SG11201602206PA - Composite ceramic abrasive polishing solution - Google Patents

Composite ceramic abrasive polishing solution

Info

Publication number
SG11201602206PA
SG11201602206PA SG11201602206PA SG11201602206PA SG11201602206PA SG 11201602206P A SG11201602206P A SG 11201602206PA SG 11201602206P A SG11201602206P A SG 11201602206PA SG 11201602206P A SG11201602206P A SG 11201602206PA SG 11201602206P A SG11201602206P A SG 11201602206PA
Authority
SG
Singapore
Prior art keywords
composite ceramic
polishing solution
abrasive polishing
ceramic abrasive
composite
Prior art date
Application number
SG11201602206PA
Inventor
Paul S Lugg
Duy K Lehuu
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of SG11201602206PA publication Critical patent/SG11201602206PA/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/11Lapping tools
    • B24B37/20Lapping pads for working plane surfaces
    • B24B37/24Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
    • B24B37/044Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/11Lapping tools
    • B24B37/20Lapping pads for working plane surfaces
    • B24B37/26Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/06Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
    • B24D3/10Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements for porous or cellular structure, e.g. for use with diamonds as abrasives
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/14Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings
    • B24D3/18Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings for porous or cellular structure
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09GPOLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00Polishing compositions
    • C09G1/02Polishing compositions containing abrasives or grinding agents
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00Materials not provided for elsewhere
    • C09K3/14Anti-slip materials; Abrasives
    • C09K3/1454Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463Aqueous liquid suspensions

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
SG11201602206PA 2013-09-25 2014-09-22 Composite ceramic abrasive polishing solution SG11201602206PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201361882369P 2013-09-25 2013-09-25
PCT/US2014/056750 WO2015047939A1 (en) 2013-09-25 2014-09-22 Composite ceramic abrasive polishing solution

Publications (1)

Publication Number Publication Date
SG11201602206PA true SG11201602206PA (en) 2016-04-28

Family

ID=52744375

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201602206PA SG11201602206PA (en) 2013-09-25 2014-09-22 Composite ceramic abrasive polishing solution

Country Status (8)

Country Link
US (1) US10293458B2 (en)
EP (1) EP3049215B1 (en)
JP (1) JP2016537439A (en)
KR (1) KR102289629B1 (en)
CN (1) CN105517758B (en)
SG (1) SG11201602206PA (en)
TW (1) TWI669382B (en)
WO (1) WO2015047939A1 (en)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6703939B2 (en) 2013-09-25 2020-06-03 スリーエム イノベイティブ プロパティズ カンパニー Polishing system
US9978609B2 (en) * 2015-04-27 2018-05-22 Versum Materials Us, Llc Low dishing copper chemical mechanical planarization
WO2016183126A1 (en) 2015-05-13 2016-11-17 3M Innovative Properties Company Polishing pads and systems for and methods of using same
JP6669331B2 (en) * 2015-05-19 2020-03-18 昭和電工株式会社 Polishing composition and polishing method using the polishing composition
US20210189175A1 (en) * 2016-02-16 2021-06-24 3M Innovative Properties Company Polishing systems and method of making and using same
ES2604830B1 (en) 2016-04-28 2017-12-18 Drylyte, S.L. Process for smoothing and polishing metals by ionic transport by means of free solid bodies, and solid bodies to carry out said process.
US10195713B2 (en) 2016-08-11 2019-02-05 3M Innovative Properties Company Lapping pads and systems and methods of making and using the same
CA3134368A1 (en) 2016-12-23 2018-06-28 Saint-Gobain Abrasives, Inc. Coated abrasives having a performance enhancing composition
JP7197366B2 (en) * 2016-12-26 2022-12-27 株式会社フジミインコーポレーテッド Polishing composition and polishing method
WO2019043819A1 (en) * 2017-08-30 2019-03-07 日立化成株式会社 Slurry and polishing method
JP7187770B2 (en) * 2017-11-08 2022-12-13 Agc株式会社 Polishing agent, polishing method, and polishing additive
CN109868447B (en) 2017-12-01 2022-03-25 通用电气公司 Method for reducing surface roughness
EP3768795A1 (en) 2018-03-21 2021-01-27 3M Innovative Properties Company Structured abrasives containing polishing materials for use in the home
CN110499102A (en) * 2018-05-20 2019-11-26 深圳市得益达电子科技有限公司 A kind of cerium oxide liquid suspension polishing liquid for glass polishing
EP3578998A1 (en) 2018-06-08 2019-12-11 3M Innovative Properties Company Impedance assembly
CN110772911B (en) * 2018-07-30 2021-11-09 天津大学 Microwave reaction device and reaction system for removing bioaerosol and application thereof
US20210060724A1 (en) * 2019-08-30 2021-03-04 Sunnen Products Co. Lapping Tool
CN111558855A (en) * 2020-06-01 2020-08-21 宏明金属科技(无锡)有限公司 Process method for polishing high-precision mechanical matching parts
CN111607330A (en) * 2020-06-03 2020-09-01 大连理工大学 Shear thickening polishing solution
CN115247026A (en) * 2021-04-26 2022-10-28 福建晶安光电有限公司 Sapphire polishing solution and preparation method thereof
CN113999653B (en) * 2021-10-28 2022-05-24 华南理工大学 Silicon single crystal grinding agent and preparation method and application thereof
CN116000782B (en) * 2022-12-27 2023-09-19 昂士特科技(深圳)有限公司 Chemical mechanical polishing composition for metal alloy CMP

Family Cites Families (72)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2010120A (en) * 1934-04-27 1935-08-06 Int Harvester Co Harvester thresher
US3036003A (en) 1957-08-07 1962-05-22 Sinclair Research Inc Lubricating oil composition
US3236770A (en) 1960-09-28 1966-02-22 Sinclair Research Inc Transaxle lubricant
NL296139A (en) 1963-08-02
NL145565B (en) 1965-01-28 1975-04-15 Shell Int Research PROCESS FOR PREPARING A LUBRICANT COMPOSITION.
US3414347A (en) 1965-03-30 1968-12-03 Edroy Products Company Inc Binocular with pivoted lens plate
US3574576A (en) 1965-08-23 1971-04-13 Chevron Res Distillate fuel compositions having a hydrocarbon substituted alkylene polyamine
US3539633A (en) 1965-10-22 1970-11-10 Standard Oil Co Di-hydroxybenzyl polyamines
US3461172A (en) 1966-11-22 1969-08-12 Consolidation Coal Co Hydrogenation of ortho-phenolic mannich bases
US3448047A (en) 1967-04-05 1969-06-03 Standard Oil Co Lube oil dispersants
US3586629A (en) 1968-09-16 1971-06-22 Mobil Oil Corp Metal salts as lubricant additives
US3725480A (en) 1968-11-08 1973-04-03 Standard Oil Co Ashless oil additives
US3726882A (en) 1968-11-08 1973-04-10 Standard Oil Co Ashless oil additives
US3634515A (en) 1968-11-08 1972-01-11 Standard Oil Co Alkylene polyamide formaldehyde
US3591598A (en) 1968-11-08 1971-07-06 Standard Oil Co Certain condensation products derived from mannich bases
US3980569A (en) 1974-03-15 1976-09-14 The Lubrizol Corporation Dispersants and process for their preparation
US4314827A (en) 1979-06-29 1982-02-09 Minnesota Mining And Manufacturing Company Non-fused aluminum oxide-based abrasive mineral
US4623364A (en) 1984-03-23 1986-11-18 Norton Company Abrasive material and method for preparing the same
CA1254238A (en) 1985-04-30 1989-05-16 Alvin P. Gerk Process for durable sol-gel produced alumina-based ceramics, abrasive grain and abrasive products
US4770671A (en) * 1985-12-30 1988-09-13 Minnesota Mining And Manufacturing Company Abrasive grits formed of ceramic containing oxides of aluminum and yttrium, method of making and using the same and products made therewith
IN172215B (en) 1987-03-25 1993-05-08 Lubrizol Corp
US4881951A (en) * 1987-05-27 1989-11-21 Minnesota Mining And Manufacturing Co. Abrasive grits formed of ceramic containing oxides of aluminum and rare earth metal, method of making and products made therewith
US5157088A (en) 1987-11-19 1992-10-20 Dishong Dennis M Nitrogen-containing esters of carboxy-containing interpolymers
WO1990004625A2 (en) 1988-10-24 1990-05-03 Exxon Chemical Company Amide containing friction modifier for use in power transmission fluids
US5152917B1 (en) * 1991-02-06 1998-01-13 Minnesota Mining & Mfg Structured abrasive article
US5695384A (en) * 1994-12-07 1997-12-09 Texas Instruments Incorporated Chemical-mechanical polishing salt slurry
US5958794A (en) 1995-09-22 1999-09-28 Minnesota Mining And Manufacturing Company Method of modifying an exposed surface of a semiconductor wafer
JPH09279454A (en) 1996-04-15 1997-10-28 Unitika Ltd Biodegradable short fiber nonwoven fabric and its production
US6194317B1 (en) * 1998-04-30 2001-02-27 3M Innovative Properties Company Method of planarizing the upper surface of a semiconductor wafer
WO1998049723A1 (en) 1997-04-30 1998-11-05 Minnesota Mining And Manufacturing Company Method of planarizing the upper surface of a semiconductor wafer
US8092707B2 (en) * 1997-04-30 2012-01-10 3M Innovative Properties Company Compositions and methods for modifying a surface suited for semiconductor fabrication
US5855633A (en) 1997-06-06 1999-01-05 Lockheed Martin Energy Systems, Inc. Lapping slurry
US6439967B2 (en) 1998-09-01 2002-08-27 Micron Technology, Inc. Microelectronic substrate assembly planarizing machines and methods of mechanical and chemical-mechanical planarization of microelectronic substrate assemblies
US6569216B1 (en) * 1998-11-27 2003-05-27 Kao Corporation Abrasive fluid compositions
JP4808848B2 (en) 1999-04-23 2011-11-02 スリーエム イノベイティブ プロパティズ カンパニー Glass grinding method
US6458018B1 (en) * 1999-04-23 2002-10-01 3M Innovative Properties Company Abrasive article suitable for abrading glass and glass ceramic workpieces
US6225224B1 (en) * 1999-05-19 2001-05-01 Infineon Technologies Norht America Corp. System for dispensing polishing liquid during chemical mechanical polishing of a semiconductor wafer
US6319108B1 (en) * 1999-07-09 2001-11-20 3M Innovative Properties Company Metal bond abrasive article comprising porous ceramic abrasive composites and method of using same to abrade a workpiece
US6306012B1 (en) 1999-07-20 2001-10-23 Micron Technology, Inc. Methods and apparatuses for planarizing microelectronic substrate assemblies
JP4519970B2 (en) * 1999-12-21 2010-08-04 スリーエム イノベイティブ プロパティズ カンパニー Polishing material in which the polishing layer has a three-dimensional structure
US6241596B1 (en) 2000-01-14 2001-06-05 Applied Materials, Inc. Method and apparatus for chemical mechanical polishing using a patterned pad
US6620508B2 (en) 2000-01-25 2003-09-16 Nippon Aerosil Co., Ltd. Oxide powder and method for preparing the same, and product using the same
US20020197935A1 (en) * 2000-02-14 2002-12-26 Mueller Brian L. Method of polishing a substrate
KR100790062B1 (en) * 2000-05-09 2007-12-31 쓰리엠 이노베이티브 프로퍼티즈 캄파니 Porous Abrasive Article Having Ceramic Abrasive Composites
EP1326940B1 (en) 2000-10-16 2010-03-31 3M Innovative Properties Company Method of making ceramic aggregate particles
US6645624B2 (en) 2000-11-10 2003-11-11 3M Innovative Properties Company Composite abrasive particles and method of manufacture
US6551366B1 (en) * 2000-11-10 2003-04-22 3M Innovative Properties Company Spray drying methods of making agglomerate abrasive grains and abrasive articles
CN1314516A (en) 2001-04-23 2001-09-26 李长增 Method for producing outer paper of double layer fruit bag and product
US20030104770A1 (en) * 2001-04-30 2003-06-05 Arch Specialty Chemicals, Inc. Chemical mechanical polishing slurry composition for polishing conductive and non-conductive layers on semiconductor wafers
US20040159050A1 (en) * 2001-04-30 2004-08-19 Arch Specialty Chemicals, Inc. Chemical mechanical polishing slurry composition for polishing conductive and non-conductive layers on semiconductor wafers
US6596042B1 (en) * 2001-11-16 2003-07-22 Ferro Corporation Method of forming particles for use in chemical-mechanical polishing slurries and the particles formed by the process
JP3849593B2 (en) 2002-06-28 2006-11-22 Jsr株式会社 Polishing pad and multilayer polishing pad
JP4219722B2 (en) 2003-03-31 2009-02-04 株式会社フジミインコーポレーテッド Polishing composition
US7267700B2 (en) 2003-09-23 2007-09-11 3M Innovative Properties Company Structured abrasive with parabolic sides
JP2005146036A (en) 2003-11-12 2005-06-09 Sanwa Kenma Kogyo Kk Precision polishing agent
TWI227729B (en) 2003-12-19 2005-02-11 Eternal Chemical Co Ltd A slurry for color photoresist planarization
JP4616571B2 (en) 2004-03-31 2011-01-19 東洋ゴム工業株式会社 Polishing pad
US7494519B2 (en) 2005-07-28 2009-02-24 3M Innovative Properties Company Abrasive agglomerate polishing method
US7399330B2 (en) 2005-10-18 2008-07-15 3M Innovative Properties Company Agglomerate abrasive grains and methods of making the same
WO2007103578A1 (en) * 2006-03-09 2007-09-13 Cabot Microelectronics Corporation Method of polishing a tungsten carbide surface
WO2009046311A2 (en) * 2007-10-05 2009-04-09 Saint-Gobain Ceramics & Plastics, Inc. Composite slurries of nano silicon carbide and alumina
JP2010540265A (en) * 2007-10-05 2010-12-24 サン−ゴバン セラミックス アンド プラスティクス,インコーポレイティド Polishing sapphire with composite slurry
JP5483815B2 (en) * 2007-12-28 2014-05-07 株式会社ネオス Wrapping agent composition
US9394502B2 (en) * 2008-04-28 2016-07-19 Ppt Research, Inc. Stable aqueous slurry suspensions
CN103952120B (en) 2008-09-16 2015-07-08 戴蒙得创新股份有限公司 Slurries containing abrasive grains having a unique morphology
JP2011040427A (en) 2009-08-06 2011-02-24 Yamaguchi Seiken Kogyo Kk Abrasive composition
JP2011173958A (en) * 2010-02-23 2011-09-08 Tokyo Electron Ltd Method for producing slurry, slurry, grinding method and grinding apparatus
JP6005521B2 (en) * 2010-11-08 2016-10-12 株式会社フジミインコーポレーテッド Polishing composition and semiconductor substrate polishing method using the same
JP5883609B2 (en) * 2011-10-12 2016-03-15 一般財団法人ファインセラミックスセンター Polishing material, polishing composition and polishing method
CN102343547A (en) * 2011-10-20 2012-02-08 天津理工大学 Thermochemistry mechanical polishing method of sapphire substrate material and polishing solution
CN103254799A (en) * 2013-05-29 2013-08-21 陈玉祥 Hydrophilic diamond-suspended grinding and polishing solution and preparation method thereof
JP6703939B2 (en) * 2013-09-25 2020-06-03 スリーエム イノベイティブ プロパティズ カンパニー Polishing system

Also Published As

Publication number Publication date
JP2016537439A (en) 2016-12-01
EP3049215A4 (en) 2017-05-17
CN105517758A (en) 2016-04-20
EP3049215B1 (en) 2021-04-14
US10293458B2 (en) 2019-05-21
EP3049215A1 (en) 2016-08-03
TW201525119A (en) 2015-07-01
CN105517758B (en) 2020-03-31
KR20160060690A (en) 2016-05-30
US20160221146A1 (en) 2016-08-04
TWI669382B (en) 2019-08-21
WO2015047939A1 (en) 2015-04-02
KR102289629B1 (en) 2021-08-17

Similar Documents

Publication Publication Date Title
SG11201602206PA (en) Composite ceramic abrasive polishing solution
ZA201604565B (en) Abrasive cleaning composition
HK1198889A1 (en) Grinder
PL3052271T3 (en) Bonded abrasive articles and methods
PL3013525T3 (en) Abrasive article including shaped abrasive particles
TWI561618B (en) Polishing component
SG11201602207QA (en) Multi-layered polishing pads
SG11201600242PA (en) Low density polishing pad
SG10201406355RA (en) Polishing method
PL2983866T3 (en) Grinding body
SG10201407984XA (en) Polishing apparatus
SG11201601847WA (en) Polishing composition
EP2866974A4 (en) Abrasive article
EP3013529A4 (en) Abrasive article
SG11201601941SA (en) Polishing composition
SG10201407798XA (en) Polishing apparatus
EP3036064A4 (en) Abrasive article
SG11201503597PA (en) Multilayer polishing pad
HK1205479A1 (en) Self-leveling sandpaper grinding machine
SG10201403993VA (en) Polishing apparatus
SG11201505900XA (en) Polishing pad
PL3046729T3 (en) Resin-bonded grinding disk
SG11201505490RA (en) Surface selective polishing compositions
SG11201509094YA (en) Workpiece polishing apparatus
SG11201509518WA (en) A chemical mechanical polishing (cmp) composition