SG11202112025TA - Method for measuring concentration of fluorine gas in halogen fluoride-containing gas using mass spectrometer - Google Patents
Method for measuring concentration of fluorine gas in halogen fluoride-containing gas using mass spectrometerInfo
- Publication number
- SG11202112025TA SG11202112025TA SG11202112025TA SG11202112025TA SG11202112025TA SG 11202112025T A SG11202112025T A SG 11202112025TA SG 11202112025T A SG11202112025T A SG 11202112025TA SG 11202112025T A SG11202112025T A SG 11202112025TA SG 11202112025T A SG11202112025T A SG 11202112025TA
- Authority
- SG
- Singapore
- Prior art keywords
- mass spectrometer
- gas
- measuring concentration
- halogen fluoride
- containing gas
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B7/00—Halogens; Halogen acids
- C01B7/19—Fluorine; Hydrogen fluoride
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
- G01N27/622—Ion mobility spectrometry
- G01N27/623—Ion mobility spectrometry combined with mass spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
- H01J49/0422—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for gaseous samples
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B7/00—Halogens; Halogen acids
- C01B7/24—Inter-halogen compounds
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0011—Sample conditioning
- G01N33/0018—Sample conditioning by diluting a gas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/0027—Methods for using particle spectrometers
- H01J49/0031—Step by step routines describing the use of the apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/40—Time-of-flight spectrometers
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Inorganic Chemistry (AREA)
- Immunology (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Pathology (AREA)
- Electrochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Combustion & Propulsion (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Molecular Biology (AREA)
- Sampling And Sample Adjustment (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019214260 | 2019-11-27 | ||
PCT/JP2020/042274 WO2021106601A1 (en) | 2019-11-27 | 2020-11-12 | Method for measuring fluorine gas concentration in halogen-fluoride-containing gas using mass spectrometer |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11202112025TA true SG11202112025TA (en) | 2021-12-30 |
Family
ID=76130185
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11202112025TA SG11202112025TA (en) | 2019-11-27 | 2020-11-12 | Method for measuring concentration of fluorine gas in halogen fluoride-containing gas using mass spectrometer |
Country Status (9)
Country | Link |
---|---|
US (1) | US11984308B2 (en) |
EP (1) | EP4067300A4 (en) |
JP (1) | JPWO2021106601A1 (en) |
KR (1) | KR20210146388A (en) |
CN (1) | CN113767281A (en) |
IL (1) | IL287815A (en) |
SG (1) | SG11202112025TA (en) |
TW (1) | TWI758968B (en) |
WO (1) | WO2021106601A1 (en) |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3219410A (en) * | 1962-05-23 | 1965-11-23 | Hooker Chemical Corp | Method for recovering hydrogen fluoride from waste gases |
JPH04353761A (en) | 1991-05-30 | 1992-12-08 | Tadahiro Omi | Method and apparatus for measuring quantity of impurity in specific gas |
JPH07307301A (en) | 1994-03-17 | 1995-11-21 | Hitachi Ltd | Semiconductor device and its manufacture |
CN1683923B (en) | 2000-03-31 | 2010-09-22 | 昭和电工株式会社 | Measuring method for concentration of fluohydrocarbon, measuring equipment and manufacturing method of perfluocarbon |
US7179653B2 (en) | 2000-03-31 | 2007-02-20 | Showa Denko K.K. | Measuring method for concentration of halogen and fluorine compound, measuring equipment thereof and manufacturing method of halogen compound |
US6686594B2 (en) | 2001-10-29 | 2004-02-03 | Air Products And Chemicals, Inc. | On-line UV-Visible light halogen gas analyzer for semiconductor processing effluent monitoring |
JP4172938B2 (en) * | 2002-02-14 | 2008-10-29 | 昭和電工株式会社 | Exhaust gas treatment method and treatment apparatus |
JP4211983B2 (en) | 2004-02-24 | 2009-01-21 | セントラル硝子株式会社 | Method and apparatus for measuring F2 gas concentration |
WO2007021814A2 (en) * | 2005-08-11 | 2007-02-22 | Eksigent Technologies, Llc | Plastic surfaces and apparatuses for reduced adsorption of solutes and methods of preparing the same |
CN102879492B (en) | 2012-09-24 | 2014-05-14 | 中昊晨光化工研究院有限公司 | System and method for quantitatively detecting impurities in sulfur hexafluoride gas |
CN108883933B (en) | 2016-04-05 | 2023-02-28 | 关东电化工业株式会社 | Method for supplying chlorine fluoride |
WO2017179458A1 (en) | 2016-04-11 | 2017-10-19 | セントラル硝子株式会社 | Method for purifying fluorinated interhalogen compound |
JP2018107438A (en) | 2016-12-26 | 2018-07-05 | セントラル硝子株式会社 | Method for surface treatment of metal member, and method for manufacturing semiconductor element |
CN107464735A (en) * | 2017-06-28 | 2017-12-12 | 中国地质科学院水文地质环境地质研究所 | A kind of new chlorine bromine isotope mass spectrometer and its analysis method |
US11779877B2 (en) | 2018-12-21 | 2023-10-10 | Resonac Corporation | Method for removing halogen fluoride, quantitative analysis method for gas component contained in halogen fluoride mixed gas, and quantitative analyzer |
CN109888599A (en) | 2019-03-25 | 2019-06-14 | 北京科益虹源光电技术有限公司 | A kind of passivating method and passivating device suitable for laser discharge cavity |
-
2020
- 2020-11-12 EP EP20893561.9A patent/EP4067300A4/en active Pending
- 2020-11-12 US US17/608,527 patent/US11984308B2/en active Active
- 2020-11-12 CN CN202080032719.7A patent/CN113767281A/en active Pending
- 2020-11-12 KR KR1020217035596A patent/KR20210146388A/en not_active Application Discontinuation
- 2020-11-12 WO PCT/JP2020/042274 patent/WO2021106601A1/en unknown
- 2020-11-12 SG SG11202112025TA patent/SG11202112025TA/en unknown
- 2020-11-12 JP JP2021561294A patent/JPWO2021106601A1/ja active Pending
- 2020-11-23 TW TW109140922A patent/TWI758968B/en active
-
2021
- 2021-11-03 IL IL287815A patent/IL287815A/en unknown
Also Published As
Publication number | Publication date |
---|---|
TW202127023A (en) | 2021-07-16 |
CN113767281A (en) | 2021-12-07 |
US11984308B2 (en) | 2024-05-14 |
JPWO2021106601A1 (en) | 2021-06-03 |
WO2021106601A1 (en) | 2021-06-03 |
US20220223397A1 (en) | 2022-07-14 |
KR20210146388A (en) | 2021-12-03 |
IL287815A (en) | 2022-01-01 |
TWI758968B (en) | 2022-03-21 |
EP4067300A1 (en) | 2022-10-05 |
EP4067300A4 (en) | 2024-01-03 |
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