SU456822A1 - Abrasive slurry - Google Patents
Abrasive slurryInfo
- Publication number
- SU456822A1 SU456822A1 SU1612774A SU1612774A SU456822A1 SU 456822 A1 SU456822 A1 SU 456822A1 SU 1612774 A SU1612774 A SU 1612774A SU 1612774 A SU1612774 A SU 1612774A SU 456822 A1 SU456822 A1 SU 456822A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- polishing
- abrasive slurry
- diamond
- ethyl alcohol
- abrasive
- Prior art date
Links
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Description
(54) АБРАЗИВНАЯ СУСПЕНЗИЯ(54) ABRASIVE SUSPENSION
1one
Изобретение относитс к области обработки нолупроводниковых материалов абразивом.This invention relates to the processing of abrasive materials with semi-conducting materials.
Известна абразивна суспензи дл полировки полупроводниковых материалов, включающа алмазный норошок и охлаждающую жидкость.A known abrasive slurry for polishing semiconductor materials, including diamond blades and coolant.
Дл повышени нроизводительности и качества полировки предлагаема суспензи составлена на основе этилового спирта, а соотношение ее компонентов выбрано из услови 0,2-0,4 г алмазного порошка на 1 л этилового спирта.To increase the productivity and quality of polishing, the proposed suspension is based on ethyl alcohol, and the ratio of its components is selected from the condition of 0.2-0.4 g of diamond powder per 1 liter of ethyl alcohol.
Процесс полировки ведетс с посто нной подпиткой по следующей технологии.The polishing process is carried out with a constant feed according to the following technology.
На полировальник из искусственной замши, предварительно обильно смоченный спиртом, ианоситс алмазный порошок или алмазна паста, которые втираютс в полировальник в течение 3-5 мин.An artificial suede polishing pad, pre-moistened with alcohol, is washed with diamond powder or diamond paste, which is rubbed into the polisher for 3-5 minutes.
В мешалку станка засыпаетс алмазный порошок той же зернистости и заливаетс этиловый спирт. После установки на влажный полировальник шлифовально-иолировальных головок с накленными на них пластинами включаетс мешалка, привод станка и осуществл етс подача алмазной суспензии из мешалки на полировальник.Diamond powder of the same grit is poured into the machine mixer and ethyl alcohol is poured. After the grinding and polishing heads are mounted on the wet polishing unit with the plates attached to them, the agitator is turned on, the machine is driven and the diamond suspension is fed from the agitator to the polisher.
Предмет изобретени Subject invention
Абразивна суспензи дл полировки полупроводииковых материалов, вк„тючающа алмазный порошок и охлаждающую жидкость, отличающа с тем, что, с целью повышени производительности и качества полировки , суспензи составлена на основе этилового спирта, а соотношение ее компонентов выбрано из услови : 0,2-0,4 г алмазного порошка на 1 л этилового спирта.Abrasive slurry for polishing semiconducting materials, including diamond diamond powder and coolant, characterized in that, in order to increase the productivity and quality of polishing, the slurry is based on ethyl alcohol, and the ratio of its components is selected from the condition: 0.2-0 , 4 g of diamond powder per 1 liter of ethanol.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU1612774A SU456822A1 (en) | 1970-12-25 | 1970-12-25 | Abrasive slurry |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU1612774A SU456822A1 (en) | 1970-12-25 | 1970-12-25 | Abrasive slurry |
Publications (1)
Publication Number | Publication Date |
---|---|
SU456822A1 true SU456822A1 (en) | 1975-01-15 |
Family
ID=20463942
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU1612774A SU456822A1 (en) | 1970-12-25 | 1970-12-25 | Abrasive slurry |
Country Status (1)
Country | Link |
---|---|
SU (1) | SU456822A1 (en) |
-
1970
- 1970-12-25 SU SU1612774A patent/SU456822A1/en active
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