SG11201602623WA - Ceiling transport vehicle - Google Patents

Ceiling transport vehicle

Info

Publication number
SG11201602623WA
SG11201602623WA SG11201602623WA SG11201602623WA SG11201602623WA SG 11201602623W A SG11201602623W A SG 11201602623WA SG 11201602623W A SG11201602623W A SG 11201602623WA SG 11201602623W A SG11201602623W A SG 11201602623WA SG 11201602623W A SG11201602623W A SG 11201602623WA
Authority
SG
Singapore
Prior art keywords
transport vehicle
ceiling transport
ceiling
vehicle
transport
Prior art date
Application number
SG11201602623WA
Other languages
English (en)
Inventor
Daichi TOMIDA
Original Assignee
Daifuku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Kk filed Critical Daifuku Kk
Publication of SG11201602623WA publication Critical patent/SG11201602623WA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B13/00—Other railway systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B3/00—Elevated railway systems with suspended vehicles
    • B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C13/00—Other constructional features or details
    • B66C13/04—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack
    • B66C13/08—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack for depositing loads in desired attitudes or positions
    • B66C13/085—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack for depositing loads in desired attitudes or positions electrical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C13/00—Other constructional features or details
    • B66C13/18—Control systems or devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C15/00—Safety gear
    • B66C15/04—Safety gear for preventing collisions, e.g. between cranes or trolleys operating on the same track
    • B66C15/045—Safety gear for preventing collisions, e.g. between cranes or trolleys operating on the same track electrical
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0235—Containers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mechanical Engineering (AREA)
  • Transportation (AREA)
  • Automation & Control Theory (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
  • Control And Safety Of Cranes (AREA)
  • Control Of Conveyors (AREA)
SG11201602623WA 2013-10-10 2014-10-06 Ceiling transport vehicle SG11201602623WA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013213059A JP6007880B2 (ja) 2013-10-10 2013-10-10 天井搬送車
PCT/JP2014/076679 WO2015053214A1 (ja) 2013-10-10 2014-10-06 天井搬送車（ｃｅｉｌｉｎｇ ｔｒａｎｓｐｏｒｔ ｖｅｈｉｃｌｅ）

Publications (1)

Publication Number Publication Date
SG11201602623WA true SG11201602623WA (en) 2016-05-30

Family

ID=52813030

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201602623WA SG11201602623WA (en) 2013-10-10 2014-10-06 Ceiling transport vehicle

Country Status (7)

Country Link
US (1) US10083847B2 (ja)
JP (1) JP6007880B2 (ja)
KR (1) KR102214427B1 (ja)
CN (1) CN105593142B (ja)
SG (1) SG11201602623WA (ja)
TW (1) TWI630165B (ja)
WO (1) WO2015053214A1 (ja)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10186442B2 (en) * 2014-06-19 2019-01-22 Murata Machinery, Ltd Carrier buffering device and storage method
JP6358142B2 (ja) * 2015-03-26 2018-07-18 株式会社ダイフク 物品搬送設備
JP6330714B2 (ja) * 2015-04-09 2018-05-30 株式会社ダイフク 物品搬送設備及び物品搬送設備の保守作業方法
JP6304122B2 (ja) * 2015-05-13 2018-04-04 株式会社ダイフク 物品搬送設備
EP3359480B1 (en) * 2015-10-08 2023-07-12 Verton IP Pty Ltd Materials management systems and methods
SG11201810030TA (en) * 2016-05-20 2018-12-28 Murata Machinery Ltd Transport vehicle and transport method
JP6773123B2 (ja) * 2016-10-18 2020-10-21 村田機械株式会社 搬送システム
JP6589820B2 (ja) * 2016-10-31 2019-10-16 株式会社ダイフク 通行規制装置
JP6743750B2 (ja) * 2017-04-14 2020-08-19 株式会社ダイフク 物品搬送設備
WO2018220227A1 (de) * 2017-06-02 2018-12-06 Dücker Group GmbH Palettenroboter mit schwenkhubantrieb
EP3630669A1 (de) * 2017-06-02 2020-04-08 Dücker Group GmbH Palettenroboter mit greifwerkzeug
US10622236B2 (en) 2017-08-30 2020-04-14 Taiwan Semiconductor Manufacturing Co., Ltd. Apparatus and method for handling wafer carrier doors
US11945697B2 (en) 2018-02-08 2024-04-02 Vita Inclinata Ip Holdings Llc Multiple remote control for suspended load control equipment apparatus, system, and method
US10629492B2 (en) 2018-04-27 2020-04-21 Taiwan Semiconductor Manufacturing Co., Ltd. Gate structure having a dielectric gate and methods thereof
JP7149119B2 (ja) * 2018-07-03 2022-10-06 日本電産サンキョー株式会社 産業用ロボット
JP7162977B2 (ja) * 2018-07-25 2022-10-31 株式会社ディスコ カセットホルダ
SG11202104305YA (en) * 2018-10-29 2021-05-28 Murata Machinery Ltd Ceiling conveyance vehicle and ceiling conveyance vehicle system
US20220059380A1 (en) * 2018-12-14 2022-02-24 Murata Machinery, Ltd. Conveyance vehicle
JP7063277B2 (ja) * 2019-01-10 2022-05-09 株式会社ダイフク 天井搬送車
US11618566B1 (en) 2019-04-12 2023-04-04 Vita Inclinata Technologies, Inc. State information and telemetry for suspended load control equipment apparatus, system, and method
US11834305B1 (en) 2019-04-12 2023-12-05 Vita Inclinata Ip Holdings Llc Apparatus, system, and method to control torque or lateral thrust applied to a load suspended on a suspension cable
EP3733586A1 (de) * 2019-04-30 2020-11-04 Siemens Aktiengesellschaft Verfahren zur kollisionsfreien bewegung einer last mit einem kran
US11862494B2 (en) * 2020-07-09 2024-01-02 Changxin Memory Technologies, Inc. Crane monitoring system and method
US11992444B1 (en) 2023-12-04 2024-05-28 Vita Inclinata Ip Holdings Llc Apparatus, system, and method to control torque or lateral thrust applied to a load suspended on a suspension cable

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3375907B2 (ja) * 1998-12-02 2003-02-10 神鋼電機株式会社 天井走行搬送装置
JP3371897B2 (ja) * 1998-12-02 2003-01-27 神鋼電機株式会社 天井走行搬送装置
JP4465415B2 (ja) * 2000-03-15 2010-05-19 ムラテックオートメーション株式会社 天井走行搬送装置
US6779760B2 (en) * 2002-12-19 2004-08-24 Taiwan Semiconductor Manufacturing Co., Ltd Safety system for overhead transport vehicle
JP4224784B2 (ja) * 2003-07-18 2009-02-18 株式会社ダイフク 把持部昇降式搬送装置
US20050079041A1 (en) * 2003-10-13 2005-04-14 International Business Machines Corporation Hoisting device for use with overhead traveling carriage system
JP2008137738A (ja) * 2006-11-30 2008-06-19 Asyst Technologies Japan Inc 天井走行搬送装置
JP2008265529A (ja) * 2007-04-20 2008-11-06 Asyst Technologies Japan Inc 搬送装置
JP5388045B2 (ja) * 2007-07-24 2014-01-15 北陽電機株式会社 搬送台車及び光測距装置
JP5266683B2 (ja) * 2007-08-03 2013-08-21 村田機械株式会社 搬送システム、及び該搬送システムにおける教示方法
JP2009208888A (ja) * 2008-03-04 2009-09-17 Asyst Technologies Japan Inc 搬送車
KR101305265B1 (ko) * 2008-07-23 2013-09-06 가부시키가이샤 다이후쿠 물품 반송 설비에 있어서의 학습 장치 및 학습 방법
JP4807424B2 (ja) * 2009-03-17 2011-11-02 村田機械株式会社 天井搬送システムと物品の移載方法
JP5429570B2 (ja) * 2010-03-08 2014-02-26 株式会社ダイフク 物品搬送設備
JP5821171B2 (ja) * 2010-09-07 2015-11-24 村田機械株式会社 搬送システム

Also Published As

Publication number Publication date
CN105593142B (zh) 2018-01-30
WO2015053214A1 (ja) 2015-04-16
KR20160067850A (ko) 2016-06-14
KR102214427B1 (ko) 2021-02-08
TWI630165B (zh) 2018-07-21
JP6007880B2 (ja) 2016-10-12
JP2015074547A (ja) 2015-04-20
US10083847B2 (en) 2018-09-25
CN105593142A (zh) 2016-05-18
US20160240417A1 (en) 2016-08-18
TW201529463A (zh) 2015-08-01

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