SU957744A1 - Transformer plasma generator - Google Patents

Transformer plasma generator

Info

Publication number
SU957744A1
SU957744A1 SU2985681/07A SU2985681A SU957744A1 SU 957744 A1 SU957744 A1 SU 957744A1 SU 2985681/07 A SU2985681/07 A SU 2985681/07A SU 2985681 A SU2985681 A SU 2985681A SU 957744 A1 SU957744 A1 SU 957744A1
Authority
SU
USSR - Soviet Union
Prior art keywords
plasma generator
transformer plasma
transformer
generator
absent
Prior art date
Application number
SU2985681/07A
Other languages
Russian (ru)
Inventor
Н.П. Глуханов
И.П. Дашкевич
Г.С. Эйленкриг
В.Г. Захаров
Л.Т. Сукнотова
Original Assignee
Всесоюзный научно-исследовательский, проектно-конструкторский и технологический институт токов высокой частоты им.В.П.Вологдина
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Всесоюзный научно-исследовательский, проектно-конструкторский и технологический институт токов высокой частоты им.В.П.Вологдина filed Critical Всесоюзный научно-исследовательский, проектно-конструкторский и технологический институт токов высокой частоты им.В.П.Вологдина
Priority to SU2985681/07A priority Critical patent/SU957744A1/en
Application granted granted Critical
Publication of SU957744A1 publication Critical patent/SU957744A1/en

Links

Abstract

The abstract is absent.
SU2985681/07A 1980-06-09 1980-06-09 Transformer plasma generator SU957744A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU2985681/07A SU957744A1 (en) 1980-06-09 1980-06-09 Transformer plasma generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU2985681/07A SU957744A1 (en) 1980-06-09 1980-06-09 Transformer plasma generator

Publications (1)

Publication Number Publication Date
SU957744A1 true SU957744A1 (en) 1996-02-10

Family

ID=60525853

Family Applications (1)

Application Number Title Priority Date Filing Date
SU2985681/07A SU957744A1 (en) 1980-06-09 1980-06-09 Transformer plasma generator

Country Status (1)

Country Link
SU (1) SU957744A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6150628A (en) * 1997-06-26 2000-11-21 Applied Science And Technology, Inc. Toroidal low-field reactive gas source
US6388226B1 (en) 1997-06-26 2002-05-14 Applied Science And Technology, Inc. Toroidal low-field reactive gas source
US6815633B1 (en) 1997-06-26 2004-11-09 Applied Science & Technology, Inc. Inductively-coupled toroidal plasma source
US8779322B2 (en) 1997-06-26 2014-07-15 Mks Instruments Inc. Method and apparatus for processing metal bearing gases

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6150628A (en) * 1997-06-26 2000-11-21 Applied Science And Technology, Inc. Toroidal low-field reactive gas source
US6388226B1 (en) 1997-06-26 2002-05-14 Applied Science And Technology, Inc. Toroidal low-field reactive gas source
US6486431B1 (en) 1997-06-26 2002-11-26 Applied Science & Technology, Inc. Toroidal low-field reactive gas source
US6552296B2 (en) 1997-06-26 2003-04-22 Applied Science And Technology, Inc. Toroidal low-field reactive gas source
US6559408B2 (en) 1997-06-26 2003-05-06 Applied Science & Technology, Inc. Toroidal low-field reactive gas source
EP1310980A1 (en) * 1997-06-26 2003-05-14 Applied Science & Technology, Inc. Toroidal low-field reactive gas source
EP1310981A1 (en) * 1997-06-26 2003-05-14 Applied Science & Technology, Inc. Toroidal low-field reactive gas source
EP1313128A1 (en) * 1997-06-26 2003-05-21 Applied Science & Technology, Inc. Toroidal low-field reactive gas source
EP1313130A1 (en) * 1997-06-26 2003-05-21 Applied Science & Technology, Inc. Toroidal low-field reactive gas source
EP1313131A1 (en) * 1997-06-26 2003-05-21 Applied Science & Technology, Inc. Toroidal low-field reactive gas source
EP1313129A1 (en) * 1997-06-26 2003-05-21 Applied Science & Technology, Inc. Toroidal low-field reactive gas source
EP1313132A1 (en) * 1997-06-26 2003-05-21 Applied Science & Technology, Inc. Toroidal low-field reactive gas source
US6815633B1 (en) 1997-06-26 2004-11-09 Applied Science & Technology, Inc. Inductively-coupled toroidal plasma source
EP2256781A1 (en) * 1997-06-26 2010-12-01 Mks Instruments, Inc. Toroidal Plasma Chamber
US8779322B2 (en) 1997-06-26 2014-07-15 Mks Instruments Inc. Method and apparatus for processing metal bearing gases

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