SG11201706884WA - Pressure control device - Google Patents

Pressure control device

Info

Publication number
SG11201706884WA
SG11201706884WA SG11201706884WA SG11201706884WA SG11201706884WA SG 11201706884W A SG11201706884W A SG 11201706884WA SG 11201706884W A SG11201706884W A SG 11201706884WA SG 11201706884W A SG11201706884W A SG 11201706884WA SG 11201706884W A SG11201706884W A SG 11201706884WA
Authority
SG
Singapore
Prior art keywords
control device
pressure control
pressure
control
Prior art date
Application number
SG11201706884WA
Other languages
English (en)
Inventor
Takahiro Nozawa
Takeshi Nakamura
Original Assignee
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk filed Critical Fujikin Kk
Publication of SG11201706884WA publication Critical patent/SG11201706884WA/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B1/00—Comparing elements, i.e. elements for effecting comparison directly or indirectly between a desired value and existing or anticipated values
    • G05B1/01—Comparing elements, i.e. elements for effecting comparison directly or indirectly between a desired value and existing or anticipated values electric
    • G05B1/03—Comparing elements, i.e. elements for effecting comparison directly or indirectly between a desired value and existing or anticipated values electric for comparing digital signals
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00—Automatic controllers
    • G05B11/01—Automatic controllers electric
    • G05B11/011—Automatic controllers electric details of the correcting means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00—Automatic controllers
    • G05B11/01—Automatic controllers electric
    • G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Control Of Fluid Pressure (AREA)
  • Flow Control (AREA)
SG11201706884WA 2015-02-26 2016-01-06 Pressure control device SG11201706884WA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015036113A JP6475516B2 (ja) 2015-02-26 2015-02-26 圧力制御装置
PCT/JP2016/050253 WO2016136282A1 (ja) 2015-02-26 2016-01-06 圧力制御装置

Publications (1)

Publication Number Publication Date
SG11201706884WA true SG11201706884WA (en) 2017-10-30

Family

ID=56788273

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201706884WA SG11201706884WA (en) 2015-02-26 2016-01-06 Pressure control device

Country Status (8)

Country Link
US (1) US10520958B2 (ja)
JP (1) JP6475516B2 (ja)
KR (1) KR101966720B1 (ja)
CN (1) CN107003684B (ja)
IL (1) IL254072B (ja)
SG (1) SG11201706884WA (ja)
TW (1) TWI575347B (ja)
WO (1) WO2016136282A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6475516B2 (ja) 2015-02-26 2019-02-27 株式会社フジキン 圧力制御装置
JP6706121B2 (ja) * 2016-03-30 2020-06-03 株式会社フジキン 圧力制御装置および圧力制御システム
CN107422754B (zh) * 2017-09-01 2023-11-14 中国人民解放军军事科学院军事医学研究院 一种微量气体流速控制装置及控制方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3812456A (en) * 1956-04-20 1974-05-21 Us Navy A hydro-acoustic filter
CH638869A5 (de) * 1979-03-14 1983-10-14 Bbc Brown Boveri & Cie Verfahren zur foerderung und steuerung des bypassluftstromes bei aufgeladenen verbrennungskraftmaschinen und verbrennungskraftmaschine zur ausfuehrung des verfahrens.
JPS6165127A (ja) * 1984-09-07 1986-04-03 Hitachi Ltd 圧力信号の処理装置
JPH03291706A (ja) * 1990-04-09 1991-12-20 Seiko Instr Inc ワイドレンジ圧力制御システム
JP3291706B2 (ja) * 1996-02-09 2002-06-10 川崎マイクロエレクトロニクス株式会社 論理回路の高速動作検証方法、及び、論理回路
JP3586075B2 (ja) * 1997-08-15 2004-11-10 忠弘 大見 圧力式流量制御装置
WO2000077376A1 (fr) * 1997-12-17 2000-12-21 Hitachi, Ltd. Dispositif de mesure de debit d'air faisant partie integrante d'un corps a etranglement a commande electronique
JP4298025B2 (ja) * 1998-03-25 2009-07-15 シーケーディ株式会社 真空圧力制御システム
US7010136B1 (en) * 1999-02-17 2006-03-07 Micro Ear Technology, Inc. Resonant response matching circuit for hearing aid
WO2004109420A1 (ja) * 2003-06-09 2004-12-16 Ckd Corporation 相対的圧力制御システム及び相対的流量制御システム
JP3863505B2 (ja) * 2003-06-20 2006-12-27 忠弘 大見 圧力センサ及び圧力制御装置並びに圧力式流量制御装置の自動零点補正装置
DE10333204A1 (de) * 2003-07-22 2005-02-24 Conti Temic Microelectronic Gmbh Verfahren und Vorrichtung zur Druckmessung
JP4399227B2 (ja) * 2003-10-06 2010-01-13 株式会社フジキン チャンバの内圧制御装置及び内圧被制御式チャンバ
US7155319B2 (en) * 2005-02-23 2006-12-26 Applied Materials, Inc. Closed loop control on liquid delivery system ECP slim cell
JP4142704B2 (ja) * 2006-08-17 2008-09-03 レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード スタナン気体供給システム
CN201199236Y (zh) * 2008-04-30 2009-02-25 刘庆杰 轻烃燃气在线热值分析装置
US8477957B2 (en) * 2009-04-15 2013-07-02 Nokia Corporation Apparatus, method and computer program
CN102072795B (zh) * 2009-11-20 2013-07-31 昆山双桥传感器测控技术有限公司 压阻式高频高温动态压力传感器
KR20120093788A (ko) * 2011-02-15 2012-08-23 가부시키가이샤 호리바 에스텍 유체제어장치 및 압력제어장치
JP6061696B2 (ja) * 2013-01-23 2017-01-18 西部電機株式会社 バルブアクチュエータ及びバルブ装置並びにバルブアクチュエータの制御方法
CN103277876B (zh) * 2013-06-24 2016-03-23 苏州翔箭智能科技有限公司 空调***中的电子膨胀阀的控制方法
JP6475516B2 (ja) 2015-02-26 2019-02-27 株式会社フジキン 圧力制御装置

Also Published As

Publication number Publication date
US10520958B2 (en) 2019-12-31
JP2016157362A (ja) 2016-09-01
CN107003684A (zh) 2017-08-01
US20170351274A1 (en) 2017-12-07
KR20170113632A (ko) 2017-10-12
CN107003684B (zh) 2020-08-14
IL254072B (en) 2021-06-30
JP6475516B2 (ja) 2019-02-27
WO2016136282A1 (ja) 2016-09-01
KR101966720B1 (ko) 2019-08-27
TWI575347B (zh) 2017-03-21
TW201642064A (zh) 2016-12-01
IL254072A0 (en) 2017-10-31

Similar Documents

Publication Publication Date Title
ZA201705922B (en) Reduced pressure apparatuses
HK1214710A1 (zh) 自動配對控制裝置
GB2542527B (en) Fluid control device
GB2546363B (en) Valve device
GB201805686D0 (en) Operation control device
GB202012507D0 (en) Fluid control device
GB2537789B (en) Fluid control device
PL3368143T3 (pl) Urządzenie sterujące przepływem
PL3280939T3 (pl) Urządzenie do sterowania przepływem
GB201516978D0 (en) Device control
ZA201804881B (en) Fluid control
IL254072B (en) Pressure control device
PL3390871T3 (pl) Urządzenie zaworowe
PL3129269T3 (pl) Urządzenie sterujące
GB2562400B (en) Pressure control device
PL3467863T3 (pl) Urządzenie sterujące
PL3250476T3 (pl) System regulacji ciśnienia
PL3250475T3 (pl) Układ regulacji ciśnienia
ZA201501104B (en) Pressure reduction device
GB201612008D0 (en) Control device
GB201613965D0 (en) Improved control device
GB2532098B (en) Pump Control Device
GB201401505D0 (en) Pressure control system
GB2548051B (en) Improved pressure control device
RS62069B1 (sr) Ventilski uređaj