SU957744A1 - Transformer plasma generator - Google Patents
Transformer plasma generatorInfo
- Publication number
- SU957744A1 SU957744A1 SU2985681/07A SU2985681A SU957744A1 SU 957744 A1 SU957744 A1 SU 957744A1 SU 2985681/07 A SU2985681/07 A SU 2985681/07A SU 2985681 A SU2985681 A SU 2985681A SU 957744 A1 SU957744 A1 SU 957744A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- plasma generator
- transformer plasma
- transformer
- generator
- absent
- Prior art date
Links
Abstract
The abstract is absent.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU2985681/07A SU957744A1 (en) | 1980-06-09 | 1980-06-09 | Transformer plasma generator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU2985681/07A SU957744A1 (en) | 1980-06-09 | 1980-06-09 | Transformer plasma generator |
Publications (1)
Publication Number | Publication Date |
---|---|
SU957744A1 true SU957744A1 (en) | 1996-02-10 |
Family
ID=60525853
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU2985681/07A SU957744A1 (en) | 1980-06-09 | 1980-06-09 | Transformer plasma generator |
Country Status (1)
Country | Link |
---|---|
SU (1) | SU957744A1 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6150628A (en) * | 1997-06-26 | 2000-11-21 | Applied Science And Technology, Inc. | Toroidal low-field reactive gas source |
US6388226B1 (en) | 1997-06-26 | 2002-05-14 | Applied Science And Technology, Inc. | Toroidal low-field reactive gas source |
US6815633B1 (en) | 1997-06-26 | 2004-11-09 | Applied Science & Technology, Inc. | Inductively-coupled toroidal plasma source |
US8779322B2 (en) | 1997-06-26 | 2014-07-15 | Mks Instruments Inc. | Method and apparatus for processing metal bearing gases |
-
1980
- 1980-06-09 SU SU2985681/07A patent/SU957744A1/en active
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6150628A (en) * | 1997-06-26 | 2000-11-21 | Applied Science And Technology, Inc. | Toroidal low-field reactive gas source |
US6388226B1 (en) | 1997-06-26 | 2002-05-14 | Applied Science And Technology, Inc. | Toroidal low-field reactive gas source |
US6486431B1 (en) | 1997-06-26 | 2002-11-26 | Applied Science & Technology, Inc. | Toroidal low-field reactive gas source |
US6552296B2 (en) | 1997-06-26 | 2003-04-22 | Applied Science And Technology, Inc. | Toroidal low-field reactive gas source |
US6559408B2 (en) | 1997-06-26 | 2003-05-06 | Applied Science & Technology, Inc. | Toroidal low-field reactive gas source |
EP1310980A1 (en) * | 1997-06-26 | 2003-05-14 | Applied Science & Technology, Inc. | Toroidal low-field reactive gas source |
EP1310981A1 (en) * | 1997-06-26 | 2003-05-14 | Applied Science & Technology, Inc. | Toroidal low-field reactive gas source |
EP1313128A1 (en) * | 1997-06-26 | 2003-05-21 | Applied Science & Technology, Inc. | Toroidal low-field reactive gas source |
EP1313130A1 (en) * | 1997-06-26 | 2003-05-21 | Applied Science & Technology, Inc. | Toroidal low-field reactive gas source |
EP1313131A1 (en) * | 1997-06-26 | 2003-05-21 | Applied Science & Technology, Inc. | Toroidal low-field reactive gas source |
EP1313129A1 (en) * | 1997-06-26 | 2003-05-21 | Applied Science & Technology, Inc. | Toroidal low-field reactive gas source |
EP1313132A1 (en) * | 1997-06-26 | 2003-05-21 | Applied Science & Technology, Inc. | Toroidal low-field reactive gas source |
US6815633B1 (en) | 1997-06-26 | 2004-11-09 | Applied Science & Technology, Inc. | Inductively-coupled toroidal plasma source |
EP2256781A1 (en) * | 1997-06-26 | 2010-12-01 | Mks Instruments, Inc. | Toroidal Plasma Chamber |
US8779322B2 (en) | 1997-06-26 | 2014-07-15 | Mks Instruments Inc. | Method and apparatus for processing metal bearing gases |
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