SG11201804105RA - Silicon optical circuit - Google Patents
Silicon optical circuitInfo
- Publication number
- SG11201804105RA SG11201804105RA SG11201804105RA SG11201804105RA SG11201804105RA SG 11201804105R A SG11201804105R A SG 11201804105RA SG 11201804105R A SG11201804105R A SG 11201804105RA SG 11201804105R A SG11201804105R A SG 11201804105RA SG 11201804105R A SG11201804105R A SG 11201804105RA
- Authority
- SG
- Singapore
- Prior art keywords
- detection
- optical
- optical circuit
- flaw
- optical waveguide
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title abstract 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title abstract 3
- 229910052710 silicon Inorganic materials 0.000 title abstract 3
- 239000010703 silicon Substances 0.000 title abstract 3
- 238000001514 detection method Methods 0.000 abstract 6
- 230000002950 deficient Effects 0.000 abstract 2
- 238000011143 downstream manufacturing Methods 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 238000011179 visual inspection Methods 0.000 abstract 2
- 230000005540 biological transmission Effects 0.000 abstract 1
- 238000007796 conventional method Methods 0.000 abstract 1
- 230000001939 inductive effect Effects 0.000 abstract 1
- 238000007689 inspection Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000005259 measurement Methods 0.000 abstract 1
- 230000001953 sensory effect Effects 0.000 abstract 1
- 230000000007 visual effect Effects 0.000 abstract 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
- G01M11/33—Testing of optical devices, constituted by fibre optics or optical waveguides with a light emitter being disposed at one fibre or waveguide end-face, and a light receiver at the other end-face
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/08—Testing mechanical properties
- G01M11/083—Testing mechanical properties by using an optical fiber in contact with the device under test [DUT]
- G01M11/085—Testing mechanical properties by using an optical fiber in contact with the device under test [DUT] the optical fiber being on or near the surface of the DUT
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/08—Testing mechanical properties
- G01M11/083—Testing mechanical properties by using an optical fiber in contact with the device under test [DUT]
- G01M11/086—Details about the embedment of the optical fiber within the DUT
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/34—Optical coupling means utilising prism or grating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12061—Silicon
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12085—Integrated
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12107—Grating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12138—Sensor
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12147—Coupler
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12164—Multiplexing; Demultiplexing
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Power Engineering (AREA)
- Optical Integrated Circuits (AREA)
Abstract
SILICON OPTICAL CIRCUIT The visual detection of a silicon optical circuit in a conventional technique depends on sensory decision by a human who visually conducts checking, and there has been limitation in completely detecting small flaws. A defective chip having a flaw which was overlooked in visual inspection is judged as a good product by mistake and is flowed out to the downstream processes after the visual inspection. The defective chip cannot be judged as a failure in an early stage of the process of the whole optical circuits, thereby reducing a yield at the downstream manufacturing and inspection processes and inducing increase in cost for manufacturing and inspecting products. The optical circuit of the present invention includes, in addition to an optical circuit that implements desired functions, an optical waveguide for flaw detection which surrounds the entire optical circuit and which is sufficiently proximate to the optical waveguide of the optical circuit and grating couplers connected to the optical waveguide for detection. Based on the transmission characteristic measurement of the optical waveguide for detection using the grating couplers, a flaw within each chip can be efficiently discovered in the state of a wafer before being cut into chips. A flaw can also be discovered hierarchically by providing individual optical waveguides for detection for respective chips and by further forming one common optical waveguide for detection over the plurality of chips. (Figure 1)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015226811 | 2015-11-19 | ||
| PCT/JP2016/004913 WO2017085934A1 (en) | 2015-11-19 | 2016-11-17 | Silicon optical circuit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11201804105RA true SG11201804105RA (en) | 2018-06-28 |
Family
ID=58719217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201804105RA SG11201804105RA (en) | 2015-11-19 | 2016-11-17 | Silicon optical circuit |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US10190941B2 (en) |
| EP (1) | EP3379306B1 (en) |
| JP (1) | JP6484350B2 (en) |
| CN (1) | CN108351469B (en) |
| CA (1) | CA3005704C (en) |
| SG (1) | SG11201804105RA (en) |
| WO (1) | WO2017085934A1 (en) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6796048B2 (en) * | 2017-09-25 | 2020-12-02 | 日本電信電話株式会社 | Si photonics optical circuit and its manufacturing method |
| JP6915508B2 (en) * | 2017-11-24 | 2021-08-04 | 日本電信電話株式会社 | Optical circuit inspection method |
| JP7192255B2 (en) * | 2018-05-31 | 2022-12-20 | 富士通オプティカルコンポーネンツ株式会社 | Optical device, optical module using same, and test method for optical device |
| JP7107094B2 (en) * | 2018-08-23 | 2022-07-27 | 富士通オプティカルコンポーネンツ株式会社 | Optical device and optical transceiver module |
| JP2020046542A (en) * | 2018-09-19 | 2020-03-26 | 日本電信電話株式会社 | Optical circuit and optical connection structure |
| CN113810118B (en) * | 2019-04-08 | 2023-06-20 | Nano科技(北京)有限公司 | Single body integrated coherent transceiver |
| US20220326113A1 (en) * | 2019-06-07 | 2022-10-13 | Nippon Telegraph And Telephone Corporation | Probe for Optical Circuit Inspection |
| WO2020255191A1 (en) * | 2019-06-17 | 2020-12-24 | 日本電信電話株式会社 | Optical circuit wafer |
| US10955614B1 (en) * | 2020-01-14 | 2021-03-23 | Globalfoundries U.S. Inc. | Optical fiber coupler structure having manufacturing variation-sensitive transmission blocking region |
| EP3851886A1 (en) * | 2020-01-16 | 2021-07-21 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO | A photonic integrated device for converting a light signal into sound |
| US11490177B1 (en) | 2020-06-05 | 2022-11-01 | Luminous Computing, Inc. | Optical link system and method for computation |
| US11428646B2 (en) | 2020-08-28 | 2022-08-30 | Openlight Photonics, Inc. | Loss monitoring in photonic circuit fabrication |
| CN112198589B (en) * | 2020-10-23 | 2023-05-05 | 武汉光谷信息光电子创新中心有限公司 | Test structure, wafer and manufacturing process control and monitoring method of wafer |
| WO2022177854A1 (en) * | 2021-02-22 | 2022-08-25 | Luminous Computing, Inc. | Photonic integrated circuit system and method of fabrication |
| WO2023218533A1 (en) * | 2022-05-10 | 2023-11-16 | 日本電信電話株式会社 | Optical circuit |
| WO2024029011A1 (en) * | 2022-08-03 | 2024-02-08 | 日本電信電話株式会社 | Optical modulator |
| US11788929B1 (en) * | 2022-09-29 | 2023-10-17 | Aeva, Inc. | Techniques for wafer level die testing using sacrificial structures |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3423096B2 (en) * | 1995-02-02 | 2003-07-07 | 住友大阪セメント株式会社 | Optical waveguide material for inspection test and inspection test method |
| JPH10227934A (en) | 1997-02-14 | 1998-08-25 | Nippon Telegr & Teleph Corp <Ntt> | Optical circuit component and its manufacture, and optical circuit aligning device |
| KR100451635B1 (en) * | 2002-12-10 | 2004-10-08 | 삼성전기주식회사 | Fiber blocks and pipe blocks, and methods for connecting optical signals of multi-layer PCB by using them |
| US7024066B1 (en) * | 2003-04-07 | 2006-04-04 | Luxtera, Inc. | Littrow gratings as alignment structures for the wafer level testing of optical and optoelectronic chips |
| JP4976113B2 (en) * | 2006-11-29 | 2012-07-18 | 三井化学株式会社 | Optical waveguide inspection method and inspection apparatus |
| JP2010151973A (en) * | 2008-12-24 | 2010-07-08 | Fujitsu Ltd | Optical semiconductor device, manufacturing method thereof, and optical transmission device |
| JP2011107384A (en) | 2009-11-17 | 2011-06-02 | Nec Corp | Method for manufacturing optical coupling device |
| WO2014034458A1 (en) * | 2012-08-31 | 2014-03-06 | 日本電気株式会社 | Structure for connecting optical module and optical connector |
| WO2014034655A1 (en) | 2012-08-31 | 2014-03-06 | 日本電気株式会社 | Optical probe, inspection device, and inspection method |
| US9234854B2 (en) * | 2013-03-15 | 2016-01-12 | International Business Machines Corporation | Single fiber noncritical-alignment wafer-scale optical testing |
| US9405065B2 (en) * | 2013-10-03 | 2016-08-02 | Stmicroelectronics, Inc. | Hybrid photonic and electronic integrated circuits |
| SG11201607289SA (en) * | 2014-03-05 | 2016-10-28 | Nippon Telegraph & Telephone | Polarization rotation circuit |
| US20160282698A1 (en) * | 2015-03-26 | 2016-09-29 | Intel Corporation | High index contrast waveguide devices and systems |
| US9933577B2 (en) * | 2016-03-11 | 2018-04-03 | Globalfoundries Inc. | Photonics chip |
| JP2018005067A (en) * | 2016-07-06 | 2018-01-11 | 日本電気株式会社 | Optical measurement element for alignment and method for aligning photoprobe using optical measurement element |
| US9715064B1 (en) * | 2016-09-13 | 2017-07-25 | Globalfoundries Inc. | Multi-chip modules with vertically aligned grating couplers for transmission of light signals between optical waveguides |
-
2016
- 2016-11-17 CN CN201680067066.XA patent/CN108351469B/en active Active
- 2016-11-17 JP JP2017551537A patent/JP6484350B2/en active Active
- 2016-11-17 CA CA3005704A patent/CA3005704C/en active Active
- 2016-11-17 US US15/776,027 patent/US10190941B2/en active Active
- 2016-11-17 WO PCT/JP2016/004913 patent/WO2017085934A1/en active Application Filing
- 2016-11-17 EP EP16865938.1A patent/EP3379306B1/en active Active
- 2016-11-17 SG SG11201804105RA patent/SG11201804105RA/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| CN108351469A (en) | 2018-07-31 |
| US10190941B2 (en) | 2019-01-29 |
| JPWO2017085934A1 (en) | 2018-03-22 |
| EP3379306A4 (en) | 2019-07-10 |
| US20180335365A1 (en) | 2018-11-22 |
| WO2017085934A1 (en) | 2017-05-26 |
| CA3005704A1 (en) | 2017-05-26 |
| EP3379306A1 (en) | 2018-09-26 |
| CN108351469B (en) | 2020-09-08 |
| EP3379306B1 (en) | 2021-01-06 |
| JP6484350B2 (en) | 2019-03-13 |
| CA3005704C (en) | 2020-12-01 |
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