnormal portions of the disk-shaped substrate when the shape is similar, and measuring the position in the thickness direction of the defective disk-shaped substrate. (3) The process of judging the abnormal part includes the process of detecting an abnormal point generated when the amount of reflected light received is smaller or larger than the setting value, and displaying the abnormal point on the surface corresponding to the disc-shaped substrate. The pattern of the upper position 'process of determining whether the set of displayed abnormal points has the shape as an abnormal part' is a method of detecting a defect of a disc-shaped substrate of (1) or (2). (4) The reflected light is described by a linear camera in which a plurality of (5) 200416728 pixels are arranged in the radial direction of the disk-shaped substrate from the center to the periphery of the disk-shaped substrate, and the image processing is performed by the linear camera. The access method determines the distance between the two abnormal parts, and is a method for detecting a disc-shaped substrate (1) or (3). (5) As a criterion for determining the distance between the two abnormal portions, 値 L (mm) is a refractive index of the light-transmitting material η, and ί (mm), and the irradiation light is applied to the surface of the disc-shaped substrate. In the case of β 2, when forming sin 0 2 / sin 0 χ, set it to L = 2tTan 0 1, and check the defect of the disc-shaped substrate according to any one of (1) to (4). (6) The wavelength of the irradiated light is 600 to 700 nm, and the defect detection method of the disc-shaped substrate according to any one of (1) to (5) is (7) an angle of a surface line of the light-transmitting material layer of the irradiated light The incident angle is 15 ° ~ 85 °, and more preferably, it is a disc-shaped base depression detection method according to any one of (1) to (6) whose characteristic is 30 ′. (8) A defect detection device for a disk-shaped substrate, comprising a disk-shaped substrate formed of a light-transmitting material, a rotation support device for the substrate, and a device for irradiating light in a direction perpendicular to the surface. When one side is obliquely incident on the surface of the disk-shaped substrate and the disk-shaped substrate is rotated, the same time is measured from the surface of the disk-shaped substrate to the outer periphery while rotating the disk-shaped substrate, and the irradiation light from the disk is described. The surface of the substrate is incident on the inside, and it is measured by (2) or the set thickness as the angle of incidence. For law. ~ 45 〇 The lack of a board is provided with a light detection device that receives the reflected light generated on the back side of the light in turn when the line is rotated to rotate the device or in accordance with the opening time -8-(6) (6) 200416728, and by When the amount of reflected light received by the light detection device is smaller or larger than the setting value, it is determined as an abnormal part, and when the above-mentioned abnormal parts are shifted by at least two times, it is determined whether the abnormal parts are similar shapes. At this time, an image processing device that measures the distance in the direction of rotation of the disk-shaped substrate between the two abnormal portions, and a determination device that determines that the measured distance is a surface defect at a set time. (9) The image processing device detects an abnormal point when the amount of reflected light received by the light detection device is smaller or larger than the set value, and displays the abnormal point on the surface of the disc-shaped substrate. The pattern of the position determines whether or not the set of displayed abnormal points has a shape as an abnormal portion, and is a defect detection device of the disc-shaped substrate of (8). (10) The light detection device is a linear camera formed by arranging a large number of pixels in a radial direction of the disk-shaped substrate from the center to the outer periphery of the disk-shaped substrate. Defect detection device for substrate. (1 1) The determination device is set as 値 L (mm) as a determination criterion for the distance between the two abnormal portions, the refractive index of the light-transmitting material is η, the thickness is t (mm), and the above The incident angle of the irradiated light to the surface of the disc-shaped substrate is θ2. When creating nuneVsine], set L = 2tTan 0!, Which is the characteristic of the disc-shaped substrate defect of (8), (9) or (10). Detection device. (12) A feature of 'providing a band-pass filter that transmits only light in a wavelength range of a predetermined width with a specific wavelength as the center' is provided on the optical path of the irradiation light from the above-mentioned irradiation device to the above-mentioned disc-shaped substrate (8 ) To (11) (7) (7) 200416728. (1 3) A polarizing plate is provided to polarize light passing through the band-pass filter to left-handed or right-handed circular polarization, and one of two linearly polarized lights whose polarization planes are orthogonal to each other. The light-receiving-side polarizing plate 'of which the reflected light passes through the above-mentioned polarizing plate and the light-receiving-side polarizing plate that transmits only the phase shifted by π is provided in the reflected light path of the above-mentioned photodetection device. Defect detection device. (14) A method for manufacturing an optical disc, comprising: a process of continuously forming a disc-shaped substrate from a light-transmitting material; and rotating the disc-shaped substrate while rotating the disc-shaped substrate to incline the irradiation light toward a perpendicular to the surface. The process in which one of the directions of rotation is incident on its surface, and the reflected light on the back surface of the irradiated light incident from the above surface into the disc-shaped substrate are sequentially inclined from the direction opposite to the perpendicular line and the irradiated light, in that order. The process of judging the time when the received light is shifted so that the amount of reflected light is smaller or larger than the set value, and when the above abnormal sections become two due to time shift, it is determined whether the two abnormal sections are similar. Shape, and the process of measuring the distance in the direction of rotation of the disc-shaped substrate of these two abnormal parts when the shape is similar by image processing, and the process of determining that the distance is a set value, and determining when the distance is a set value, A process with a surface defect, and at least a recording layer and a light transmitting layer formed in this order on a disc-shaped substrate other than the surface defect the process of. (15) A method for manufacturing an optical disc, comprising: a process of continuously forming a disc-shaped substrate from a light-transmitting material; and rotating the disc-shaped substrate while rotating the disc-shaped substrate while irradiating light toward the surface perpendicular to the surface- 10- (8) (8) 200416728 The process in which a line is incident on its surface obliquely to the direction of rotation, and the reflected light on the back of the irradiated light incident from the above surface into the disc-shaped substrate is inclined from The direction of the vertical line opposite to the irradiated light is sequentially shifted in time to receive light, so that the amount of reflected light received is smaller or larger than the set value, and the process of judging as an abnormal part becomes two, and the abnormal part becomes two due to time shift. In this case, it is determined whether or not the two abnormal portions are similar, and the distance in the rotation direction of the disk-shaped substrate of the two abnormal portions when the similar shape is measured is determined by image processing, and the inside of the defective disk-shaped substrate is measured. And a process of forming at least a recording layer and a light-transmitting layer in this order on a disc-shaped substrate other than the above-mentioned surface defect. (16) The process of judging the abnormal portion includes a process of detecting an abnormal point generated when the amount of reflected light received is smaller or larger than the set value, and displaying the abnormal point on a disk-shaped substrate. The pattern of the position on the surface determines whether or not the set of displayed abnormal points has the shape of the abnormal part, and the manufacturing method of the optical disc according to (14) or (15). (17) The reflected light is received by a linear camera in which a plurality of pixels are arranged in the radial direction of the disk-shaped substrate from the center to the outer periphery of the disk-shaped substrate, and the image processing is accessed by the linear camera. The method of (14) or (15) is used to determine the distance between the two abnormal parts. (18) The setting of the criterion for determining the distance between the two abnormal portions 値 L (mm) is to set the refractive index of the light-transmitting material to ^, set the thickness to t (mm), and set the above-mentioned irradiated light to a circle. The incident angle on the surface of the disc-shaped substrate is 0 2. When making sin Θ 2 / sin 0 i, it is set to L = 2tTan 0!, Which is (11) to (11) to (11) to (11) to (11) The manufacturing method of the optical disc in any one of (17). (Effects of the Invention) The present invention is structured as described above. Therefore, the same optical system can reliably discriminate the surface defects and the internal defects of the disc-shaped substrate and can detect them. In addition, it can improve the manufacturing yield of optical discs. Excellent effect. [Embodiment] As shown in FIG. 1, the defect detection device 10 of a disk-shaped substrate in the best form for carrying out the present invention constitutes an optical disc manufacturing device 50 (refer to a part of FIG. 8 and is manufactured by a substrate manufacturing device 60) , A disc-shaped substrate formed of a light-transmitting material (a variety of films will be formed in the next process to become a disc) 12, and a rotation support device 16 that rotates the substrate is placed on the film-forming side, and the film is On the forming side, in FIG. 1, the irradiation device 18 which irradiates the irradiation light obliquely from above and rotates the above-mentioned disk-shaped substrate 1 2 while simultaneously measuring from the center of the disk-shaped substrate 12 toward the radial direction. To the outer periphery; a linear camera 20 that reflects light from the front and back surfaces of the disc-shaped substrate 12 (which will be described in detail below) and receives light from the irradiation device 18 and the reflection of light received by the linear camera 20 The amount of light is based on the detection of dark spots or bright spots generated when the surface or internal defect of the disc-shaped substrate 1 2 is smaller than the setting 値 as an abnormal point, and the abnormality is When arranging on the substrate surface, a set formed by abnormal points is used as the abnormal portion. Therefore, the shape of the abnormal portion is the size or shape indicating the defect. When the abnormal portion is detected, the deviation time of the abnormal portion is detected. Times -12- (10) (10) 200416728 when 'they determine whether the shapes of these two abnormal parts are similar, and when they are similar', an image processing device that measures the distance in the direction of rotation of the disk-shaped substrate of the two abnormal parts 22, and the distance measured above is constituted by the CPU 24 of the judging device for judging a surface defect at the time of setting. The symbol 26 in the first figure indicates a motor constituting a part of the rotation support device 16; Motor control device for the rotation speed of 26; 30 is a display for displaying the determination result of the above-mentioned CPU 24; 32 is a printer for outputting the same determination result; 34 is a disc-shaped substrate to be inspected in accordance with the determination result of the CPU 24 A conveying device that conveys to the next process or discharges as a defective product; 36 is a signal indicating that the determination result from the CPU 24 is transmitted to the conveying device 34 Sequencer. The rotation support device 16 is provided on the inspection table 40 described below. The disc-shaped substrate 12 is a polycarbonate (PC) substrate as shown in FIG. On the surface 1 2 A on the film formation side of the PC substrate 12, a reflective film 1 4 A, a heat-resistant protective film 14B, a recording film 14C, an interface layer 14D, a heat-resistant protective film 14E, a light transmitting layer 14F, and The outermost hard cladding layer 14G is formed to form the optical disc 14. The process after inspecting the disc-shaped substrate 12 by the defect detection device 10 (film formation line 70: refer to FIG. 8) is formed as described above. The reflection film 14A to the hard cladding layer 14G. As shown in Fig. 3, the above-mentioned irradiation device 18 is a band-shaped irradiation area 19 which radiates linearly across the radial direction from the inner periphery to the outer periphery of the disc-shaped substrate 12. As shown in FIG. 4, the irradiation device 18 includes a light source 1 8 A including a halogen lamp, and is sequentially arranged from the light source 1 8 A to the above-mentioned disc -13- (11) (11) 200416728 Bandpass filter 18B, SC (sharp cut-off) filter 18C, linear polarizer 18D, λ / 4 retardation plate 18E on the optical path of the irradiated light from the substrate 12 The irradiated light is incident on the surface of the disc-shaped substrate 12. Here, the above-mentioned band-pass filter 18B is a wavelength light having a wavelength of 650 nm as a peak, and can transmit a certain bandwidth, and the SC filter 18C is a wavelength light that can cut off less than 610 nm. The linear camera 20 is configured by arranging a plurality of pixels (for example, 4096 pixels) linearly from the center of the disc-shaped substrate 12 toward the outer periphery, and can output a video output signal to an image in accordance with the amount of light reflected by each pixel. Processing device 22. A circularly polarizing plate 20A is disposed on the optical path of the reflected light between the linear camera 20 and the disc-shaped substrate 12. The circularly polarizing plate 20A reflects the left-handed or right-handed circularly polarized light irradiated from the above-mentioned irradiating device 18 on the back surface of the disk-shaped substrate 1 2, and only transmits phase 7Γ, and can only transmit reflections that become right-handed or left-handed circularly polarized light. Light. As shown in FIG. 5, the arrangement of the irradiating device 18 and the linear camera 20 is a reflection reflected from the surface 12A of the disc-shaped substrate 12 into the interior according to the irradiated light I of the irradiating device 18 and reflected by the back surface 12B. The light R can enter the linear camera 20. The above-mentioned irradiated light 1 is a perpendicular line to the surface 1 2 A, is inclined toward one of the rotation directions of the disc-shaped substrate 12, that is, a tangential direction, and an angle of the perpendicular line to the surface 12A of the disc-shaped substrate 12, that is, an incident angle. 0 2 作 丨 5. To 85. . If it is within this angle range, the irradiated light will not be totally reflected, but will be incident on the cross section from the surface 12A of the disc -14- (12) (12) 200416728, and be reflected on the back surface 12B. The reflected light is perpendicular to the surface 12 A, and is received by the linear camera 20 at a position opposite to the slope of the irradiated light. In particular, even if a defect having a large distance between the measured real image and the shadow (see below) does not overlap and can be measured, it is necessary to increase 0 2, and if 0 2 is too large, the real image and shadow are increased. The distance will increase, and the amount of data processing used to determine that these similar shapes will increase, so 02 is 30 ° to 45. More ideal. As shown in FIG. 6, the image processing device 22 takes each pixel number of the linear camera 20 on the horizontal axis from the center side of the disc-shaped substrate 12 toward the outer peripheral side, and takes the amount of received light (when reflected light amount) on the vertical axis. Based on the setting of low reflected light level (low threshold level) and high setting 値 (high threshold level) as the reference, and it is smaller than the low threshold level ', this detection is used as a dark spot. Figure 7 is Pixels of 1 to 4096 pixels of the linear camera detect the amount of received light, and display the obtained judgment results in a horizontal line. 'The linear cameras are sequentially shifted in time (scanning) to detect the amount of received light. As a diagram, the judgment result of one scanning point of one pixel is displayed as one mass (one point) in Fig. 7. The position on the entire surface of the disc-shaped substrate is represented by 4096 X 24000 points. As shown in Fig. 7 The dark spot assembly detected as shown in FIG. 6 is recorded as an abnormal part with three points in the radial direction and four points in the scanning direction, and the similar relationship between the abnormal part and other abnormal parts and the disc between them can be calculated. Substrate-like circle The distance in the direction. When the light transmittance of the defect is larger than that of the material of the disc-shaped substrate 12 and the like, the detection is performed as a bright point when the amount of reflected light is higher than the high setting 値 (high threshold level). The aggregate also becomes the abnormal part. -15- (13) (13) 200416728 As shown below, the anterior (upper) abnormal part (collection of dark points or aggregate of bright points: the same applies hereinafter) in Figure 7 ! Is a recognized real image, and the following (lower) abnormal portion D: is recognized as a shadow. The above-mentioned CPU 24 compares the distance between the two abnormal portions 〇1 and 〇2 with a preset reference set in advance. By comparison, if it is approximately the same as this 値, it is judged as a surface defect, if it is small, it is judged as an internal defect, and the judgment result is transferred to the conveying device 34 through the sequencer 36, and the conveying device 34 checks the result according to the input result information. The disc-shaped substrate 12 is transported to the disc-shaped substrate 丨 2 or is discharged from the line as NG. Here, the setting 基准 L (mm), which is a criterion for determining the distance between the two abnormal portions, is the disc-shaped The refractive index of the substrate 12 is η and the thickness is t (mm). The incident angle of the surface 1 2 A of the disc-shaped substrate is 0 2 and n = sin (L = 2tTan0 when 9 2 / sin0 1). As shown in FIG. 8, the conveying device 34 is composed of: The disc-shaped substrate 12 manufactured by the substrate manufacturing apparatus 60 is transferred from the terminal 38 of the previous process transfer line to the first transfer device 42 of the inspection table 40, and the disc-shaped substrate 12 that has completed the inspection is removed from the inspection table 40. The second transfer device 48 is selectively screened to the subsequent process transfer line 44 or the discharge line 46. The above-mentioned subsequent process transfer line 44 transfers the disc-shaped substrate 12 that has passed the inspection to the reflection film 14A, which is heat-resistant and protected The film formation line 70 of the film 14B, the recording film 14C, the interface layer 14D, the heat-resistant protective film 14E, the light transmission layer 14F, and the hard cladding layer 14G. Hereinafter, referring to Fig. 9, a disc substrate 12 transported from the substrate manufacturing apparatus 60 will be described with the above-mentioned defect detection apparatus 10, which detects surface defects or internal defects, and completes the process as an optical disc 14. -16- (14) (14) 200416728 The disc-shaped substrate 12 is continuously manufactured by the substrate manufacturing apparatus 60, and the disc-shaped substrate 12 manufactured as described above is directed upward from the surface 12A by the first transfer device 42. Transfer terminal 38 is transferred to rotation support device 16 on inspection table 40
C 然後’經由電動機控制裝置28以所定轉速來旋轉電動機 26之狀態’將照射光從照射裝置1 8投影於被檢查對象的圓盤 狀基板1 2上方的表面1 2 A。其反射光是被輸入於上述線性攝 影機20的各像素。這時候，線性攝影機20是以一次攝影（一 次掃描）來測定光量，連續地進行掃描。這時候，圓盤狀 基板1 2是被旋轉，利用依次錯開光的入射及反射的位置，而 依次錯開時間使得反射光受光。 這時候，如第5圖所示地，照射光的入射光1是從圓盤 狀基板12的背面12A折射而到背面12B，在此被反射而從表 面12A出射作爲反射光R。 若在該入射光I或反射光R的光路上有缺陷，該部分的反 射光量會降低（或增加）之故，因而若與正常光的對比相 差一定以上，則線性攝影機20的各像素的受光量，成爲如第 6圖所示地下降至低臨限位準（或上昇至高臨限位準）。 因此，此乃成爲第1 〇圖的步驟1 〇 1的缺陷檢測。在步驟 1 0 1中有缺陷檢測時，則在下一步驟1 02中，如第7圖所示地 ，異常部⑴的大小朝圓盤狀基板半徑方向被測定3點’而朝 掃描方向被測定4點。 在圓盤狀基板1 2的表面1 2 A有缺陷F時’該缺陷F如弟1 0 (A)圖所示地橫過入射光1的光路後’再藉由圓盤狀基板1 2 -17- (15) (15)200416728 進行旋轉而在些微時間之後，如第1 0 (B)圖所示地，缺陷 橫過反射光R的光路。 因此，如第7圖所示地，在圓盤狀基板1 2的半徑方向位 在同一位置，且朝掃描方向錯開，藉由畫像處理裝置22檢測 作爲異常部(實像）及異常部D2 (陰影）。 缺陷G在圓盤狀基板12的斷面內時，如第1 1 (A)及（B) 圖所示地，依次橫過入射光1的圓盤狀基板1 2斷面內的光路 及反射光R的圓盤狀基板12斷面內的光路。這時候，也錯開 地被檢測實像及陰影。 然後，在步驟1 03中，認定所檢測的兩個異常部D 1，D2 是否爲相似形，亦即認定是否在實像與陰影的關係之同時， 測定兩者間的距離L (參照第7圖）。 被認定爲相似形時，則移至下一步驟104，在CPU24中 來判別上述兩個異常部D!，〇2間的距離是否與設定値L大約 相等，或是在設定値以下。 在此，如第1 2圖所示地，缺陷G位在圓盤狀基板1 2的斷 面內時，則入射光1的光路上的檢測位置與反射光的光路上 的檢測位置的異常部間的距離1是當然成爲小於上述設定値 L (mm) 〇 因此，當被檢測的兩個異常部爲相似形時，而兩者間的 距離大約相等於L時，判別該異常部是表示表面缺陷者，又 小於L時是判別表示內部缺陷者。 判別的結果，若兩個異常部D!，D2間的距離與設定値L 大約相等時，則被判斷爲表面缺陷（步驟1 〇 5)，而移至步 -18- (16) (16)200416728 驟106及步驟107。 在步驟106，在CPU24中，將表面缺陷（暗點或明點的 集合體所構成的異常部）的大小，與事先所輸入的設定値 相比較而加以判別。 大小爲設定値以下時爲小缺陷，在步驟1 〇 7中成爲好 (〇K)，藉由第二移載裝置48，檢查台40上的圓盤狀基板12 是移載於後續工程搬運線44。 又，大小爲設定値以上，則在步驟1 09中作爲不好 (NG)，第二移載裝置48是將檢查台40的圓盤狀基板12移載 至排出線46。 在上述步驟1 07中，表面缺陷即使均小而成塊時也進行 較大的一個缺陷，亦即進行集合判別。 該集合判別是藉由如第7圖的一定範圍的面積內的點（ 各該異常點）的數目比率，來判定該比率是否超過設定値 〇 在設定値以下，則在步驟110中作爲好（ΟΚ)，圓盤狀 基板12是被送至成膜線7〇，俾成膜記錄膜14C，光透過層14F 等（參照步驟120)。又，若爲設定値以上，則有較大缺陷 ’而在步驟1 Π中，被視爲不好（NG)，圓盤狀基板12是被 移載至排出線46。 在上述的步驟1 〇3中被檢測的缺陷不是相似形時，及即 使爲相似形而兩者間的距離也在設定値以下時，則在步驟 1 1 2中被判斷爲內部缺陷，進行下一步驟1 1 3及步驟Π 4。 在步驟1 1 3中’判別內部缺陷的大小是否比設定値還大 -19- (17) (17)200416728 ，若爲設定値以下則爲好（OK)，而在步驟115中，檢查台 40上的圓盤狀基板12是被移載至後續工程搬運線44，在步 驟120，在成膜線60中，形成有反射膜14A，耐熱保護膜14B ’ g己錄目吴1 4 C，界面層1 4 D，耐熱保護膜1 4 E，光透過層1 4 F 及硬敷層14G，形成作爲光碟14。 又，若爲設定値以上，則移至步驟1 1 6而發出警告，惟 檢查台40上的圓盤狀基板12是被移至後續工程搬運線44。 但是，這時候在步驟1 1 7中，較小的內部缺陷大量地發生， 藉由該集合，將產生較大的內部缺陷的情形回授至生產工程 〇 在步驟1 14中，與上述步驟107同樣地，視爲集合判別， 結果，若較小的異常部集合爲設定値以下，則移至步驟1 1 8 而成爲好（OK)，圓盤狀基板12是從檢查台40移載至後續 工程搬運線44，與上述同樣地，在步驟121，經由成膜線70 成爲完成品。 又，設定値以上時，則移至上述步驟1 1 6 ’進行警告及 對於步驟1 1 7的生產工程的回授。 在此，上述照射裝置18的來自λ /4相位差板18E的出射 光（照射光）的波長，是藉由通過帶通濾波器186及％濾波 器18C，作爲600〜700nm的波長光，此爲由PC所構成的圓盤 狀基板1 2的反射率的分光特性，作爲反射率最低領域的波長 者。作成如此，則圓盤狀基板1 2內的透過率成爲最大’能 強調與有缺陷時的異常部的對比。選擇波長是依光透過性材 料的種類而爲藉由線性攝影機20可受光的波長帶’且可爲可 -20- (18) 200416728 視光’近紫外線或近紅外線（3 5 0〜1 1 0 0 n m)中的任意波長 ，惟特別是爲了強調對比，以6 0 0〜7 0 0 n m較理想。 又，如上述地，照射裝置18是使用直線偏光板18D及λ /4相位差板1 8Ε ’對於圓盤狀基板1 2的照射光作成右旋或左 旋圓偏光，且在線性攝影機20的入射光軸上也設有圓偏光板 20Α，能反射來自照射裝置18的圓偏光，僅成爲迴旋方向成 爲相反方向的圓偏光能入射於線性攝影機20。C Then, "the state in which the motor 26 is rotated at a predetermined rotation speed via the motor control device 28" projects the irradiation light from the irradiation device 18 onto the surface 1 2 A above the disc-shaped substrate 12 of the inspection object. The reflected light is input to each pixel of the linear camera 20 described above. At this time, the linear camera 20 measures the amount of light in one shot (one scan) and scans continuously. At this time, the disc-shaped substrate 12 is rotated, and the positions of incident and reflected light are sequentially shifted, and the reflected light is received by shifting the time sequentially. At this time, as shown in Fig. 5, the incident light 1 of the irradiated light is refracted from the back surface 12A of the disc-shaped substrate 12 to the back surface 12B, is reflected there, and is emitted from the surface 12A as reflected light R. If there is a defect in the optical path of the incident light I or reflected light R, the amount of reflected light in that part will decrease (or increase), so if the contrast with normal light is more than a certain value, the light received by each pixel of the linear camera 20 As shown in Figure 6 below, the amount becomes underground (or rises to a high threshold). Therefore, this is the defect detection of step 101 in FIG. 10. If there is a defect detection in step 101, then in the next step 102, as shown in Fig. 7, the size of the abnormal portion ⑴ is measured at three points toward the radius of the disc-shaped substrate and measured in the scanning direction. 4 o'clock. When there is a defect F on the surface 1 2 A of the disc-shaped substrate 12, the defect F crosses the optical path of the incident light 1 as shown in the figure 1 (A), and then passes through the disc-shaped substrate 1 2- 17- (15) (15) 200416728 After rotating for a little time, as shown in Fig. 10 (B), the defect crosses the optical path of the reflected light R. Therefore, as shown in FIG. 7, the disk-shaped substrate 12 is located at the same position in the radial direction and staggered in the scanning direction. The image processing device 22 detects the abnormal portion (real image) and the abnormal portion D2 (shadow). ). When the defect G is in the cross-section of the disc-shaped substrate 12, as shown in Figs. 1 (A) and (B), the light path and reflection in the cross-section of the disc-shaped substrate 12 of the incident light 1 are sequentially crossed. Optical path of the cross section of the disk-shaped substrate 12 of the light R. At this time, real images and shadows are also staggered. Then, in step 103, it is determined whether the detected two abnormal parts D1 and D2 are similar, that is, whether the real image and the shadow are related and whether the distance L between them is measured (refer to FIG. 7). ). When it is determined that the shape is similar, the process proceeds to the next step 104, and the CPU 24 determines whether the distance between the two abnormal portions D !, 〇2 is approximately equal to the setting 値 L, or is below the setting 値. Here, as shown in FIG. 12, when the defect G is located in the cross-section of the disc-shaped substrate 12, the abnormal position of the detection position on the optical path of the incident light 1 and the detection position on the optical path of the reflected light is abnormal. The distance 1 between them is of course smaller than the above setting 値 L (mm). Therefore, when the two abnormal parts detected are similar, and the distance between the two is approximately equal to L, it is determined that the abnormal part indicates the surface. When the defect is less than L, it is judged to indicate the internal defect. As a result of the discrimination, if the distance between the two abnormal parts D !, D2 is approximately equal to the setting 値 L, it is judged as a surface defect (step 1 〇5), and moves to steps -18- (16) (16) 200416728 Step 106 and Step 107. In step 106, the size of the surface defect (an abnormal portion composed of an aggregate of dark or bright points) is compared with the setting 値 input in advance to determine the size of the surface defect in the CPU 24. If the size is set to 値 or less, it is a small defect, and it becomes good (〇K) in step 107. The second transfer device 48 is used to transfer the disc-shaped substrate 12 on the inspection table 40 to the subsequent processing line. 44. When the size is equal to or larger than the setting value, it is determined as NG in step 109, and the second transfer device 48 transfers the disc-shaped substrate 12 of the inspection table 40 to the discharge line 46. In the above-mentioned step 107, even when the surface defects are all small, a larger defect is performed, that is, a set judgment is performed. The set judgment is based on the ratio of the number of points (each of the abnormal points) within a certain range of area as shown in FIG. 7 to determine whether the ratio exceeds the setting 値 0 or less than the setting ，, and it is good in step 110 ( 〇), the disc-shaped substrate 12 is sent to the film formation line 70, the film formation recording film 14C, the light transmission layer 14F, etc. (see step 120). If it is set to 値 or more, there is a large defect ′. In step 1 Π, it is considered bad (NG), and the disc-shaped substrate 12 is transferred to the discharge line 46. When the defect detected in the above step 1 03 is not a similar shape, and if the distance between the two is set to be less than or equal to the similar shape, it is judged as an internal defect in step 1 12 and the following is performed. One step 1 1 3 and step Π 4. In step 1 1 3, it is determined whether the size of the internal defect is larger than the setting 値 -19- (17) (17) 200416728, if it is the setting 値 or less, it is good (OK), and in step 115, the inspection table 40 The disc-shaped substrate 12 on the substrate is transferred to a subsequent engineering conveying line 44. At step 120, in the film forming line 60, a reflective film 14A, a heat-resistant protective film 14B 'is recorded, and the interface is Wu 1 4C. The layer 14 D, the heat-resistant protective film 14 E, the light transmitting layer 14F, and the hard cladding layer 14G were formed as the optical disc 14. In addition, if it is set to 値 or more, the process proceeds to step 1 16 and a warning is issued, but the disc-shaped substrate 12 on the inspection table 40 is moved to the subsequent process conveyance line 44. However, at this time, small internal defects occur in a large amount in step 1 1 1. With this set, the situation of large internal defects is fed back to the production process. In step 1 14 and step 107 above, Similarly, it is considered as a set discrimination. As a result, if the set of smaller abnormal parts is equal to or smaller than the set value, the process moves to step 1 1 8 and becomes OK. The disc-shaped substrate 12 is transferred from the inspection table 40 to the subsequent stage. In the same manner as described above, the process conveying line 44 becomes a finished product through the film forming line 70 in step 121. When the value is set to 値 or more, the process moves to the above-mentioned step 1 1 6 'for warning and feedback on the production process of step 1 1-7. Here, the wavelength of the emitted light (illumination light) from the λ / 4 retardation plate 18E of the above-mentioned irradiating device 18 is passed through the band-pass filter 186 and the% filter 18C as a wavelength of light of 600 to 700 nm. It is a spectral characteristic of the reflectance of the disc-shaped substrate 12 made of PC, and it is a wavelength in the lowest reflectance range. By doing so, the transmittance in the disc-shaped substrate 12 is maximized, and the contrast with the abnormal portion when there is a defect can be emphasized. The selected wavelength is a wavelength band that can be received by the linear camera 20 according to the type of the light-transmitting material, and can be -20- (18) 200416728 Sight light 'near ultraviolet or near infrared (3 5 0 ~ 1 1 0 0 nm), but especially for the purpose of emphasizing the contrast, 60 nm to 700 nm is ideal. As described above, the irradiating device 18 uses the linear polarizing plate 18D and the λ / 4 retardation plate 18E ′ to irradiate the disc-shaped substrate 12 with right-handed or left-handed circularly polarized light, and makes it incident on the linear camera 20 A circularly polarizing plate 20A is also provided on the optical axis, and can reflect circularly polarized light from the irradiating device 18, and only the circularly polarized light having the direction of rotation reversed can enter the linear camera 20.
此乃用以防止周圍的干擾光入射於線性攝影機20，而強 調無異常部的部分與異常的對比者。 因此，若在線性攝影機20所受光的反射光中的異常部與 不足的部分之間有充分對比，則不需要將照射光的波長限定 在特定領域，或作爲圓偏光。This is to prevent the surrounding interference light from entering the linear camera 20, and to emphasize the contrast between the part without an abnormality and the abnormality. Therefore, if there is sufficient contrast between the abnormal portion and the insufficient portion in the reflected light received by the linear camera 20, it is not necessary to limit the wavelength of the irradiated light to a specific field or to be circularly polarized light.
又，在上述實施形態的例子中，線性攝影機20是將如像 素號碼1至4096的複數像素，從圓盤狀基板12的內周側朝外 周直線狀地排列於半徑方向所構成，惟在圓盤狀基板1 2的 旋轉方向，各像素在單位時間內所掃描的距離是半徑方向內 側，亦即像素號碼愈小會愈短，而半徑方向外側，亦即像素 號碼愈大會愈多，會在檢測點數上產生不相同，此乃如表1 所示地，在各像素的單位時間內進行掃描的距離上施以加權 ，俾將所有像素的大小實質上作成同一較佳。 -21 - (19) (19)200416728 [表1] 像素號碼 加權 1 xl/4096 2 X2/4096 3 X3/4096 4 X4/4096 4094 X4094/4096 4095 X4095/4096 4096 xl 又，本發明是也適用於使用線性攝影機以外的光檢測器 的情形。例如在旋轉圓盤狀基板之狀態下，朝半徑方向掃 描相當於線性攝影機的一個至數個受光器。 又，圓盤狀基板12是由PC所構成而整體由光透過性材 料所形成地，本發明是適用於入射光在圓盤狀基板的背面 反射，並可檢測該反射光的光透過性圓盤狀基板。 又，與第3圖的圓盤狀基板的旋轉方向相反的旋轉方向 -22- (20) (20)200416728 也可進行測定，這時候，缺陷是先由反射光R被檢測（實像） ，之後由照射光I檢測（陰影）。 又，經上述檢查而合格的圓盤狀基板1 2是在成膜線7 〇 上，形成有反射膜14A，耐熱保護膜14B，記錄膜14C，界面 層14D，耐熱保護膜14E，光透過層14F及硬敷層14G而成爲 光碟1 4，惟本發明是並不被限定於此者，至少適用於形成有 記錄膜及光透過層的光碟的製造方法者。 (實施例） 將圓盤狀基板12作爲厚度1.1 mm的聚碳酸酯（折射率 η = 1 . 5 8)，作成入射角0 2 = 4 5 °，而將波長6 5 0 n m的照射光 （ 圓偏光）入射在圓盤狀基板12的表面12A，以4096像素的線 性攝影機受光反射光。 這時候，由於n = sin02/sin(9i = 1.58，因此成爲= 26.5°，成爲 I^StTanefl.lmm，L=l.lmm 時是成爲表面缺 陷，而0SL<l.lmm時是成爲內部缺陷。 存在於極表面的內部缺陷是其表面有成爲凹凸的可能性 之故，因而加以除去較理想，又也考慮測定誤差，也除去距 離爲L ± α的情形較理想，α是如可在5 %者。測定結果爲 >L+ α時，其實像與陰影是被判定爲不是同一缺陷。 在實際的判定下，考慮到上述的誤差等，將1. 〇 5 S L S 1 · 1 5作爲表面缺陷，並將0 S L< 1.05作爲內部缺陷的表面缺 陷的例子，以油性油墨形成大小約0 · 6 m m的缺陷於圓盤狀基 板的表面，又，在其他的圓盤狀基板中，作爲內部缺陷的 -23· (21) (21)200416728 例子，選擇以油性油墨打標記而將缺陷形成於圓盤狀基板 12的背面12B側者，及在光透過性材料層內有缺陷者，如第1 圖所示的構成來測定缺陷時，如表2所示，所謂表面缺陷與 內部缺陷及圓盤狀基板基板背面的缺陷，是實像與陰影之 間的距離L明確地不相同，可判別表面缺陷與內部缺陷。 表2 缺陷光 碟號碼 缺陷半 徑位置 R (mm) 缺陷徑 方向 (dot) 缺陷周 方向 (dot) 實像/陰 影間掃 描S (scan) 實像/陰 影間距 離L (mm) 缺陷種 類判定 1 25.45 31 32 166 1.106 表面 2 40.25 35 34 105 1.106 表面 3 58.15 32 32 73 1.111 表面 4 24.55 28 31 0 0.000 內部 5 41.21 31 30 0 0.000 內部 6 55.33 30 32 0 0.000 內部 7 30.12 12 11 76 0.599 內部 8 40.35 11 11 86 0.908 內部 9 51.25 12 10 61 0.818 內部 在表2中 缺陷半徑位置R:顯示所檢測的缺陷的半徑方向位置 -24- (22) 200416728 缺陷徑方向：顯示所檢測的缺陷的半徑方向的Μ '測點^ 缺陷周方向：顯示所檢測的缺陷的周方向的檢__ 實像/陰影間掃描S :顯示實像與陰影間的掃描_In the example of the above-mentioned embodiment, the linear camera 20 is configured by arranging a plurality of pixels such as pixel numbers 1 to 4096 in a straight line in the radial direction from the inner peripheral side to the outer periphery of the disc-shaped substrate 12, but the In the rotation direction of the disk-shaped substrate 12, the distance scanned by each pixel in a unit time is the inside of the radial direction, that is, the smaller the pixel number, the shorter it will be, and the outside of the radial direction, that is, the more the pixel number, the more There is a difference in the number of detection points. As shown in Table 1, weights are applied to the scanning distance of each pixel in a unit time, and it is preferable that the sizes of all pixels are substantially the same. -21-(19) (19) 200416728 [Table 1] Pixel number weighting 1 xl / 4096 2 X2 / 4096 3 X3 / 4096 4 X4 / 4096 4094 X4094 / 4096 4095 X4095 / 4096 4096 xl The present invention is also applicable For use with photodetectors other than linear cameras. For example, when a disk-shaped substrate is rotated, one to several photoreceptors equivalent to a linear camera are scanned in a radial direction. The disc-shaped substrate 12 is composed of a PC and is formed of a light-transmitting material as a whole. The present invention is suitable for reflecting incident light on the back surface of the disc-shaped substrate and detecting the light-transmitting circle of the reflected light. Disc-shaped substrate. In addition, the rotation direction -22- (20) (20) 200416728, which is opposite to the rotation direction of the disc-shaped substrate shown in FIG. 3, can also be measured. At this time, the defect is first detected by the reflected light R (real image), and then Detection by the irradiated light I (shadow). In addition, the disc-shaped substrate 12 that passed the above inspection is formed on the film forming line 70 with a reflective film 14A, a heat-resistant protective film 14B, a recording film 14C, an interface layer 14D, a heat-resistant protective film 14E, and a light transmitting layer. The 14F and the hard cladding layer 14G become the optical disc 14. However, the present invention is not limited to this, and is at least applicable to a method for manufacturing an optical disc in which a recording film and a light transmitting layer are formed. (Example) A disc-shaped substrate 12 was made of a polycarbonate having a thickness of 1.1 mm (refractive index η = 1.58), an incident angle of 0 2 = 45 °, and irradiation light having a wavelength of 650 nm ( Circularly polarized light) is incident on the surface 12A of the disk-shaped substrate 12 and receives light reflected by a linear camera of 4096 pixels. At this time, since n = sin02 / sin (9i = 1.58, it becomes = 26.5 °, and becomes I ^ StTanefl.lmm. When L = l.lmm, it becomes a surface defect, and when 0SL <l.lmm, it becomes an internal defect. The internal defect existing on the pole surface is because the surface may become uneven, so it is ideal to remove it, taking into account measurement errors, and also removing the case where the distance is L ± α. If α is within 5%, When the measurement result is> L + α, the image and the shadow are actually judged to be different defects. In actual judgment, taking into account the above errors, etc., 1.05 SLS 1 · 1 5 is used as the surface defect, 0 S L < 1.05 is taken as an example of a surface defect of an internal defect, and a defect having a size of about 0.6 mm is formed on the surface of a disc substrate with an oil-based ink, and as an internal defect in other disc substrates. -23 · (21) (21) 200416728 For example, select a mark formed with oil-based ink to form a defect on the back 12B side of the disc-shaped substrate 12 and a defect in the light-transmitting material layer, such as the first When the structure shown in the figure is used to measure defects, it is shown in Table 2. The so-called surface defects, internal defects, and defects on the back of the disc-shaped substrate are clearly different from the distance L between the real image and the shadow, which can discriminate between surface defects and internal defects. Table 2 Defect Disc Number Defect Radius R (mm ) Defect diameter direction (dot) Defect circumferential direction (dot) Real image / shadow scan S (scan) Real image / shadow distance L (mm) Defect type determination 1 25.45 31 32 166 1.106 Surface 2 40.25 35 34 105 1.106 Surface 3 58.15 32 32 73 1.111 Surface 4 24.55 28 31 0 0.000 Internal 5 41.21 31 30 0 0.000 Internal 6 55.33 30 32 0 0.000 Internal 7 30.12 12 11 76 0.599 Internal 8 40.35 11 11 86 0.908 Internal 9 51.25 12 10 61 0.818 Internal Table 2 Medium defect radius position R: Shows the radial position of the detected defect -24- (22) 200416728 Defect radius direction: Shows the M ′ measuring point of the radial direction of the detected defect ^ Defect circumferential direction: Shows the position of the detected defect Inspection in the circumferential direction __ Scan between real image and shadow S: Scan between display real image and shadow _
實像/陰影間的距離L:顯示缺陷的半徑位置與®像及陰 影間的掃描數所計算的距離LDistance L between real image / shadow: distance L calculated from the radius of the display defect and the number of scans between the image and the shadow
L (mm) = [Rx2xtt /24000 (光碟一周的掃描數）]xSL (mm) = [Rx2xtt / 24000 (number of scans per disc)] xS
缺陷種類：利用L (mm)所判別的缺陷種類 缺陷光碟號碼1至3是1.05 S LS 1.15，判定爲「表面」缺 陷（將α作爲0.05。1.15<是表示不是相同缺陷） 缺陷光碟號碼4至6是L (mm) =0 (無陰影）是利用圓盤 狀基板的背面的缺陷判定爲「內部」缺陷 缺陷光碟號碼7至9是L (mm) <1.1，判定爲「內部」缺Defect type: Defect type discriminated by L (mm). Defective disc numbers 1 to 3 are 1.05 S LS 1.15, and judged to be "surface" defects (α is 0.05. 1.15 < indicates that they are not the same defect) Defective disc number 4 L to 6 is L (mm) = 0 (no shadow) is the defect on the back of the disc-shaped substrate is judged as "internal" defect. Defective disc numbers 7 to 9 are L (mm) < 1.1, it is judged as "internal" defect.
【圖式簡單說明】 第1圖是表示本發明的實施的最佳形態的缺陷檢測裝置 的方塊圖。 第2圖是模式地表示在依本發明的缺陷檢測裝置及方法 的被檢體的圓盤狀基板放大形成反射膜，記錄膜等的狀態 的一部分的斷面圖。 第3圖是表示第1圖的缺陷檢測裝置的照射裝置的照射裝 置，線性攝影機及圓盤狀基板的關係的立體圖。 -25- (23) (23)200416728 第4圖是表示同照射裝置及線性攝影機的照射光及反射 光的光學系統的槪略斷面圖。 第5圖是放大表示將光線入射於圓盤狀基板時的入射光 及反射光的狀態的光路圖。 第6圖是表示上述缺陷檢測裝置的線性攝影機的各像素 的反射光量的狀態的線圖。 第7圖是表示將同缺陷檢測裝置的畫像處理裝置所檢測 的缺陷加以圖式顯示的線圖。 第8圖是包括表示將包括將被檢體的圓盤狀基板搬入， 搬出於同缺陷檢測裝置的搬運裝置的光碟的製造方法的局部 方塊圖的槪略俯視圖。 第9圖是表示依同缺陷檢測裝置進行圓盤狀基板的缺陷 檢測的過程的流程圖。 第10圖是表示藉由同缺陷檢測裝置來檢測光透過性材料 的構成的圓盤狀基板的表面的缺陷的過程的光路圖。 第11圖是表示藉由同缺陷檢測裝置來檢測光透過性材料 的構成的圓盤狀基板的斷面內的缺陷的過程的光路圖。 第12圖是表示在光透過性所成的圓盤狀基板的斷面內 有缺陷時的該缺陷入射光路上及反射光路上的位置的關係的 光路圖。 (記號的說明） 10:缺陷檢測裝置，12:圓盤狀基板，12A:表面，12B:背 面，14··光碟，14C:記錄膜，14F··光透過層，16:旋轉支持裝 - 26- (24) 200416728 置，18:照射裝置，18A:光源，18B:帶通濾波器， 波器，18D:直線偏光板，18E: λ /4相位差偏光板， 影機，20Α:圓偏光板，22:畫像處理裝置，24:CPU 裝置，40:檢查台，42:第一移載裝置，48:第二移 50:光碟製造裝置，60:基板製造裝置，70:成膜線| ，R :反射光。 1 8 C : S C 濾 2 0:線性攝 ，34:搬運 載裝置， I:照射光[Brief Description of the Drawings] Fig. 1 is a block diagram showing a defect detection device according to a preferred embodiment of the present invention. Fig. 2 is a cross-sectional view schematically showing a part of a state in which a reflective film, a recording film, and the like are enlarged and formed on a disc-shaped substrate of a subject according to the defect detection device and method of the present invention. Fig. 3 is a perspective view showing the relationship between the irradiation device, the linear camera, and the disk-shaped substrate of the irradiation device of the defect detection device of Fig. 1. -25- (23) (23) 200416728 Fig. 4 is a schematic sectional view showing an optical system for irradiating light and reflecting light of the same irradiating device and linear camera. Fig. 5 is an optical path diagram showing a state of incident light and reflected light when light is incident on the disk-shaped substrate. Fig. 6 is a line diagram showing the state of the amount of reflected light from each pixel of the linear camera of the defect detection device. Fig. 7 is a line chart showing the defects detected by the image processing device of the defect detection device in a graphical manner. Fig. 8 is a schematic top plan view including a partial block diagram showing a manufacturing method of an optical disc including a disk-shaped substrate into which a subject is carried and carried out of a carrying device of the same defect detection device. Fig. 9 is a flowchart showing a process of detecting a defect of a disk-shaped substrate by the same defect detection device. Fig. 10 is an optical path diagram showing a process of detecting defects on the surface of a disc-shaped substrate composed of a light-transmitting material by the same defect detection device. Fig. 11 is an optical path diagram showing a process of detecting a defect in a cross section of a disc-shaped substrate made of a light-transmitting material by the same defect detection device. Fig. 12 is an optical path diagram showing the relationship between the position of the incident light path and the reflected light path of the defect when there is a defect in the cross section of the disc-shaped substrate formed by light transmission. (Explanation of symbols) 10: Defect detection device, 12: Disk-shaped substrate, 12A: Front surface, 12B: Back surface, 14 ·· Disc, 14C: Recording film, 14F ·· Light transmission layer, 16: Rotation support device-26 -(24) 200416728 set, 18: irradiation device, 18A: light source, 18B: band-pass filter, wave filter, 18D: linear polarizer, 18E: λ / 4 phase difference polarizer, projector, 20Α: circular polarizer , 22: image processing device, 24: CPU device, 40: inspection table, 42: first transfer device, 48: second shift 50: optical disc manufacturing device, 60: substrate manufacturing device, 70: film forming line |, R :reflected light. 1 8 C: S C filter 2 0: Linear photo, 34: Carrying device, I: Irradiated light
-27--27-
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| CN113628212A (en) * | 2021-10-12 | 2021-11-09 | 高视科技(苏州)有限公司 | Defective polarizer identification method, electronic device, and storage medium |
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| CN113628212A (en) * | 2021-10-12 | 2021-11-09 | 高视科技(苏州)有限公司 | Defective polarizer identification method, electronic device, and storage medium |
| CN113628212B (en) * | 2021-10-12 | 2022-03-11 | 高视科技(苏州)有限公司 | Defective polarizer identification method, electronic device, and storage medium |
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