SG11202005615TA - Deposition processing systems having active temperature control and associated methods - Google Patents
Deposition processing systems having active temperature control and associated methodsInfo
- Publication number
- SG11202005615TA SG11202005615TA SG11202005615TA SG11202005615TA SG11202005615TA SG 11202005615T A SG11202005615T A SG 11202005615TA SG 11202005615T A SG11202005615T A SG 11202005615TA SG 11202005615T A SG11202005615T A SG 11202005615TA SG 11202005615T A SG11202005615T A SG 11202005615TA
- Authority
- SG
- Singapore
- Prior art keywords
- temperature control
- processing systems
- associated methods
- active temperature
- deposition processing
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0694—Halides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/221—Ion beam deposition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201762608182P | 2017-12-20 | 2017-12-20 | |
PCT/US2018/066066 WO2019126066A1 (en) | 2017-12-20 | 2018-12-17 | Deposition processing systems having active temperature control and associated methods |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11202005615TA true SG11202005615TA (en) | 2020-07-29 |
Family
ID=66814217
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11202005615TA SG11202005615TA (en) | 2017-12-20 | 2018-12-17 | Deposition processing systems having active temperature control and associated methods |
Country Status (9)
Country | Link |
---|---|
US (2) | US11332821B2 (en) |
EP (1) | EP3728686A4 (en) |
JP (1) | JP2021508775A (en) |
KR (1) | KR20200105847A (en) |
CN (1) | CN111511959B (en) |
IL (1) | IL275149A (en) |
SG (1) | SG11202005615TA (en) |
TW (1) | TWI795492B (en) |
WO (1) | WO2019126066A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021015942A (en) * | 2019-07-16 | 2021-02-12 | 東京エレクトロン株式会社 | Apparatus and method for heat treatment of substrate |
KR102349212B1 (en) * | 2021-04-28 | 2022-01-07 | 권순영 | Method of forming coating layer with the different composition |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0327522A (en) * | 1989-06-26 | 1991-02-05 | Hitachi Ltd | Method and device for thin film processing to semiconductor substrate and thin film processing device |
US5607009A (en) * | 1993-01-28 | 1997-03-04 | Applied Materials, Inc. | Method of heating and cooling large area substrates and apparatus therefor |
DE19781631T1 (en) * | 1997-01-02 | 1999-04-01 | Cvc Products Inc | Thermally conductive chuck for vacuum processing device |
US6492625B1 (en) * | 2000-09-27 | 2002-12-10 | Emcore Corporation | Apparatus and method for controlling temperature uniformity of substrates |
JP2004079349A (en) * | 2002-08-19 | 2004-03-11 | Sony Corp | Thin film forming device |
JP2005210080A (en) | 2003-12-25 | 2005-08-04 | Tokyo Electron Ltd | Temperature-control method and temperature-control device |
US7244311B2 (en) * | 2004-10-13 | 2007-07-17 | Lam Research Corporation | Heat transfer system for improved semiconductor processing uniformity |
US20060274474A1 (en) * | 2005-06-01 | 2006-12-07 | Lee Chung J | Substrate Holder |
JP2007016272A (en) * | 2005-07-06 | 2007-01-25 | Ge Speciality Materials Japan Kk | Protective film covered on substrate, and its manufacturing method |
US7429718B2 (en) * | 2005-08-02 | 2008-09-30 | Applied Materials, Inc. | Heating and cooling of substrate support |
JP2007322156A (en) * | 2006-05-30 | 2007-12-13 | Fujifilm Corp | Radiation image conversion panel and method for manufacturing it |
US7972444B2 (en) | 2007-11-07 | 2011-07-05 | Mattson Technology, Inc. | Workpiece support with fluid zones for temperature control |
US9062379B2 (en) * | 2008-04-16 | 2015-06-23 | Applied Materials, Inc. | Wafer processing deposition shielding components |
JP5479867B2 (en) * | 2009-01-14 | 2014-04-23 | 東京エレクトロン株式会社 | Inductively coupled plasma processing equipment |
TW201237994A (en) * | 2010-12-20 | 2012-09-16 | Novellus Systems Inc | System and apparatus for flowable deposition in semiconductor fabrication |
US9725799B2 (en) * | 2013-12-06 | 2017-08-08 | Applied Materials, Inc. | Ion beam sputtering with ion assisted deposition for coatings on chamber components |
US9869013B2 (en) * | 2014-04-25 | 2018-01-16 | Applied Materials, Inc. | Ion assisted deposition top coat of rare-earth oxide |
US9543219B2 (en) * | 2014-12-02 | 2017-01-10 | Globalfoundries Inc. | Void monitoring device for measurement of wafer temperature variations |
-
2018
- 2018-12-17 CN CN201880083166.0A patent/CN111511959B/en active Active
- 2018-12-17 KR KR1020207020465A patent/KR20200105847A/en not_active Application Discontinuation
- 2018-12-17 JP JP2020535028A patent/JP2021508775A/en active Pending
- 2018-12-17 US US16/222,894 patent/US11332821B2/en active Active
- 2018-12-17 EP EP18891939.3A patent/EP3728686A4/en active Pending
- 2018-12-17 WO PCT/US2018/066066 patent/WO2019126066A1/en unknown
- 2018-12-17 SG SG11202005615TA patent/SG11202005615TA/en unknown
- 2018-12-18 TW TW107145541A patent/TWI795492B/en active
-
2020
- 2020-06-04 IL IL275149A patent/IL275149A/en unknown
-
2022
- 2022-04-15 US US17/722,137 patent/US20220259721A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
US11332821B2 (en) | 2022-05-17 |
US20220259721A1 (en) | 2022-08-18 |
IL275149A (en) | 2020-07-30 |
KR20200105847A (en) | 2020-09-09 |
CN111511959A (en) | 2020-08-07 |
EP3728686A1 (en) | 2020-10-28 |
TW201936962A (en) | 2019-09-16 |
EP3728686A4 (en) | 2021-09-29 |
TWI795492B (en) | 2023-03-11 |
WO2019126066A1 (en) | 2019-06-27 |
JP2021508775A (en) | 2021-03-11 |
CN111511959B (en) | 2022-11-04 |
US20190185989A1 (en) | 2019-06-20 |
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