SG118063A1 - A device for an etch treatment of a disk-like object - Google Patents

A device for an etch treatment of a disk-like object

Info

Publication number
SG118063A1
SG118063A1 SG200000784A SG200000784A SG118063A1 SG 118063 A1 SG118063 A1 SG 118063A1 SG 200000784 A SG200000784 A SG 200000784A SG 200000784 A SG200000784 A SG 200000784A SG 118063 A1 SG118063 A1 SG 118063A1
Authority
SG
Singapore
Prior art keywords
disk
etch treatment
etch
treatment
Prior art date
Application number
SG200000784A
Inventor
Langen Kurt
Engesser Philipp
Original Assignee
Sez Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sez Ag filed Critical Sez Ag
Priority to SG200000784A priority Critical patent/SG118063A1/en
Publication of SG118063A1 publication Critical patent/SG118063A1/en

Links

SG200000784A 2000-02-11 2000-02-11 A device for an etch treatment of a disk-like object SG118063A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SG200000784A SG118063A1 (en) 2000-02-11 2000-02-11 A device for an etch treatment of a disk-like object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG200000784A SG118063A1 (en) 2000-02-11 2000-02-11 A device for an etch treatment of a disk-like object

Publications (1)

Publication Number Publication Date
SG118063A1 true SG118063A1 (en) 2006-01-27

Family

ID=36102676

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200000784A SG118063A1 (en) 2000-02-11 2000-02-11 A device for an etch treatment of a disk-like object

Country Status (1)

Country Link
SG (1) SG118063A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10707099B2 (en) 2013-08-12 2020-07-07 Veeco Instruments Inc. Collection chamber apparatus to separate multiple fluids during the semiconductor wafer processing cycle
US11342215B2 (en) 2017-04-25 2022-05-24 Veeco Instruments Inc. Semiconductor wafer processing chamber

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4903717A (en) * 1987-11-09 1990-02-27 Sez Semiconductor-Equipment Zubehoer Fuer die Halbleiterfertigung Gesellschaft m.b.H Support for slice-shaped articles and device for etching silicon wafers with such a support
US5513668A (en) * 1993-02-08 1996-05-07 Sez Semiconductor-Equipment Zubehor Fur Die Halbleiterfertigung Gesellschaft M.B.H. Support for disk-shaped articles
US5896877A (en) * 1996-11-20 1999-04-27 Sez Semiconductor-Equipment Zubehor Fur Die Halbleiterfertigung Ag Support for wafer-like objects

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4903717A (en) * 1987-11-09 1990-02-27 Sez Semiconductor-Equipment Zubehoer Fuer die Halbleiterfertigung Gesellschaft m.b.H Support for slice-shaped articles and device for etching silicon wafers with such a support
US5513668A (en) * 1993-02-08 1996-05-07 Sez Semiconductor-Equipment Zubehor Fur Die Halbleiterfertigung Gesellschaft M.B.H. Support for disk-shaped articles
US5896877A (en) * 1996-11-20 1999-04-27 Sez Semiconductor-Equipment Zubehor Fur Die Halbleiterfertigung Ag Support for wafer-like objects

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10707099B2 (en) 2013-08-12 2020-07-07 Veeco Instruments Inc. Collection chamber apparatus to separate multiple fluids during the semiconductor wafer processing cycle
US11342215B2 (en) 2017-04-25 2022-05-24 Veeco Instruments Inc. Semiconductor wafer processing chamber

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