TR202101621A2 - METHOD OF PRODUCTION AND CHARACTERIZATION OF CARBON NANOWALL THIN FILMS BY INSURANCE FILTERED CATHODIC VACUUM ARC STORAGE AND ELECTRON CYCLOTRON RESONANAS MICROWAVE PLASMA TECHNIQUES - Google Patents

METHOD OF PRODUCTION AND CHARACTERIZATION OF CARBON NANOWALL THIN FILMS BY INSURANCE FILTERED CATHODIC VACUUM ARC STORAGE AND ELECTRON CYCLOTRON RESONANAS MICROWAVE PLASMA TECHNIQUES

Info

Publication number
TR202101621A2
TR202101621A2 TR2021/01621A TR202101621A TR202101621A2 TR 202101621 A2 TR202101621 A2 TR 202101621A2 TR 2021/01621 A TR2021/01621 A TR 2021/01621A TR 202101621 A TR202101621 A TR 202101621A TR 202101621 A2 TR202101621 A2 TR 202101621A2
Authority
TR
Turkey
Prior art keywords
production
thin films
characterization
microwave plasma
resonanas
Prior art date
Application number
TR2021/01621A
Other languages
Turkish (tr)
Inventor
Kavak Hami̇de
Kesi̇k Zeyrek Bi̇rsen
Original Assignee
Cukurova Ueniversitesi Rektoerluegue
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cukurova Ueniversitesi Rektoerluegue filed Critical Cukurova Ueniversitesi Rektoerluegue
Priority to TR2021/01621A priority Critical patent/TR202101621A2/en
Publication of TR202101621A2 publication Critical patent/TR202101621A2/en
Priority to PCT/TR2021/051343 priority patent/WO2022169434A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32422—Arrangement for selecting ions or species in the plasma

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Nanotechnology (AREA)
  • Inorganic Chemistry (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Buluş, atmalı filtreli katodik vakum ark depolama ve elektron siklotron rezonanas mikrodalga plazma teknikleri ile karbon nanoduvar ince filmlerin üretimi ve karakterizasyon yöntemi ile ilgilidir.The invention relates to the production and characterization method of carbon nanowall thin films by pulsed filter cathodic vacuum arc storage and electron cyclotron resonance microwave plasma techniques.

TR2021/01621A 2021-02-03 2021-02-03 METHOD OF PRODUCTION AND CHARACTERIZATION OF CARBON NANOWALL THIN FILMS BY INSURANCE FILTERED CATHODIC VACUUM ARC STORAGE AND ELECTRON CYCLOTRON RESONANAS MICROWAVE PLASMA TECHNIQUES TR202101621A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TR2021/01621A TR202101621A2 (en) 2021-02-03 2021-02-03 METHOD OF PRODUCTION AND CHARACTERIZATION OF CARBON NANOWALL THIN FILMS BY INSURANCE FILTERED CATHODIC VACUUM ARC STORAGE AND ELECTRON CYCLOTRON RESONANAS MICROWAVE PLASMA TECHNIQUES
PCT/TR2021/051343 WO2022169434A1 (en) 2021-02-03 2021-12-03 Production and characterization of carbon nanowall thin films by pulsed filtered catodic vacuum arc deposition and electron cyclotron resonance microwave plasma tecniques

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TR2021/01621A TR202101621A2 (en) 2021-02-03 2021-02-03 METHOD OF PRODUCTION AND CHARACTERIZATION OF CARBON NANOWALL THIN FILMS BY INSURANCE FILTERED CATHODIC VACUUM ARC STORAGE AND ELECTRON CYCLOTRON RESONANAS MICROWAVE PLASMA TECHNIQUES

Publications (1)

Publication Number Publication Date
TR202101621A2 true TR202101621A2 (en) 2021-03-22

Family

ID=76373273

Family Applications (1)

Application Number Title Priority Date Filing Date
TR2021/01621A TR202101621A2 (en) 2021-02-03 2021-02-03 METHOD OF PRODUCTION AND CHARACTERIZATION OF CARBON NANOWALL THIN FILMS BY INSURANCE FILTERED CATHODIC VACUUM ARC STORAGE AND ELECTRON CYCLOTRON RESONANAS MICROWAVE PLASMA TECHNIQUES

Country Status (2)

Country Link
TR (1) TR202101621A2 (en)
WO (1) WO2022169434A1 (en)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9812604B2 (en) * 2014-05-30 2017-11-07 Klaus Y. J. Hsu Photosensing device with graphene
JP7042492B2 (en) * 2018-12-26 2022-03-28 シーズテクノ株式会社 Direct film formation of graphene film on substrate and cantilever for scanning probe microscope

Also Published As

Publication number Publication date
WO2022169434A1 (en) 2022-08-11

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