SG11202005691VA - Ion focusing device - Google Patents

Ion focusing device

Info

Publication number
SG11202005691VA
SG11202005691VA SG11202005691VA SG11202005691VA SG11202005691VA SG 11202005691V A SG11202005691V A SG 11202005691VA SG 11202005691V A SG11202005691V A SG 11202005691VA SG 11202005691V A SG11202005691V A SG 11202005691VA SG 11202005691V A SG11202005691V A SG 11202005691VA
Authority
SG
Singapore
Prior art keywords
focusing device
ion focusing
ion
focusing
Prior art date
Application number
SG11202005691VA
Inventor
Yehia M Ibrahim
Richard D Smith
Original Assignee
Battelle Memorial Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Battelle Memorial Institute filed Critical Battelle Memorial Institute
Publication of SG11202005691VA publication Critical patent/SG11202005691VA/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/06Electron- or ion-optical arrangements
    • H01J49/062Ion guides
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/622Ion mobility spectrometry
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08Ion sources; Ion guns
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/21Means for adjusting the focus
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/06Electron- or ion-optical arrangements
    • H01J49/062Ion guides
    • H01J49/065Ion guides having stacked electrodes, e.g. ring stack, plate stack
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04Means for controlling the discharge
    • H01J2237/049Focusing means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30Electron or ion beam tubes for processing objects
    • H01J2237/304Controlling tubes
    • H01J2237/30472Controlling the beam

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
SG11202005691VA 2017-12-20 2018-12-13 Ion focusing device SG11202005691VA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15/849,417 US10332723B1 (en) 2017-12-20 2017-12-20 Ion focusing device
PCT/US2018/065380 WO2019125891A1 (en) 2017-12-20 2018-12-13 Ion focusing device

Publications (1)

Publication Number Publication Date
SG11202005691VA true SG11202005691VA (en) 2020-07-29

Family

ID=65023986

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202005691VA SG11202005691VA (en) 2017-12-20 2018-12-13 Ion focusing device

Country Status (7)

Country Link
US (2) US10332723B1 (en)
EP (1) EP3729489A1 (en)
JP (1) JP2021507478A (en)
CN (1) CN111587470A (en)
CA (1) CA3085929A1 (en)
SG (1) SG11202005691VA (en)
WO (1) WO2019125891A1 (en)

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US10804089B2 (en) 2017-10-04 2020-10-13 Batelle Memorial Institute Methods and systems for integrating ion manipulation devices
US10332723B1 (en) 2017-12-20 2019-06-25 Battelle Memorial Institute Ion focusing device
WO2019222274A1 (en) 2018-05-14 2019-11-21 MOBILion Systems, Inc. Coupling of ion mobility spectrometer with mass spectrometer
AU2020280042A1 (en) * 2019-05-21 2021-12-23 MOBILion Systems, Inc. Voltage control for ion mobility separation
US11119069B2 (en) 2019-05-28 2021-09-14 Battelle Memorial Institute Device and method to manipulate ions in multi level system
WO2021102406A1 (en) 2019-11-22 2021-05-27 MOBILion Systems, Inc. Mobility based filtering of ions
WO2021207235A1 (en) 2020-04-06 2021-10-14 MOBILion Systems, Inc. Systems and methods for two-dimensional mobility based filtering of ions
EP4153985A4 (en) 2020-05-22 2024-07-10 Mobilion Systems Inc Methods and apparatus for trapping and accumulation of ions
WO2021247820A1 (en) 2020-06-05 2021-12-09 MOBILion Systems, Inc. Apparatus and methods for ion manipulation having improved duty cycle
GB2595876B (en) 2020-06-09 2024-02-07 Microsaic Systems Plc Mass spectrometry ion funnel
GB2626523A (en) 2022-11-15 2024-07-31 Thermo Fisher Scient Bremen Gmbh Collisional activation in ion guides

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Also Published As

Publication number Publication date
US20190189393A1 (en) 2019-06-20
WO2019125891A1 (en) 2019-06-27
CN111587470A (en) 2020-08-25
US10332723B1 (en) 2019-06-25
US11605531B2 (en) 2023-03-14
JP2021507478A (en) 2021-02-22
US20200321190A1 (en) 2020-10-08
EP3729489A1 (en) 2020-10-28
CA3085929A1 (en) 2019-06-27

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