SG143050A1 - Method of fabricating micro-electromechanical devices with protective structures - Google Patents
Method of fabricating micro-electromechanical devices with protective structuresInfo
- Publication number
- SG143050A1 SG143050A1 SG200406109-9A SG2004061099A SG143050A1 SG 143050 A1 SG143050 A1 SG 143050A1 SG 2004061099 A SG2004061099 A SG 2004061099A SG 143050 A1 SG143050 A1 SG 143050A1
- Authority
- SG
- Singapore
- Prior art keywords
- mems
- protective
- structures
- substrate
- electromechanical devices
- Prior art date
Links
Landscapes
- Micromachines (AREA)
Abstract
METHOD OF FABRICATING MICRO-ELECTROMECHANICAL DEVICES WITH PROTECTIVE STRUCTURES A method of fabricating MEMS devices includes the step of applying a protective structure to a front surface of a substrate on which a plurality of spaced MEMS structures is positioned. The protective structure has a body and a plurality of posts extending from the body. The protective structure is applied so that a strut is received between adjacent MEMS structures. The substrate is separated such that each MEMS structure is positioned on a respective discrete substrate. A holding means is applied to a back surface of the substrate. The body is separated such that the protective structure is divided into discrete protective structures, with a MEMS structure being received between pairs of consecutive posts. The back surface is released from the holding means.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG200406109-9A SG143050A1 (en) | 2000-05-24 | 2000-05-24 | Method of fabricating micro-electromechanical devices with protective structures |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG200406109-9A SG143050A1 (en) | 2000-05-24 | 2000-05-24 | Method of fabricating micro-electromechanical devices with protective structures |
Publications (1)
Publication Number | Publication Date |
---|---|
SG143050A1 true SG143050A1 (en) | 2008-06-27 |
Family
ID=39615550
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200406109-9A SG143050A1 (en) | 2000-05-24 | 2000-05-24 | Method of fabricating micro-electromechanical devices with protective structures |
Country Status (1)
Country | Link |
---|---|
SG (1) | SG143050A1 (en) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4223215A1 (en) * | 1992-07-15 | 1994-01-20 | Bosch Gmbh Robert | Processing silicon@ wafer having deformable micro mechanical structure - comprising adhering foil to lower side of wafer and removing foil after processing |
CA2119505A1 (en) * | 1993-03-29 | 1994-09-30 | Rafael Cesar Alfaro | Grid array masking tape process |
US5923995A (en) * | 1997-04-18 | 1999-07-13 | National Semiconductor Corporation | Methods and apparatuses for singulation of microelectromechanical systems |
US6060336A (en) * | 1998-12-11 | 2000-05-09 | C.F. Wan Incorporated | Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore |
-
2000
- 2000-05-24 SG SG200406109-9A patent/SG143050A1/en unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4223215A1 (en) * | 1992-07-15 | 1994-01-20 | Bosch Gmbh Robert | Processing silicon@ wafer having deformable micro mechanical structure - comprising adhering foil to lower side of wafer and removing foil after processing |
CA2119505A1 (en) * | 1993-03-29 | 1994-09-30 | Rafael Cesar Alfaro | Grid array masking tape process |
US5923995A (en) * | 1997-04-18 | 1999-07-13 | National Semiconductor Corporation | Methods and apparatuses for singulation of microelectromechanical systems |
US6060336A (en) * | 1998-12-11 | 2000-05-09 | C.F. Wan Incorporated | Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore |
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