SG11201908001VA - Control method of driving frequency of pulsed variable frequency rf generator - Google Patents
Control method of driving frequency of pulsed variable frequency rf generatorInfo
- Publication number
- SG11201908001VA SG11201908001VA SG11201908001VA SG11201908001VA SG11201908001VA SG 11201908001V A SG11201908001V A SG 11201908001VA SG 11201908001V A SG11201908001V A SG 11201908001VA SG 11201908001V A SG11201908001V A SG 11201908001VA SG 11201908001V A SG11201908001V A SG 11201908001VA
- Authority
- SG
- Singapore
- Prior art keywords
- generator
- frequency
- control method
- pulsed variable
- variable frequency
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
- H01J37/32146—Amplitude modulation, includes pulsing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
- H01J37/32155—Frequency modulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
- H01J37/32155—Frequency modulation
- H01J37/32165—Plural frequencies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
- H01J37/32183—Matching circuits
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
- H03H7/38—Impedance-matching networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
- H03H7/38—Impedance-matching networks
- H03H7/40—Automatic matching of load impedance to source impedance
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020190014594A KR102348338B1 (en) | 2019-02-07 | 2019-02-07 | The Driving Frequency Control Method of The Pulsed Frequency Variable RF Generator |
PCT/KR2019/007802 WO2020162653A1 (en) | 2019-02-07 | 2019-06-27 | Method for controlling driving frequency of pulsed variable frequency rf generator |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201908001VA true SG11201908001VA (en) | 2020-09-29 |
Family
ID=71947882
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201908001VA SG11201908001VA (en) | 2019-02-07 | 2019-06-27 | Control method of driving frequency of pulsed variable frequency rf generator |
Country Status (8)
Country | Link |
---|---|
US (1) | US11244809B2 (en) |
EP (1) | EP3694104B1 (en) |
JP (1) | JP7104057B2 (en) |
KR (1) | KR102348338B1 (en) |
CN (1) | CN111801766B (en) |
SG (1) | SG11201908001VA (en) |
TW (1) | TWI713416B (en) |
WO (1) | WO2020162653A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102667081B1 (en) * | 2020-11-27 | 2024-05-17 | 세메스 주식회사 | Device for multi-level pulsing, substrate processing apparatus including the same |
US11823869B2 (en) * | 2021-10-15 | 2023-11-21 | Mks Instruments, Inc. | Impedance matching in a RF power generation system |
US20230360886A1 (en) * | 2022-05-05 | 2023-11-09 | Applied Materials, Inc. | Control and prediction of multiple plasma coupling surfaces and corresponding power transfer |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6804129B2 (en) * | 1999-07-22 | 2004-10-12 | 02 Micro International Limited | High-efficiency adaptive DC/AC converter |
US6259615B1 (en) * | 1999-07-22 | 2001-07-10 | O2 Micro International Limited | High-efficiency adaptive DC/AC converter |
US20080179948A1 (en) * | 2005-10-31 | 2008-07-31 | Mks Instruments, Inc. | Radio frequency power delivery system |
US7764140B2 (en) * | 2005-10-31 | 2010-07-27 | Mks Instruments, Inc. | Radio frequency power delivery system |
CN101297480B (en) * | 2005-10-31 | 2012-08-08 | Mks仪器股份有限公司 | Radio frequency power delivery system and method |
KR100895689B1 (en) | 2007-11-14 | 2009-04-30 | 주식회사 플라즈마트 | Impedance matching methods and electric apparatus performing the same |
US7839223B2 (en) | 2008-03-23 | 2010-11-23 | Advanced Energy Industries, Inc. | Method and apparatus for advanced frequency tuning |
KR20120022251A (en) * | 2010-09-01 | 2012-03-12 | 삼성전자주식회사 | Plasma etching method and apparatus thereof |
JP5576819B2 (en) * | 2011-03-23 | 2014-08-20 | パナソニック株式会社 | Lighting device and lighting apparatus |
JP5867701B2 (en) * | 2011-12-15 | 2016-02-24 | 東京エレクトロン株式会社 | Plasma processing equipment |
US8576013B2 (en) * | 2011-12-29 | 2013-11-05 | Mks Instruments, Inc. | Power distortion-based servo control systems for frequency tuning RF power sources |
US9374058B2 (en) | 2012-06-01 | 2016-06-21 | Nohsn Co., Ltd. | Impedance matching device and method |
KR20140058787A (en) | 2012-11-06 | 2014-05-15 | 세메스 주식회사 | Apparatus for generating plasma and method for matching impedance thereof |
US9294100B2 (en) * | 2012-12-04 | 2016-03-22 | Advanced Energy Industries, Inc. | Frequency tuning system and method for finding a global optimum |
KR101544975B1 (en) | 2013-09-30 | 2015-08-18 | 주식회사 플라즈마트 | Impedance Matching Method And Impedance Matching System |
CN103632927B (en) * | 2013-12-19 | 2016-03-16 | 中微半导体设备(上海)有限公司 | The impedance matching methods of plasma etching system |
US9520795B2 (en) * | 2014-01-08 | 2016-12-13 | Semiconductor Components Industries, Llc | Method of forming a power supply controller and structure therefor |
US9336901B2 (en) | 2014-03-17 | 2016-05-10 | Lam Research Corporation | Track and hold feedback control of pulsed RF |
US9544987B2 (en) | 2014-06-30 | 2017-01-10 | Advanced Energy Industries, Inc. | Frequency tuning for pulsed radio frequency plasma processing |
KR101677748B1 (en) * | 2014-10-29 | 2016-11-29 | 삼성전자 주식회사 | Pulse plasma apparatus and method for operating the same |
CN105826154B (en) * | 2015-01-06 | 2017-12-19 | 北京北方华创微电子装备有限公司 | For the impedance matching methods and device of pulse radiation frequency power supply |
KR101983873B1 (en) | 2015-03-24 | 2019-05-29 | 엠케이에스코리아 유한회사 | Impedance Matching Method And Impedance Matching System |
US9876476B2 (en) | 2015-08-18 | 2018-01-23 | Mks Instruments, Inc. | Supervisory control of radio frequency (RF) impedance tuning operation |
US10483854B2 (en) * | 2017-05-19 | 2019-11-19 | Semiconductor Components Industries, Llc | Resonant power supply converter circuit and method therefor |
CN109148250B (en) * | 2017-06-15 | 2020-07-17 | 北京北方华创微电子装备有限公司 | Impedance matching device and impedance matching method |
-
2019
- 2019-02-07 KR KR1020190014594A patent/KR102348338B1/en active IP Right Grant
- 2019-06-27 WO PCT/KR2019/007802 patent/WO2020162653A1/en active Application Filing
- 2019-06-27 CN CN201980001598.7A patent/CN111801766B/en active Active
- 2019-06-27 US US16/484,062 patent/US11244809B2/en active Active
- 2019-06-27 SG SG11201908001VA patent/SG11201908001VA/en unknown
- 2019-06-27 JP JP2019547117A patent/JP7104057B2/en active Active
- 2019-08-14 EP EP19191658.4A patent/EP3694104B1/en active Active
- 2019-08-30 TW TW108131286A patent/TWI713416B/en active
Also Published As
Publication number | Publication date |
---|---|
EP3694104B1 (en) | 2023-10-11 |
TW202031098A (en) | 2020-08-16 |
WO2020162653A1 (en) | 2020-08-13 |
KR102348338B1 (en) | 2022-01-06 |
CN111801766A (en) | 2020-10-20 |
US11244809B2 (en) | 2022-02-08 |
JP7104057B2 (en) | 2022-07-20 |
CN111801766B (en) | 2023-08-25 |
KR20200097161A (en) | 2020-08-18 |
TWI713416B (en) | 2020-12-11 |
US20210335576A1 (en) | 2021-10-28 |
JP2021516412A (en) | 2021-07-01 |
EP3694104A1 (en) | 2020-08-12 |
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