SG143050A1 - Method of fabricating micro-electromechanical devices with protective structures - Google Patents

Method of fabricating micro-electromechanical devices with protective structures

Info

Publication number
SG143050A1
SG143050A1 SG200406109-9A SG2004061099A SG143050A1 SG 143050 A1 SG143050 A1 SG 143050A1 SG 2004061099 A SG2004061099 A SG 2004061099A SG 143050 A1 SG143050 A1 SG 143050A1
Authority
SG
Singapore
Prior art keywords
mems
protective
structures
substrate
electromechanical devices
Prior art date
Application number
SG200406109-9A
Inventor
Kia Silverbrook
Original Assignee
Silverbrook Res Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Silverbrook Res Pty Ltd filed Critical Silverbrook Res Pty Ltd
Priority to SG200406109-9A priority Critical patent/SG143050A1/en
Publication of SG143050A1 publication Critical patent/SG143050A1/en

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  • Micromachines (AREA)

Abstract

METHOD OF FABRICATING MICRO-ELECTROMECHANICAL DEVICES WITH PROTECTIVE STRUCTURES A method of fabricating MEMS devices includes the step of applying a protective structure to a front surface of a substrate on which a plurality of spaced MEMS structures is positioned. The protective structure has a body and a plurality of posts extending from the body. The protective structure is applied so that a strut is received between adjacent MEMS structures. The substrate is separated such that each MEMS structure is positioned on a respective discrete substrate. A holding means is applied to a back surface of the substrate. The body is separated such that the protective structure is divided into discrete protective structures, with a MEMS structure being received between pairs of consecutive posts. The back surface is released from the holding means.
SG200406109-9A 2000-05-24 2000-05-24 Method of fabricating micro-electromechanical devices with protective structures SG143050A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG200406109-9A SG143050A1 (en) 2000-05-24 2000-05-24 Method of fabricating micro-electromechanical devices with protective structures

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG200406109-9A SG143050A1 (en) 2000-05-24 2000-05-24 Method of fabricating micro-electromechanical devices with protective structures

Publications (1)

Publication Number Publication Date
SG143050A1 true SG143050A1 (en) 2008-06-27

Family

ID=39615550

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200406109-9A SG143050A1 (en) 2000-05-24 2000-05-24 Method of fabricating micro-electromechanical devices with protective structures

Country Status (1)

Country Link
SG (1) SG143050A1 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4223215A1 (en) * 1992-07-15 1994-01-20 Bosch Gmbh Robert Processing silicon@ wafer having deformable micro mechanical structure - comprising adhering foil to lower side of wafer and removing foil after processing
CA2119505A1 (en) * 1993-03-29 1994-09-30 Rafael Cesar Alfaro Grid array masking tape process
US5923995A (en) * 1997-04-18 1999-07-13 National Semiconductor Corporation Methods and apparatuses for singulation of microelectromechanical systems
US6060336A (en) * 1998-12-11 2000-05-09 C.F. Wan Incorporated Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4223215A1 (en) * 1992-07-15 1994-01-20 Bosch Gmbh Robert Processing silicon@ wafer having deformable micro mechanical structure - comprising adhering foil to lower side of wafer and removing foil after processing
CA2119505A1 (en) * 1993-03-29 1994-09-30 Rafael Cesar Alfaro Grid array masking tape process
US5923995A (en) * 1997-04-18 1999-07-13 National Semiconductor Corporation Methods and apparatuses for singulation of microelectromechanical systems
US6060336A (en) * 1998-12-11 2000-05-09 C.F. Wan Incorporated Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore

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