SG11202112025TA - Method for measuring concentration of fluorine gas in halogen fluoride-containing gas using mass spectrometer - Google Patents

Method for measuring concentration of fluorine gas in halogen fluoride-containing gas using mass spectrometer

Info

Publication number
SG11202112025TA
SG11202112025TA SG11202112025TA SG11202112025TA SG11202112025TA SG 11202112025T A SG11202112025T A SG 11202112025TA SG 11202112025T A SG11202112025T A SG 11202112025TA SG 11202112025T A SG11202112025T A SG 11202112025TA SG 11202112025T A SG11202112025T A SG 11202112025TA
Authority
SG
Singapore
Prior art keywords
mass spectrometer
gas
measuring concentration
halogen fluoride
containing gas
Prior art date
Application number
SG11202112025TA
Inventor
Atsushi Suzuki
Original Assignee
Showa Denko Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko Kk filed Critical Showa Denko Kk
Publication of SG11202112025TA publication Critical patent/SG11202112025TA/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00Halogens; Halogen acids
    • C01B7/19Fluorine; Hydrogen fluoride
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/622Ion mobility spectrometry
    • G01N27/623Ion mobility spectrometry combined with mass spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/04Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0422Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for gaseous samples
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00Halogens; Halogen acids
    • C01B7/24Inter-halogen compounds
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0009General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0011Sample conditioning
    • G01N33/0018Sample conditioning by diluting a gas
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/0027Methods for using particle spectrometers
    • H01J49/0031Step by step routines describing the use of the apparatus
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/26Mass spectrometers or separator tubes
    • H01J49/34Dynamic spectrometers
    • H01J49/40Time-of-flight spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Molecular Biology (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
SG11202112025TA 2019-11-27 2020-11-12 Method for measuring concentration of fluorine gas in halogen fluoride-containing gas using mass spectrometer SG11202112025TA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019214260 2019-11-27
PCT/JP2020/042274 WO2021106601A1 (en) 2019-11-27 2020-11-12 Method for measuring fluorine gas concentration in halogen-fluoride-containing gas using mass spectrometer

Publications (1)

Publication Number Publication Date
SG11202112025TA true SG11202112025TA (en) 2021-12-30

Family

ID=76130185

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202112025TA SG11202112025TA (en) 2019-11-27 2020-11-12 Method for measuring concentration of fluorine gas in halogen fluoride-containing gas using mass spectrometer

Country Status (9)

Country Link
US (1) US11984308B2 (en)
EP (1) EP4067300A4 (en)
JP (1) JPWO2021106601A1 (en)
KR (1) KR20210146388A (en)
CN (1) CN113767281A (en)
IL (1) IL287815A (en)
SG (1) SG11202112025TA (en)
TW (1) TWI758968B (en)
WO (1) WO2021106601A1 (en)

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3219410A (en) * 1962-05-23 1965-11-23 Hooker Chemical Corp Method for recovering hydrogen fluoride from waste gases
JPH04353761A (en) 1991-05-30 1992-12-08 Tadahiro Omi Method and apparatus for measuring quantity of impurity in specific gas
JPH07307301A (en) 1994-03-17 1995-11-21 Hitachi Ltd Semiconductor device and its manufacture
CN1683923B (en) 2000-03-31 2010-09-22 昭和电工株式会社 Measuring method for concentration of fluohydrocarbon, measuring equipment and manufacturing method of perfluocarbon
US7179653B2 (en) 2000-03-31 2007-02-20 Showa Denko K.K. Measuring method for concentration of halogen and fluorine compound, measuring equipment thereof and manufacturing method of halogen compound
US6686594B2 (en) 2001-10-29 2004-02-03 Air Products And Chemicals, Inc. On-line UV-Visible light halogen gas analyzer for semiconductor processing effluent monitoring
JP4172938B2 (en) * 2002-02-14 2008-10-29 昭和電工株式会社 Exhaust gas treatment method and treatment apparatus
JP4211983B2 (en) 2004-02-24 2009-01-21 セントラル硝子株式会社 Method and apparatus for measuring F2 gas concentration
WO2007021814A2 (en) * 2005-08-11 2007-02-22 Eksigent Technologies, Llc Plastic surfaces and apparatuses for reduced adsorption of solutes and methods of preparing the same
CN102879492B (en) 2012-09-24 2014-05-14 中昊晨光化工研究院有限公司 System and method for quantitatively detecting impurities in sulfur hexafluoride gas
CN108883933B (en) 2016-04-05 2023-02-28 关东电化工业株式会社 Method for supplying chlorine fluoride
WO2017179458A1 (en) 2016-04-11 2017-10-19 セントラル硝子株式会社 Method for purifying fluorinated interhalogen compound
JP2018107438A (en) 2016-12-26 2018-07-05 セントラル硝子株式会社 Method for surface treatment of metal member, and method for manufacturing semiconductor element
CN107464735A (en) * 2017-06-28 2017-12-12 中国地质科学院水文地质环境地质研究所 A kind of new chlorine bromine isotope mass spectrometer and its analysis method
US11779877B2 (en) 2018-12-21 2023-10-10 Resonac Corporation Method for removing halogen fluoride, quantitative analysis method for gas component contained in halogen fluoride mixed gas, and quantitative analyzer
CN109888599A (en) 2019-03-25 2019-06-14 北京科益虹源光电技术有限公司 A kind of passivating method and passivating device suitable for laser discharge cavity

Also Published As

Publication number Publication date
TW202127023A (en) 2021-07-16
CN113767281A (en) 2021-12-07
US11984308B2 (en) 2024-05-14
JPWO2021106601A1 (en) 2021-06-03
WO2021106601A1 (en) 2021-06-03
US20220223397A1 (en) 2022-07-14
KR20210146388A (en) 2021-12-03
IL287815A (en) 2022-01-01
TWI758968B (en) 2022-03-21
EP4067300A1 (en) 2022-10-05
EP4067300A4 (en) 2024-01-03

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