SG11201902595UA - A method of depositing a tin layer on a metal substrate and a use of a structure comprising a nickel/phosphorous alloy underlayer and said tin layer with said method - Google Patents

A method of depositing a tin layer on a metal substrate and a use of a structure comprising a nickel/phosphorous alloy underlayer and said tin layer with said method

Info

Publication number
SG11201902595UA
SG11201902595UA SG11201902595UA SG11201902595UA SG11201902595UA SG 11201902595U A SG11201902595U A SG 11201902595UA SG 11201902595U A SG11201902595U A SG 11201902595UA SG 11201902595U A SG11201902595U A SG 11201902595UA SG 11201902595U A SG11201902595U A SG 11201902595UA
Authority
SG
Singapore
Prior art keywords
erasmusstrabe
berlin
tin layer
atotech
depositing
Prior art date
Application number
SG11201902595UA
Inventor
Din-Ghee Neoh
Chee-Chow Tan
Jen Joo Lim
Robert Rüther
Jürgen Barthelmes
Olaf Kurtz
Original Assignee
Atotech Deutschland Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atotech Deutschland Gmbh filed Critical Atotech Deutschland Gmbh
Publication of SG11201902595UA publication Critical patent/SG11201902595UA/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C19/00Alloys based on nickel or cobalt
    • C22C19/03Alloys based on nickel or cobalt based on nickel
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/18Electroplating using modulated, pulsed or reversing current
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1633Process of electroless plating
    • C23C18/1646Characteristics of the product obtained
    • C23C18/165Multilayered product
    • C23C18/1653Two or more layers with at least one layer obtained by electroless plating and one layer obtained by electroplating
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/10Electroplating with more than one layer of the same or of different metals
    • C25D5/12Electroplating with more than one layer of the same or of different metals at least one layer being of nickel or chromium
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/10Electroplating with more than one layer of the same or of different metals
    • C25D5/12Electroplating with more than one layer of the same or of different metals at least one layer being of nickel or chromium
    • C25D5/14Electroplating with more than one layer of the same or of different metals at least one layer being of nickel or chromium two or more layers being of nickel or chromium, e.g. duplex or triplex layers
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/34Pretreatment of metallic surfaces to be electroplated
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/605Surface topography of the layers, e.g. rough, dendritic or nodular layers
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/615Microstructure of the layers, e.g. mixed structure
    • C25D5/617Crystalline layers
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814Conductive parts
    • H01L21/4821Flat leads, e.g. lead frames with or without insulating supports

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Rolls And Other Rotary Bodies (AREA)

Abstract

INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property MD 1101111 0 DOI HIM 0111 110 1 0 0111111111H111111111111111111111111111111111 Organization International Bureau (10) International Publication Number (43) International Publication Date .....0\"\"\") WO 2018/077874 Al 03 May 2018 (03.05.2018) WI P0 I P C T — (51) (21) (22) (25) Filing Language: (26) (30) (71) (72) International Patent Classification: Berlin (DE). RUTHER, Robert; c/o Atotech Deutsch- C25D 5/18 (2006.01) H01R 13/03 (2006.01) land GmbH, Patent Management, ErasmusstraBe 20, C25D 5/14 (2006.01) C25D 5/12 (2006.01) 10553 Berlin (DE). BARTHELMES, Jurgen; c/o Atotech C23C 18/16 (2006.01) Deutschland GmbH, Patent Management, ErasmusstraBe International Application Number: 20, 10553 Berlin (DE). KURTZ, Olaf; c/o Atotech PCT/EP2017/077156 Deutschland GmbH, Patent Management, ErasmusstraBe 20, 10553 Berlin (DE). International Filing Date: (74) Agent: SCHULZ, Hendrik; c/o Atotech Deutschland 24 October 2017 (24.10.2017) GmbH, Patent Management, ErasmusstraBe 20, 10553 English Berlin (DE). Publication Language: English (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, Priority Data: AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, 16195351.8 24 October 2016 (24.10.2016) EP CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, Applicant: ATOTECH DEUTSCHLAND GMBH DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, [DE/DE]; ErasmusstraBe 20, 10553 Berlin (DE). HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, Inventors: NEOH, Din-Ghee; c/o Atotech Deutschland MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, GmbH, Patent Management, ErasmusstraBe 20, 10553 OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, Berlin (DE). TAN, Chee-Chow; c/o Atotech Deutsch-SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, land GmbH, Patent Management, ErasmusstraBe 20, 10553 TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. Berlin (DE). LIM, Jen Joo; c/o Atotech Deutschland GmbH, Patent Management, ErasmusstraBe 20, 10553 —TR, = = Title: A METHOD : To achieve is devised, on at least depositing said tin layer comprising using a pulse plating method. PRISING A NICKEL/PHOSPHOROUS ALLOY UNDERLAYER AND SAID TIN LAYER WITH SAID METHOD ce) _ = ---.. substrate GC underlayer OF DEPOSITING A TIN LAYER ON A METAL SUBSTRATE AND A USE OF A Figure 4 STRUCTURE COM- a tin layer on a metal alloy alloy underlayer = (54) = = — 3 E ...c 46 25 C lu 20 tIO E- 15 ,.. n -1. i .....0 J c c co -' a) 30 . Example _ = = — 5 8 = = = _ 9 = - = 1-1 ii- IN cc IN IN (57) 0 1-1 © by N 6 7A 7B tin deposits being largely free of pressure induced whiskers, a method of depositing wherein said method comprises: (a) providing said metal substrate; (b) depositing a nickel/phosphorous one surface of said metal substrate; and (c) depositing said tin layer on said nickel/phosphorous C [Continued on next page] WO 2018/077874 Al MIDEDIMOMOIDEIREIDIONOMMOHOHNEVOIS (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3))
SG11201902595UA 2016-10-24 2017-10-24 A method of depositing a tin layer on a metal substrate and a use of a structure comprising a nickel/phosphorous alloy underlayer and said tin layer with said method SG11201902595UA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP16195351 2016-10-24
PCT/EP2017/077156 WO2018077874A1 (en) 2016-10-24 2017-10-24 A method of depositing a tin layer on a metal substrate and a use of a structure comprising a nickel/phosphorous alloy underlayer and said tin layer with said method

Publications (1)

Publication Number Publication Date
SG11201902595UA true SG11201902595UA (en) 2019-05-30

Family

ID=57211308

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201902595UA SG11201902595UA (en) 2016-10-24 2017-10-24 A method of depositing a tin layer on a metal substrate and a use of a structure comprising a nickel/phosphorous alloy underlayer and said tin layer with said method

Country Status (8)

Country Link
US (1) US20190271093A1 (en)
EP (1) EP3529398B1 (en)
JP (1) JP6990240B2 (en)
KR (1) KR102404045B1 (en)
CN (1) CN109844182A (en)
MY (1) MY192687A (en)
SG (1) SG11201902595UA (en)
WO (1) WO2018077874A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7121881B2 (en) * 2017-08-08 2022-08-19 三菱マテリアル株式会社 Terminal material with silver film and terminal with silver film
EP3931373A1 (en) * 2019-02-25 2022-01-05 Tata Steel IJmuiden B.V. Method for electrolytically depositing a chromium oxide layer
US11306409B2 (en) 2019-05-23 2022-04-19 Ag-Nano System Llc Method to enable electroplating of golden silver nanoparticles
JP2023075905A (en) * 2021-11-19 2023-05-31 千住金属工業株式会社 Metallic body, formation method of metallic body, and mating type connection terminal comprising metallic body

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JPS58221291A (en) * 1982-06-16 1983-12-22 Furukawa Electric Co Ltd:The Silver coated copper material for electrical connection
JPH0790675A (en) * 1993-09-21 1995-04-04 Murata Mfg Co Ltd Production of electronic parts
US5750017A (en) * 1996-08-21 1998-05-12 Lucent Technologies Inc. Tin electroplating process
US6361823B1 (en) 1999-12-03 2002-03-26 Atotech Deutschland Gmbh Process for whisker-free aqueous electroless tin plating
CN1407141A (en) * 2001-03-16 2003-04-02 希普雷公司 Tinplating
US20020185716A1 (en) 2001-05-11 2002-12-12 Abys Joseph Anthony Metal article coated with multilayer finish inhibiting whisker growth
DE10132478C1 (en) * 2001-07-03 2003-04-30 Atotech Deutschland Gmbh Process for depositing a metal layer and process for regenerating a solution containing metal ions in a high oxidation state
JP2005109373A (en) * 2003-10-02 2005-04-21 Fuji Electric Device Technology Co Ltd Semiconductor device
JP4894304B2 (en) 2005-03-28 2012-03-14 ソニー株式会社 Lead-free Sn base plating film and contact structure of connecting parts
WO2007002424A1 (en) 2005-06-24 2007-01-04 Technic, Inc. Silver barrier layer to minimize whisker growth in tin electrodeposits
JP2007284762A (en) 2006-04-18 2007-11-01 Sumitomo Metal Mining Co Ltd Method for forming tin-plated film, and semiconductor device
JP4847898B2 (en) * 2007-03-07 2011-12-28 日立電線株式会社 Wiring conductor and method for manufacturing the same
ES2574561T3 (en) 2007-07-10 2016-06-20 Atotech Deutschland Gmbh Solution and process to increase the weldability and corrosion resistance of the surface of a metal or metal alloy
JP5086485B1 (en) 2011-09-20 2012-11-28 Jx日鉱日石金属株式会社 Metal material for electronic parts and method for producing the same

Also Published As

Publication number Publication date
KR20190070958A (en) 2019-06-21
US20190271093A1 (en) 2019-09-05
EP3529398A1 (en) 2019-08-28
KR102404045B1 (en) 2022-05-30
CN109844182A (en) 2019-06-04
JP2019533088A (en) 2019-11-14
MY192687A (en) 2022-09-01
WO2018077874A1 (en) 2018-05-03
JP6990240B2 (en) 2022-01-12
EP3529398B1 (en) 2022-10-19

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