SG147361A1 - Cleaning process and apparatus - Google Patents
Cleaning process and apparatusInfo
- Publication number
- SG147361A1 SG147361A1 SG200719147-1A SG2007191471A SG147361A1 SG 147361 A1 SG147361 A1 SG 147361A1 SG 2007191471 A SG2007191471 A SG 2007191471A SG 147361 A1 SG147361 A1 SG 147361A1
- Authority
- SG
- Singapore
- Prior art keywords
- support
- article
- cleaning process
- acoustic wave
- cleaning
- Prior art date
Links
Abstract
Cleaning Process and Apparatus A method for cleaning an article held by support, the method comprising the steps of applying an acoustic wave to said article and support; rotating said article and support such that an area on the article previously masked by the support is exposed to said acoustic wave.
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG200719147-1A SG147361A1 (en) | 2007-04-27 | 2007-12-24 | Cleaning process and apparatus |
CN200880021905XA CN101687228B (en) | 2007-04-27 | 2008-04-22 | Cleaning process and apparatus |
PCT/SG2008/000133 WO2008133593A2 (en) | 2007-04-27 | 2008-04-22 | Cleaning process and apparatus |
MYPI20094436A MY154924A (en) | 2007-04-27 | 2008-04-22 | Cleaning process and apparatus |
TW97115680A TWI473667B (en) | 2007-04-27 | 2008-04-28 | Cleaning process and apparatus |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG200702957-2A SG147336A1 (en) | 2007-04-27 | 2007-04-27 | Cleaning process and apparatus |
SG200719147-1A SG147361A1 (en) | 2007-04-27 | 2007-12-24 | Cleaning process and apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
SG147361A1 true SG147361A1 (en) | 2008-11-28 |
Family
ID=40032348
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200702957-2A SG147336A1 (en) | 2007-04-27 | 2007-04-27 | Cleaning process and apparatus |
SG200719147-1A SG147361A1 (en) | 2007-04-27 | 2007-12-24 | Cleaning process and apparatus |
SG2010079713A SG180053A1 (en) | 2007-04-27 | 2007-12-24 | Cleaning process and apparatus |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200702957-2A SG147336A1 (en) | 2007-04-27 | 2007-04-27 | Cleaning process and apparatus |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG2010079713A SG180053A1 (en) | 2007-04-27 | 2007-12-24 | Cleaning process and apparatus |
Country Status (3)
Country | Link |
---|---|
CN (1) | CN101687228B (en) |
SG (3) | SG147336A1 (en) |
TW (1) | TWI473667B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112354764A (en) * | 2020-11-12 | 2021-02-12 | 湖南昕泰装饰材料有限公司 | Surface pretreatment device for aluminum profile machining |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105057273A (en) * | 2015-08-27 | 2015-11-18 | 苏州凯锝微电子有限公司 | Ultrasonic lens cleaning device |
CN107716273A (en) * | 2016-08-12 | 2018-02-23 | 宁波创润新材料有限公司 | To the processing method of metalliferous material |
CN107401893A (en) * | 2017-08-21 | 2017-11-28 | 无锡市强力干燥设备厂 | PCR reacts lid plate rubber dedicated drying case |
JP7101528B2 (en) * | 2018-04-25 | 2022-07-15 | 東京エレクトロン株式会社 | Board processing equipment |
CN114683163A (en) * | 2020-12-31 | 2022-07-01 | 上海新昇半导体科技有限公司 | Dehumidifying device and polishing equipment |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4601223A (en) * | 1984-07-16 | 1986-07-22 | Westinghouse Electric Corp. | Flail tube cutter |
JPH0652977U (en) * | 1992-12-22 | 1994-07-19 | 株式会社北村製作所 | Cleaning equipment |
US5937469A (en) * | 1996-12-03 | 1999-08-17 | Intel Corporation | Apparatus for mechanically cleaning the edges of wafers |
JPH10323635A (en) * | 1997-05-26 | 1998-12-08 | Sony Corp | Ultrasonic cleaning device |
JP2001274130A (en) * | 2000-03-24 | 2001-10-05 | Mitsubishi Electric Corp | Method of wet cleaning and manufacturing semiconductor device |
US6532974B2 (en) * | 2001-04-06 | 2003-03-18 | Akrion Llc | Process tank with pressurized mist generation |
US6871657B2 (en) * | 2001-04-06 | 2005-03-29 | Akrion, Llc | Low profile wafer carrier |
TWI234497B (en) * | 2004-08-17 | 2005-06-21 | Yang-Kuan Wang | Device using ultrasonic waves to clean LP records |
US20070006892A1 (en) * | 2005-07-08 | 2007-01-11 | Imtec Acculine, Inc. | Uniform, far-field megasonic cleaning method and apparatus |
TWI348939B (en) * | 2006-12-22 | 2011-09-21 | Hon Hai Prec Ind Co Ltd | Apparatus for cleaning article |
-
2007
- 2007-04-27 SG SG200702957-2A patent/SG147336A1/en unknown
- 2007-12-24 SG SG200719147-1A patent/SG147361A1/en unknown
- 2007-12-24 SG SG2010079713A patent/SG180053A1/en unknown
-
2008
- 2008-04-22 CN CN200880021905XA patent/CN101687228B/en active Active
- 2008-04-28 TW TW97115680A patent/TWI473667B/en active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112354764A (en) * | 2020-11-12 | 2021-02-12 | 湖南昕泰装饰材料有限公司 | Surface pretreatment device for aluminum profile machining |
CN112354764B (en) * | 2020-11-12 | 2021-08-06 | 湖南昕泰装饰材料有限公司 | Surface pretreatment device for aluminum profile machining |
Also Published As
Publication number | Publication date |
---|---|
CN101687228B (en) | 2013-05-01 |
TWI473667B (en) | 2015-02-21 |
TW200900166A (en) | 2009-01-01 |
SG180053A1 (en) | 2012-05-30 |
CN101687228A (en) | 2010-03-31 |
SG147336A1 (en) | 2008-11-28 |
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