SG124301A1 - Piezoelectric micromachined ultrasonic transducer array and method for fabricating the same - Google Patents
Piezoelectric micromachined ultrasonic transducer array and method for fabricating the sameInfo
- Publication number
- SG124301A1 SG124301A1 SG200500207A SG200500207A SG124301A1 SG 124301 A1 SG124301 A1 SG 124301A1 SG 200500207 A SG200500207 A SG 200500207A SG 200500207 A SG200500207 A SG 200500207A SG 124301 A1 SG124301 A1 SG 124301A1
- Authority
- SG
- Singapore
- Prior art keywords
- layer
- diaphragm
- silicon
- ultrasonic transducer
- transducer array
- Prior art date
Links
Landscapes
- Transducers For Ultrasonic Waves (AREA)
Abstract
A piezoelectric ultrasonic transducer array is formed by producing one or more trenches in a silicon wafer 20, and then fusion bonding a silicon layer 25 over the trenches, thereby forming back cavities 26. The silicon layer 25 acts as a diaphragm, and is provided with a piezoelectric layer 22 and electrode layers 21, 23 sandwiching it, so that deflection of the diaphragm can be produced by, or conversely produces, electrical signals in the electrodes 21, 23 . The silicon diaphragm layer 25 is moved onto the silicon wafer as a part of an SOI structure. The SOI further includes a handle wafer which is removed once the diaphragm layer 25 is bonded to the wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SG200500207A SG124301A1 (en) | 2005-01-10 | 2005-01-10 | Piezoelectric micromachined ultrasonic transducer array and method for fabricating the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SG200500207A SG124301A1 (en) | 2005-01-10 | 2005-01-10 | Piezoelectric micromachined ultrasonic transducer array and method for fabricating the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG124301A1 true SG124301A1 (en) | 2006-08-30 |
Family
ID=37969640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG200500207A SG124301A1 (en) | 2005-01-10 | 2005-01-10 | Piezoelectric micromachined ultrasonic transducer array and method for fabricating the same |
Country Status (1)
| Country | Link |
|---|---|
| SG (1) | SG124301A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110572756A (en) * | 2019-09-11 | 2019-12-13 | 京东方科技集团股份有限公司 | Directional film transducer, preparation method thereof and loudspeaker |
| CN111952435A (en) * | 2020-08-19 | 2020-11-17 | 国网河南省电力公司电力科学研究院 | Piezoelectric transduction unit structure for sound vibration measurement |
| CN111952436A (en) * | 2020-08-19 | 2020-11-17 | 国网河南省电力公司电力科学研究院 | Preparation process of passive piezoelectric self-powered unit structure |
-
2005
- 2005-01-10 SG SG200500207A patent/SG124301A1/en unknown
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110572756A (en) * | 2019-09-11 | 2019-12-13 | 京东方科技集团股份有限公司 | Directional film transducer, preparation method thereof and loudspeaker |
| CN111952435A (en) * | 2020-08-19 | 2020-11-17 | 国网河南省电力公司电力科学研究院 | Piezoelectric transduction unit structure for sound vibration measurement |
| CN111952436A (en) * | 2020-08-19 | 2020-11-17 | 国网河南省电力公司电力科学研究院 | Preparation process of passive piezoelectric self-powered unit structure |
| CN111952436B (en) * | 2020-08-19 | 2022-03-29 | 国网河南省电力公司电力科学研究院 | Preparation process of passive piezoelectric self-powered unit structure |
| CN111952435B (en) * | 2020-08-19 | 2022-03-29 | 国网河南省电力公司电力科学研究院 | Piezoelectric transduction unit structure for sound vibration measurement |
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