SG11201911488UA - Suction device - Google Patents
Suction deviceInfo
- Publication number
- SG11201911488UA SG11201911488UA SG11201911488UA SG11201911488UA SG11201911488UA SG 11201911488U A SG11201911488U A SG 11201911488UA SG 11201911488U A SG11201911488U A SG 11201911488UA SG 11201911488U A SG11201911488U A SG 11201911488UA SG 11201911488U A SG11201911488U A SG 11201911488UA
- Authority
- SG
- Singapore
- Prior art keywords
- suction device
- suction
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
- B25J15/0675—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum of the ejector type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/005—Vacuum work holders
- B25B11/007—Vacuum work holders portable, e.g. handheld
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
- B25J15/0683—Details of suction cup structure, e.g. grooves or ridges
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017180384A JP7148105B2 (en) | 2017-09-20 | 2017-09-20 | suction device |
PCT/JP2018/033086 WO2019058989A1 (en) | 2017-09-20 | 2018-09-06 | Suction device |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201911488UA true SG11201911488UA (en) | 2020-04-29 |
Family
ID=65810338
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201911488UA SG11201911488UA (en) | 2017-09-20 | 2018-09-06 | Suction device |
Country Status (8)
Country | Link |
---|---|
US (1) | US11642794B2 (en) |
EP (1) | EP3685971A4 (en) |
JP (1) | JP7148105B2 (en) |
KR (1) | KR102345434B1 (en) |
CN (1) | CN110785270B (en) |
SG (1) | SG11201911488UA (en) |
TW (1) | TWI683390B (en) |
WO (1) | WO2019058989A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU2020344932A1 (en) * | 2019-09-10 | 2022-03-31 | A O Formaflon Swiss AG | Suction unit and suction device |
CN111775174B (en) * | 2020-07-23 | 2021-09-14 | 天津工业大学 | Non-contact sucker based on wall attachment effect |
CN114524270B (en) * | 2022-02-24 | 2024-06-14 | 南京理工大学 | Single-inlet double-vortex non-contact vacuum chuck with needle valve |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS572477B2 (en) * | 1974-03-01 | 1982-01-16 | ||
JPH0632916B2 (en) * | 1985-07-15 | 1994-05-02 | 株式会社西部技研 | A method of suspending and floating a plate-shaped body in a non-contact state with a fluid |
EP0201240B1 (en) * | 1985-05-04 | 1992-09-23 | Kabushiki Kaisha Seibu Giken | Apparatus for supporting and/or conveying a plate with fluid without physical contact |
US5169196A (en) * | 1991-06-17 | 1992-12-08 | Safabakhsh Ali R | Non-contact pick-up head |
JP4669252B2 (en) | 2000-06-09 | 2011-04-13 | 株式会社ハーモテック | Swirl flow forming body and non-contact transfer device |
EP1233442B1 (en) | 2001-02-20 | 2009-10-14 | Harmotec Corporation | Non-contacting conveyance equipment |
US6601888B2 (en) * | 2001-03-19 | 2003-08-05 | Creo Inc. | Contactless handling of objects |
JP4437415B2 (en) | 2004-03-03 | 2010-03-24 | リンク・パワー株式会社 | Non-contact holding device and non-contact holding and conveying device |
GB0522552D0 (en) * | 2005-11-04 | 2005-12-14 | Univ Salford The | Handling device |
JP4243766B2 (en) * | 2006-10-02 | 2009-03-25 | Smc株式会社 | Non-contact transfer device |
JP5239564B2 (en) | 2008-07-04 | 2013-07-17 | セイコーエプソン株式会社 | Chuck device and suction holding hand |
JP2011138877A (en) * | 2009-12-28 | 2011-07-14 | Seiko Epson Corp | Non-contact holder and non-contact holding hand |
JP2011161529A (en) | 2010-02-05 | 2011-08-25 | Seiko Epson Corp | Noncontact holding device |
KR101814096B1 (en) | 2010-02-23 | 2018-01-02 | 아사히 유키자이 가부시키가이샤 | In-line Fluid Mixing Device |
KR20110105635A (en) * | 2010-03-19 | 2011-09-27 | 서울과학기술대학교 산학협력단 | Hand device and multi-hand device for wafer transportation |
KR102043656B1 (en) * | 2010-06-07 | 2019-11-12 | 니폰 덴키 가라스 가부시키가이샤 | Transfer device for plate-like member, and suction pad |
KR101187684B1 (en) * | 2010-10-25 | 2012-10-04 | 서울과학기술대학교 산학협력단 | Non-contact air pads for chucking a substrate by using the radial flow |
JP2013013992A (en) | 2011-07-06 | 2013-01-24 | Link Power Kk | Apparatus for holding and conveying small-sized workpiece |
US8904629B2 (en) * | 2012-03-09 | 2014-12-09 | LG CNS Co. Ltd. | Light-emitting diode (LED) wafer picker |
JP5921323B2 (en) * | 2012-05-11 | 2016-05-24 | 株式会社妙徳 | Transport holding tool and transport holding device |
DE102012215513A1 (en) | 2012-08-31 | 2014-03-06 | J. Schmalz Gmbh | gripping device |
JP6292842B2 (en) | 2013-11-25 | 2018-03-14 | 株式会社ジェーイーエル | Substrate holding device |
TWI526380B (en) * | 2013-11-27 | 2016-03-21 | 財團法人工業技術研究院 | Contact holding device using vortex |
KR20160093674A (en) * | 2013-12-03 | 2016-08-08 | 가부시키가이샤 하모테크 | Holding device, holding system, control method, and conveyance device |
JP5908136B1 (en) * | 2015-03-03 | 2016-04-26 | 株式会社ハーモテック | Suction device |
-
2017
- 2017-09-20 JP JP2017180384A patent/JP7148105B2/en active Active
-
2018
- 2018-09-06 SG SG11201911488UA patent/SG11201911488UA/en unknown
- 2018-09-06 KR KR1020197038165A patent/KR102345434B1/en active IP Right Grant
- 2018-09-06 CN CN201880041926.1A patent/CN110785270B/en active Active
- 2018-09-06 WO PCT/JP2018/033086 patent/WO2019058989A1/en unknown
- 2018-09-06 US US16/618,545 patent/US11642794B2/en active Active
- 2018-09-06 EP EP18858330.6A patent/EP3685971A4/en active Pending
- 2018-09-12 TW TW107132001A patent/TWI683390B/en active
Also Published As
Publication number | Publication date |
---|---|
JP7148105B2 (en) | 2022-10-05 |
US11642794B2 (en) | 2023-05-09 |
TWI683390B (en) | 2020-01-21 |
WO2019058989A1 (en) | 2019-03-28 |
KR20200013696A (en) | 2020-02-07 |
CN110785270B (en) | 2023-09-08 |
CN110785270A (en) | 2020-02-11 |
TW201921576A (en) | 2019-06-01 |
EP3685971A1 (en) | 2020-07-29 |
US20200164527A1 (en) | 2020-05-28 |
EP3685971A4 (en) | 2021-06-09 |
JP2019055439A (en) | 2019-04-11 |
KR102345434B1 (en) | 2021-12-29 |
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