SG138573A1 - Method and system for optimizing intra-field critical dimension uniformity using a sacrificial twin mask - Google Patents

Method and system for optimizing intra-field critical dimension uniformity using a sacrificial twin mask

Info

Publication number
SG138573A1
SG138573A1 SG200704579-2A SG2007045792A SG138573A1 SG 138573 A1 SG138573 A1 SG 138573A1 SG 2007045792 A SG2007045792 A SG 2007045792A SG 138573 A1 SG138573 A1 SG 138573A1
Authority
SG
Singapore
Prior art keywords
sacrificial
critical dimension
dimension uniformity
field critical
twin mask
Prior art date
Application number
SG200704579-2A
Inventor
Chih-Ming Ke
Tsai-Sheng Gau
Shinn-Sheng Yu
Hung-Chang Hsieh
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/455,982 external-priority patent/US20070292771A1/en
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Publication of SG138573A1 publication Critical patent/SG138573A1/en

Links

SG200704579-2A 2006-06-20 2007-06-20 Method and system for optimizing intra-field critical dimension uniformity using a sacrificial twin mask SG138573A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/455,982 US20070292771A1 (en) 2006-06-20 2006-06-20 Method and system for optimizing intra-field critical dimension uniformity using a sacrificial twin mask
US11/763,269 US7897297B2 (en) 2006-06-20 2007-06-14 Method and system for optimizing intra-field critical dimension uniformity using a sacrificial twin mask

Publications (1)

Publication Number Publication Date
SG138573A1 true SG138573A1 (en) 2008-01-28

Family

ID=39004454

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200704579-2A SG138573A1 (en) 2006-06-20 2007-06-20 Method and system for optimizing intra-field critical dimension uniformity using a sacrificial twin mask

Country Status (2)

Country Link
KR (1) KR20070120908A (en)
SG (1) SG138573A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102606308B1 (en) 2016-06-28 2023-11-24 삼성전자주식회사 Method of manufacturing photomasks, method of forming patterns and method of manufacturing semiconductor devices

Also Published As

Publication number Publication date
KR20070120908A (en) 2007-12-26

Similar Documents

Publication Publication Date Title
TWI339863B (en) Method and system for optimizing intra-field critical dimension uniformity using a sacrificial twin mask
EP2045974A4 (en) A method and system for network service controlling
IL169046A (en) System and method for auditing a network
EP2095249A4 (en) System and method for facilitating a ready social network
EP2087667A4 (en) A method and system for providing arouting architecture for overlay networks
EP2062212A4 (en) A promotions system and method
EP2137969A4 (en) Method and system for previewing media over a network
EP2018717A4 (en) Method and system for establishing a channel for a wireless video area network
EP2127221A4 (en) A method and system for monitoring messages passed over a network
HK1111538A1 (en) A method and system for achieving large-scale instant communication
EP1941337A4 (en) System architecture for a power distribution network and method of operation
EP2033428A4 (en) System and method for modifying a device profile
EP1982481A4 (en) Method and system for improving traffic distribution across a communication network
GB2429369B (en) Computer implemented method and system for optimizing a network
EP1986381A4 (en) A method and system for implementing instant communication
HK1121601A1 (en) A method and system for wire communication
TWI340578B (en) A method for anti-rogue connection in a network system
ZA200810731B (en) Information distribution system and method for a mobile network
TWI366993B (en) Method and system for determining synchronization status in a wide band cdma network
GB0614964D0 (en) Methods and apparatuses for monitoring a system
GB0612317D0 (en) Method and system for monitoring a mobile network
EP2062159A4 (en) Method and system for providing network based transaction metrics
EP1946532A4 (en) Method and system for providing a camp-on hold service
HUE061369T2 (en) Method and apparatuses in a telecommunication system
EP2009937A4 (en) A method, system and device of accounting for group service