SG54552A1 - Diamond-like thin film forming apparatus and method - Google Patents
Diamond-like thin film forming apparatus and methodInfo
- Publication number
- SG54552A1 SG54552A1 SG1997003060A SG1997003060A SG54552A1 SG 54552 A1 SG54552 A1 SG 54552A1 SG 1997003060 A SG1997003060 A SG 1997003060A SG 1997003060 A SG1997003060 A SG 1997003060A SG 54552 A1 SG54552 A1 SG 54552A1
- Authority
- SG
- Singapore
- Prior art keywords
- diamond
- thin film
- forming apparatus
- film forming
- thin
- Prior art date
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23054896A JPH1072285A (en) | 1996-08-30 | 1996-08-30 | Equipment for forming diamond-like carbon thin film and forming method therefor |
Publications (1)
Publication Number | Publication Date |
---|---|
SG54552A1 true SG54552A1 (en) | 1998-11-16 |
Family
ID=16909493
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG1997003060A SG54552A1 (en) | 1996-08-30 | 1997-08-27 | Diamond-like thin film forming apparatus and method |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPH1072285A (en) |
SG (1) | SG54552A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001192206A (en) * | 2000-01-05 | 2001-07-17 | Sumitomo Electric Ind Ltd | Method for manufacturing amorphous carbon-coated member |
JP4567867B2 (en) * | 2000-10-24 | 2010-10-20 | キヤノンアネルバ株式会社 | Film forming apparatus for magnetic recording disk and method for manufacturing magnetic recording disk |
JP5721050B2 (en) * | 2011-03-08 | 2015-05-20 | 日産自動車株式会社 | Roll coater device |
-
1996
- 1996-08-30 JP JP23054896A patent/JPH1072285A/en active Pending
-
1997
- 1997-08-27 SG SG1997003060A patent/SG54552A1/en unknown
Also Published As
Publication number | Publication date |
---|---|
JPH1072285A (en) | 1998-03-17 |
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