SG11201908394WA - System, Method, And Computer Program For Analyzing Operation Of Fluid Control Device - Google Patents

System, Method, And Computer Program For Analyzing Operation Of Fluid Control Device

Info

Publication number
SG11201908394WA
SG11201908394WA SG11201908394WA SG11201908394WA SG 11201908394W A SG11201908394W A SG 11201908394WA SG 11201908394W A SG11201908394W A SG 11201908394WA SG 11201908394W A SG11201908394W A SG 11201908394WA
Authority
SG
Singapore
Prior art keywords
fluid control
control device
information
abnormality
operation information
Prior art date
Application number
Inventor
Yuya Suzuki
Katsunori Komehana
Masahiko Ochiishi
Akihiro Harada
Ryutaro TANNO
Tsutomu Shinohara
Original Assignee
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk filed Critical Fujikin Kk
Publication of SG11201908394WA publication Critical patent/SG11201908394WA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0025—Electrical or magnetic means
    • F16K37/0041—Electrical or magnetic means for measuring valve parameters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0025—Electrical or magnetic means
    • F16K37/005—Electrical or magnetic means for measuring fluid parameters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0075—For recording or indicating the functioning of a valve in combination with test equipment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/002—Investigating fluid-tightness of structures by using thermal means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • G01M3/28—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipes, cables or tubes; for pipe joints or seals; for valves ; for welds
    • G01M3/2876—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipes, cables or tubes; for pipe joints or seals; for valves ; for welds for valves
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

SYSTEM, METHOD, AND COMPUTER PROGRAM FOR ANALYZING OPERATION OF FLUID CONTROL DEVICE A cause of abnormality of a fluid control device and/or data with which abnormality can be predicted can be collected to be analyzed, and abnormality can be predicted based on a result of the analysis. A fluid control device 8 and a server 72 are configured to be able to communicate with each other through networks NW1 and 2. The fluid control device 8 includes an operation information acquisition mechanism that acquires a plurality of types of operation information about the fluid control device 8. The server 72 includes a determination processing unit 721 that determines whether the fluid control device 8 has an abnormality, an information collection unit 724 that collects the operation information and an abnormality determination result for the fluid control device 1, an information storage unit 725 that stores the operation information and the determination result collected, an information extraction unit 726 that refers to the information storage unit 725, and extracts, analysis target including same predetermined operation information and another of the operation information as well as information related to the determination result, 72 selectively for each of a plurality of the fluid control devices 1, and a correlation analysis unit 727 that analyzes correlation between a predetermined operation of the fluid control device 8 and occurrence of abnormality through comparison using the information extracted. Fig. 14
SG11201908394W 2017-03-17 2018-03-13 System, Method, And Computer Program For Analyzing Operation Of Fluid Control Device SG11201908394WA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017053709 2017-03-17
PCT/JP2018/009793 WO2018168873A1 (en) 2017-03-17 2018-03-13 Operation analysis system of fluid control device, method, and computer program

Publications (1)

Publication Number Publication Date
SG11201908394WA true SG11201908394WA (en) 2019-10-30

Family

ID=63522328

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201908394W SG11201908394WA (en) 2017-03-17 2018-03-13 System, Method, And Computer Program For Analyzing Operation Of Fluid Control Device

Country Status (7)

Country Link
US (1) US11371627B2 (en)
JP (1) JP7008938B2 (en)
KR (1) KR102402579B1 (en)
CN (1) CN110352340B (en)
SG (1) SG11201908394WA (en)
TW (2) TWI741342B (en)
WO (1) WO2018168873A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7283096B2 (en) * 2019-02-04 2023-05-30 株式会社ジェイテクト Inspection device and learning model generation device for inspection
JP7265251B2 (en) * 2019-05-09 2023-04-26 株式会社フジキン Motion analysis system for fluid control device, motion analysis method for fluid control device, and computer program
CN112100019B (en) * 2019-09-12 2021-03-23 无锡江南计算技术研究所 Multi-source fault collaborative analysis positioning method for large-scale system
TWI766386B (en) 2019-11-28 2022-06-01 日商富士金股份有限公司 Operation information collecting system for fluid control equipment, fluid control equipment, operation information collecting method for fluid control equipment, and computer program
KR102404652B1 (en) 2020-04-28 2022-06-02 광운대학교 산학협력단 Microfluidic control system based on artificial intelligence

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US5616829A (en) * 1995-03-09 1997-04-01 Teledyne Industries Inc. Abnormality detection/suppression system for a valve apparatus
JP4396286B2 (en) * 2004-01-21 2010-01-13 三菱電機株式会社 Device diagnostic device and device monitoring system
WO2006070689A1 (en) * 2004-12-28 2006-07-06 Tokyo Electron Limited Semiconductor manufacturing apparatus, abnormality detection in such semiconductor manufacturing apparatus, method for specifying abnormality cause or predicting abnormality, and recording medium wherein computer program for executing such method is recorded
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JP4866682B2 (en) * 2005-09-01 2012-02-01 株式会社フジキン Abnormality detection method for fluid supply system using flow control device with pressure sensor
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JP2012137934A (en) * 2010-12-27 2012-07-19 Hitachi Ltd Abnormality detection/diagnostic method, abnormality detection/diagnostic system, abnormality detection/diagnostic program and company asset management/facility asset management system
JP5978038B2 (en) * 2012-07-23 2016-08-24 株式会社フジキン Leak detection device and fluid controller having the same
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Also Published As

Publication number Publication date
CN110352340B (en) 2021-10-01
US20200080663A1 (en) 2020-03-12
JPWO2018168873A1 (en) 2020-01-30
TW201839369A (en) 2018-11-01
KR102402579B1 (en) 2022-05-26
CN110352340A (en) 2019-10-18
TWI741342B (en) 2021-10-01
TW201945703A (en) 2019-12-01
JP7008938B2 (en) 2022-01-25
WO2018168873A1 (en) 2018-09-20
KR20190118615A (en) 2019-10-18
TWI692627B (en) 2020-05-01
US11371627B2 (en) 2022-06-28

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