SU706690A1 - Method of measuring lateral demensions of optically transparent structures - Google Patents
Method of measuring lateral demensions of optically transparent structuresInfo
- Publication number
- SU706690A1 SU706690A1 SU772449219A SU2449219A SU706690A1 SU 706690 A1 SU706690 A1 SU 706690A1 SU 772449219 A SU772449219 A SU 772449219A SU 2449219 A SU2449219 A SU 2449219A SU 706690 A1 SU706690 A1 SU 706690A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- demensions
- optically transparent
- transparent structures
- measuring lateral
- lateral
- Prior art date
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
(54) СПОСОБ. ИЗМЕРЕНИЯ ПОПЕРЕЧНЫХ РАЗМЕРОВ ОПТИЧЕСКИ ПРОЗРАЧНЫХ СТРУКТУР(54) METHOD. MEASUREMENT OF TRANSVERSE DIMENSIONS OF OPTICAL TRANSPARENT STRUCTURES
расход щуюс сферическую волну, равноценную, излучению точечного источника, расположенного в плоскости фильтра 3. Это тпуценне посредством объектива 4 преобразуют в сход щуюс волну, пропускаемую через амплитуднопрозрачную структуру 5, ширину которой необходимо измерить. Положение основного максимума интенсивности пол по оптической оси Z определ ют путем перемещени вдоль нее сканирующей системы 6 с точечным приемником светового излучени , преобразующим световое излучение в злектрнческий сигнал, который поступает иа дифференциатор 8, а с него - на блок 9, вырабатывающий импульс при нулевом входном напр жении, выход блока 9 подключен к вертикальным пластинам осциллографа 10. Если развертка осциллографа синхронизирована со сканирующей системой 6, то в точке максимума интенсивности на экране будет однозначно вь.1свечиватьс отсчетна метка, котора определ ет значение щирины структуры 5.a diverging spherical wave, equivalent to the radiation of a point source located in the plane of filter 3. This is transformed by means of objective 4 into a converging wave transmitted through an amplitude-transparent structure 5, the width of which is to be measured. The position of the main field intensity maximum along the optical axis Z is determined by moving along it a scanning system 6 with a point receiver of light radiation, which converts light radiation into an electrical signal that comes to differentiator 8, and from it to block 9, generating a pulse at zero input voltage, the output of block 9 is connected to the vertical plates of the oscilloscope 10. If the scan of the oscilloscope is synchronized with the scanning system 6, then at the maximum intensity point on the screen will be one The first label is highlighted, which defines the width of structure 5.
Способ позвол ет значительно расширить диапазон измерени и повысить, его.помехозащищенность .The method allows to significantly expand the measurement range and increase its interference immunity.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU772449219A SU706690A1 (en) | 1977-02-01 | 1977-02-01 | Method of measuring lateral demensions of optically transparent structures |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU772449219A SU706690A1 (en) | 1977-02-01 | 1977-02-01 | Method of measuring lateral demensions of optically transparent structures |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SU706690A1 true SU706690A1 (en) | 1979-12-30 |
Family
ID=20694306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SU772449219A SU706690A1 (en) | 1977-02-01 | 1977-02-01 | Method of measuring lateral demensions of optically transparent structures |
Country Status (1)
| Country | Link |
|---|---|
| SU (1) | SU706690A1 (en) |
-
1977
- 1977-02-01 SU SU772449219A patent/SU706690A1/en active
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