SU1466028A1 - Apparatus for positioning articles, particularly secondary process holders - Google Patents
Apparatus for positioning articles, particularly secondary process holders Download PDFInfo
- Publication number
- SU1466028A1 SU1466028A1 SU874196881A SU4196881A SU1466028A1 SU 1466028 A1 SU1466028 A1 SU 1466028A1 SU 874196881 A SU874196881 A SU 874196881A SU 4196881 A SU4196881 A SU 4196881A SU 1466028 A1 SU1466028 A1 SU 1466028A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- rollers
- positioning
- cassettes
- rods
- orthogonal
- Prior art date
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Изобретение может быть использовано в автоматических лини х дл изготовлени интегральных схем. Устройство позиционировани (П) изделий, преимущественно вторичных технологических кассет (ВТК), содержит механизм П в виде штоков 11 с роликами 10 на свободных концах, контактирующих с роликами базовых элементов изделий , и приводы 7 возвратно-поступательного перемещени штоков 11. Базовые элементы изделий выполнены в виде двух планок 5, закрепленных параллельно друг другу на днище ВТК и ортогонально их плоскости П. На боковых поверхност х планок 5 под роликами 10 имеютс направл ющие гнезда (ИГ) 8 треугольной формы, грани которых параллельны оси роликов 10 и ортогональны плоскости П. НГ 8 могут быть выполнены как на внешней, так и на внутренней боковой поверхности планок 5. Штоки 11 вьщвигаютс , ролики 10 вход т в НГ 8 и, опира сь на их грани, осуществл ют П. Устройство имеет повьш1енные технологические возможности. 6 ил. о (ЛThe invention can be used in automatic lines for the manufacture of integrated circuits. The device for positioning (P) products, mainly secondary technological cassettes (VTK), contains mechanism P in the form of rods 11 with rollers 10 at free ends in contact with the rollers of the base elements of the products, and actuators 7 of reciprocating movement of the rods 11. in the form of two strips 5 fixed parallel to each other on the bottom of the CTA and orthogonal to their plane P. On the side surfaces of the strips 5 under the rollers 10 there are triangular shaped guide slots (IG) 8 whose faces are parallel The axes of the rollers 10 are orthogonal to the planes P. NG 8 can be made both on the outer and on the inner side surface of the laths 5. The rods 11 are moved, the rollers 10 are included in the NG 8 and, resting on their faces, P. The device has increased technological capabilities. 6 Il. o (l
Description
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Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU874196881A SU1466028A1 (en) | 1987-02-18 | 1987-02-18 | Apparatus for positioning articles, particularly secondary process holders |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU874196881A SU1466028A1 (en) | 1987-02-18 | 1987-02-18 | Apparatus for positioning articles, particularly secondary process holders |
Publications (1)
Publication Number | Publication Date |
---|---|
SU1466028A1 true SU1466028A1 (en) | 1989-03-15 |
Family
ID=21286490
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU874196881A SU1466028A1 (en) | 1987-02-18 | 1987-02-18 | Apparatus for positioning articles, particularly secondary process holders |
Country Status (1)
Country | Link |
---|---|
SU (1) | SU1466028A1 (en) |
-
1987
- 1987-02-18 SU SU874196881A patent/SU1466028A1/en active
Non-Patent Citations (1)
Title |
---|
Авторское свидетельство СССР № 938337, ют. Н 05 К 13/02, 1980. * |
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