SG97764A1 - Multilayer piezoeletric actuator with bending deformation and method for its manufacture - Google Patents

Multilayer piezoeletric actuator with bending deformation and method for its manufacture

Info

Publication number
SG97764A1
SG97764A1 SG9803177A SG1998003177A SG97764A1 SG 97764 A1 SG97764 A1 SG 97764A1 SG 9803177 A SG9803177 A SG 9803177A SG 1998003177 A SG1998003177 A SG 1998003177A SG 97764 A1 SG97764 A1 SG 97764A1
Authority
SG
Singapore
Prior art keywords
piezoeletric
multilayer
actuator
manufacture
bending deformation
Prior art date
Application number
SG9803177A
Inventor
Kui Yao
Wei Guang Zhu
Zhe Zhang
Huang Tony
Qingrui Yin
Xi Yao
Original Assignee
Inst Data Storage
Univ Nanyang
Univ Xian Jiaotong
Shanghai Inst Of Ceramics
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inst Data Storage, Univ Nanyang, Univ Xian Jiaotong, Shanghai Inst Of Ceramics filed Critical Inst Data Storage
Priority to SG9803177A priority Critical patent/SG97764A1/en
Publication of SG97764A1 publication Critical patent/SG97764A1/en

Links

SG9803177A 1998-08-21 1998-08-21 Multilayer piezoeletric actuator with bending deformation and method for its manufacture SG97764A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG9803177A SG97764A1 (en) 1998-08-21 1998-08-21 Multilayer piezoeletric actuator with bending deformation and method for its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG9803177A SG97764A1 (en) 1998-08-21 1998-08-21 Multilayer piezoeletric actuator with bending deformation and method for its manufacture

Publications (1)

Publication Number Publication Date
SG97764A1 true SG97764A1 (en) 2003-08-20

Family

ID=29707941

Family Applications (1)

Application Number Title Priority Date Filing Date
SG9803177A SG97764A1 (en) 1998-08-21 1998-08-21 Multilayer piezoeletric actuator with bending deformation and method for its manufacture

Country Status (1)

Country Link
SG (1) SG97764A1 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60178677A (en) * 1984-02-24 1985-09-12 Nippon Telegr & Teleph Corp <Ntt> Bending type piezoelectric actuator
JPS63296286A (en) * 1987-05-27 1988-12-02 Tokin Corp Laminated piezoelectric actuator element
JPH0552508A (en) * 1991-08-28 1993-03-02 Canon Inc Cantilever-type actuator, and scanning tunneling microscope and information processing device using the same
JPH09148642A (en) * 1995-11-22 1997-06-06 Sony Corp Piezoelectric actuator and its strain gauge bonding method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60178677A (en) * 1984-02-24 1985-09-12 Nippon Telegr & Teleph Corp <Ntt> Bending type piezoelectric actuator
JPS63296286A (en) * 1987-05-27 1988-12-02 Tokin Corp Laminated piezoelectric actuator element
JPH0552508A (en) * 1991-08-28 1993-03-02 Canon Inc Cantilever-type actuator, and scanning tunneling microscope and information processing device using the same
JPH09148642A (en) * 1995-11-22 1997-06-06 Sony Corp Piezoelectric actuator and its strain gauge bonding method

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